A kind of mutual capacitance touchscreens functional sheet and preparation method thereof
Technical field
The present invention relates to a kind of mutual capacitance touchscreens functional sheet and preparation method thereof, for handset touch panel etc., belong to tactile
Touch screen research field.
Background technology
Capacitance touch screen is operated using the electric current sensing of human body, when finger touches on the metal layer, due to human body
Electric field, user and touch screen surface are formed with a coupled capacitor, and for high frequency electric, electric capacity is direct conductor, can shadow
Ring circuit integral capacitor characteristic.The species of capacitance plate is classified in the way of inductance capacitance, can be divided into surface capacitance type and projection electricity
Appearance formula, projection-type capacitive touch screen can be divided into self-capacitance and mutual capacitance according to the mode of scanning.Self-capacitance scanning X/Y electrode and ground
The electric capacity constituting, mutual capacitance scans the electric capacity between X/Y electrode.
Existing projecting type capacitor screen needs one or more etched ITO layer, and ITO layer is passed through etching and formed multiple water
Gentle vertical electrode, to be driven by a capacitive induction chip.This chip can transfer data to primary processor, also can be certainly
Oneself processes the XY shaft position of contact.When horizontal and vertical electrode is all driven by single-ended inducing method, i.e. a line and string
Drive circuit is identical, referred to as " single-ended " sensing, as self-capacitance.When an axle is driven by a set of AC signal, and pass through tactile
The response touching screen is then gone out by the electrode senses on other axles.This mode is referred to as " crossing formula " sensing, because electric field be enough to horizontal stroke
The mode worn is delivered to another electrode group (as arranged) by the dielectric layer of upper strata panel from an electric level group (as row), then for mutual
Electric capacity.Mutual capacitance touchscreens need not be calibrated with respect to self-capacitance touchscreen, and avoids " terrible point " effect, it is possible to achieve real
Multiple point touching.Meanwhile, mutual capacitance touchscreens are not subject to temperature, humidity, finger to moisten degree, body weight, ground degree of drying shadow
Ring, " drift " phenomenon will not be produced.
The transverse electrode of mutual capacitance touchscreens functional sheet and longitudinal electrode are made by ITO, typically optimum and normal
That sees has three kinds:1st, the PET film of single-layer double-side ITO structure, that is, as basement membrane, two sides is respectively provided with one layer of ITO to PET, two sides
ITO is fabricated to transverse electrode (X electrode) and longitudinal electrode (Y electrode) respectively;2nd, the PET film of mono-layer single-face ITO structure, typically will
ITO is etched to rhombus or triangle, by special structure, X and Y electrode is separated on each node, such as uses MEMS technology
Viaduct similar at node is set up;3rd, use the PET of dual-layer, single-sided ITO structure, need between PET and PET to use OCA adhesion.
So, mutual capacitance touchscreens functional sheet sweeps touch is exactly node capacitor, rather than electrode capacitance.
Mutual capacitance touchscreens functional sheet mainly has three kinds of production programs:
First, adopt the PET film of single-layer double-side ITO structure, tow sides ITO needs to process;
Due to the not bending resistance of ITO, and PET film material is very thin, and positive and negative ITO needs individually to add through twice
Work, operation is numerous and diverse, thus ITO injured is bad very high, and yields is low;Simultaneously because there being two-layer ITO, finished product holds during using very much
Easily because bending leads to dysfunction.
2nd, the PET of mono-layer single-face ITO structure adds metal and puts up a bridge;
Because metal bridging craft precision has high demands, difficult and not resistant to bending, the structure of metal bridging simultaneously is made on PET
Line experience effect is poor, makes the metal bright spot that can be seen that the inside during finished product
3rd, use the PET of dual-layer, single-sided ITO structure, need between PET and PET to use OCA adhesion;
Due to using double-layer PET, integral thickness is partially thick, and one side ITO structure PET with 50 the thinnest at present μ m thick is
Example, using double-layer PET, one layer of 50 μm of OCA of middle laminating, integral thickness reaches 150 μm, is 3 times of first two scheme thickness.
Content of the invention
Present invention aims to the deficiencies in the prior art, there is provided a kind of handling ease and the thinner mutual electricity of thickness
Hold touch screen function piece, further, this mutual capacitance touchscreens functional sheet more existing mutual capacitance touchscreens functional sheet bending resistance
Higher;
It is a further object of the present invention to provide the preparation method of above-mentioned mutual capacitance touchscreens functional sheet, the method processing technology
Simply, technological process is few, finished product line effect suitable with dual-layer, single-sided ITO structure effect in the case of, but thickness only have its 1/
3.
The purpose of the present invention to implement by the following technical programs:
A kind of mutual capacitance touchscreens functional sheet, including basement membrane, the IT0 being arranged on basement membrane drives layer, is arranged at ITO
Drive the sealing coat on layer, be arranged at the Graphene inductive layer on ITO driving layer, and be arranged at the guarantor on Graphene inductive layer
Shield glue-line;Described ITO drives the ito film that layer is patterning, and described Graphene inductive layer is the graphene film of patterning;Described
IT0 drives layer to be connected with capacitive sensing chip by wire respectively with Graphene inductive layer.
Preferably, described wire is located at the edge that IT0 drives layer, and part wire drives layer to fit with IT0 and draws and electricity
Hold induction chip to be directly connected to, part wire is separated with ITO, overlaps through sealing coat with Graphene inductive layer.
Preferably, the thickness of described Graphene inductive layer is 0.34nm.
Preferably, described ITO drives the thickness of layer is 50-200nm, for example:50nm、60nm、70nm、80nm、90nm、
100nm, 110nm, 120nm, 130nm, 140nm, 150nm, 160nm, 170nm, 180nm, 190nm, 200nm, etc..Excellent further
Select 150nm.
Preferably, the thickness of described sealing coat is 30-100nm, for example:30nm、40nm、50nm、60nm、70nm、80nm、
90nm, 100nm, etc..Preferably 50nm.
The thickness of described basement membrane and the thickness of described protection glue-line, enter according to the demand of mutual capacitance touchscreens functional sheet
Row adjustment.The present invention drives layer feature to can achieve below 50 μm of the thickness of protection glue-line according to Graphene.50 μm of protection glue-line
Thickness not only do not interfere with graphene film as the function of inductive layer, also achieve than existing mutual capacitance touchscreens functional sheet foot
Enough high sensitivity.
Preferably, the described line of induction adopts metal wire, more preferably AlMoAl, Cu line, most preferably Cu line.
Preferably, the thickness of described wire is 300-400nm.
Preferably, described ITO drives layer to adopt the ITO of monolayer.Exist because ITO must rely on basement membrane, basement membrane
Preferably employ PET film, therefore, when making, generally directly quoted using the PET film with ITO structure and carry out touch screen
Make.
Preferably, described Graphene inductive layer adopts the Graphene of monolayer or bilayer, preferred single layer Graphene.
Preferably, described sealing coat adopts the transparent insulation glue such as OC, SiO2, SiN, further preferably adopts SiO2.
Preferably, described protection glue-line adopts OCA transparent optical cement.
The preparation method of above-mentioned mutual capacitance touchscreens functional sheet, comprises the steps:
1) in the ito surface sputter layer of conductive material layer of the basement membrane with ITO, then pattern ito film and produce mutual tolerance
The ITO of formula touch screen drives layer and patterning conductive material layer to form wire;
2) drive whole face on layer to be coated with sealing coat in ITO, during coating, by wire and Graphene inductive layer lap position and
The empty avoiding of golden finger end;
3) the photoresistance pattern of inductive layer is made with photoresist on sealing coat;
4) transfer graphene on photoresistance pattern, and guarantee that Graphene is overlapped with wire;
5) step 3 is got rid of in etching) the middle photoresistance pattern being formed, the Graphene sensing of the Graphene formation patterning of reservation
Layer;
6) one layer of Protection glue of whole face laminating on Graphene inductive layer, cuts into small pieces and forms mutual capacitance touchscreens function
Piece.
Preferably, described step 1) in, the basement membrane with ITO one layer of Cu of ito surface sputter as conductive material layer.
Described step 1) in, the conductor width with Graphene inductive layer overlap joint that patterning conductive material layer is formed is to be connected with ITO
3-5 times of conductor width, most preferably 2.5 times.
Preferably, described step 3) in, the photoresistance pattern of induction channels is made by exposure technology.
The principle of the invention:
According to the preparation method of the present invention, longitudinal electrode (Y electrode) can will be turned to as ITO by ito film etched pattern
Drive layer, graphene film turns to transverse electrode (X electrode) by photoetching agent pattern and is used as Graphene inductive layer, each transverse electrode
It is induction channels, induction channels edge and ITO edge pass through metal wire (preferably Cu) and overlap, Y electrode and stone that ito film is formed
The sealing coat that the induction channels (X electrode) that black alkene is constituted are insulated separates, and Graphene inductive layer is protected with OCA glue, shape
Become complete mutual capacitance touchscreens functional sheet.
Beneficial effect of the present invention:The PET film of existing single-layer double-side ITO structure, in the upper sputter ITO of sealing coat (insulating barrier)
Success rate is low to lead to yield rate low, and sputter ITO layer sheet resistance out and transmitance are unable to reach requirement, present invention Graphene
Film replaces one layer of ITO, only need to easily transfer on sealing coat according to existing graphene film transfer method and can achieve, and sheet resistance and
Transmitance is guaranteed.It is described as follows:
1st, the inventive method, on the premise of ensureing line effect, can greatly reduce mutual capacitance touchscreens functional sheet overall thick
Degree, finished product line effect suitable with dual-layer, single-sided ITO structure effect in the case of, but thickness only have its 1/3.
2nd, the inventive method, with respect to traditional scheme one and two, is existing maturation process, production yield rate using technique
Height, long service life, image space case one will not easily occur reversely bending ITO during making and use, produce ITO fracture,
Thus forming dysfunction, and scheme two bridging technique, because PET is plastics, even if making finished product to there is also certain stretching
Property, bridging structure precision has high demands, and metal bridge is tiny is easily broken off it is easy to damaging during making and use and going out
, there is certain lacuna in appearance in existing dysfunction simultaneously.
3rd, more preferably, thickness is with respect to the electricity of dual-layer, single-sided ITO structure for the bending resistance of product mutual capacitance touchscreens of the present invention
Hold touch screen and decrease 2/3rds, the application of extension mutual capacitance touchscreens.ITO is not resistant to bending and stretches, and the bullet of Graphene
Property strains as 0.6%, and elongation strain is 6%, and single-layer graphene tensile strength is 150-180GPa, and Young's moduluss are 1TPa, this
Invention replaces ITO layer using graphene layer, improves the bending resistance of whole touch screen, extends answering of mutual capacitance touchscreens
With.
Figure of description
Fig. 1 is mutual capacitance touchscreens functional sheet cost schematic diagram of the present invention;
Fig. 2 is the schematic cross-section along A-A direction for the Fig. 1;
Fig. 3 drives layer schematic diagram for ITO of the present invention;
Fig. 4 is sealing coat schematic diagram of the present invention;
Fig. 5 is photoresistance pattern schematic diagram in present invention process;
Fig. 6 is Graphene inductive layer schematic diagram of the present invention.
Wherein, 1- substrate, 2-ITO drives layer, 21- longitudinal electrode (also referred to as Y electrode), 3- sealing coat, and 4- Graphene senses
Layer, 41- induction channels (also referred to as X electrode, transverse electrode), 42- photoresistance pattern, 5- protects glue-line, 6- plain conductor, 7- golden finger
End.
Specific embodiment
Below in conjunction with accompanying drawing, the preferred embodiments of the present invention are illustrated it will be appreciated that preferred reality described herein
Apply example to be merely to illustrate and explain the present invention, be not intended to limit the present invention.
Embodiment 1:
A kind of mutual capacitance touchscreens functional sheet, referring to shown in Fig. 1,2, whole mutual capacitance touchscreens functional sheet is transparent,
Each layer is transparent material and constitutes, and the black and white of in figure is only intended to clearly distinctly display the architectural feature of product.Mutually
Capacitance touch screen functional sheet includes basement membrane 1, IT0 driving layer 2, sealing coat 3, Graphene inductive layer 4 and protection glue-line 5, described
Basement membrane 1, IT0 drive layer 2, sealing coat 3, Graphene inductive layer 4 and protection glue-line 5 to fit tightly successively.Described ITO drives layer
2 is the ito film of patterning.Shown in Figure 3, the ito film of patterning forms longitudinal electrode 21, also referred to as Y electrode, in figure black
Position represents.Described Graphene inductive layer 4 is the graphene film of patterning, and shown in Figure 6, the graphene film of patterning is formed
Transverse electrode 41, also referred to as induction channels, X electrode.Described plain conductor 6 is used for the connection that ITO drives layer 2 and capacitive sensing chip
Conduction, and the connection conduction of Graphene inductive layer 4 and capacitive sensing chip.Described plain conductor 6 is located at IT0 and drives layer 2
Edge.Wherein, part wire is driven layer to fit and draw with IT0 and is directly connected to capacitive sensing chip, another part wire
One end is overlapped through sealing coat with Graphene inductive layer, and the other end drives layer edge separation with ITO, along ITO edge
Exist with ITO to draw at a certain distance outward and be connected with capacitive sensing chip.
The present embodiment adopts the setting of Graphene inductive layer, you can cleverly realize mutual capacitance touchscreens functional sheet of the present invention
The raising of bend-resistance, can effectively mitigate the technical purposes such as the flow process of preparation technology.
As the present embodiment further preferred embodiment, the present embodiment is refined to the material of each layer and thickness
Preferred version.The preferred 0.34nm of thickness of described Graphene inductive layer 4.It is 50-200nm that described ITO drives the thickness of layer 2,
For example:50nm、60nm、70nm、80nm、90nm、100nm、110nm、120nm、130nm、140nm、150nm、160nm、
170nm, 180nm, 190nm, 200nm, etc..Further preferably 150nm..The thickness of described sealing coat 3 is 30-100nm, for example:
30nm, 40nm, 50nm, 60nm, 70nm, 80nm, 90nm, 100nm, etc..Preferably 50nm.The thickness of described basement membrane and described
The thickness of protection glue-line, is adjusted according to the demand of mutual capacitance touchscreens functional sheet.The present invention drives layer special according to Graphene
Point can achieve below 50 μm of the thickness of protection glue-line.The thickness of 50 μm of protection glue-line does not only interfere with graphene film as sense
Answer the function of layer, also achieve the sufficiently high sensitivity than existing mutual capacitance touchscreens functional sheet.Described metal wire, preferably
AIMoAI, Cu line, most preferably Cu line.The thickness of the described line of induction is 300-400nm.Described ITO drives the ITO that layer is monolayer.
Exist because ITO must rely on basement membrane, basement membrane preferably employs PET film, therefore, when making, generally using with ITO knot
The PET film of structure directly quotes the making carrying out touch screen.Described Graphene inductive layer is monolayer or the bilayer of patterning
Graphene, preferred single layer Graphene.Described sealing coat adopts OC, SiO2, the transparent insulation glue such as SiN, it is preferred to use SiO2.Described
Protection glue-line preferably employs OCA transparent optical cement.The thickness of basement membrane (preferably employing PET) and protection glue-line (preferably employ
OCA) unrestricted choice different-thickness can be needed according to practical application, the feature no shadow to mutual capacitance touchscreens functional sheet of the present invention
Ring.
Embodiment 2:
The preparation method of mutual capacitance touchscreens functional sheet, comprises the steps:
1., by monolayer ITO (thickness is 250 μm) one layer of Cu of structure PET sputter, Cu THICKNESS CONTROL is in 300-400nm;So
Make mutual capacitance type touch screen ITO afterwards and drive layer 2 and its corresponding metal wire 6, as shown in figure 3, ITO patternization is constituted mutually after making
The Y electrode 21 of appearance formula touch screen;
2. shown in Figure 4, drive whole face on layer 2 to be coated with SiO in ITO2, SiO2Thickness 50 ± 10nm, constitutes sealing coat 3,
During coating, need to be by Graphene inductive layer and metal wire 6 lap position and golden finger end 7 empty avoiding;
3. on sealing coat, make the photoresistance pattern 42 of photoresist by exposure technology, as shown in figure 5, blank space represents
There is photoresist, black bar shaped represents unglazed photoresist, photoetching agent pattern thickness about 1000nm;
4. CVD is grown graphene film 4 to transfer on photoresistance pattern, and guarantee that graphene film 4 is overlapped with metal wire 6;
5. etch removing photoresistance film, remove the photoresistance pattern 42 being formed in the 3rd step, form the stone that patterned Graphene film is constituted
Black alkene inductive layer 4, the graphene film of reservation is induction channels 41, i.e. X electrode, as shown in figure 4, white bar shaped represents that sensing is logical
Road 41, is a layer graphene film, and black portions indicate no graphene film;
6. in one layer 50 μm of OCA of laminating, cut into small pieces and become mutual capacitance touchscreens functional sheet of the present invention, such as Fig. 1
Shown;
Embodiment 3:
The preparation method of mutual capacitance touchscreens functional sheet, with embodiment 1, difference is processing step:
1st, in step 1, one layer of AIMoAI of sputter is used for making the line of induction;
2nd, sealing coat adopts OC.
Embodiment 4:
The preparation method of mutual capacitance touchscreens functional sheet, with embodiment 1, difference is processing step:
In step 4, shift two-layer graphene film.
Embodiment 5:
The preparation method of mutual capacitance touchscreens functional sheet, with embodiment 1, difference is processing step:The thickness of ITO
Monolayer ITO thickness is 50 μm.
Embodiment 6:
The preparation method of mutual capacitance touchscreens functional sheet, with embodiment 1, difference is processing step:The thickness of ITO
Monolayer ITO thickness is 200 μm.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, although with reference to aforementioned reality
Apply example the present invention has been described in detail, for a person skilled in the art, it still can be to aforementioned each enforcement
Technical scheme described in example is modified, or carries out equivalent to wherein some technical characteristics.All essences in the present invention
Within god and principle, any modification, equivalent substitution and improvement made etc., should be included within the scope of the present invention.