CN106484205B - Mutual capacitance touch screen functional sheet and preparation method thereof - Google Patents

Mutual capacitance touch screen functional sheet and preparation method thereof Download PDF

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CN106484205B
CN106484205B CN201611227656.2A CN201611227656A CN106484205B CN 106484205 B CN106484205 B CN 106484205B CN 201611227656 A CN201611227656 A CN 201611227656A CN 106484205 B CN106484205 B CN 106484205B
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ito
graphene
touch screen
mutual capacitance
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CN106484205A (en
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袁凯
王炜
谭化兵
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Wuxi Sixth Element Electronic Film Technology Co ltd
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Changzhou Sixth Element Semiconductor Co ltd
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means

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Abstract

The invention discloses a mutual capacitance touch screen functional sheet and a preparation method thereof, wherein the structure of the mutual capacitance touch screen functional sheet comprises a substrate film, an IT0 driving layer arranged on the substrate film, an isolation layer arranged on an ITO driving layer, a graphene sensing layer arranged on the ITO driving layer and a protective adhesive layer arranged on the graphene sensing layer; the ITO driving layer is a patterned ITO film, and the graphene sensing layer is a patterned graphene film; and the IT0 driving layer and the graphene sensing layer are connected with the capacitance sensing chip through wires respectively. The method can greatly reduce the overall thickness of the mutual capacitance touch screen functional sheet on the premise of ensuring the scribing effect, and the thickness of the finished product is only 1/3 of that of the double-layer single-sided ITO structure.

Description

Mutual capacitance touch screen functional sheet and preparation method thereof
Technical Field
The invention relates to a mutual capacitance touch screen functional sheet and a preparation method thereof, which are used for mobile phone touch screens and the like, and belong to the field of touch screen research.
Background
The capacitive touch screen works by utilizing the current induction of a human body, when a finger touches on the metal layer, a coupling capacitor is formed on the surfaces of the user and the touch screen due to the electric field of the human body, and the capacitor is a direct conductor for high-frequency current, so that the overall capacitive characteristic of the circuit can be influenced. The types of the capacitive screens are classified according to the mode of sensing capacitance, and can be classified into surface capacitance type and projection capacitance type, and the projection capacitance type touch screen can be classified into self capacitance type and mutual capacitance type according to the scanning mode. The self capacitance scans the capacitance formed by the X/Y electrode and the ground, and the mutual capacitance scans the capacitance between the X/Y electrodes.
Existing projected capacitive screens require one or more etched ITO layers that are etched to form a plurality of horizontal and vertical electrodes that are driven by a capacitive sense die. The chip can transfer data to the main processor and also can process the XY axis positions of the contacts by itself. When both the horizontal and vertical electrodes are driven by single-ended sensing, i.e., the row and column driving circuits are identical, the sensing is referred to as "single-ended" sensing, i.e., self-capacitance. When one axis is driven by a set of AC signals, the response across the touch screen is sensed by the electrodes on the other axis. This approach is referred to as "transverse" induction because the electric field is transferred from one set of electrodes (e.g., row) to the other set of electrodes (e.g., column) through the dielectric layer of the upper panel in a manner sufficient to be transverse, and is then mutual capacitance. The mutual capacitance touch screen does not need to be calibrated relative to the self-capacitance touch screen, and the 'ghost point' effect is avoided, so that real multi-point touch can be realized. Meanwhile, the mutual capacitance touch screen is not affected by temperature, humidity, finger wetting degree, human body weight and ground drying degree, and does not generate a drift phenomenon.
The transverse electrode and the longitudinal electrode of the mutual capacitance touch screen functional sheet are all made of ITO, and three general types of the best quality and common types are: 1. PET film with single-layer double-sided ITO structure, namely PET is used as a substrate film, two sides are respectively provided with a layer of ITO, and the ITO on the two sides are respectively manufactured into a transverse electrode (X electrode) and a longitudinal electrode (Y electrode); 2. the PET film with a single-layer single-sided ITO structure is generally formed by etching ITO into a diamond shape or a triangle shape, and X and Y electrodes are separated on each node through a special structure, for example, the node is similar to an overpass bridge by using MEMS technology; 3. PET with a double-layer single-sided ITO structure is used, and OCA is required to be adhered between PET. Thus, the mutual capacitance touch screen functional sheet sweeps the node capacitance instead of the electrode capacitance.
The mutual capacitance touch screen functional sheet mainly has three manufacturing schemes:
1. adopting a PET film with a single-layer double-sided ITO structure, and processing the ITO on the front side and the back side;
the ITO is not bending-resistant, the PET film is thin, and the front and back ITO is required to be processed separately for two times, so that the working procedure is complicated, the ITO is not damaged well, and the yield is low; meanwhile, due to the two layers of ITO, the finished product is easy to cause poor functions due to bending in the use process.
2. PET with single-layer single-sided ITO structure is bridged by metal;
because the metal bridging process has high precision requirement, the metal bridging structure is difficult to manufacture on PET and is not bending-resistant, and meanwhile, the metal bridging structure has poor scribing experience effect, and metal bright spots in the metal bridging structure can be seen when the metal bridging structure is manufactured into a finished product
3. PET with a double-layer single-sided ITO structure is used, and the PET is adhered by OCA;
because of using double-layer PET, the whole thickness is thicker, taking the current thinnest single-sided ITO structure PET with 50 μm thickness as an example, using double-layer PET, sticking a layer of 50 μm OCA in the middle, and the whole thickness reaches 150 μm, which is 3 times of the thickness of the former two schemes.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the mutual capacitance touch screen functional sheet which is easy to process and thinner in thickness, and further, the mutual capacitance touch screen functional sheet has stronger bending resistance than the traditional mutual capacitance touch screen functional sheet;
the invention also aims to provide a preparation method of the mutual capacitance touch screen functional sheet, which has simple manufacturing process and less process flow, and the thickness of the finished product is only 1/3 of that of the double-layer single-sided ITO structure.
The aim of the invention is realized by the following technical scheme:
a mutual capacitance touch screen functional sheet comprises a substrate film, an IT0 driving layer arranged on the substrate film, an isolation layer arranged on an ITO driving layer, a graphene sensing layer arranged on the ITO driving layer and a protective adhesive layer arranged on the graphene sensing layer; the ITO driving layer is a patterned ITO film, and the graphene sensing layer is a patterned graphene film; and the IT0 driving layer and the graphene sensing layer are connected with the capacitance sensing chip through wires respectively.
Preferably, the wires are located at the edge of the IT0 driving layer, part of the wires are attached to the IT0 driving layer and led out to be directly connected with the capacitance sensing chip, part of the wires are separated from the ITO and are lapped with the graphene sensing layer through the isolating layer.
Preferably, the thickness of the graphene sensing layer is 0.34nm.
Preferably, the thickness of the ITO driving layer is 50-200nm, for example: 50nm, 60nm, 70nm, 80nm, 90nm, 100nm, 110nm, 120nm, 130nm, 140nm, 150nm, 160nm, 170nm, 180nm, 190nm, 200nm, etc. Further preferably 150nm.
Preferably, the thickness of the isolation layer is 30-100nm, for example: 30nm, 40nm, 50nm, 60nm, 70nm, 80nm, 90nm, 100nm, etc. Preferably 50nm.
The thickness of the base film and the thickness of the protective adhesive layer are adjusted according to the requirements of the mutual capacitance touch screen functional sheet. According to the invention, the thickness of the protective adhesive layer can be less than 50 mu m according to the characteristics of the graphene induction layer. The thickness of the 50 mu m protective adhesive layer can not influence the function of the graphene film as an induction layer, and the sensitivity is sufficiently higher than that of the traditional mutual capacitance touch screen functional sheet.
Preferably, the wires are metal wires, more preferably AlMoAl, cu wires, most preferably Cu wires.
Preferably, the thickness of the wire is 300-400nm.
Preferably, the ITO driving layer is a single layer of ITO. Since ITO must be present as a base film, PET film is preferably used as the base film, it is common to use PET film with ITO structure directly for touch screen fabrication during fabrication.
Preferably, the graphene sensing layer adopts single-layer or double-layer graphene, and single-layer graphene is preferred.
Preferably, the isolating layer adopts transparent insulating glue such as OC, siO2, siN and the like, and further preferably adopts SiO 2
Preferably, the protective adhesive layer is OCA transparent optical adhesive.
The preparation method of the mutual capacitance touch screen functional sheet comprises the following steps:
1) Sputtering a conductive material layer on the ITO surface of the substrate film with ITO, patterning the ITO film to manufacture an ITO driving layer of the mutual capacitance type touch screen and patterning the conductive material layer to form a wire;
2) Coating an isolation layer on the whole surface of the ITO driving layer, and when the isolation layer is coated, keeping the lap joint position of the lead and the graphene sensing layer and the gap of the gold finger end;
3) Manufacturing a photoresist pattern of the sensing layer on the isolation layer by using photoresist;
4) Transferring the graphene onto the photoresist pattern, and ensuring that the graphene is overlapped with the lead;
5) Etching to remove the photoresist pattern formed in the step 3), and forming a patterned graphene induction layer by the reserved graphene;
6) And (3) sticking a layer of protective adhesive on the whole surface of the graphene induction layer, and cutting into small pieces to form the mutual capacitance touch screen functional piece.
Preferably, in the step 1), a Cu layer is sputtered as the conductive material layer on the ITO surface of the ITO-attached base film. In the step 1), the width of the conductive wire formed by patterning the conductive material layer and overlapping with the graphene sensing layer is 3-5 times, and optimally 2.5 times, the width of the conductive wire connected with the ITO.
Preferably, in the step 3), the photoresist pattern of the sensing channel is manufactured through an exposure process.
The principle of the invention is as follows:
according to the preparation method, the ITO film is etched and patterned into the longitudinal electrode (Y electrode) to serve as the ITO driving layer, the graphene film is patterned into the transverse electrode (X electrode) through photoresist to serve as the graphene sensing layer, each transverse electrode is the sensing channel, the edges of the sensing channels are lapped with the edges of the ITO film through metal wires (preferably Cu), the Y electrode formed by the ITO film and the sensing channel (X electrode) formed by the graphene are separated by the insulating isolation layer, and the graphene sensing layer is protected by OCA glue, so that the complete mutual capacitance touch screen functional sheet is formed.
The invention has the beneficial effects that: the prior PET film with a single-layer double-sided ITO structure has low success rate of sputtering ITO on an isolation layer (insulating layer) to cause low yield, and the sputtered ITO layer sheet resistance and transmittance can not meet the requirements. The concrete explanation is as follows:
1. the method can greatly reduce the overall thickness of the mutual capacitance touch screen functional sheet on the premise of ensuring the scribing effect, and the thickness of the finished product is only 1/3 of that of the double-layer single-sided ITO structure.
2. Compared with the traditional scheme I and the traditional scheme II, the method provided by the invention has the advantages that the using process is the existing mature process, the production yield is high, the service life is long, the ITO is not easy to bend reversely in the manufacturing and using processes like the scheme I, the ITO is broken, and thus the function is poor, and the scheme II bridging process has certain elasticity even if the PET is made into a finished product because the PET is plastic, the bridging structure has high precision requirement, the metal bridge is tiny and easy to break, the function is easy to damage in the manufacturing and using processes, and meanwhile, certain defects exist in the appearance.
3. The mutual capacitance touch screen of the product has better bending resistance, and compared with the capacitive touch screen with a double-layer single-sided ITO structure, the thickness of the product is reduced by two thirds, and the application of the mutual capacitance touch screen is expanded. ITO is not resistant to bending and stretching, the elastic strain of graphene is 0.6%, the tensile strain is 6%, the single-layer graphene has a tensile strength of 150-180GPa and a Young modulus of 1TPa, and the graphene induction layer is used for replacing the ITO layer, so that the bending resistance of the whole touch screen is improved, and the application of the mutual capacitance touch screen is expanded.
Drawings
FIG. 1The cost schematic diagram of the functional sheet of the mutual capacitance touch screen is shown;
FIG. 2Is thatFIG. 1Schematic cross-section along A-A;
FIG. 3The ITO driving layer is schematically shown in the invention;
FIG. 4Is a schematic diagram of an isolation layer of the invention;
FIG. 5Is a schematic diagram of a photoresist pattern in the process of the invention;
FIG. 6The graphene induction layer is schematically shown in the invention.
The device comprises a 1-substrate, a 2-ITO driving layer, a 21-longitudinal electrode (also called as Y electrode), a 3-isolation layer, a 4-graphene sensing layer, a 41-sensing channel (also called as X electrode and transverse electrode), a 42-photoresist pattern, a 5-protective adhesive layer, a 6-metal wire and a 7-golden finger end.
Detailed Description
The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustration and explanation of the present invention only, and are not intended to limit the present invention.
Example 1:
mutual capacitance touch screen functional sheet, seeFIG. 12The whole mutual capacitance touch screen functional sheet is transparent, each layer is made of transparent materials, and black and white in the drawing are only used for clearly distinguishing and displaying the structural characteristics of the product. The mutual capacitance touch screen functional sheet comprises a base film 1, an IT0 driving layer 2, an isolation layer 3, a graphene induction layer 4 and a protection adhesive layer 5, wherein the base film 1, the IT0 driving layer 2, the isolation layer 3, the graphene induction layer 4 and the protection adhesive layer 5 are sequentially and tightly attached. The ITO driving layer 2 is a patterned ITO film. SeeFIG. 3The patterned ITO film is shown forming vertical electrodes 21, also called Y electrodes, indicated by black areas in the figure. The graphene sensing layer 4 is a patterned graphene film, seeFIG. 6The patterned graphene film is shown forming lateral electrodes 41, also called sense channels, X electrodes. The metal wire 6 is used for connecting and conducting the ITO driving layer 2 and the capacitance sensing chip, and connecting and conducting the graphene sensing layer 4 and the capacitance sensing chip. The metal wire 6 is located at the edge of the IT0 driving layer 2. Wherein, part wire and IT0 drive layer laminating and draw and direct connection with the capacitive sensing chip, the one end of another part wire is crossed the isolation layer and is in the same place with the overlap joint of graphite alkene inductive layer, and the other end is separated with ITO drive layer edge, and IT is connected with the capacitive sensing chip to draw with ITO existence certain distance department outside the ITO edge.
The arrangement of the graphene induction layer can skillfully improve the bending resistance of the mutual capacitance touch screen functional sheet, and the technical purposes of reducing the flow of the preparation process and the like can be effectively achieved.
As a further preferred embodiment of the present example, the present example is a preferred embodiment in which the materials and thicknesses of the layers are refined. The thickness of the graphene sensing layer 4 is preferably 0.34nm. The thickness of the ITO driving layer 2 is 50-200nm, for example: 50nm, 60nm, 70nm, 80nm, 90nm, 100nm, 110nm, 120nm, 130nm, 140nm, 150nm, 160nm, 170nm, 180nm, 190nm, 200nm, etc. Further preferably 150nm. . The isolating layer3 is 30-100nm thick, for example: 30nm, 40nm, 50nm, 60nm, 70nm, 80nm, 90nm, 100nm, etc. Preferably 50nm. The thickness of the base film and the thickness of the protective adhesive layer are adjusted according to the requirements of the mutual capacitance touch screen functional sheet. According to the invention, the thickness of the protective adhesive layer can be less than 50 mu m according to the characteristics of the graphene induction layer. The thickness of the 50 mu m protective adhesive layer can not influence the function of the graphene film as an induction layer, and the sensitivity is sufficiently higher than that of the traditional mutual capacitance touch screen functional sheet. The metal wire is preferably AIMoAI or Cu wire, and most preferably Cu wire. The thickness of the metal wire is 300-400nm. The ITO driving layer is single-layer ITO. Since ITO must be present as a base film, PET film is preferably used as the base film, it is common to use PET film with ITO structure directly for touch screen fabrication during fabrication. The graphene sensing layer is patterned single-layer or double-layer graphene, preferably single-layer graphene. The isolating layer adopts OC and SiO 2 Transparent insulating glue such as SiN, preferably SiO 2 . The protective adhesive layer is preferably OCA transparent optical adhesive. The thickness of the base film (preferably PET) and the protective adhesive layer (preferably OCA) can be freely selected to be different in thickness according to practical application requirements, and the functional effect of the mutual capacitance touch screen functional sheet is not affected.
Example 2:
the preparation method of the mutual capacitance touch screen functional sheet comprises the following steps:
1. sputtering a layer of Cu on PET with a single-layer ITO (thickness of 250 μm) structure, wherein the thickness of Cu is controlled within 300-400 nm; then, the ITO driving layer 2 of the mutual capacitance type touch screen and corresponding metal wires 6 thereof are manufactured, such asFIG. 3The Y electrode 21 of the mutual capacitance type touch screen is formed after ITO patterning;
2. seeFIG. 4SiO is coated on the ITO driving layer 2 2 ,SiO 2 The thickness is 50+/-10 nm to form an isolation layer 3, and when the graphene induction layer is coated, the lap joint position of the graphene induction layer and the metal wire 6 and the gap between the golden finger ends 7 are needed;
3. on the isolation layer, a photoresist pattern 42 of photoresist is formed by an exposure process, such asFIG. 5The blank is shown withThe photoresist, black stripe indicates no photoresist, the photoresist pattern thickness is about 1000nm;
4. transferring the graphene induction layer 4 grown by the CVD method onto the photoresist pattern, and ensuring that the graphene induction layer 4 is overlapped with the metal wire 6;
5. etching to remove the photoresist film, removing the photoresist pattern 42 formed in step 3 to form a graphene sensing layer 4 composed of patterned graphene film, wherein the remained graphene film is a sensing channel 41, i.e. an X electrode, such asFIG. 4The white bar-shaped indicates the sensing channel 41, which is a layer of graphene film, and the black portion indicates no graphene film;
6. attaching a layer of OCA with a thickness of 50 μm, and cutting into small pieces to obtain the mutual capacitance touch screen functional piece, such asFIG. 1Shown;
example 3:
the preparation method of the mutual capacitance touch screen functional sheet has the following process steps as in the embodiment 1, wherein:
1. in the step 1, a layer of AIMoAI is sputtered for manufacturing a metal wire;
2. the isolation layer adopts OC.
Example 4:
the preparation method of the mutual capacitance touch screen functional sheet has the following process steps as in the embodiment 1, wherein:
in step 4, two graphene films are transferred.
Example 5:
the preparation method of the mutual capacitance touch screen functional sheet has the following process steps as in the embodiment 1, wherein: thickness of ITO the single layer ITO thickness was 50 μm.
Example 6:
the preparation method of the mutual capacitance touch screen functional sheet has the following process steps as in the embodiment 1, wherein: thickness of ITO the single layer ITO thickness was 200 μm.
The foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (13)

1. A preparation method of a mutual capacitance touch screen functional sheet is characterized by comprising the following steps:
the method comprises the following steps:
1) Sputtering a conductive material layer on the ITO surface of the substrate film with ITO, patterning the ITO film to manufacture an ITO driving layer of the mutual capacitance type touch screen and patterning the conductive material layer to form a wire;
2) Coating an isolation layer on the whole surface of the ITO driving layer, and when the isolation layer is coated, keeping the lap joint position of the lead and the graphene sensing layer and the gap of the gold finger end;
3) Manufacturing a photoresist pattern of the sensing layer on the isolation layer by using photoresist, and manufacturing a photoresist pattern of the sensing channel by using an exposure process;
4) Transferring the graphene onto the photoresist pattern, and ensuring that the graphene is overlapped with the lead;
5) Etching to remove the photoresist pattern formed in the step 3), and forming a patterned graphene induction layer by the reserved graphene;
6) A layer of protective adhesive is adhered to the whole surface of the graphene induction layer, the graphene is cut into small pieces to form a mutual capacitance touch screen functional piece, the graphene is patterned into transverse electrodes through photoresist to serve as the graphene induction layer, each transverse electrode is an induction channel, the edges of the induction channels are lapped with the edges of the ITO driving layer through wires, and a Y electrode formed by the ITO driving layer is separated from the induction channel formed by the graphene by an insulating isolation layer; part of the wires are attached to the IT0 driving layer and led out to be directly connected with the capacitance sensing chip, one end of the other part of wires passes through the isolating layer to be overlapped with the graphene sensing layer, the other end of the wires is separated from the edge of the ITO driving layer, and the wires are led out to be connected with the capacitance sensing chip along a certain distance between the other end of the wires and the ITO driving layer.
2. The method for preparing the mutual capacitance touch screen functional sheet according to claim 1, wherein the method comprises the following steps:
in the step 1), a layer of Cu is sputtered on the ITO surface of the substrate film with ITO as a conductive material layer.
3. The method for preparing the mutual capacitance touch screen functional sheet according to claim 1, wherein the method comprises the following steps:
in the step 1), the width of the conducting wire formed by patterning the conducting material layer and overlapped with the graphene sensing layer is 3-5 times of the width of the conducting wire connected with the ITO.
4. A mutual capacitance touch screen functional sheet prepared by the preparation method of any one of claims 1 to 3, characterized in that:
the device comprises a substrate film, an IT0 driving layer arranged on the substrate film, an isolation layer arranged on the ITO driving layer, a graphene sensing layer arranged on the ITO driving layer and a protective adhesive layer arranged on the graphene sensing layer; the ITO driving layer is a patterned ITO film, and the graphene sensing layer is a patterned graphene film;
the IT0 driving layer and the graphene sensing layer are respectively connected with the capacitance sensing chip through wires;
wherein: the lead is positioned at the edge of the IT0 driving layer, part of the lead is attached to the IT0 driving layer and led out to be directly connected with the capacitance sensing chip, part of the lead is separated from the ITO and is overlapped with the graphene sensing layer through the isolating layer.
5. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the thickness of the graphene sensing layer is 0.34nm.
6. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the thickness of the ITO driving layer is 50-200nm.
7. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the thickness of the isolation layer is 30-100nm.
8. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the wire adopts AlMoAl or Cu.
9. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the thickness of the wire is 300-400nm.
10. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the ITO driving layer adopts single-layer ITO.
11. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the graphene induction layer adopts a single-layer or double-layer graphene film.
12. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the isolation layer adopts OC transparent insulating glue, siO2 transparent insulating glue or SiN transparent insulating glue.
13. The mutual capacitance touch screen functional sheet of claim 4, wherein:
the protective adhesive layer adopts OCA transparent optical adhesive.
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CN109032402B (en) * 2018-07-03 2021-09-03 京东方科技集团股份有限公司 Manufacturing method of flexible touch panel, flexible touch panel and device

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