CN106501700B - A kind of device stress testing tool - Google Patents

A kind of device stress testing tool Download PDF

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Publication number
CN106501700B
CN106501700B CN201610940026.3A CN201610940026A CN106501700B CN 106501700 B CN106501700 B CN 106501700B CN 201610940026 A CN201610940026 A CN 201610940026A CN 106501700 B CN106501700 B CN 106501700B
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China
Prior art keywords
slide plate
lower lock
lock block
plate
testing tool
Prior art date
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Active
Application number
CN201610940026.3A
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Chinese (zh)
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CN106501700A (en
Inventor
彭军华
窦金龙
赵耿
邵云
邹平
刘栋
高超
王真
王飞
银登杰
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Zhuzhou CRRC Times Semiconductor Co Ltd
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Zhuzhou CRRC Times Electric Co Ltd
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Priority to CN201610940026.3A priority Critical patent/CN106501700B/en
Publication of CN106501700A publication Critical patent/CN106501700A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor

Abstract

The invention discloses a kind of device stress testing tools, including upper holder block, lower lock block and driving device for driving the upper holder block and the lower lock block moves towards along the vertical direction, it further include the slide plate that can be conducted when downside and the upper surface of the lower lock block contact, the upper side of the slide plate have for mask placement device placed mesa, and the slide plate can the relatively described lower lock block transverse shifting to be able to drive device from placement location to test position.In the device stress testing tool, because being provided with slide plate, device can be put in avoid manpower, then guarantee safety.Simultaneously as device is placed on placed mesa in placement location, wherein the space of placement location is bigger than the space of test position, it can more accurately place, placed mesa and device relative friction are avoided, so the device stress testing tool can efficiently solve testing tool and there are problems that security risk in and be easy to cause device damage.

Description

A kind of device stress testing tool
Technical field
The present invention relates to experiment the field of test technology, more specifically to a kind of device stress testing tool.
Background technique
Semiconductor devices need to carry out a variety of tests before factory under the conditions of certain pressure, test for convenience, using one The testing tool of kind reliable performance is indispensable, to apply certain pressure to semiconductor devices by testing tool, to be surveyed It tests.
Common testing tool generally comprises base, upper holder block, lower lock block and for pushing upper holder block and lower lock block at present The driving cylinder of relative movement.Generally elasticity dress of the setting for preventing the two close to each other also between upper holder block and lower lock block It sets.While being also conducted on upper holder block and lower lock block and being connected with busbar, for conduction.When in use, driving cylinder retracts at this time, In Under the action of elastic device, upper holder block and lower lock block are relatively distant from movement, vacate middle position, then put semiconductor devices It sets on lower lock block, driving cylinder drives downwards upper holder block later, so that upper holder block and lower lock block is squeezed semiconductor devices simultaneously, simultaneously It is accessed in electric system by busbar.
But pass through inventor, and it is found in long-term practice, different semiconductor devices is needed replacing in test process, it is such as empty Between it is narrow can cause it is inconvenient, and if disposably cannot accurately place, the lower surface of device can then hold with lower lock block friction Easily scratch device surface;And operator is when replacing device, how to avoid because maloperation leads to cylinder movement and clamp hand, Cause biggish security risk.
There are security risk and device damage is be easy to cause using middle in conclusion how to efficiently solve testing tool Problem is current those skilled in the art's urgent problem.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of device stress testing tool, the device stress testing tool Testing tool, which can be efficiently solved, to be had security risk in and be easy to cause device damage.
In order to achieve the above object, the invention provides the following technical scheme:
A kind of device stress testing tool, including upper holder block, lower lock block and for driving the upper holder block and the pushing The driving device that block moves towards along the vertical direction further includes that the upper surface of downside and the lower lock block being capable of conductance when contacting Logical slide plate, the upper side of the slide plate have a placed mesa for mask placement device, and the slide plate can it is relatively described under Briquetting transverse shifting is to be able to drive device from placement location to test position.
It preferably, further include the slide plate Flexible Reset device being arranged between the slide plate and the lower lock block, the cunning Sheet reset elastic device can be deformed in vertical direction to prevent slide plate from being in contact with lower lock block.
It preferably, further include the sliding rail being slidably matched in transverse direction with the slide plate.
Preferably, it is additionally provided with for preventing slide plate from continuing to slide after device to test position to drive in the slide plate slides Dynamic positioning device.
Preferably, location hole is provided on the slide plate, the positioning device is the elasticity matched with the location hole Positioning pin, when the thrust that the slide plate is born is less than predetermined value, the elastic positioning pin can prevent the location hole along it It moves radially.
Preferably, the side of the slide plate is provided with grip hole.
Preferably, including bottom plate and pressing plate, it is provided with the upper holder block on the upside of the bottom plate, is set on the downside of the pressing plate It is equipped with the lower lock block.
Preferably, further include intermediate plate between the bottom plate and the pressing plate, the upside of the intermediate plate is fixed There is the lower lock block, and its downside is respectively fixed with the upper holder block.
Preferably, further include and the relatively-stationary guide rod of the bottom plate, the guide rod and the top board and the centre Plate is slidably matched along the vertical direction.
Preferably, briquetting Flexible Reset is provided between the intermediate plate and the bottom plate and between the pressing plate Device.
A kind of device stress testing tool provided by the invention, specifically, the device stress testing tool include upper holder block, Lower lock block, driving device and slide plate, wherein upper holder block and lower lock block are used to be respectively placed in the both ends of device, and wherein driving device For driving lower lock block and upper holder block to relatively move so that upper holder block and lower lock block are jointly to device pressure pressure.On its middle slide plate Side has the placed mesa for mask placement device, should be able to be conductive mutually when the upper surface of downside and lower lock block contacts.Wherein slide Plate should also be able to opposite lower lock block transverse shifting and need so that slide plate is able to drive device from placement location to test position Illustrate, wherein test position is referred to when device is located at the position, at this time driving device work can make upper holder block and Lower lock block just pushes down device, so that device is able to carry out test.
In the above technical solution, in the application device stress testing tool, first slide plate is removed, so that mounting table Face is located at placement location, in placement location, device is placed on glove table top, is then moved into slide plate, make placed mesa position In test position, and then device is made to be located at test position.At this time driving device start to work, driving device to upper holder block directly or Pressure pressure indirectly, makes upper holder block and lower lock block extrusion device, and slide plate contacts realization with lower lock block and conducts at this time, and then can Realize electrical testing.In the device stress testing tool, because being provided with slide plate, by slide plate relative to the movement of lower lock block, with It drives device to enter test position, can put in device to avoid manpower, then guarantee safety.Simultaneously as device be Placement location is placed on placed mesa, and wherein the space of placement location is bigger than the space of test position, can be compared accurately It places, avoids placed mesa and device relative friction, and in the process for being pushed into test position, placed mesa is opposite with device quiet Only, device friction can be further avoided, so device can be effectively avoided and wear in entire push-on process, to protect Demonstrate,prove the integrality of device.In conclusion the device stress testing tool, which can efficiently solve, has peace in testing tool use Full hidden danger and the problem of be easy to cause device damage.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with It obtains other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of device stress testing tool provided in an embodiment of the present invention;
Fig. 2 is position view of the slide plate provided in an embodiment of the present invention under the state that skids off.
It is marked in attached drawing as follows:
Driving device 1, lower lock block 2, slide plate 3, slide plate Flexible Reset device 4, sliding rail 5, bottom plate 6, pressing plate 7, intermediate plate 8, Briquetting Flexible Reset device 9, device 10, grip hole 51.
Specific embodiment
The embodiment of the invention discloses a kind of device stress testing tools, exist to efficiently solve in testing tool use Security risk and the problem of be easy to cause device damage.
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Fig. 1-Fig. 2 is please referred to, Fig. 1 is the structural schematic diagram of device stress testing tool provided in an embodiment of the present invention;Fig. 2 For position view of the slide plate provided in an embodiment of the present invention under the state that skids off.
In a specific embodiment, a kind of device stress testing tool is present embodiments provided, specifically, the device pressure Power testing tool includes upper holder block, lower lock block 2, driving device 1 and slide plate 3,
Wherein upper holder block and lower lock block 2 are used to be respectively placed in the both ends of device 10, and under wherein driving device 1 is for driving Briquetting 2 and upper holder block relatively move so that upper holder block and lower lock block 2 are jointly to the pressure pressure of device 10, it should be noted that its In a upper holder block and a lower lock block 2 can be considered as and constitute one group of squeeze unit, when can have multiple groups extruding in the tool Unit, and multiple groups are stacked up and down, to test simultaneously multiple devices 10, not to the number of upper holder block and lower lock block 2 at this It is specifically limited.Wherein driving device 1 can be electric cylinders, can also be telescoping cylinder, such as telescopic hydraulic cylinder and flexible pneumatic cylinder.When It should ensure that, wherein upper holder block and lower lock block 2 are energization briquetting, can be connected to busbar in advance generally to facilitate access electric system In.
There is the placed mesa for mask placement device 10, it should be noted that can be on placed mesa on the upside of its middle slide plate 3 It is provided with positioning device, mounting table and device 10 can also be made to protect by the stiction between placed mesa and device 10 Hold relatively-stationary relationship.It also needs to guarantee, should be able to be conductive mutually when the upper surface of downside and lower lock block 2 contacts, i.e., The material for showing slide plate 3 and lower lock block 2 should be conductive material, and should can be conductive when being in contact.Show wherein Upper holder block, device 10, slide plate 3 and lower lock block 2, which can sequentially form, to be conducted.
Its middle slide plate 3 should also be able to opposite 2 transverse shifting of lower lock block, so that slide plate 3 is able to drive device 10 from placement Position is to test position, it should be noted that wherein test position is referred to when device 10 is located at the position, is driven at this time The work of device 1 can make upper holder block and lower lock block 2 just push down device 10, so that device 10 is able to carry out test.Wherein place Position refers in the position, device 10 is directly placed on placed mesa with can be convenient, and specific placement location can From the point of view of being the easy degree being placed on placed mesa according to device 10, because space between upper holder block and lower lock block 2 Limitation, wherein placement location should can be set side by side in transverse direction with upper holder block, i.e., in vertical direction, there is no overlappings Place.It should be noted that slide plate 3 can be set multiple, when testing multiple devices 10 at the same time, each device 10 can be made It is provided with slide plate 3.
In the present embodiment, in the application device stress testing tool, first slide plate 3 is removed, so that placed mesa position Device 10 is placed on glove table top in placement location in placement location, then slide plate 3 is moved into, is located at placed mesa Test position, and then device 10 is made to be located at test position.Driving device 1 is started to work at this time, and driving device 1 is direct to upper holder block Or the pressure that presses indirectly, making 2 extrusion device 10 of upper holder block and lower lock block, slide plate 3 contacts realization with lower lock block 2 and conducts at this time, And then it can be realized electrical testing.In the device stress testing tool, because being provided with slide plate 3, by slide plate 3 with respect to lower lock block 2 movement can be put in device 10 to avoid manpower with driving device 10 to enter test position, then guarantee safety.Together Shi Yinwei device 10 is placed on placed mesa in placement location, wherein space of the space of placement location than test position Greatly, it can more accurately place, avoid placed mesa and 10 relative friction of device, and in the process for being pushed into test position, Placed mesa and device 10 are opposing stationary, can further avoid the friction of device 10, so in entire push-on process, it can be effective Ground avoids device 10 from wearing, to guarantee the integrality of device 10.In conclusion the device stress testing tool can be effective Ground solve the problems, such as testing tool in there are security risk and be easy to cause device 10 damage.
When slide plate 3 is moved to test position from placement location, during mobile relative to lower lock block 2, Ying Jinliang It avoids moving up and down, moves up and down and device 10 and upper holder block friction or device 10 is be easy to cause to topple over.Based on this, in order to It is mobile steady, it is also provided with the sliding rail 5 being slidably matched in transverse direction with slide plate 3, specific sliding rail 5 can be guide rail Mechanism may be arranged as other structures, such as include two sliding rails 5 for all having sliding slot, and the sliding slot of two sliding rails 5 is provide with respectively On the two sides side of slide plate 3, with extending direction is slidably matched along the chute with slide plate 3.Wherein sliding rail 5 may be mounted at lower lock block On 2, can also install on the relatively-stationary component of lower lock block 2 so that sliding rail 5 can keep relative stability with lower lock block 2 Positional relationship.Wherein sliding rail 5 can be made insulation, also can be set into it is nonisulated, in order to guarantee safety, herein preferably Sliding rail 5 is epoxy resin sliding rail 5.
Slide plate 3 is being moved along sliding rail 5, when so that device 10 entering test position, in order to avoid excessive sliding, is being caused Deviate, can be set for being slided in slide plate 3 to drive the positioning for preventing slide plate 3 from continuing sliding after device 10 to test position Device.The specific positioning device can be limited wall.In order to facilitate later period adjustment, it can be provided with location hole on slide plate 3, And positioning device is then the ground elastic positioning pin that is slidably matched with location hole, and when the thrust that slide plate 3 is born is less than predetermined value, elasticity Positioning pin can prevent location hole from radially sliding, and then slide plate 3 be prevented to slide, it should be noted that predetermined value should root Determine according to manpower thrust size, generally 5 Ns or so, only needs manpower that can experience resistance.Wherein elastic positioning pin can King positioning pin is thought, to guarantee flexibility.
It is considered that, in order to guarantee the service life of slide plate 3 Yu pressing plate 7, Ying Jinliang avoids two during moving slide board 3 Person's relative friction is based on this, can make have certain interval between slide plate 3 and lower lock block 2, and between slide plate 3 and lower lock block 2 It is provided with slide plate Flexible Reset device 4, slide plate Flexible Reset device 4 can be deformed in vertical direction to prevent slide plate 3 and push Block 2 is in contact, it should be noted that when squeezing test, under extruding force effect, slide plate Flexible Reset device 4 should can Deformation, so that slide plate 3 is in contact to realize and conduct with lower lock block 2.I.e. when starting moving slide board 3, slide plate 3 and lower lock block 2 Between can have certain gap, avoid phase mutual friction.Wherein, slide plate Flexible Reset device 4 is arranged in slide plate 3 and pressing plate 7 Between, not surface both ends are directly connect with slide plate 3 with lower lock block 2 respectively, and it can also be and be indirectly connected with, when sliding rail 5 is such as set, The one end for acting on slide plate 3 on slide plate Flexible Reset device 4 can be made directly to be connected with sliding rail 5.In order to guarantee the stabilization of structure, At least two slide plate Flexible Reset devices 4 can be provided in the lower section of every sliding rail 5.It should also be noted that, wherein sliding Sheet reset elastic device 4 can be spring or other elastic structures.
Further, it is pushed into and pulls out for convenience slide plate 3, can be in the side of slide plate 3, and be preferably provided on the outside Grip hole 51, grip hole 51 refers to that hole section at least guarantees to refer to four and is put into the hole, is pulled with facilitating.
Further, it is contemplated that upper holder block and lower lock block 2 have certain electric conductivity, in order to guarantee other structures safety, It can make that bottom plate 6 and pressing plate 7 is arranged, and the upside of bottom plate 6 is provided with lower lock block 2, the downside of pressing plate 7 is provided with lower lock block 2, and then driving device 1 can be made to directly drive pressing plate 7 and pushed.It should be noted that in order to improve working efficiency, and mention Height can be provided at least one intermediate plate 8 with batch test result precision again, and be fixed with upper pressure in the upside of intermediate plate 8 Block, and lower lock block 2 is fixed on the downside of it, when an intermediate plate 8 is only arranged, the lower lock block of the downside on such intermediate plate 8 2, the upper holder block common combination with 6 upside of bottom plate, to form a squeeze unit, to be respectively placed in the both ends of a device 10, The formation of device 10 is squeezed, while the upper holder block of 7 downside of the lower lock block 2 of 8 upside of intermediate plate and pressing plate is combined into an extruding list Member, when there are at least two intermediate plates 8, upper holder block and lower lock block 2 between two neighboring intermediate plate 8 constitute extrudings singly Member.When in use, the extruding force that two devices 10 are subject to up and down tested simultaneously can be made equal in magnitude.
In driving pressing plate 7 downwards, and when intermediate plate 8 being driven to move down, in order to guarantee ride comfort, it can be set and led Bar, guide rod and bottom plate 6 are relatively fixed, and guide rod and top board 7 and centre are slidably matched along the vertical direction.
When completing test, it can make to be moved up by driving device 1 with dynamic pressure plate 7, so that adjacent upper holder block is under There is biggish gap, to facilitate push-in device 10 between briquetting 2.But when with intermediate plate 8, driving device 1 is then at this time Driving is more inconvenient, is based on this, can be between intermediate plate 8 and bottom plate 6, and briquetting reset is provided between pressing plate 7 Elastic device 9, with squeeze when, deformation and energy storage, and driving device 1 reply initial position when, discharge elasticity can, make upper holder block There is enough gaps between lower lock block 2.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one The widest scope of cause.

Claims (8)

1. a kind of device stress testing tool, including upper holder block, lower lock block and for driving the upper holder block and the lower lock block The driving device moved towards along the vertical direction, which is characterized in that further include that downside is contacted with the upper surface of the lower lock block When the slide plate that can conduct, the upper side of the slide plate has the placed mesa for mask placement device, and the slide plate can The relatively described lower lock block transverse shifting is to be able to drive device from placement location to test position;It further include being arranged in the slide plate Slide plate Flexible Reset device between the lower lock block, the slide plate Flexible Reset device can be deformed in vertical direction to hinder Limited slip plate is in contact with lower lock block;It further include the sliding rail being slidably matched in transverse direction with the slide plate;The slide plate resets bullet One end that the slide plate is acted on property device is directly connected with the sliding rail.
2. device stress testing tool according to claim 1, which is characterized in that be additionally provided with for sliding in the slide plate It moves to drive the positioning device for preventing the slide plate from continuing sliding after device to test position.
3. device stress testing tool according to claim 2, which is characterized in that it is provided with location hole on the slide plate, The positioning device is the elastic positioning pin matched with the location hole, is less than predetermined value in the thrust that the slide plate is born When, the elastic positioning pin can prevent the location hole from moving along the radial.
4. device stress testing tool according to claim 3, which is characterized in that the side of the slide plate is provided with handle Hole.
5. device stress testing tool according to claim 1-4, which is characterized in that including bottom plate and pressing plate, It is provided with the upper holder block on the upside of the bottom plate, the lower lock block is provided on the downside of the pressing plate.
6. device stress testing tool according to claim 5, which is characterized in that further include positioned at the bottom plate and described Intermediate plate between pressing plate is fixed with the lower lock block on the upside of the intermediate plate, and its downside is respectively fixed with the upper pressure Block.
7. device stress testing tool according to claim 6, which is characterized in that further include relatively fixed with the bottom plate Guide rod, the guide rod is slidably matched along the vertical direction with the top board and with the intermediate plate.
8. device stress testing tool according to claim 7, which is characterized in that between the intermediate plate and the bottom plate And briquetting Flexible Reset device is provided between the pressing plate.
CN201610940026.3A 2016-11-01 2016-11-01 A kind of device stress testing tool Active CN106501700B (en)

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CN106501700B true CN106501700B (en) 2019-11-01

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202291099U (en) * 2011-08-26 2012-07-04 上海金研机械制造有限公司 Stamping automatic delivery device
CN204893365U (en) * 2015-09-07 2015-12-23 浙江大元泵业股份有限公司 Automatic change press

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090126545A1 (en) * 2007-11-15 2009-05-21 Advanced Foundry Specialist, Llc Automated trim press and shuttle system
CN105444965A (en) * 2014-08-29 2016-03-30 昆山迈致治具科技有限公司 Vacuum pressure test device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202291099U (en) * 2011-08-26 2012-07-04 上海金研机械制造有限公司 Stamping automatic delivery device
CN204893365U (en) * 2015-09-07 2015-12-23 浙江大元泵业股份有限公司 Automatic change press

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Effective date of registration: 20201016

Address after: 412001 Room 309, floor 3, semiconductor third line office building, Tianxin hi tech park, Shifeng District, Zhuzhou City, Hunan Province

Patentee after: Zhuzhou CRRC times Semiconductor Co.,Ltd.

Address before: The age of 412001 in Hunan Province, Zhuzhou Shifeng District Road No. 169

Patentee before: ZHUZHOU CRRC TIMES ELECTRIC Co.,Ltd.