CN106521505A - Method for manufacturing microtexture friction surface through photoetching - Google Patents
Method for manufacturing microtexture friction surface through photoetching Download PDFInfo
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- CN106521505A CN106521505A CN201611019589.5A CN201611019589A CN106521505A CN 106521505 A CN106521505 A CN 106521505A CN 201611019589 A CN201611019589 A CN 201611019589A CN 106521505 A CN106521505 A CN 106521505A
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- Prior art keywords
- friction surface
- texture
- micro
- rinsed
- iron
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/28—Acidic compositions for etching iron group metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- ing And Chemical Polishing (AREA)
Abstract
The invention discloses a method for manufacturing a microtexture friction surface through photoetching. The friction performance of the surface can be significantly improved. The method comprises the steps of preheating, photoresist coating, predrying, masking, exposing, baking, developing, hard baking, etching, photoresist removal and the like. According to the method, no large equipment is needed, the process is easy and convenient, patterns are easy to control, and the method has important applications in the field of friction-reducing lubricating materials and the like.
Description
Technical field
The present invention relates to advanced manufacture field, specifically a kind of chemical wet etching manufactures the side of micro- texture friction surface
Method.
Background technology
Friction is one of modal natural phenomena of nature, and is the main table of material failure by abrasion caused by friction
Existing form.The friction and wear behavior for how controlling material is always the target that scientific research personnel pursues.In recent years, it has been found that in material
Material surface carries out the effect that micro- texture can effectively play antiwear and antifriction.Such as, Etsion was once reported and was knitted using laser surface is micro-
Structure method (Tribology Letters, 2004,17 (17):Surface friction property 733-737) processed, research find and not
Texture surface is compared, and the surface load bearing capacity after texture, wearability, antifriction quality are significantly improved, and its main cause is weary
During oil lubrication, micro- hole can be played oil groove oil storage lubrication and be received the function of abrasive dust.Chinese patent (application number：
2013105020736) a kind of micro- texture method of piston ring laser is disclosed, by pulse laser micro fabrication, in piston ring
Rubbing surface carries out the micro- texture of laser and processes, and the piston-ring friction coefficient after texture, friction power loss are substantially reduced, and piston ring uses the longevity
Life extends.What the micro- texture method in these surfaces was adopted is all Laser Processing.Laser is mainly used using the micro- texture method of laser
Ablation function, have the disadvantage process after pit bottom and surrounding have material stacking, need to carry out after-treatment, otherwise affect knit
The effect of structure, or even play a part of to aggravate abrasive wear；Additionally, for the pattern of some complex rules, using Laser Processing
Difficulty is larger.Accordingly, it would be desirable to develop the new micro- texture method of friction surface.
Chemical wet etching method is a kind of material surface processing method developed with the development of semi-conductor industry, photoetching
Micro- texture of technology processing has the advantages that easily-controllable without the need for main equipment, simple process, pattern.And current etching technics is main
Semi-conducting material is directed to, for other materials, the etching process of such as conventional iron-based antifriction lubrication material also rarely has
Report.Due to the difference of material, etching technics also has marked difference, even identical material, as purpose is different, etches work
Skill is also differed, additionally, etching effect is subject to multifactorial impact and restriction, still no guide specifications at present, it is impossible to from existing
In some preparation technologies, simple repeatedly condition test is groped, and needs the system test with risk, therefore, still belong to
In scientific research category.
The content of the invention
The present invention is directed to the deficiencies in the prior art, and purpose seeks to provide a kind of chemical wet etching manufacture micro- texture friction surface
Method, to strengthen the properties of antifriction and wear resistance of iron.
The method that the chemical wet etching of the present invention manufactures micro- texture friction surface, is characterized in：By preheating, gluing, preliminary drying, cover
Mould, exposure, baking, development, dry firmly, etch, remove photoresist ten technological operations composition, wherein, friction surface refers to iron
Friction surface, concrete operation step are as follows：
1) preheat：Iron is preheated at 100～120 DEG C 3～6min；
2) gluing：S1813 photoresists are dropped in iron surface to be paved with, then material is placed in spin coater, by which
Be fixed on vacuum chuck, in nitrogen protection atmosphere, 10s, 900～1100rpm rotation 10s are rotated in 300rpm respectively,
4000rpm rotates 60s；
3) preliminary drying：By resulting materials in 110～120 DEG C of 2～4min of preliminary drying；
4) mask：Required template is covered on friction surface, wherein needing texture part for photic zone, remainder
For black light-absorption layer；
5) expose：The friction surface for covering template is exposed into 5～30min under the ultraviolet light of 365nm；
6) bakee：Removing template is removed, resulting materials are bakeed into 5～10min at 115～130 DEG C；
7) develop：Above-mentioned material is soaked in the tetramethyl ammonium hydroxide solution that mass concentration is 2～4% 1～3min,
20～60s is rinsed in deionized water；
8) it is hard to dry：Then put it into；
9) etch：1～10min is etched at material is put into 23～27 DEG C in the dilute acid soln that mass concentration is 1～4%,
Take out, in deionized water, rinse 2～5min；
10) remove photoresist：Material is put in acetone and will be rinsed 2～4 times, to coating adhesive CL, obtain final product micro- texture friction table
Face.
The method that the chemical wet etching of the present invention manufactures micro- texture friction surface, its feature are also resided in, and described diluted acid is dilute
At least one in nitric acid, phosphoric acid,diluted, dilute sulfuric acid.
Compared with prior art, the invention has the beneficial effects as follows：
1st, the micro- texture of relative laser, the method for the present invention is without the need for main equipment, the pit bottom and surrounding after gained texture
Without material stacking, after-treatment need not be carried out, it is more convenient.
2nd, relatively existing photoetching method, the method for the present invention are more efficient for iron, machining accuracy, pattern point
Resolution is higher, and the depth of processing can also be adjusted as needed.
3rd, the method for the present invention is in addition, it is only necessary to adjusts die plate pattern, can just be easy to the friction table of processed complex pattern
Face, namely micro- texture friction surface of the unmanageable various patterns of conventional method can be prepared, in antifriction lubrication material and elder generation
Entering manufacturing technology field has larger using value.
Description of the drawings
Fig. 1 is texture front surface photo.
Fig. 2 is using the surface picture after the micro- texture of the inventive method chemical wet etching.
Specific embodiment
Embodiment 1：
Q235 cast irons piece is preheated into 5min at 100 DEG C；S1813 photoresists are dropped in cast iron sheet material surface to be paved with, so
Afterwards material is placed in spin coater, is fixed on vacuum chuck, in nitrogen protection atmosphere, rotated in 300rpm respectively
10s, 900rpm rotate 10s, 4000rpm rotation 60s；By resulting materials in 110 DEG C of preliminary drying 4min；By diameter 5mm circle casements
Plate is covered on friction surface, wherein needing texture part to be photic zone, remainder is black light-absorption layer；Template will be covered
Friction surface exposes 10min under the ultraviolet light of 365nm；Then removing template is removed, resulting materials is bakeed into 8min at 120 DEG C；Will
Material soaks 2min in the tetramethyl ammonium hydroxide solution that mass concentration is 2%, rinses 30s in deionized water；Then will
Which is put under 110 DEG C of environment and dries；5min is etched at material is put into 23 DEG C in the dilute nitric acid solution that mass concentration is 2%, is taken
Go out, in deionized water, rinse 3min；Material is put in acetone and will be rinsed 2 times, to coating adhesive CL, obtained final product micro- texture and rub
Wipe surface.
Embodiment 2：
SAE1020 steel is preheated into 3min at 110 DEG C；S1813 photoresists are dropped in cast iron sheet material surface to be paved with, then
Material is placed in spin coater, is fixed on vacuum chuck, in nitrogen protection atmosphere, 10s is rotated in 300rpm respectively,
1000rpm rotates 10s, 4000rpm rotation 60s；By resulting materials in 120 DEG C of preliminary drying 3min；By it is oval (major axis 1.8mm, it is short
Axle 0.6mm) casement plate is covered on friction surface, wherein needing texture part for photic zone, remainder is black light-absorption layer；
The friction surface for covering template is exposed into 20min under the ultraviolet light of 365nm；Then removing template is removed, by resulting materials at 125 DEG C
Bakee 6min；Material is soaked into 2min in the tetramethyl ammonium hydroxide solution that mass concentration is 3%, is rinsed in deionized water
40s；Then put it into；Carve at material is put into 25 DEG C in the dilute phosphoric acid solution that mass concentration is 3%
Erosion 4min, takes out, 2min is rinsed in deionized water；Material is put in acetone and will be rinsed 3 times, to coating adhesive CL, i.e.,
Obtain micro- texture friction surface.
Embodiment 3：
45 steel are preheated into 6min at 120 DEG C；S1813 photoresists are dropped in cast iron sheet material surface to be paved with, then by material
Material is placed in spin coater, is fixed on vacuum chuck, in nitrogen protection atmosphere, rotates 10s in 300rpm respectively,
1100rpm rotates 10s, 4000rpm rotation 60s；By resulting materials in 120 DEG C of preliminary drying 2min；By 2 microns of circular port templates of diameter
It is covered on friction surface, wherein needing texture part to be photic zone, remainder is black light-absorption layer；Rubbing for template will be covered
Wipe surface 15min is exposed under the ultraviolet light of 365nm；Then removing template is removed, resulting materials is bakeed into 6min at 130 DEG C；By material
Material soaks 2min in the tetramethyl ammonium hydroxide solution that mass concentration is 4%, rinses 60s in deionized water；Then by which
It is put under 120 DEG C of environment and dries；8min is etched at material is put into 27 DEG C in the dilution heat of sulfuric acid that mass concentration is 4%, is taken out,
5min is rinsed in deionized water；Material is put in acetone and will be rinsed 4 times, to coating adhesive CL, obtain final product micro- texture friction
Surface.
Claims (2)
1. a kind of method that chemical wet etching manufactures micro- texture friction surface, it is characterised in that be by preheating, gluing, preliminary drying, cover
Mould, exposure, baking, development, dry firmly, etch, remove photoresist ten technological operations composition, described friction surface refers to iron
Friction surface, concrete operation step are as follows：
1) preheat：Iron is preheated at 100～120 DEG C 3～6min；
2) gluing：S1813 photoresists are dropped in iron surface to be paved with, then material is placed in spin coater, is fixed
On vacuum chuck, in nitrogen protection atmosphere, 10s, 900～1100rpm rotation 10s, 4000rpm are rotated in 300rpm respectively
Rotation 60s；
3) preliminary drying：By resulting materials in 110～120 DEG C of 2～4min of preliminary drying；
4) mask：Required template is covered on friction surface, wherein needing texture part to be photic zone, remainder is black
Color light-absorption layer；
5) expose：The friction surface for covering template is exposed into 5～30min under the ultraviolet light of 365nm；
6) bakee：Removing template is removed, resulting materials are bakeed into 5～10min at 115～130 DEG C；
7) develop：Above-mentioned material is soaked into 1～3min in the tetramethyl ammonium hydroxide solution that mass concentration is 2～4%, is being gone
20～60s is rinsed in ionized water；
8) it is hard to dry：Then put it into；
9) etch：1～10min is etched at material is put into 23～27 DEG C in the dilute acid soln that mass concentration is 1～4%, is taken out,
2～5min is rinsed in deionized water；
10) remove photoresist：Material is put in acetone and will be rinsed 2～4 times, to coating adhesive CL, obtain final product micro- texture friction surface.
2. the method that a kind of chemical wet etching according to claim 1 manufactures micro- texture friction surface, it is characterised in that described
Diluted acid be dust technology, phosphoric acid,diluted, at least one in dilute sulfuric acid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611019589.5A CN106521505A (en) | 2016-11-18 | 2016-11-18 | Method for manufacturing microtexture friction surface through photoetching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611019589.5A CN106521505A (en) | 2016-11-18 | 2016-11-18 | Method for manufacturing microtexture friction surface through photoetching |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106521505A true CN106521505A (en) | 2017-03-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611019589.5A Pending CN106521505A (en) | 2016-11-18 | 2016-11-18 | Method for manufacturing microtexture friction surface through photoetching |
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| CN (1) | CN106521505A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109093452A (en) * | 2018-09-25 | 2018-12-28 | 合肥工业大学 | The method that the micro- texture auxiliary friction induction filming in metal surface reduces abrasion |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62181433A (en) * | 1986-02-04 | 1987-08-08 | Mitsubishi Electric Corp | Dry etching method |
| CN101252155A (en) * | 2008-03-14 | 2008-08-27 | 厦门大学 | Method for preparation of polycrystalline silicon solar cell textile layer |
| CN104536262A (en) * | 2015-01-11 | 2015-04-22 | 南昌航空大学 | Method for manufacturing binary optical element with transparent ceramic as substrate material |
-
2016
- 2016-11-18 CN CN201611019589.5A patent/CN106521505A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62181433A (en) * | 1986-02-04 | 1987-08-08 | Mitsubishi Electric Corp | Dry etching method |
| CN101252155A (en) * | 2008-03-14 | 2008-08-27 | 厦门大学 | Method for preparation of polycrystalline silicon solar cell textile layer |
| CN104536262A (en) * | 2015-01-11 | 2015-04-22 | 南昌航空大学 | Method for manufacturing binary optical element with transparent ceramic as substrate material |
Non-Patent Citations (2)
| Title |
|---|
| 中国科学技术协会主编: "《2014-2015机械工程学科发展报告（摩擦学）》", 30 April 2016 * |
| 于海武等: "《2010年全国青年摩擦学及工业应用研讨会论文集》", 31 August 2010 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109093452A (en) * | 2018-09-25 | 2018-12-28 | 合肥工业大学 | The method that the micro- texture auxiliary friction induction filming in metal surface reduces abrasion |
| CN109093452B (en) * | 2018-09-25 | 2020-08-07 | 合肥工业大学 | Method for reducing abrasion by auxiliary friction induced film formation of metal surface microtexture |
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Application publication date: 20170322 |
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