CN106521448A - Double-electric-cylinder vertically-lifted cavity forming structure - Google Patents
Double-electric-cylinder vertically-lifted cavity forming structure Download PDFInfo
- Publication number
- CN106521448A CN106521448A CN201510585185.1A CN201510585185A CN106521448A CN 106521448 A CN106521448 A CN 106521448A CN 201510585185 A CN201510585185 A CN 201510585185A CN 106521448 A CN106521448 A CN 106521448A
- Authority
- CN
- China
- Prior art keywords
- cover plate
- upper cover
- cavity
- electric cylinders
- electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacture Of Motors, Generators (AREA)
Abstract
The invention relates to a double-electric-cylinder vertically-lifted cavity forming structure applied to semiconductor thin film deposition equipment, and belongs to the technical field of semiconductor thin film deposition application and manufacturing. Double electric cylinders are mounted in an inverted mode and are controlled synchronously, and an upper cover plate of a cavity is opened through the lifting force provided with the two sides. The double-electric-cylinder vertically-lifted cavity forming structure comprises the upper cover plate, two motors and electric cylinder pushing rods, wherein the upper cover plate is arranged on the cavity and used for opening and closing the cavity; the two motors are fixedly mounted on two electric cylinder bodies correspondingly, arranged on the upper cover plate together with the electric cylinder bodies in an inverted mode, and fixed with the upper cover plate through the electric cylinder bodies; and the electric cylinder pushing rods penetrate through the upper cover plate to be connected with output shafts of the motors, and the ends of the electric cylinder pushing rods are fixedly mounted on the cavity. According to the double-electric-cylinder vertically-lifted cavity forming structure, the double electric cylinders are mounted in the inverted mode, the two sides provide the lifting force, and the problem that the upper cover plate twists and deforms due to single-side stressing is avoided. The electric cylinder pushing rods are mounted on the cavity, and the electric cylinder bodies are mounted on the upper cover plate, so that in the moving process, a lever extends out to enable the electric cylinder bodies and the upper cover plate to move together. Through the inverted mounting mode, space needed below equipment is saved.
Description
Technical field
The present invention relates to a kind of structure of beginning to speak of the double electric cylinders vertical lifts for being applied to semiconductor thin film deposition equipment.Double electric cylinders are reverse mounted, Synchronization Control, and both sides provide lifting force and open cavity upper cover plate.Belong to semiconductive thin film deposition applications and manufacturing technology field.
Background technology
Semiconductor thin film deposition equipment needs to carry out the dismounting and maintenance of parts in debugging or production, therefore the chamber lid of equipment is required to realize opening and closing to carry out operation of beginning to speak.In it there is no the small-size experiment equipment for passing piece automatically, generally require by open and close chamber lid to carry out taking, sending the operation of wafer.
Because the cover plate of cavity is not self-existent, other attached functional part or pipeline etc. are mounted with thereon often, operation only with manually implemented switch cavity is likely to result in fatigue, the damage of human body, such design is incomplete, and it is easier security incident occur, injure personnel or equipment.
Existing equipment is often turnover cover plate operation, has using gas spring reinforcement or carries out switch cavity action using other electric and pneumatic structures, to reduce the injury to human body and to improve efficiency.
But for some semiconductor thin film deposition equipments are when deposition reaction is carried out, it is to save valuable special gas resources and accelerate the response time, improve device efficiency, often has stricter control requirement to intracavity volume.So the mucosal structure of semiconductor thin film deposition equipment is often designed closely.Intracavity does not have space accommodate convertible structure of beginning to speak.
Presence for above-mentioned phenomenon can so avoid equipment damage or collision that rotary movement causes so some equipment can select rectilinear mode of beginning to speak.Because the cavity of semiconductor thin film deposition equipment belongs to precise part, part should be avoided to greatest extent from colliding, this is accomplished by cavity when beginning to speak, cover plate is steady, accurately mobile.The flexural deformation that cover plate is produced because of unbalance stress is not allowed.Conventional vertical lift type mode of beginning to speak often is controlled using single power source, i.e., from electric cylinders or cylinder as lifting action execution unit.Because the center of equipment often has important functional part to occupy, lifting execution unit is only capable of installed in cavity side, can thus make whole equipment monolateral stress in lifting process cause unbalance loading, cavity cover plate during beginning to speak can not holding level completely, the hidden danger for causing part to collide.
Semiconductor thin film deposition equipment function is complicated, and component is numerous, and accessory layout must be rationally compact, equipment volume is reduced as far as possible, and easy to maintenance.
The content of the invention
The technical problem to be solved is to provide the structure of beginning to speak that a kind of double electric cylinders for solving the problems, such as that the existing vertically mode of beginning to speak smoothly can not be begun to speak are vertically moved up or down.
The present invention is achieved in that the structure of beginning to speak of a kind of pair of electric cylinders vertical lift, including：
Upper cover plate, is arranged on cavity, for opening and being opened and closed；
Two motors, are respectively and fixedly installed in two electric cylinders main bodys, are inverted the top for being arranged on upper cover plate, are fixed by electric cylinders main body and upper cover plate together with electric cylinders main body；
Electric cylinders push rod, is connected through upper cover plate with the output shaft of motor, and its end is fixedly mounted on cavity.
Further improvement of the invention, electric cylinders push rod are symmetrically mounted on the side of upper cover plate, are fixed on cavity after the two guide rods opposite side through upper cover plate corresponding with electric cylinders push rod.
It is of the invention further to improve, upper cover plate along electric cylinders push rod slidably.
It is of the invention further to improve, upper cover plate along guide rod slidably.
Compared with prior art, beneficial effect is the present invention：
The present invention is installed by double electric cylinders inversion types, and both sides provide lifting force, it is to avoid monolateral stress causes upper cover plate torsional deformation.Electric cylinders push rod is arranged on cavity, and electric cylinders main body is arranged on upper cover plate, and in motor process, lever stretches out, and electric cylinders main body is moved together with upper cover plate.Inversion type mounting means, saves equipment space required below.
Drive upper cover plate to open by double electric cylinders vertical lift and reach the purpose steadily begun to speak.Double electric cylinders coordinate the structure of guide rail, whole cavity upper cover plate uniform force when beginning to speak, it is to avoid deformation caused by unbalance loading.
By inverted electric machine structure, total design is applicable to miniature precision experimental facilitiess and can be applicable to big scale production equipment again.With stable, accurate control ability and flexible, simple adaptability.The lifting of stability, reliability to equipment and the raising of productivity ratio have larger benefit.
Description of the drawings
Fig. 1 is the structure front view of beginning to speak of provided in an embodiment of the present invention pair of electric cylinders vertical lift
Fig. 2 is the structure normal axomometric drawing of beginning to speak of provided in an embodiment of the present invention pair of electric cylinders vertical lift
It is numbered in figure：1st, motor；2nd, electric cylinders main body；3rd, upper cover plate；4th, electric cylinders push rod；5th, cavity；6th, guide rod.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, with reference to embodiments and accompanying drawing, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is not intended to limit the present invention only to explain the present invention.
Embodiment
Fig. 2 is combined referring to Fig. 1, the structure of beginning to speak of double electric cylinders vertical lifts, at the top of cavity, upper cover plate 3 is set, for the unlatching and opening and closing of cavity 5, at four angles of upper cover plate 3, guide rail is set, upper cover plate 3 is realized lifting with slide, wherein the guide rail of side is realized by realizing the electric cylinders push rod 4 of motor 1 that upper cover plate 3 is moved up and down, two guide rails of opposite side are realized by two independent guide rods 6, electric cylinders push rod 4 is symmetrically mounted on the side of upper cover plate 3, it is fixed on cavity 5 after two guide rods 6 opposite side through upper cover plate 3 corresponding with electric cylinders push rod 4, during the moving up and down of upper cover plate 3, due to the supporting role at four angles, stress will not unbalance loading, upper cover plate 3 can holding level completely during beginning to speak, avoid the hidden danger for causing part to collide.
Two electric cylinders push rods 4 are fixed together through side after upper cover plate with cavity 5, play a part of support, electric cylinders push rod 4 is connected through upper cover plate 3 with the output shaft of motor 1, its end is fixedly mounted on cavity 5, it is inverted in the top of upper cover plate and motor is set, motor is fixedly mounted in two electric cylinders main bodys 2, electric cylinders main body 2 is also in the top of upper cover plate 3, electric cylinders main body 2 is fixed with upper cover plate 3, when motor 1 starts, electric cylinders push rod 4 is boosted electric cylinders main body 2 and is run up with motor 1, now drives upper cover plate together as electric cylinders main body runs up.
Upper cover plate to be realized is moved up and down, and upper cover plate will be realized slidably along electric cylinders push rod, but will also avoid loosening completely or combining excessively tight.In the same manner, it is ensured that upper cover plate along guide rod slidably, but to also avoid completely loosen or combine it is excessively tight.
Referring to Fig. 1, two motors will be symmetrical arranged, while being arranged on the inner side or outside of electric cylinders main body, it is ensured that the concordance of stress.
Presently preferred embodiments of the present invention is the foregoing is only, not to limit the present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc., be should be included within the scope of the present invention.
Claims (4)
1. the structure of beginning to speak that a kind of pair of electric cylinders are vertically moved up or down, it is characterised in that include：
Upper cover plate, is arranged on cavity, for opening and being opened and closed；
Two motors, are respectively and fixedly installed in two electric cylinders main bodys, are inverted and are arranged on together with electric cylinders main body
The top of upper cover plate, is fixed by electric cylinders main body and upper cover plate；
Electric cylinders push rod, is connected through upper cover plate with the output shaft of motor, and its end is fixedly mounted on cavity.
2. according to the structure of beginning to speak of the double electric cylinders vertical lifts described in claim 1, it is characterised in that electric cylinders
Push rod is symmetrically mounted on the side of upper cover plate, the two guide rods opposite side through upper cover plate corresponding with electric cylinders push rod
After be fixed on cavity.
3. according to the structure of beginning to speak of the double electric cylinders vertical lifts described in claim 1, it is characterised in that upper to cover
Plate along electric cylinders push rod slidably.
4. according to the structure of beginning to speak of the double electric cylinders vertical lifts described in claim 1, it is characterised in that upper to cover
Plate along guide rod slidably.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510585185.1A CN106521448A (en) | 2015-09-14 | 2015-09-14 | Double-electric-cylinder vertically-lifted cavity forming structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510585185.1A CN106521448A (en) | 2015-09-14 | 2015-09-14 | Double-electric-cylinder vertically-lifted cavity forming structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106521448A true CN106521448A (en) | 2017-03-22 |
Family
ID=58349139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510585185.1A Pending CN106521448A (en) | 2015-09-14 | 2015-09-14 | Double-electric-cylinder vertically-lifted cavity forming structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106521448A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113136564A (en) * | 2020-12-31 | 2021-07-20 | 拓荆科技股份有限公司 | Single-cavity film coating system |
| CN115786885A (en) * | 2023-02-06 | 2023-03-14 | 江苏邑文微电子科技有限公司 | Chemical vapor deposition cavity equipment |
-
2015
- 2015-09-14 CN CN201510585185.1A patent/CN106521448A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113136564A (en) * | 2020-12-31 | 2021-07-20 | 拓荆科技股份有限公司 | Single-cavity film coating system |
| CN113136564B (en) * | 2020-12-31 | 2023-02-24 | 拓荆科技股份有限公司 | Single-cavity film coating system |
| CN115786885A (en) * | 2023-02-06 | 2023-03-14 | 江苏邑文微电子科技有限公司 | Chemical vapor deposition cavity equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2829500A3 (en) | Mobile lift crane with variable position counterweight | |
| CN103979458B (en) | A kind of elevating mechanism | |
| CN106521448A (en) | Double-electric-cylinder vertically-lifted cavity forming structure | |
| WO2004052623A1 (en) | Elongation drive device of stretch rod in stretch blow molding machine and bottom-type lifting drive device | |
| US20150367507A1 (en) | Remotely Operated Manipulator | |
| CN109659250A (en) | Door gear for chamber | |
| JP2010214563A (en) | Suction device and workpiece conveying device | |
| CN101459100A (en) | Automatic conveying device for compact wafer | |
| CN105797370B (en) | Mahjong machine door-opening mechanism | |
| CN109095140A (en) | Lifting turning mechanism | |
| CN101497194A (en) | Manipulator and production chain using the manipulator | |
| CN105480238B (en) | Fully side opened box car | |
| KR101326992B1 (en) | Substrate processing apparatus | |
| CN205077134U (en) | Two electric jar vertical lift's structure of beginning to speak | |
| CN106437277A (en) | Intelligent urban street bird nest demolishing device | |
| KR100907654B1 (en) | Auto sliding rf shield door | |
| CN105437184A (en) | Pneumatic turnover device of fixture | |
| CN105501540B (en) | Automatic box jacketing machine | |
| CN112103225B (en) | Vacuum equipment for vacuum welding or annealing of semiconductor chip | |
| CN204818454U (en) | Quick feed mechanism of laser welding machine | |
| CN208493343U (en) | A kind of depassing unit of cast aluminium alloy gold | |
| CN103292596A (en) | Airtight-door mechanism for atmosphere replacement room | |
| KR102012720B1 (en) | Vacuum Valve Actuator | |
| CN205407534U (en) | Novel motor end cover is rectified device | |
| CN205739086U (en) | A kind of vacuum interrupter power frequency aging equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170322 |
|
| WD01 | Invention patent application deemed withdrawn after publication |