CN1065102A - Arc light ion carburizing oozes technology and device thereof together - Google Patents
Arc light ion carburizing oozes technology and device thereof together Download PDFInfo
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- CN1065102A CN1065102A CN 91102088 CN91102088A CN1065102A CN 1065102 A CN1065102 A CN 1065102A CN 91102088 CN91102088 CN 91102088 CN 91102088 A CN91102088 A CN 91102088A CN 1065102 A CN1065102 A CN 1065102A
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Abstract
Arc light ion carburizing of the present invention oozes technology and device thereof together, is to utilize the arc discharge phenomenon to realize diffusion hardening and new technology of oozing altogether and device thereof.It is characterized in that with graphite carbon directly as the target of cathode arc source, launch highdensity carbon ion stream, rely on the bombardment of carbon ion and be diffused in workpiece surface and form the homogeneous carburizing layer, can realize carbonitriding if feed nitrogen simultaneously, if alternately evenly being set, metallic target both can realize that metal, carbon, nitrogen oozed altogether when the graphite carbon target is set, can form metal carbonitride compound cementation coating and metal compound film thereof at workpiece surface again, it is fast to have infiltration rate, diffusion layer organization is even, controllable component, equipment is simple, low cost and other advantages.
Description
Arc light ion carburizing of the present invention oozes the category that technology and device thereof belong to the thermo-chemical treatment of a kind of metallic surface together, particularly is exactly to utilize the arc discharge phenomenon to realize that diffusion hardening and carbon, nitrogen blend a kind of technology and device thereof that metal, carbon, nitrogen ooze altogether altogether.
Existing method for carburizing has solid carburizing, liquid carburizing, gas cementation, paste carburizing, controlled atmosphere carburizing, and method such as the development in recent years vacuum carburization of getting up and glow ion carburizing.But solid, liquid, gas cementation have infiltration rate slow, and tissue odds is even, and composition is uncontrollable, atmosphere pollution, and shortcomings such as labor condition difference, though that the controlled atmosphere carburizing has solved composition is controlled, the treatment time is long, the equipment complexity, cost is higher.Though glow ion carburizing and vacuum carburization take a step forward again, still have the treatment time long, equipment complexity, the shortcoming that cost is high.
The objective of the invention is to utilize the arc discharge phenomenon in the rarefied gas, graphite carbon directly as the target of cathode arc source, rely on the bombardment and the diffusion of carbon ion stream, infiltrate the inner formation of workpiece homogeneous carburizing layer and realize carbonitriding, and form metal, carbon, nitrogen compound cementation coating and metal compound film at workpiece surface.A kind of infiltration rate is fast, diffusion layer organization is even thereby provide, and composition is controlled, and the arc light ion carburizing that equipment is simple, cost is low oozes technology and device thereof together.
The present invention is the arc discharge phenomenon of utilizing in the rarefied gas, is 3x10 in vacuum tightness
-1～5x10
-1Handkerchief, and energy fill gas body medium, and workpiece air pressure is 8x10
-1In the vacuum vessel of～50 handkerchiefs, cathode rotation system and the electric arc target source that can rotate with lifting are set, are equipped with simultaneously and bleed, air feed and side amount device, its vacuum vessel is made up of bell jar (1) and chassis (7); Its cathode rotation system is made up of cathode tray (12), negative electrode negative bias power supply (8) and rotation system (9); The electric arc target source is by low-voltage dc power supply (6), arc electrode (2), arc source target (3), arc evaporator (4), and permanent-magnet block (5) and refrigerating unit are formed; Air-bleed system is made up of mechanical pump (10) and oil diffusion pump (11); Airing system is made up of air supply source (13), aspirating pipeline (17) and inlet mouth (18); Test macro mainly is made up of photoelectric thermoscope (14) and vision slit (15); It is desired to ooze workpiece (16) and places on the cathode tray (12), as the dc negative bias voltage power supply (8) that connects 0 an adjustable～1500V between the bell jar (1) of negative electrode and the cathode tray (12), cathode arc is set material (3) on the different azimuth of negative electrode bell jar (1), between anode bell jar (1) and cathode arc evaporator (4), connect continuously adjustable 0～100V low voltage, the high-current dc power supply of 0～200A, it is characterized in that: the electric arc of first cathode arc source is material to be made by graphite carbon, be shaped as cylindricly, diameter and thickness are the graphite target of φ 50～80x30～60mm; It two is to go up graphite target (3) that different azimuth is provided with and to desire the work of oozing (16) angled at bell jar (1), can be by 90 °, 45 °～60 °, 90 ° and 45 °～60 ° three kinds of scheme settings; Its three be bell jar (1) go up with desire to ooze the orientation that workpiece becomes 90 ° and 45 °～60 ° on the while evenly be arranged alternately graphite carbon target and metallic target, graphite shield target and metallic target also can only alternately be set on 90 ° of orientation, also can only on 45 °～60 ° orientation, graphite carbon target and metallic target be set alternately; It four is to feed nitrogen when on bell jar (1) the graphite carbon target being set to realize carbonitriding; It five is to go up at bell jar (1) evenly to be arranged alternately graphite carbon target and metallic target simultaneously, feeds nitrogen simultaneously and realizes that desiring to ooze workpiece surface forms metal carbonitride compound cementation coating and metal compound film; It six is that permanent-magnet block (5) that arc evaporator (4) go up to be installed can be designed as pentagon, sexangle, octagon, quincunx etc.The distance of desiring to ooze between workpiece (16) and the cathode arc target is 80～300mm.
Desire to ooze the carburizing of workpiece (16) and the temperature of carbonitriding is 800～1100 ℃, bias voltage is 200～1000V, and arc stream is 60～150A, and operating air pressure is 8x10
-1Between～50 handkerchiefs.
The temperature of workpiece is 200～1100 ℃ when desiring to ooze synthetic metal carbonitride compound cementation coating in workpiece (16) surface and metal compound film, and bias voltage is 0～1000V, and air pressure is 8x10
-1Between～8 handkerchiefs, arc stream is 60～150A.
Description of drawings:
Accompanying drawing is that arc light ion carburizing oozes technology and setting drawing thereof together.
Among the figure: 1, bell jar 2, arc electrode 3, arc source target 4, arc evaporator 5, permanent-magnet block 6, arc power 7, chassis 8, negative electrode negative bias power supply 9, rotating mechanism 10, mechanical pump 11, oil diffusion pump 12, cathode tray 13, air feed source of the gas 14, photoelectric thermoscope 15, vision slit 16, desire to ooze workpiece 17, aspirating pipeline 18, inlet mouth.
Below in conjunction with description of drawings technical characterictic of the present invention, device and working process thereof.
Carry out arc light ion carburizing and reach when oozing altogether, at first mechanical pump (10) and the oil diffusion pump (11) by air-bleed system is evacuated to high vacuum with vacuum vessel, final vacuum 3x10
-1～5x10
-1Handkerchief then charges into rare gas element argon gas or reaction gas nitrogen by airing system, makes operating air pressure remain on 8x10
-1The scope of～50 handkerchiefs then by drawing electrode (2) electric arc that ignites, is launched highdensity electronics by cathode arc evaporator (4), at this moment produces the arc spot rapidly on graphite carbon target (3) surface, and the current density of each arc spot is up to 10
5A/cm
2More than, the arc spot is done random motion on the surface of graphite target (3) under the effect in magnetic field, the carbon atom that evaporates promptly is ionized, specific ionization is up to 70～90%, the carbon ion of launching from graphite target (3) flows, bombard workpiece (16) surface at a high speed under the attraction of workpiece (16) negative bias, make workpiece (16) rise to high temperature, carbon ion infiltrates inner uniform cementation zone or the carbonitrided case of forming of workpiece in the process of bombardment and diffusion.
With 20 steel workpiece arc light ion carburizings is example, and workpiece temperature is 950 ℃, and the treatment time is 30 minutes, and depth of case is 0.77mm, and the treatment time is 1 hour, and carburized depth is 1.3mm.The surface carbon concentration of cementation zone is 0.95% through Spectrum Analysis, the surface is to the mild transition that distributes of the carbon concentration at center, the surface structure of infiltration layer is an eutectoid structure, is the ideal cementation zone, and surface carbon concentration can be controlled by processing parameters such as arc stream, bias voltage and distances with degree of oozing.
If evenly be arranged alternately that metallic target (carbide forming elements such as W, Mo, Cr, T) just can form that the metal carbonitride compound oozes at workpiece surface when on bell jar (1) different azimuth, graphite carbon target (3) being set, coating and metal compound film, can improve the performances such as wear-resisting, anti-corrosion, heat-resisting and resistance to high temperature oxidation of workpiece.
If in carburizing, feed nitrogen or ammonia by airing system, just can realize carbonitriding.
The present invention has that equipment is simple, easy to operate, the fast production efficiency height of infiltration rate, and alloying layer thickness and morphological element control, easily realize advantages such as suitability for industrialized production easily, is at present up-to-date a kind of arc light ion carburizing and oozes technology altogether.
Claims (6)
1, a kind of arc light ion carburizing oozes technology and device thereof together, is the arc discharge phenomenon of utilizing in the rarefied gas, is 3x10 in vacuum tightness
-1～5x10
-1Handkerchief, and can fill gas body medium, operating air pressure be 8x10
-1In the vacuum vessel of～50 handkerchiefs, cathode rotation system and the electric arc target source that can rotate with lifting are set, be equipped with simultaneously bleed, air feed and temperature measuring equipment, its vacuum vessel is made up of bell jar (1) and chassis (7), and its cathode rotation system is made up of cathode tray (12), negative electrode negative bias power supply (8) and rotation system (9); The electric arc target source is made up of low-voltage dc power supply (6), arc electrode (2), arc source target (3), arc evaporator (4), permanent-magnet block (5) and refrigerating unit; Air-bleed system is made up of mechanical pump (10) and oil diffusion pump (11); Airing system is by air supply source (13), and aspirating pipeline (17) and inlet mouth (18) are formed; Test macro is made up of photoelectric thermoscope (14) and vision slit (15); It is desired to ooze workpiece (16) and places on the cathode tray (12), as the dc negative bias voltage power supply (8) that connects 0 an adjustable～1500V between anodic bell jar (1) and the cathode tray (12), different azimuth at anode bell jar (1) is provided with cathode arc source target (3), the low voltage that between anode bell jar (1) and cathode arc evaporator (4), connects continuously adjustable a 0～100V, the high-current dc power supply of 0～200A, the present invention is characterised in that: the electric arc target of first cathode arc source is to be made by graphite carbon, form cylindricly, diameter and thickness are the graphite target of φ 50～80x35～60mm; It two is to go up graphite target (3) that different azimuth is provided with and desire to ooze workpiece (16) and have a certain degree at bell jar (1); It three is to go up at bell jar (1) to be arranged alternately stone in various even angle simultaneously and to put carbon target and metallic target; Its four be on bell jar (1), the graphite carbon target is set in, feed nitrogen and realize carbonitriding; It five is to feed nitrogen when evenly being arranged alternately graphite carbon target and metallic target on bell jar (1) to realize that desiring to ooze workpiece surface forms metal carbonitride compound cementation coating and metal compound film; It six is permanent magnets (5) that pentagon, sexangle, octagon, different shape such as quincunx are housed on the arc evaporator (4).
2, ooze technology and device thereof together according to the described a kind of arc light ion carburizing of claim 1 and it is characterized in that the graphite carbon target that is provided with can be specially 90 °, 45 °～60 °, 90 ° and 45 °～60 ° three kinds of scheme settings with to desire to ooze workpiece (16) angled on bell jar (1) different azimuth.
3, the described a kind of arc light ion carburizing of claim 1 oozes technology and device thereof together on schedule, it is characterized in that bell jar (1) go up with desire to ooze workpiece and become that the while evenly is arranged alternately graphite carbon target and metallic target on 90 ° and 45 °～60 ° orientation, also can be only with desire to ooze workpiece and become on 90 ° of orientation evenly to be arranged alternately graphite carbon target and metallic target, also can be only with desire to ooze workpiece at 45～evenly be arranged alternately graphite carbon target and metallic target on 60 ° of orientation.
4, ooze technology and device thereof together according to the described a kind of arc light ion carburizing of claim 1, it is characterized in that described distance of desiring to ooze between workpiece (16) and the cathode arc target is 80～300mm.
5, ooze technology and device thereof together according to the described a kind of arc light ion carburizing of claim 1, it is characterized in that describedly desiring to ooze the carburizing of workpiece (16) and the temperature of carbonitriding is 800～1100 ℃, bias voltage is 200～1000V, and arc stream is 60～150A, and operating air pressure is 8x10
-1Between～50 handkerchiefs.
6, ooze technology and device thereof together according to the described a kind of arc light ion carburizing of claim (1), the temperature of workpiece is 200～1100 ℃ when it is characterized in that desiring to ooze synthetic metal carbonitride compound cementation coating in workpiece (16) surface and metal compound film, bias voltage is 0～1000V, arc stream is 60～150A, and operating air pressure is 8x10
-1Between～8 handkerchiefs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91102088 CN1032376C (en) | 1991-03-19 | 1991-03-19 | Arc light ion carburizing and carbonitriding technology and its installation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91102088 CN1032376C (en) | 1991-03-19 | 1991-03-19 | Arc light ion carburizing and carbonitriding technology and its installation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1065102A true CN1065102A (en) | 1992-10-07 |
| CN1032376C CN1032376C (en) | 1996-07-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91102088 Expired - Fee Related CN1032376C (en) | 1991-03-19 | 1991-03-19 | Arc light ion carburizing and carbonitriding technology and its installation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1032376C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101518935B (en) * | 2008-12-06 | 2010-12-29 | 舟山市汉邦机械科技有限公司 | PVD nano composite ceramic coating screw and method for manufacturing same |
| CN102570338A (en) * | 2010-12-30 | 2012-07-11 | 通用电气公司 | Device and method for circuit protection |
| CN103882369A (en) * | 2014-04-11 | 2014-06-25 | 北京石油化工学院 | Graphite source electrode for glow carburizing without hydrogen |
| CN105862131A (en) * | 2016-06-03 | 2016-08-17 | 武汉工程大学 | Molybdenum introducing method for preparing molybdenum carbide crystal through MPCVD (Microwave Plasma Chemical Vapor Deposition) |
| CN106544625A (en) * | 2016-11-25 | 2017-03-29 | 大连圣洁热处理科技发展有限公司 | Workpiece carbonitriding technology |
| CN108517486A (en) * | 2018-07-11 | 2018-09-11 | 江苏苏扬包装股份有限公司 | A kind of piston ring carbo-nitriding surface treatment method using liquid phase arc discharge |
-
1991
- 1991-03-19 CN CN 91102088 patent/CN1032376C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101518935B (en) * | 2008-12-06 | 2010-12-29 | 舟山市汉邦机械科技有限公司 | PVD nano composite ceramic coating screw and method for manufacturing same |
| CN102570338A (en) * | 2010-12-30 | 2012-07-11 | 通用电气公司 | Device and method for circuit protection |
| CN102570338B (en) * | 2010-12-30 | 2015-12-02 | 通用电气公司 | For the apparatus and method of circuit protection |
| CN103882369A (en) * | 2014-04-11 | 2014-06-25 | 北京石油化工学院 | Graphite source electrode for glow carburizing without hydrogen |
| CN103882369B (en) * | 2014-04-11 | 2016-05-18 | 北京石油化工学院 | A kind of graphite source electrode for aura non-hydrogen carbonizing |
| CN105862131A (en) * | 2016-06-03 | 2016-08-17 | 武汉工程大学 | Molybdenum introducing method for preparing molybdenum carbide crystal through MPCVD (Microwave Plasma Chemical Vapor Deposition) |
| CN106544625A (en) * | 2016-11-25 | 2017-03-29 | 大连圣洁热处理科技发展有限公司 | Workpiece carbonitriding technology |
| CN108517486A (en) * | 2018-07-11 | 2018-09-11 | 江苏苏扬包装股份有限公司 | A kind of piston ring carbo-nitriding surface treatment method using liquid phase arc discharge |
| CN108517486B (en) * | 2018-07-11 | 2019-11-29 | 江苏苏扬包装股份有限公司 | A kind of piston ring carbo-nitriding surface treatment method using liquid phase arc discharge |
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| Publication number | Publication date |
|---|---|
| CN1032376C (en) | 1996-07-24 |
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