CN106500839A - The bearing calibration of monochromator scanning wavelength mechanical position tolerances - Google Patents
The bearing calibration of monochromator scanning wavelength mechanical position tolerances Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The present invention relates to a kind of bearing calibration of monochromator scanning wavelength mechanical position tolerances equation, including the standard spectrum provided with standard light source or standard sample, by the standard spectrum collection to becoming bar length, equation parameter is solved, optimum seeks value and vigour is soft repaiies process, the length scanning error that monochrome correction instrument or spectrogrph raster scan mechanism are caused by mechanical position tolerances.Value is sought using a kind of optimum and determines the long ratio of optimum bar and the method for revising initial wavelength, effective correction has been carried out to the scanning wavelength error of grating sine sweep type monochromator or spectrogrph.Initial wavelength is revised on software, so as to compensate monochromator scanning mechanical position tolerances, solve the problems, such as that the raster scan mechanism of monochromator, as length scanning error that light zero position error and roller steering error cause is big, cannot meet instrument wavelength accuracy, improves the accuracy of instrument wavelength.The method software and hardware combines, simple, it is adaptable to wavelength correction when monochromator or the spectrogrph examination and test of products are debugged.
Description
Technical field
The bearing calibration the present invention relates to a kind of software and hardware of monochromator scanning mechanical position tolerances combines, more particularly, to
The monochromator of grating sine sweep type or the bearing calibration of spectrometer wavelength error.
Background technology
Precision lead screw nut, the sine mechanism of swing link transmission are adopted the scanning drive mechanism of raster scan type monochromator more,
Under step motor drive, leading screw rotation, nut movement, nut are oriented to and promote roller movement, and band driven fork swings, and makes monochromator
Grating continuously rotate, the monochromatic light of monochromator output wavelength linear change.
The alignment error of raster scan type monochromator sweep mechanism includes light zero position error and fork roller steering error.
Light zero position refers to that monochromator exports the position of zero order light, and now the plane diffraction grating normal of monochromator is incident with beam splitting system
The Bisector of angle (hereinafter referred to as light splitting bisector) of light and diffracted ray overlaps, the fork central axis interlocked with grating
Position in leading screw axis.When light zero position is correct, the moving direction of fork roller require down-feed screw axis or parallel to
Fork centrage during light zero, to ensure the wavelength of raster scan type monochromator output with the linear pass of the corner of motor
System.When monochromator exist light zero position error or (and) fork roller steering error when, i.e., grating normal and light splitting bisector be not
Overlap (the two angle be referred to as light zero position error angle), or (and) moving direction out of plumb and the leading screw axis (pendulum of fork roller
The moving direction of bar roller is referred to as roller steering error angle with the angle of leading screw axis vertical direction), the wavelength of monochromator output
Cannot ensure linear with the corner of motor, cause monochromator output wavelength and design load (Wavelength design value and step
The corner of stepper motor is linear) between error, affect monochromator wavelength accuracy.
For the bearing calibration of raster scan type monochromator light zero position error and roller steering error has not yet to see phase
The report of pass.The bag of Shanghai measurement technology institute is studied in one text of error analyses of grating monochromator spectral scanning mechanisms,
For the error of sine mechanism has carried out theory analysis, but the bearing calibration of error is not proposed.The present invention is based on foundation
The mechanical position tolerances equation of grating sine sweep type monochromator, and propose a kind of optimal tune of equation variable element solution optimizing determination
Section amount and compensation dosage, the method that correction is implemented by hardware adjustments, software correction.
Content of the invention
The purpose of the present invention is that for above-mentioned the deficiencies in the prior art, there is provided a kind of based on mechanical position tolerances equation
Variable element solves optimizing, the soft wavelength calibration method that repaiies of vigour, so as to solve the raster scan mechanism of monochromator due to light zero-bit
Put that the length scanning error that error and roller steering error cause is big, problem that is cannot meeting instrument wavelength accuracy, improve instrument
The bearing calibration of the monochromator scanning wavelength mechanical position tolerances equation of wavelength accuracy.
The purpose of the present invention is achieved through the following technical solutions：
A kind of bearing calibration of monochromator scanning wavelength mechanical position tolerances equation, including with standard light source or standard sample
The standard spectrum of offer, by the standard spectrum collection to becoming bar length, equation parameter is solved, optimum seeks value and vigour is soft repaiied
The length scanning error that journey, monochrome correction instrument or spectrogrph raster scan mechanism are caused by mechanical position tolerances.
Monochromator scanning wavelength mechanical position tolerances equation is：
In formula：λ is standard wave length, and Δ λ is wavelength error：
Δ λ=λ0In-λ (2) formula：λ0For the corresponding monochromator output wavelength of standard wave length；
In formula 1：K is beam splitting system mechanical position tolerances coefficient：
D is grating pitch, α0For the angle theoretical value of grating incident angle and emergent ray, L0For fork theoretical length, θ is
Roller steering error angle, i.e. angle of the fork roller spigot surface with respect to leading screw axis vertical direction；α be grating angle parameter, a=
2d cos α, wherein：α is the angle actual value of grating incident angle and emergent ray；L is the actual length of fork；γ=β-θ, its
In：β is light zero position error angle, and θ is roller steering error angle；N is that bar length adjusts ratio,In formula：L ' is change or school
Oscillating bar length after just, L are the oscillating bar length under system debug original state；M is initial wavelength setting value.
The bearing calibration of monochromator scanning wavelength mechanical position tolerances equation, comprises the following steps：
A, acquisition standard wave length：Standard wave length λ is obtained using standard light source or standard samplej, j 2, the selection of wavelength will
Match with the wavelength accuracy and scope of instrument；
B, standard spectrum collection：Experiment porch is built, the oscillating bar length for adjusting raster scan mechanism is respectively L ' and L, adjusted
Section amount is Δ L0=L '-L, the long ratio of the corresponding bars of oscillating bar length L ' are n0, the corresponding bar length of L compares 1, carries out standard light source or standard
The spectral scan of sample, obtains standard spectrum gathered data；
C, data processing：The peak of the spectral scan data of extraction standard light source or standard sample, obtains scanning number
According to corresponding output wave long value λ for being no less than four of Plays wavelength0i, calculate its difference DELTA λ with corresponding standard wave length0i=
λ0i-λi, i=1,2,3,4 ..., as scanning wavelength error；
D, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1～4) and corresponding bar length are than substituting into mechanical position tolerances equation
1, simultaneous solution determines four parameters of error equation：Adjust before grating angle parameter a, error angle γ, bar length and compare n0, light splitting
Product kL of system mechanics position error coefficient k and oscillating bar length L；
(2) according to the oscillating bar length regulated quantity Δ L of step b0For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) 4 gained oscillating bar length L of gained kL and formula is solved equation according to step d (1), calculates k value；
E, error assessment：The parameter that step d is tried to achieve substitutes into equation 1, in monochromator or the wave-length coverage of spectral instrument
Try to achieve the maximum Δ λ of instrument wavelength errormaxIf, Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need to adjust
Whole parameter m and n, go to step f；
F, optimum are sought value and determine adjustment amount：The solution value of four parameters a, k of step d acquisition, L, γ is substituted into mechanical position
Put error equation (1), with n and λ as independent variable, Δ λ as dependent variable, calculate λ in instrument wave-length coverage, take 0.9 as n～
In the range of 1.1 during different value Δ λ maximum deviation Δ λmaxWith average value Δ λmean；Choose all Δ λmaxIn minima corresponding
N values compare n as optimum bar lengthop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop；
Parameter adjusted by g, hardware：Adjustment scanning oscillating bar length in instrument hardware, with length L that regulated quantity Δ L adjusts fork：
Δ L=(nop-1)L； (5)
H, software correction：It is m- Δ λ to revise initial wavelength on instrument softwaremeanop, complete zero mistake of light of actual monochromator
Poor correction, parameter m now obtained in wavelength error equation 1 is：
m(new)=m(old)-Δλmeanop； (6)
I, return to step b
If repeatedly adjusting the requirement that can not still meet instrument wavelength accuracy, a, k, L, γ ginseng in specification error equation
Unreasonable or Δ λ, λ data value error of number is larger, it is considered to redesigns a, k, L, γ parameter or adjusts taking for Δ λ, λ data
Value.
Beneficial effect：The present invention is solved based on mechanical position tolerances equation parameter, is sought value using a kind of optimum and is determined most
The long ratio of excellent bar and the method for revising initial wavelength, are carried out to the scanning wavelength error of grating sine sweep type monochromator or spectrogrph
Effective correction.The method software and hardware combines, simple, it is adaptable to when monochromator or the spectrogrph examination and test of products are debugged
Wavelength correction.
Description of the drawings
The light splitting sweep mechanism mechanical position tolerances schematic diagram of Fig. 1 gratings sine sweep type monochromator or spectrogrph
The light splitting sweep mechanism structure chart of Fig. 2 gratings sine sweep type monochromator or spectrogrph
1- entrance slit 2- collimating mirror 3- focus lamp 4- exit slit 5- grating 6- axle 7- spring 8- fork 9-
The long regulating bolt 15- roller guide pad 16- motors of nut 10- leading screw 11- stage clip 12- roller 13- axle 14- bars
17- electric machine support 18- shaft coupling 19- track base 20- line slideway 21- bearings and support 22- base plates
Fig. 3 standard light source spectral measurement experiment porch block diagrams
The bearing calibration flow chart of Fig. 4 monochromator scanning wavelength mechanical position tolerances
Fig. 5 grating sine sweep type spectrometer architecture block diagrams
Specific embodiment：
1～4 the present invention is further detailed explanation below in conjunction with the accompanying drawings.
The mechanical position tolerances equation of the present invention is the machine driving relation according to raster scan type monochromator sweep mechanism,
Set up the equation between light zero position error and roller steering error and instrument parameter (see Fig. 1), wavelength error：
In formula：Δ λ is wavelength error：
Δ λ=λ0-λ (2)
Wherein：λ be standard wave length's (i.e. actual wavelength), λ0For the corresponding instrument output wavelength of standard wave length (i.e. theoretical ripple
Long or design wavelength).
K is beam splitting system mechanical position tolerances coefficient：
Wherein：D is grating pitch, α0For the angle theoretical value of grating incident angle and emergent ray, L0Theoretical long for fork
Degree, θ are roller steering error angle, i.e. angle of the fork roller spigot surface with respect to leading screw axis vertical direction；
α be grating angle parameter, a=2d cos α, wherein：α is the angle actual value of grating incident angle and emergent ray；
The physical length of fork when L is system debug original state；
γ=β-θ, wherein：β is light zero position error angle, and θ is roller steering error angle；
M is that (this is known quantity to current initial wavelength setting value, if unknown, can be set to 0)；
N is that bar length adjusts ratio,Wherein：L ' is the oscillating bar length after changing or correcting, and L is that system debug is initial
Oscillating bar length under state.
The method of the present invention becomes length parameters solution, optimizing using mechanical position tolerances equation, determines optimal adjusting parameters,
And realize in the method for hardware adjustment, software correction.Step is as follows：
1st, standard wave length is obtained：Standard wave length λ is obtained using standard light source or standard samplei(i is not less than 2), note ripple
Long selection will be matched with the wavelength accuracy of instrument and scope.
2nd, standard spectrum collection：Experiment porch is built, the oscillating bar length for adjusting raster scan mechanism is respectively L ' and L, adjusted
Section amount is Δ L0=L '-L.The long ratio of the corresponding bars of oscillating bar length L ' is n0, the corresponding bar length of L compares 1, carries out standard light source or standard
The spectral scan of sample, obtains standard spectrum gathered data.
3rd, data processing：The peak of the spectral scan data of extraction standard light source or standard sample, obtains scanning number
According to corresponding output wave long value λ for being no less than 4 of Plays wavelength0i, calculate its difference DELTA λ with corresponding standard wave length0i=
λ0i-λi(i=1,2,3,4 ...), as scanning wavelength error.
4th, parametric solution：
(1) solve equation：By four groups of Δ λ0i、λi(i=1～4) and corresponding bar length are than substituting into mechanical position tolerances equation (formula
1), simultaneous solution determines 4 parameters of error equation：Adjust before grating angle parameter a, error angle γ, bar length and compare n0, light splitting
Product kL of system mechanics position error coefficient k and oscillating bar length L.
(2) according to the oscillating bar length regulated quantity Δ L of step 20For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) according to 4 gained oscillating bar length L of gained kL and formula is solved equation, k value is calculated.
5th, error assessment：The parameter that step 4 is tried to achieve substitutes into equation (1), in monochromator or the wave-length coverage of spectral instrument
Try to achieve the maximum Δ λ of instrument wavelength errormaxIf, Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need to adjust
Whole parameter m and n, go to step 6.
6th, optimum seeks value determination adjustment amount：4 parameters a, k that step 4 is obtained, the solution value of L, γ substitute into mechanical location
Error equation (1), with n, λ as independent variable, calculates λ in instrument wave-length coverage, and n is taken in certain limit such as [0.9,1.1]
The maximum deviation Δ λ of Δ λ during different valuemaxWith average value Δ λmean.Choose all Δ λmaxIn the corresponding n values conduct of minima
Optimum bar length compares nop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop.
7th, parameter adjusted by hardware：Adjustment scanning oscillating bar length in instrument hardware, with length L that regulated quantity Δ L adjusts fork：
Δ L=(nop-1)L (5)
8th, software correction：It is m- Δ λ to revise initial wavelength on instrument softwaremeanop, complete zero mistake of light of actual monochromator
Poor correction.Parameter m now obtained in wavelength error equation (formula 1) is：
m(new)=m(old)-Δλmeanop(6)
9th, return to step 2.
If repeatedly adjusting the requirement that can not still meet instrument wavelength accuracy, a, k, L, γ etc. in specification error equation
Parameter is unreasonable or Δ λ and λ data value error is larger, it is considered to redesign or adjust the value of data.
The light splitting scanning drive mechanism of grating sine sweep type monochromator or spectrogrph as illustrated in fig. 1 and 2, is precision lead screw
Nut, the sine mechanism of swing link transmission.Entrance slit 1, collimating mirror 2, focus lamp 3, exit slit 4 are fixed on by connector
On base plate 22, leading screw 10 is solid with screw by electric machine support 17, line slideway 20 by bearing and support 21, motor 16
On base plate 22.8 one end of fork is fixed in the rotary shaft 6 of grating 5 in beam splitting system, and the other end connects roller by axle 13
12.Nut 9 on leading screw 10 is fixedly connected with track base 19 so as to do straight line fortune when leading screw 10 is rotated along line slideway 20
Dynamic.Spring 7 is fixed between base plate 22 and fork 8, the roller 12 on 8 is contacted with the roller guide pad 15 on nut 8.Monochromator
Or spectrogrph is connected with leading screw 10 by shaft coupling 18 using motor 16, drive leading screw 10 to rotate, make the movement of nut 9 band
Dynamic roller 12 makes fork 8 rotate different angles with the grating 5 on moving axis 6.So that the complex light that injects from entrance slit 1 is passed through
Collimating mirror 2, grating 5, focus lamp 3, are projected from exit slit 4 with the monochromatic light of different wave length, realize monochromator or spectrogrph
Light splitting.The long regulating bolt 14 of stage clip 11, axle 13 and bar is adjusted by the long regulating bolt 14 of bar in the regulating tank on fork 8
The length of section fork.
Embodiment 1：
Sine sweep type monochromator mechanical position tolerances are corrected.
Build spectral scan measurement experiment porch as shown in figure 3, include standard light source, spectral scan control measuring system and
Host computer is constituted.Standard light source can adopt laser instrument, mercury lamp etc., it is provided that corresponding standard in the spectral region of monochromator
Wavelength, is fixed at the entrance slit of monochromator or spectrogrph beam splitting system so as to which incident ray is full of monochromator or light
The collimating mirror of spectrometer beam splitting system.Spectral scan control measuring system be located at monochromator exit slit at, control motor with
Certain angle is spaced continuous rotational angle, makes monochromator export the optical signal of the different wave length of certain wavelength interval and scope；
Experience this signal and be converted to digital signal simultaneously, host computer is passed to by data-interface；So as to obtain a wavelength range
Spectroscopic data.Host computer obtains spectroscopic data using PC by software and carries out data processing.Real using spectral scan measurement
Testing platform carries out bearing calibration implementation process such as Fig. 4 institutes of the wavelength error that monochromator sweep mechanism mechanical position tolerances cause
Show, including：
1st, determine standard wave length：With the characteristic wavelength of the one or more standard light sources with different known features spectrums and its
The corresponding wavelength of senior spectrum is used as standard wave length λj(j is not less than 2), it is ensured that standard wave length's number is no less than 2, and make which to the greatest extent
Amount covers the spectral region of monochromator, and notices that the selection of standard wave length's value will be matched with the wavelength accuracy of instrument.
2nd, standard spectrum collection：Standard light source is opened, if now the long ratio of the bar of raster scan mechanism fork is n0.Enter rower
The scanning survey of quasi- light source light spectrum, the long ratio of bar for obtaining standard spectrum in raster scan mechanism fork is n0When gathered data.Adjust
The oscillating bar length of section raster scan mechanism, regulated quantity are Δ L0If now the long ratio of the bar of raster scan mechanism fork is 1, again
Scanning standard light source, obtains standard spectrum gathered data when the long ratio of bar of raster scan mechanism fork is 1, and bar now is a length of
L.
3rd, data processing：The peak of extraction standard light source light spectrum data, obtains spectroscopic data Plays wavelength corresponding
Output wave long value λ no less than four0i, calculate its difference DELTA λ with corresponding standard wave length0i=λ0i-λi(i=1,2,3,
4 ...), as scanning wavelength error.
4th, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1～4) and corresponding bar length are than substituting into mechanical position tolerances equation (formula
1), simultaneous solution determines 4 parameters of error equation：Adjust before grating angle parameter a, error angle γ, bar length and compare n0, light splitting
Product kL of system mechanics position error coefficient k and oscillating bar length L.
(2) according to the oscillating bar length regulated quantity Δ L of step 20For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) 4 gained oscillating bar length L of gained kL and formula is solved equation according to step 4 (1), calculates k value.
5th, error assessment：The parameter that above-mentioned steps 4 are tried to achieve substitutes into equation (1), in monochromator or the wavelength of spectral instrument
Scope tries to achieve the maximum Δ λ of instrument wavelength errormaxIf, Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need
Adjusting parameter m and n is wanted, step 6 is gone to.
6th, optimum seeks value determination adjustment amount：4 parameters a, k that step 4 is obtained, the solution value of L, γ substitute into mechanical location
Error equation (1), with n and λ as independent variable, Δ λ as dependent variable, calculate λ in instrument wave-length coverage, n takes certain limit such as
The maximum deviation Δ λ of Δ λ during different value in [0.9,1.1]maxWith average value Δ λmean.Choose all Δ λmaxIn minima
Corresponding n values compare n as optimum bar lengthop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop.
6th, hardware adjustment：Adjustment scanning oscillating bar length in instrument hardware, with length L that regulated quantity Δ L adjusts fork：
Δ L=(nop-1)L (5)
8th, software correction：It is m- Δ λ to revise initial wavelength on softwaremeanop, complete the light zero error of actual monochromator
Correction.Parameter m now obtained in wavelength error equation (formula 1) is：
m(new)=m(old)-Δλmeanop(6)
9th, return to step 2.
If repeatedly adjusting the requirement that can not still meet instrument wavelength accuracy, a, k, L, γ etc. in specification error equation
Parameter is unreasonable or Δ λ and λ data value error is larger, it is considered to redesign or adjust the value of data.
Embodiment 2：
Sine sweep type spectrogrph mechanical position tolerances are corrected.
Sine sweep type spectrometer architecture is as shown in figure 5, light source and manipulator are fixed on beam splitting system (i.e. monochromator)
Outside entrance slit, and light source and entrance slit are into object-image relation, detecting and controlling system respectively with beam splitting system, sensor assembly,
And host computer connection, while the sampled device of beam splitting system is connected composition spectrogrph with sensor assembly.The structure of beam splitting system
Sine sweep mechanism is adopted as shown in Figure 1.
The bearing calibration of the wavelength error caused for sine sweep type spectrogrph light splitting sweep mechanism mechanical position tolerances
Implementation process as shown in figure 4, including：
1st, determine standard wave length：Made with the characteristic wavelength of one or more standard sample with different known features wavelength
For standard wave length λj(j is not less than 2), it is ensured that standard wave length's number is no less than 2, and make which cover the spectrum of spectrogrph as far as possible
Scope, and notice that the selection of wavelength value will be matched with the wavelength accuracy of instrument.
2nd, standard spectrum collection：The oscillating bar length of raster scan mechanism is adjusted, regulated quantity is Δ L0, in 2 different pendulum
Under pole length L ' and L, (the long ratio of the corresponding bar of difference is n0Scanning survey with 1), absorbance spectrum is carried out to standard sample, obtains
Obtain standard spectrum gathered data.
3rd, data processing：The peak of extraction standard sample spectral data, obtains spectroscopic data Plays wavelength corresponding
Output wave long value λ no less than 440i, calculate its difference DELTA λ with corresponding standard wave length0i=λ0i-λi(i=1,2,3,
4 ...), as scanning wavelength error.
4th, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1～4) and corresponding bar length are than substituting into mechanical position tolerances equation (formula
1), simultaneous solution determines 4 parameters of error equation：Adjust before grating angle parameter a, error angle γ, bar length and compare n0, light splitting
Product kL of system mechanics position error coefficient k and oscillating bar length L.
(2) according to the oscillating bar length regulated quantity Δ L of step 20For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) 4 gained oscillating bar length L of gained kL and formula is solved equation according to step 4 (1), calculates and seek k value.
5th, error assessment：The parameter that above-mentioned steps are tried to achieve substitutes into equation (1), in the wavelength model of monochromator or spectral instrument
Enclose the maximum Δ λ for trying to achieve instrument wavelength errormaxIf, Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need
Adjusting parameter m and n, go to step 6.
6th, optimum seeks value determination adjustment amount：Four parameters a, k that step 4 is obtained, the solution value of L, γ substitute into mechanical position
Put error equation (1), with n and λ as independent variable, Δ λ as dependent variable, calculate λ in instrument wave-length coverage, n takes certain limit
Maximum deviation Δ λ such as Δ λ during different value in [0.9,1.1]maxWith average value Δ λmean.Choose all Δ λmaxIn minimum
It is worth corresponding n values and compares n as optimum bar lengthop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop.
7th, hardware adjustment：Adjustment scanning oscillating bar length in instrument hardware, with length L that regulated quantity Δ L adjusts fork：
Δ L=(nop-1)L (5)
8th, software correction：It is m- Δ λ to revise initial wavelength on instrument softwaremeanop, complete actual spectrum instrument mechanical location
The correction of error.Parameter m now obtained in wavelength error equation (1 formula) is：
m(new)=m(old)-Δλmeanop(6)
9th, return to step 2.
If repeatedly adjusting the requirement that can not still meet instrument wavelength accuracy, a, k, L, the γ in specification error equation
Or Δ λ unreasonable etc. parameter and λ data value errors are larger, it is considered to redesign or adjust the value of data.
Claims (3)
1. a kind of bearing calibration of monochromator scanning wavelength mechanical position tolerances, it is characterised in that include with standard light source or mark
The standard spectrum that quasi- sample is provided, by the standard spectrum collection to becoming bar length, equation parameter is solved, optimum seeks value and vigour is soft
Process, the length scanning error that monochrome correction instrument or spectrogrph raster scan mechanism are caused is repaiied by mechanical position tolerances.
2. according to the bearing calibration of the monochromator scanning wavelength mechanical position tolerances equation described in claim 1, it is characterised in that
Monochromator scanning wavelength mechanical position tolerances equation is：
In formula：λ is standard wave length, and Δ λ is wavelength error：
Δ λ=λ0-λ (2)
In formula：λ0For the corresponding monochromator output wavelength of standard wave length；
In formula 1：K is beam splitting system mechanical position tolerances coefficient：
D is grating pitch, α0For the angle theoretical value of grating incident angle and emergent ray, L0For fork theoretical length, θ is roller
Steering error angle, i.e. angle of the fork roller spigot surface with respect to leading screw axis vertical direction；α be grating angle parameter, a=
2dcos α, wherein：α is the angle actual value of grating incident angle and emergent ray；L is the actual length of fork；γ=β-θ, its
In：β is light zero position error angle, and θ is roller steering error angle；N is that bar length adjusts ratio,In formula：L ' is change or school
Oscillating bar length after just, L are the oscillating bar length under system debug original state；M is initial wavelength setting value.
3. according to the bearing calibration of the monochromator scanning wavelength mechanical position tolerances equation described in claim 1, it is characterised in that
Comprise the following steps：
A, acquisition standard wave length：Standard wave length λ is obtained using standard light source or standard samplej, j 2, the selection of wavelength are wanted and instrument
The wavelength accuracy and scope of device matches；
B, standard spectrum collection：Experiment porch is built, the oscillating bar length for adjusting raster scan mechanism is respectively L ' and L, regulated quantity
For Δ L0=L '-L, the long ratio of the corresponding bars of oscillating bar length L ' are n0, the corresponding bar length of L compares 1, carries out standard light source or standard sample
Spectral scan, obtain standard spectrum gathered data；
C, data processing：The peak of the spectral scan data of extraction standard light source or standard sample, obtains in scan data
Corresponding output wave long value λ for being no less than four of standard wave length0i, calculate its difference DELTA λ with corresponding standard wave length0i=λ0i-
λi, i=1,2,3,4 ..., as scanning wavelength error；
D, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1～4) and corresponding bar length are than substituting into mechanical position tolerances equation 1, connection
Vertical four parameters for solving determination error equation：Adjust before grating angle parameter a, error angle γ, bar length and compare n0, beam splitting system
Mechanical position tolerances coefficient k and product kL of oscillating bar length L；
(2) according to the oscillating bar length regulated quantity Δ L of step b0For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) 4 gained oscillating bar length L of gained kL and formula is solved equation according to step d (1), calculates k value；
E, error assessment：The parameter that step d is tried to achieve substitutes into equation 1, tries to achieve in the wave-length coverage of monochromator or spectral instrument
The maximum Δ λ of instrument wavelength errormaxIf, Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Adjustment ginseng is otherwise needed
Number m and n, goes to step f；
F, optimum are sought value and determine adjustment amount：The solution value of four parameters a, k of step d acquisition, L, γ is substituted into mechanical location to miss
Eikonal equation formula (1), with n and λ as independent variable, Δ λ as dependent variable, calculate λ in instrument wave-length coverage, when n takes 0.9～1.1 model
The maximum deviation Δ λ of Δ λ when enclosing interior different valuemaxWith average value Δ λmean；Choose all Δ λmaxIn the corresponding n values of minima
Compare n as optimum bar lengthop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop；
Parameter adjusted by g, hardware：Adjustment scanning oscillating bar length in instrument hardware, with length L that regulated quantity Δ L adjusts fork：
Δ L=(nop-1)L； (5)
H, software correction：It is m- Δ λ to revise initial wavelength on instrument softwaremeanop, complete the light zero error of actual monochromator
Correct, parameter m now obtained in wavelength error equation 1 is：
m(new)=m(old)-Δλmeanop； (6)
I, return to step b
If repeatedly adjusting the requirement that can not still meet instrument wavelength accuracy, in specification error equation, a, k, L, γ parameter is not
Reasonable or Δ λ, λ data value error is larger, it is considered to redesign the value of a, k, L, γ parameter or adjustment Δ λ, λ data.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106895918A (en) * | 2017-04-26 | 2017-06-27 | 吉林大学 | Wavelength equation parameter population and most the spectrometer wavelength bearing calibration of value optimizing |
| CN108956554A (en) * | 2018-05-18 | 2018-12-07 | 吉林大学 | The method for wavelength calibration of Atomic Fluorescence Spectrometer based on digital micromirror array |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0344783A2 (en) * | 1988-06-02 | 1989-12-06 | The Perkin-Elmer Corporation | Monochromator drift compensation |
| CN203519163U (en) * | 2013-09-06 | 2014-04-02 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instrument |
| CN104655273A (en) * | 2013-11-21 | 2015-05-27 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instruments |
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2016
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0344783A2 (en) * | 1988-06-02 | 1989-12-06 | The Perkin-Elmer Corporation | Monochromator drift compensation |
| CN203519163U (en) * | 2013-09-06 | 2014-04-02 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instrument |
| CN104655273A (en) * | 2013-11-21 | 2015-05-27 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instruments |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106895918A (en) * | 2017-04-26 | 2017-06-27 | 吉林大学 | Wavelength equation parameter population and most the spectrometer wavelength bearing calibration of value optimizing |
| CN106895918B (en) * | 2017-04-26 | 2018-01-30 | 吉林大学 | Wavelength equation parameter population and the spectrometer wavelength bearing calibration for being most worth optimizing |
| CN108956554A (en) * | 2018-05-18 | 2018-12-07 | 吉林大学 | The method for wavelength calibration of Atomic Fluorescence Spectrometer based on digital micromirror array |
| CN108956554B (en) * | 2018-05-18 | 2020-09-29 | 吉林大学 | Wavelength calibration method of atomic fluorescence spectrometer based on digital micromirror array |
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