CN106500839B - The bearing calibration of monochromator scanning wavelength mechanical position tolerances - Google Patents
The bearing calibration of monochromator scanning wavelength mechanical position tolerances Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The present invention relates to a kind of bearing calibration of monochromator scanning wavelength mechanical position tolerances equation, including the standard spectrum provided with standard sources or standard sample, by the way that the standard spectrum grown to becoming bar gathers, equation parameter solves, optimal seeks value and vigour is soft repaiies process, monochrome correction instrument or spectrometer raster scan mechanism the length scanning error as caused by mechanical position tolerances.Using a kind of optimal method sought value and determine optimal bar length ratio and amendment initial wavelength, effective correction has been carried out to the scanning wavelength error of grating sine sweep type monochromator or spectrometer.Initial wavelength is corrected on software, so as to compensate monochromator scanning mechanical position tolerances, solve the problems, such as that the raster scan mechanism of monochromator length scanning error caused by light zero position error and roller steering error is big, instrument wavelength accuracy can not be met, improve the accuracy of instrument wavelength.This method software and hardware is combined, simple and easy, wavelength amendment when being debugged suitable for monochromator or the spectrometer examination and test of products.
Description
Technical field
The present invention relates to a kind of software and hardware of monochromator scanning mechanical position tolerances to be combined bearing calibration, more particularly, to
The monochromator of grating sine sweep type or the bearing calibration of spectrometer wavelength error.
Background technology
The scanning transmission mechanism of raster scan type monochromator uses precision lead screw nut, the sine mechanism of swing link transmission more,
Under driving stepper motor, leading screw rotation, nut movement, nut, which is oriented to, promotes roller movement, and band driven fork is swung, and makes monochromator
Grating continuously rotate, the monochromatic light of monochromator output wavelength linear change.
The alignment error of raster scan type monochromator sweep mechanism includes light zero position error and swing rod roller steering error.
Light zero position refers to the position of monochromator output zero order light, and now the plane diffraction grating normal of monochromator and beam splitting system are incident
The Bisector of angle of light and diffracted ray (being hereinafter referred to as divided bisector) overlaps, the swing rod central axis interlocked with grating
In the position of leading screw axis.When light zero position is correct, the moving direction of swing rod roller require down-feed screw axis or parallel to
Swing rod center line during light zero, to ensure the linear pass of corner of the wavelength and stepper motor of the output of raster scan type monochromator
System.When monochromator exist light zero position error or (and) swing rod roller steering error when, i.e., grating normal with light splitting bisector not
Overlap (the two angle is referred to as light zero position error angle), or (and) the moving direction out of plumb of swing rod roller and leading screw axis (pendulum
The moving direction of bar roller is referred to as roller steering error angle with the angle of leading screw axis vertical direction), the wavelength of monochromator output
It can not ensure linear with the corner of stepper motor, cause monochromator output wavelength and design load (Wavelength design value and step
The corner of stepper motor is linear) between error, influence the accuracy of monochromator wavelength.
Bearing calibration for raster scan type monochromator light zero position error and roller steering error has not yet to see phase
The report of pass.The bag of Shanghai measurement technology research institute is studied in the text of error analysis one of grating monochromator spectral scanning mechanisms,
Theory analysis has been carried out for the error of sine mechanism, but without the bearing calibration for proposing error.The present invention is based on foundation
The mechanical position tolerances equation of grating sine sweep type monochromator, and propose that a kind of equation variable element solves optimizing and determines optimal adjust
Section amount and compensation rate, implement the method for correction by hardware adjustments, software correction.
The content of the invention
The purpose of the present invention is that for above-mentioned the deficiencies in the prior art, there is provided one kind is based on mechanical position tolerances equation
Variable element solves optimizing, the soft wavelength calibration method repaiied of vigour, so as to solve the raster scan mechanism of monochromator due to light zero-bit
Put that length scanning error caused by error and roller steering error is big, can not meet the problem of instrument wavelength accuracy, improve instrument
The bearing calibration of the monochromator scanning wavelength mechanical position tolerances equation of wavelength accuracy.
The purpose of the present invention is achieved through the following technical solutions：
A kind of bearing calibration of monochromator scanning wavelength mechanical position tolerances equation, including with standard sources or standard sample
The standard spectrum of offer, by the way that the standard spectrum grown to becoming bar gathers, equation parameter solves, optimal seeks value and vigour is soft repaiied
Journey, monochrome correction instrument or spectrometer raster scan mechanism the length scanning error as caused by mechanical position tolerances.
Monochromator scanning wavelength mechanical position tolerances equation is：
In formula：λ is standard wave length, and Δ λ is wavelength error：
Δ λ=λ0-λ (2)
In formula：λ0For monochromator output wavelength corresponding to standard wave length；
In formula 1：K is beam splitting system mechanical position tolerances coefficient：
D is grating pitch, α0For the angle theoretical value of grating incident angle and emergent ray, L0For swing rod theoretical length, θ is
Roller steering error angle, i.e. angle of the swing rod roller spigot surface with respect to leading screw axis vertical direction；α is grating angle parameter, a=
2d cos α, wherein：α is the angle actual value of grating incident angle and emergent ray；L is the actual length of swing rod；γ=β-θ, its
In：β is light zero position error angle, and θ is roller steering error angle；N is bar length regulation ratio,In formula：L ' is change or school
Oscillating bar length after just, L are the oscillating bar length under system debug original state；M is initial wavelength setting value.
The bearing calibration of monochromator scanning wavelength mechanical position tolerances equation, comprises the following steps：
A, standard wave length is obtained：Standard wave length λ is obtained using standard sources or standard samplej, j≤2, the selection of wavelength will
Match with the wavelength accuracy and scope of instrument；
B, standard spectrum gathers：Experiment porch is built, the oscillating bar length for adjusting raster scan mechanism is respectively L ' and L, is adjusted
Section amount is Δ L0=L '-L, bar length ratio is n corresponding to oscillating bar length L '0, bar length ratio 1, carries out standard sources or standard corresponding to L
The spectral scan of sample, obtain standard spectrum gathered data；
C, data processing：The peak of the spectral scan data of extraction standard light source or standard sample, obtain scanning number
According to the output wave long value λ that four are no less than corresponding to Plays wavelength0i, calculate its difference DELTA λ with corresponding standard wave length0i=
λ0i-λi, i=1,2,3,4 ..., as scanning wavelength error；
D, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1~4) and corresponding bar length are than substituting into mechanical position tolerances equation
1, simultaneous solution determines four parameters of error equation：N is compared in regulation before grating angle parameter a, error angle γ, bar length0, light splitting
System mechanics position error coefficient k and oscillating bar length L product kL；
(2) according to step b oscillating bar length regulated quantity Δ L0For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) the gained kL and gained oscillating bar length L of formula 4 is solved equation according to step d (1), calculates to obtain k values；
E, error assessment：The parameter that step d is tried to achieve substitutes into equation 1, in the wave-length coverage of monochromator or spectral instrument
Try to achieve the maximum Δ λ of instrument wavelength errormaxIf Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need to adjust
Whole parameter m and n, goes to step f；
F, optimal value of seeking determines adjustment amount：Step d four parameters a, k, L, γ obtained solution value is substituted into mechanical position
Put error equation (1), be dependent variable by independent variable, Δ λ of n and λ, calculate λ in instrument wave-length coverage, when n takes 0.9~
In the range of 1.1 during different value Δ λ maximum deviation Δ λmaxWith average value Δ λmean；Choose all Δ λmaxIn minimum value it is corresponding
N values as optimal bar length compare nop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop；
G, hardware adjusts parameter：The adjustment scanning oscillating bar length in instrument hardware, the length L of swing rod is adjusted with regulated quantity Δ L：
Δ L=(nop-1)L； (5)
H, software correction：It is m- Δs λ that initial wavelength is corrected on instrument softwaremeanop, the light zero for completing actual monochromator misses
The correction of difference, the parameter m now obtained in wavelength error equation 1 are：
m(new)=m(old)-Δλmeanop； (6)
I, return to step b
If the requirement of instrument wavelength accuracy can not still be met by repeatedly adjusting, a, k, L, γ join in specification error equation
Unreasonable or Δ λ, λ the data value error of number is larger, considers to redesign a, k, L, γ parameter or adjusts taking for Δ λ, λ data
Value.
Beneficial effect：The present invention is solved based on mechanical position tolerances equation parameter, is determined most using a kind of optimal value of seeking
The method of excellent bar length ratio and amendment initial wavelength, is carried out to the scanning wavelength error of grating sine sweep type monochromator or spectrometer
Effective correction.This method software and hardware is combined, simple and easy, when being debugged suitable for monochromator or the spectrometer examination and test of products
Wavelength amendment.
Brief description of the drawings
The light splitting sweep mechanism mechanical position tolerances schematic diagram of Fig. 1 gratings sine sweep type monochromator or spectrometer
The light splitting sweep mechanism structure chart of Fig. 2 gratings sine sweep type monochromator or spectrometer
1- entrance slit 2- collimating mirror 3- focus lamp 4- exit slit 5- grating 6- axle 7- spring 8- swing rods 9-
The long regulating bolt 15- rollers guide pad 16- stepper motors of nut 10- leading screw 11- stage clip 12- roller 13- axle 14- bars
17- electric machine support 18- shaft coupling 19- track base 20- line slideway 21- bearings and support 22- bottom plates
Fig. 3 standard sources spectral measurement experiment porch block diagrams
The bearing calibration flow chart of Fig. 4 monochromator scanning wavelength mechanical position tolerances
Fig. 5 grating sine sweep type spectrometer architecture block diagrams
Embodiment：
1~4 the present invention is further detailed explanation below in conjunction with the accompanying drawings.
The present invention mechanical position tolerances equation be according to the machine driving relation of raster scan type monochromator sweep mechanism,
The equation established between light zero position error and roller steering error and instrument parameter (see Fig. 1), wavelength error：
In formula：Δ λ is wavelength error：
Δ λ=λ0-λ (2)
Wherein：λ is standard wave length's (i.e. actual wavelength), λ0For (the i.e. theoretical ripple of instrument output wavelength corresponding to standard wave length
Long or design wavelength).
K is beam splitting system mechanical position tolerances coefficient：
Wherein：D is grating pitch, α0For the angle theoretical value of grating incident angle and emergent ray, L0It is theoretical long for swing rod
Degree, θ is roller steering error angle, i.e. angle of the swing rod roller spigot surface with respect to leading screw axis vertical direction；
α is grating angle parameter, a=2d cos α, wherein：α is the angle actual value of grating incident angle and emergent ray；
The physical length of swing rod when L is system debug original state；
γ=β-θ, wherein：β is light zero position error angle, and θ is roller steering error angle；
M is that (this is known quantity to current initial wavelength setting value, if unknown, can be set to 0)；
N is bar length regulation ratio,Wherein：L ' is the oscillating bar length after changing or correcting, and L is that system debug is initial
Oscillating bar length under state.
The method of the present invention becomes length parameters solution, optimizing using mechanical position tolerances equation, determines optimal adjusting parameters,
And realized in the method for hardware adjustment, software correction.Step is as follows：
1st, standard wave length is obtained：Standard wave length λ is obtained using standard sources or standard samplei(i is not less than 2), pay attention to ripple
Long selection will match with the wavelength accuracy and scope of instrument.
2nd, standard spectrum gathers：Experiment porch is built, the oscillating bar length for adjusting raster scan mechanism is respectively L ' and L, is adjusted
Section amount is Δ L0=L '-L.Bar length ratio is n corresponding to oscillating bar length L '0, bar length ratio 1, carries out standard sources or standard corresponding to L
The spectral scan of sample, obtain standard spectrum gathered data.
3rd, data processing：The peak of the spectral scan data of extraction standard light source or standard sample, obtain scanning number
According to the output wave long value λ that 4 are no less than corresponding to Plays wavelength0i, calculate its difference DELTA λ with corresponding standard wave length0i=
λ0i-λi(i=1,2,3,4 ...), as scanning wavelength error.
4th, parametric solution：
(1) solve equation：By four groups of Δ λ0i、λi(i=1~4) and corresponding bar length are than substituting into mechanical position tolerances equation (formula
1), simultaneous solution determines 4 parameters of error equation：N is compared in regulation before grating angle parameter a, error angle γ, bar length0, light splitting
System mechanics position error coefficient k and oscillating bar length L product kL.
(2) according to the oscillating bar length regulated quantity Δ L of step 20For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) according to the gained kL and gained oscillating bar length L of formula 4 is solved equation, k values are calculated to obtain.
5th, error assessment：The parameter that step 4 is tried to achieve substitutes into equation (1), in the wave-length coverage of monochromator or spectral instrument
Try to achieve the maximum Δ λ of instrument wavelength errormaxIf Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need to adjust
Whole parameter m and n, goes to step 6.
6th, optimal value of seeking determines adjustment amount：4 parameters a, k, L, γ that step 4 is obtained solution value substitute into mechanical location
Error equation (1), using n, λ as independent variable, λ is calculated in instrument wave-length coverage, n takes certain limit such as in [0.9,1.1]
Δ λ maximum deviation Δ λ during different valuemaxWith average value Δ λmean.Choose all Δ λmaxIn minimum value corresponding to n value conducts
Optimal bar length compares nop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop。
7th, hardware adjusts parameter：The adjustment scanning oscillating bar length in instrument hardware, the length L of swing rod is adjusted with regulated quantity Δ L：
Δ L=(nop-1)L (5)
8th, software correction：It is m- Δs λ that initial wavelength is corrected on instrument softwaremeanop, the light zero for completing actual monochromator misses
The correction of difference.The parameter m now obtained in wavelength error equation (formula 1) is：
m(new)=m(old)-Δλmeanop (6)
9th, return to step 2.
If the requirement of instrument wavelength accuracy can not still be met by repeatedly adjusting, a, k, L, γ etc. in specification error equation
Parameter is unreasonable or Δ λ and λ data value error is larger, considers to redesign or adjust the value of data.
The light splitting scanning transmission mechanism of grating sine sweep type monochromator or spectrometer is precision lead screw as illustrated in fig. 1 and 2
The sine mechanism of nut, swing link transmission.Entrance slit 1, collimating mirror 2, focus lamp 3, exit slit 4 are fixed on by connector
On bottom plate 22, leading screw 10 is consolidated by bearing and support 21, stepper motor 16 by electric machine support 17, line slideway 20 with screw
Due on bottom plate 22.The one end of swing rod 8 is fixed in the rotary shaft 6 of grating 5 in beam splitting system, and the other end connects roller by axle 13
12.Nut 9 on leading screw 10 is fixedly connected with track base 19, it is done straight line fortune along line slideway 20 when leading screw 10 rotates
It is dynamic.Spring 7 is fixed between bottom plate 22 and swing rod 8, the roller 12 on 8 is contacted with the roller guide pad 15 on nut 8.Monochromator
Or spectrometer is connected using stepper motor 16 by shaft coupling 18 with leading screw 10, driving leading screw 10 rotates, and makes the movement of nut 9 and band
Dynamic roller 12 makes swing rod 8 rotate different angles with the grating 5 on moving axis 6.So that the complex light warp injected from entrance slit 1
Collimating mirror 2, grating 5, focus lamp 3, are projected with the monochromatic light of different wave length from exit slit 4, realize monochromator or spectrometer
Light splitting.Stage clip 11, axle 13 and the long regulating bolt 14 of bar are arranged in the regulating tank on swing rod 8, are adjusted by the long regulating bolt 14 of bar
Save the length of swing rod.
Embodiment 1：
Sine sweep type monochromator mechanical position tolerances correct.
Build spectral scan measurement experiment platform as shown in figure 3, including standard sources, spectral scan control measuring system and
Host computer forms.Standard sources can use laser, mercury lamp etc., can provide corresponding standard in the spectral region of monochromator
Wavelength, it is fixed at monochromator or the entrance slit of spectrometer beam splitting system, its incident ray is full of monochromator or light
The collimating mirror of spectrometer beam splitting system.Spectral scan control measuring system be located at monochromator exit slit, control stepper motor with
Certain continuous rotational angle in angle interval, monochromator is set to export the optical signal of the different wave length of certain wavelength interval and scope；
Experience this signal simultaneously and be converted to data signal, host computer is transmitted to by data-interface；So as to obtain a wavelength range
Spectroscopic data.Host computer obtains spectroscopic data by software using PC and carries out data processing.Measured using spectral scan real
Test bearing calibration implementation process such as Fig. 4 institutes that platform carries out wavelength error caused by monochromator sweep mechanism mechanical position tolerances
Show, including：
1st, standard wave length is determined：With the characteristic wavelength of one or more standard sources composed with different known features and its
Wavelength is as standard wave length λ corresponding to advanced spectrumj(j is not less than 2), it is ensured that standard wave length's number is no less than 2, and makes it most
The spectral region of amount covering monochromator, and notice that the selection of standard wave length's value will match with the wavelength accuracy of instrument.
2nd, standard spectrum gathers：Standard sources is opened, if now the bar length ratio of raster scan mechanism swing rod is n0.Enter rower
The scanning survey of quasi- light source light spectrum, the bar length ratio for obtaining standard spectrum in raster scan mechanism swing rod is n0When gathered data.Adjust
The oscillating bar length of raster scan mechanism is saved, regulated quantity is Δ L0If now the bar length of raster scan mechanism swing rod is than being 1, again
Scanning standard light source, it is a length of to obtain standard spectrum gathered data, bar now when the bar length of raster scan mechanism swing rod is than being 1
L。
3rd, data processing：The peak of extraction standard light source light spectrum data, it is corresponding to obtain spectroscopic data Plays wavelength
Be no less than the output wave long value λ of four0i, calculate its difference DELTA λ with corresponding standard wave length0i=λ0i-λi(i=1,2,3,
4 ...), as scanning wavelength error.
4th, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1~4) and corresponding bar length are than substituting into mechanical position tolerances equation (formula
1), simultaneous solution determines 4 parameters of error equation：N is compared in regulation before grating angle parameter a, error angle γ, bar length0, light splitting
System mechanics position error coefficient k and oscillating bar length L product kL.
(2) according to the oscillating bar length regulated quantity Δ L of step 20For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) the gained kL and gained oscillating bar length L of formula 4 is solved equation according to step 4 (1), calculates to obtain k values.
5th, error assessment：The parameter that above-mentioned steps 4 are tried to achieve substitutes into equation (1), in monochromator or the wavelength of spectral instrument
Scope tries to achieve the maximum Δ λ of instrument wavelength errormaxIf Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need
Adjusting parameter m and n are wanted, goes to step 6.
6th, optimal value of seeking determines adjustment amount：4 parameters a, k, L, γ that step 4 is obtained solution value substitute into mechanical location
Error equation (1), it is dependent variable by independent variable, Δ λ of n and λ, calculates λ in instrument wave-length coverage, n takes certain limit such as
Δ λ maximum deviation Δ λ during different value in [0.9,1.1]maxWith average value Δ λmean.Choose all Δ λmaxIn minimum value
Corresponding n values compare n as optimal bar lengthop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop。
6th, hardware adjustment：The adjustment scanning oscillating bar length in instrument hardware, the length L of swing rod is adjusted with regulated quantity Δ L：
Δ L=(nop-1)L (5)
8th, software correction：It is m- Δs λ that initial wavelength is corrected on softwaremeanop, complete the light zero error of actual monochromator
Correction.The parameter m now obtained in wavelength error equation (formula 1) is：
m(new)=m(old)-Δλmeanop (6)
9th, return to step 2.
If the requirement of instrument wavelength accuracy can not still be met by repeatedly adjusting, a, k, L, γ etc. in specification error equation
Parameter is unreasonable or Δ λ and λ data value error is larger, considers to redesign or adjust the value of data.
Embodiment 2：
Sine sweep type spectrometer mechanical position tolerances correct.
Sine sweep type spectrometer architecture is as shown in figure 5, light source and modulator are fixed on beam splitting system (i.e. monochromator)
Outside entrance slit, and light source and entrance slit be into object-image relation, detecting and controlling system respectively with beam splitting system, sensor assembly,
And host computer connection, while the sampled device of beam splitting system is connected composition spectrometer with sensor assembly.The structure of beam splitting system
Use sine sweep mechanism as shown in Figure 1.
For the bearing calibration of wavelength error caused by sine sweep type spectrometer light splitting sweep mechanism mechanical position tolerances
Implementation process as shown in figure 4, including：
1st, standard wave length is determined：Made with the characteristic wavelength of one or more standard samples with different known features wavelength
For standard wave length λj(j is not less than 2), it is ensured that standard wave length's number is no less than 2, and it is covered the spectrum of spectrometer as far as possible
Scope, and notice that the selection of wavelength value will match with the wavelength accuracy of instrument.
2nd, standard spectrum gathers：The oscillating bar length of raster scan mechanism is adjusted, regulated quantity is Δ L0, in 2 different pendulum
(bar length ratio is n corresponding to respectively under pole length L ' and L0With 1), the scanning survey of absorbance spectrum is carried out to standard sample, is obtained
Obtain standard spectrum gathered data.
3rd, data processing：The peak of extraction standard sample spectral data, it is corresponding to obtain spectroscopic data Plays wavelength
Be no less than the output wave long value λ of 440i, calculate its difference DELTA λ with corresponding standard wave length0i=λ0i-λi(i=1,2,3,
4 ...), as scanning wavelength error.
4th, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1~4) and corresponding bar length are than substituting into mechanical position tolerances equation (formula
1), simultaneous solution determines 4 parameters of error equation：N is compared in regulation before grating angle parameter a, error angle γ, bar length0, light splitting
System mechanics position error coefficient k and oscillating bar length L product kL.
(2) according to the oscillating bar length regulated quantity Δ L of step 20For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) the gained kL and gained oscillating bar length L of formula 4 is solved equation according to step 4 (1), k values are sought in calculating.
5th, error assessment：The parameter that above-mentioned steps are tried to achieve substitutes into equation (1), in monochromator or the wavelength model of spectral instrument
Enclose the maximum Δ λ for trying to achieve instrument wavelength errormaxIf Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise need
Adjusting parameter m and n, go to step 6.
6th, optimal value of seeking determines adjustment amount：Four parameters a, k, L, γ that step 4 is obtained solution value substitute into mechanical position
Error equation (1) is put, is dependent variable by independent variable, Δ λ of n and λ, calculates λ in instrument wave-length coverage, n takes certain limit
Δ λ maximum deviation Δ λ during such as different value in [0.9,1.1]maxWith average value Δ λmean.Choose all Δ λmaxIn minimum
N values corresponding to value compare n as optimal bar lengthop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop。
7th, hardware adjustment：The adjustment scanning oscillating bar length in instrument hardware, the length L of swing rod is adjusted with regulated quantity Δ L：
Δ L=(nop-1)L (5)
8th, software correction：It is m- Δs λ that initial wavelength is corrected on instrument softwaremeanop, complete actual spectrum instrument mechanical location
The correction of error.The parameter m now obtained in wavelength error equation (1 formula) is：
m(new)=m(old)-Δλmeanop (6)
9th, return to step 2.
If the requirement of instrument wavelength accuracy can not still be met by repeatedly adjusting, a, k, L, γ in specification error equation
Or Δ λ unreasonable etc. parameter and λ data value errors are larger, consider to redesign or adjust the value of data.
Claims (2)
1. a kind of bearing calibration of monochromator scanning wavelength mechanical position tolerances, it is characterised in that including with standard sources or mark
The standard spectrum that quasi- sample provides, gathered by the standard spectrum grown to becoming bar, monochromator scanning wavelength mechanical position tolerances side
Journey parametric solution, it is optimal seek value and vigour is soft repaiies process, monochrome correction instrument or spectrometer raster scan mechanism are missed by mechanical location
Length scanning error caused by difference,
Monochromator scanning wavelength mechanical position tolerances equation is：
In formula：λ is standard wave length, and Δ λ is wavelength error：
Δ λ=λ0-λ (2)
In formula：λ0For monochromator output wavelength corresponding to standard wave length；
In formula 1：K is beam splitting system mechanical position tolerances coefficient：
D is grating pitch, α0For the angle theoretical value of grating incident angle and emergent ray, L0For swing rod theoretical length, θ is roller
Steering error angle, i.e. angle of the swing rod roller spigot surface with respect to leading screw axis vertical direction；α is grating angle parameter, a=2d
Cos α, wherein：α is the angle actual value of grating incident angle and emergent ray；L is the actual length of swing rod；γ=β-θ, wherein：
β is light zero position error angle, and θ is roller steering error angle；N is bar length regulation ratio,In formula：L ' is change or correction
Oscillating bar length afterwards, L are the oscillating bar length under system debug original state；M is initial wavelength setting value.
2. according to the bearing calibration of the monochromator scanning wavelength mechanical position tolerances described in claim 1, it is characterised in that including
Following steps：
A, standard wave length is obtained：Standard wave length λ is obtained using standard sources or standard samplej, j≤2, the selection of wavelength is wanted and instrument
The wavelength accuracy and scope of device match；
B, standard spectrum gathers：Experiment porch is built, the oscillating bar length for adjusting raster scan mechanism is respectively L ' and L, regulated quantity
For Δ L0=L '-L, bar length ratio is n corresponding to oscillating bar length L '0, bar length ratio 1, carries out standard sources or standard sample corresponding to L
Spectral scan, obtain standard spectrum gathered data；
C, data processing：The peak of the spectral scan data of extraction standard light source or standard sample, obtain in scan data
The output wave long value λ of four is no less than corresponding to standard wave length0i, calculate its difference DELTA λ with corresponding standard wave length0i=λ0i-
λi, i=1,2,3,4 ..., as scanning wavelength error；
D, parametric solution：
(1) solve equation：By four couples of Δ λ0i、λi(i=1~4) and corresponding bar length are than substituting into mechanical position tolerances equation 1, connection
It is vertical to solve four parameters for determining error equation：N is compared in regulation before grating angle parameter a, error angle γ, bar length0, beam splitting system
Mechanical position tolerances coefficient k and oscillating bar length L product kL；
(2) according to step b oscillating bar length regulated quantity Δ L0For：
ΔL0=L '-L=(n0-1)L
Seek the long L of bar：
(3) the gained kL and gained oscillating bar length L of formula 4 is solved equation according to step d (1), calculates to obtain k values；
E, error assessment：The parameter that step d is tried to achieve substitutes into equation 1, is tried to achieve in the wave-length coverage of monochromator or spectral instrument
The maximum Δ λ of instrument wavelength errormaxIf Δ λmaxNo more than instrument wavelength accuracy index, then terminate；Otherwise adjustment is needed to join
Number m and n, goes to step f；
F, optimal value of seeking determines adjustment amount：Step d four parameters a, k, L, γ obtained solution value is substituted into mechanical location to miss
Eikonal equation formula (1), it is dependent variable by independent variable, Δ λ of n and λ, λ is calculated in instrument wave-length coverage, when n takes 0.9~1.1 model
Δ λ maximum deviation Δ λ when enclosing interior different valuemaxWith average value Δ λmean；Choose all Δ λmaxIn minimum value corresponding to n values
Compare n as optimal bar lengthop, corresponding Δ λmeanValue is used as initial wavelength correction value Δ λmeanop；
G, hardware adjusts parameter：The adjustment scanning oscillating bar length in instrument hardware, the length L of swing rod is adjusted with regulated quantity Δ L：
Δ L=(nop-1)L； (5)
H, software correction：It is m- Δs λ that initial wavelength is corrected on instrument softwaremeanop, complete the light zero error of actual monochromator
Correction, the parameter m now obtained in wavelength error equation 1 are：
m(new)=m(old)-Δλmeanop； (6)
I, return to step b
If the requirement of instrument wavelength accuracy can not still be met by repeatedly adjusting, in specification error equation, a, k, L, γ parameter is not
Rationally or Δ λ, λ data value error is larger, considers to redesign a, k, L, γ parameter or adjusts the value of Δ λ, λ data.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0344783A2 (en) * | 1988-06-02 | 1989-12-06 | The Perkin-Elmer Corporation | Monochromator drift compensation |
| CN203519163U (en) * | 2013-09-06 | 2014-04-02 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instrument |
| CN104655273A (en) * | 2013-11-21 | 2015-05-27 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instruments |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0344783A2 (en) * | 1988-06-02 | 1989-12-06 | The Perkin-Elmer Corporation | Monochromator drift compensation |
| CN203519163U (en) * | 2013-09-06 | 2014-04-02 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instrument |
| CN104655273A (en) * | 2013-11-21 | 2015-05-27 | 天津港东科技发展股份有限公司 | Scanning system of optical spectrum instruments |
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