CN106469704A - Semiconductor chip package, system and manufacture method - Google Patents

Semiconductor chip package, system and manufacture method Download PDF

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Publication number
CN106469704A
CN106469704A CN201510514194.1A CN201510514194A CN106469704A CN 106469704 A CN106469704 A CN 106469704A CN 201510514194 A CN201510514194 A CN 201510514194A CN 106469704 A CN106469704 A CN 106469704A
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CN
China
Prior art keywords
semiconductor chip
chip package
attachment disk
lead wire
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510514194.1A
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Chinese (zh)
Inventor
A·M·蒂武西奥
常洁
李根赫
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Fairchild Semiconductor Suzhou Co Ltd
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Fairchild Semiconductor Suzhou Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Semiconductor Suzhou Co Ltd filed Critical Fairchild Semiconductor Suzhou Co Ltd
Priority to CN201510514194.1A priority Critical patent/CN106469704A/en
Publication of CN106469704A publication Critical patent/CN106469704A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L2224/40Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • H01L2224/401Disposition
    • H01L2224/40151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/40221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/40245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape

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  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

The present invention provides a kind of semiconductor chip package, a kind of system of this semiconductor chip package of inclusion and corresponding manufacture method.This semiconductor chip package includes:Lead frame, described lead frame includes a chip attachment disk and is arranged at least one lead wire of this chip attachment disk side;At least one semiconductor chip, at least one semiconductor chip described is disposed on the described chip attachment disk of described lead frame;Molding material, for covering at least a portion of described chip attachment disk and described lead wire, to form semiconductor chip package;Wherein the bottom in semiconductor chip package is provided with and climbs electric groove for increase creep age distance, and this is climbed electric groove and is located in the molding material between described chip attachment disk and described lead wire.The semiconductor chip package of the present invention can have bigger source-leakage creep age distance such that it is able to provide more preferable insulating properties when being applied to high-pressure electronic product.

Description

Semiconductor chip package, system and manufacture method
Technical field
The present invention relates to a kind of semiconductor chip package, a kind of this semiconductor die package of inclusion The system of part and corresponding manufacture method.
Background technology
With the continuous development of high-power high voltage electronic device, semiconductor chip package is wanted Seek also more and more higher.And, become less and less with electronic equipments such as radio telephones, Require to produce less semiconductor chip package, enable them to be included in these electronics In equipment.However, less packaging part usually requires that less semiconductor chip, this may Impact internal performance simultaneously shortens creep age distance.Further, since comprising the half of such as power transistor Conductor chip packaging part can produce amount of heat in the course of the work, also requires that improving tradition partly leads The heat dispersion of body chip package.
For example, US granted patent US6756658B1 discloses a kind of surface with double lead Install semiconductor chip package, wherein source electrode and drain electrode between creep age distance shorter so that Easily break down when being applied to high voltage product.It is additionally, since this semiconductor die package Part adopts wire as internal mutual line so that packaged resistance/inductance is higher it is impossible to carrying is high electric Stream.Additionally, this semiconductor chip package only carries out unilateral cooling using PCB, lead to radiate Effect is undesirable.
Therefore, need a kind of semiconductor chip package that can solve the problem that at least one the problems referred to above badly And its system.
Content of the invention
The present invention passes through to provide a kind of semiconductor chip package, corresponding system and system as follows Make method to realize at least one above-mentioned purpose.
On the one hand, the present invention provides a kind of semiconductor chip package it is characterised in that including:
Lead frame, described lead frame includes a chip attachment disk and to be arranged in this chip attached At least one lead wire of disk side;
At least one semiconductor chip, at least one semiconductor chip described be disposed in described in draw On the described chip attachment disk of wire frame;
Molding material, for covering at least a portion of described chip attachment disk and described lead wire, To form semiconductor chip package;
Wherein the bottom in semiconductor chip package is provided with and climbs electricity for increase creep age distance Groove, this climbs the molding material that electric groove is located between described chip attachment disk and described lead wire In.
On the other hand, the present invention also provides a kind of system, and this system includes above-mentioned semiconductor chip Packaging part, and a circuit substrate, described semiconductor chip package passes through surface-pasted Mode is mounted to this circuit substrate.
Another further aspect, the present invention also provides a kind of manufacture for above-mentioned semiconductor chip package Method, described manufacture method comprises the following steps:
A () obtains a lead frame, this lead frame includes a chip attachment disk and at least One lead wire, at least one semiconductor chip is bonded to the chip attachment disk of lead frame;
B () covers chip attachment disk and at least one lead of described lead frame with molding material Around at least a portion of piece, to form semiconductor chip package;And
C () forms electric recessed for increasing climbing of creep age distance in the bottom of semiconductor chip package Groove, this climbs the mould that electric groove is located between described chip attachment disk and at least one lead wire described In prepared material.
These and other embodiment of the present invention is described in detail with reference to the drawings in the description. In the accompanying drawings, same or analogous part will be represented with same or analogous reference marker.In addition, For clarity, some parts in accompanying drawing may be not to scale.
Brief description
Below in conjunction with the exemplary of the Description of Drawings present invention, can from described description It is expressly understood the above and other aspects, features and advantages of the present invention.In the accompanying drawings:
Fig. 1 illustrates the decomposition of the semiconductor chip package according to one embodiment of the invention Schematic diagram.
Fig. 2 illustrates the section of the semiconductor chip package according to one embodiment of the invention Figure.
Fig. 3 illustrates the perspective of the semiconductor chip package according to one embodiment of the invention Figure.
Fig. 4 illustrates that the semiconductor chip package according to one embodiment of the invention is encapsulating Sectional view before.
Fig. 5 illustrates that the semiconductor chip package according to one embodiment of the invention is encapsulating Axonometric chart before.
Fig. 6 illustrates the top view of the lead frame according to one embodiment of the invention.
Fig. 7 illustrates the side view of the lead frame of Fig. 6.
Fig. 8 illustrates the axonometric chart of the lead frame of Fig. 6.
Fig. 9 is shown in showing of the semiconductor chip package completing on the lead frame of Fig. 6 It is intended to.
Figure 10 illustrates the axonometric chart of the semiconductor chip package of Fig. 9.
Figure 11 illustrates the inclusion semiconductor chip package according to one embodiment of the invention A system axonometric chart.
Figure 12 illustrates the sectional view of the system of Figure 11.
Figure 13 illustrates the inclusion semiconductor die package according to another embodiment of the invention The axonometric chart of another system of part.
Figure 14 illustrates the sectional view of the system of Figure 13.
Specific embodiment
In the disclosure, term " bottom (portion) ", " top (portion) " are not intended to limit Concrete orientation, but combine accompanying drawing and shown with respect to the conventional arrangement of semiconductor chip package For example.
On the one hand, the present invention provides a kind of semiconductor chip package it is characterised in that including:
Lead frame, described lead frame includes a chip attachment disk and to be arranged in this chip attached At least one lead wire of disk side;
At least one semiconductor chip, at least one semiconductor chip described be disposed in described in draw On the described chip attachment disk of wire frame;
Molding material, for covering at least a portion of described chip attachment disk and described lead wire, To form semiconductor chip package;
Wherein the bottom in semiconductor chip package is provided with and climbs electricity for increase creep age distance Groove, this climbs the molding material that electric groove is located between described chip attachment disk and described lead wire In.
In a preferred embodiment, at least one lead wire described has and is exposed to quasiconductor Lead terminal outside chip package and the end of the inside inside semiconductor chip package End, the lead terminal of at least one lead wire described and inside end are ladder-like arranged.
In a preferred embodiment, described semiconductor chip package further includes at least One connection intermediate plate, described at least one connect intermediate plate be respectively electrically connected to described at least one Between semiconductor chip and the corresponding inside end of at least one lead wire described.
In a preferred embodiment, described climb electric groove be located at described connection intermediate plate with described Below connecting portion between the inside end of lead wire.
In a preferred embodiment, described climb electric groove along the basal surface side of chip attachment disk To width be more than or equal to 1mm, and/or described climb electric groove along perpendicular to chip attachment disk side To depth be more than or equal to 0.5mm.
In a preferred embodiment, wherein said chip attachment disk and described lead terminal it Between edge climb electric groove profile creep age distance be more than or equal to 7.8mm.
In a preferred embodiment, described semiconductor chip package further includes one Heating column, this heating column is disposed on described chip attachment disk neighbouring described semiconductor chip, And the top surface of this heating column exposes from the top of semiconductor chip package.
In a preferred embodiment, the side of wherein this heating column is provided with recess, with shape Become the cross sectional shape of basic " work " shape.
In a preferred embodiment, wherein this heating column is made of metal.
On the other hand, the present invention provides a kind of system it is characterised in that including:
One semiconductor chip package, this semiconductor chip package includes:
Lead frame, described lead frame includes a chip attachment disk and is arranged in this core At least one lead wire of piece attachment disk side;
At least one semiconductor chip, at least one semiconductor chip described is disposed in institute State on the described chip attachment disk of lead frame;
Molding material, for covering at least the one of described chip attachment disk and described lead wire Part, to form semiconductor chip package;
Wherein it is provided with for increasing creep age distance in the bottom of semiconductor chip package Climb electric groove, this is climbed electric groove and is located between described chip attachment disk and described lead wire In molding material;And
One circuit substrate, semiconductor chip package is mounted to by surface-pasted mode This circuit substrate.
In a preferred embodiment, described system further includes a top heat sink, This top heat sink is installed in the top surface of semiconductor chip package, and be arranged in core A heating column on piece attachment disk directly or indirectly contacts, and described circuit substrate is attached to half The basal surface of conductor chip packaging part.
Preferably, in the case that described system includes above-mentioned top heat sink, this system also may be used To further include an insulating trip, this insulating trip is disposed in top heat sink and semiconductor core Between the top surface of chip package.Preferably, described circuit substrate is provided with an opening, This opening climbs the lower section of electric groove and along the length direction extension climbing electric groove positioned at described.
In a preferred embodiment, described system further includes a bottom heat spreader, This bottom heat spreader is installed in the basal surface of semiconductor chip package, and adheres to chip The basal surface of disk directly or indirectly contacts, but climbs electric groove described in not covering.
Preferably, in the case that described system includes above-mentioned bottom heat spreader, semiconductor chip The top surface of packaging part can be mounted to described circuit substrate, described circuit substrate be arranged in core A heating column on piece attachment disk directly or indirectly contacts.And it is preferable that described system An insulating trip can also be included, this insulating trip is disposed in bottom heat spreader and semiconductor chip Between the basal surface of packaging part.
Another further aspect, the present invention provides a kind of side for manufacturing above-mentioned semiconductor chip package Method, comprises the following steps:
A () obtains a lead frame, this lead frame includes a chip attachment disk and at least One lead wire, at least one semiconductor chip is bonded to the chip attachment disk of lead frame;
B () covers chip attachment disk and at least one lead of described lead frame with molding material Around at least a portion of piece, to form semiconductor chip package;And
C () forms electric recessed for increasing climbing of creep age distance in the bottom of semiconductor chip package Groove, this climbs the mould that electric groove is located between described chip attachment disk and at least one lead wire described In prepared material.
In a preferred embodiment, further include a step (d):By a heat conduction Post is arranged on described chip attachment disk neighbouring described semiconductor chip.
In a preferred embodiment, further include at one step of execution after step (c) Suddenly (e):By the top surface of a heat spreader attachment to semiconductor chip package or basal surface.
In a preferred embodiment, wherein this manufacture method is suitable to manufacture SiC device.
Describe the semiconductor chip package of the present invention below with reference to accompanying drawings in detail, including should be partly The system of conductor chip packaging part and the embodiment of corresponding manufacture method.It should be appreciated that Embodiments below and accompanying drawing are only illustrative, are not construed as limiting the scope of the present invention.
Fig. 1 illustrates the decomposition of the semiconductor chip package according to one embodiment of the invention Schematic diagram.
As shown in fig. 1, the inside of this semiconductor chip package includes at least one quasiconductor Chip 200, a such as one semiconductor chip DIODE 201 and semiconductor chip FET 202; And also include a lead frame, this lead frame comprise a chip attachment disk 50 with relative At least one lead wire 300 of arrangement.For example, this at least one lead wire may include electrically exhausted The source lead piece of edge and grid lead piece.Molding material is used for covering described chip attachment disk 50 With at least a portion of described lead wire 300, they are partly encapsulated and partly leads thus being formed Body chip package 100.Described molding material can be epoxy molding compounds (EMC), example As epoxy resin.Advantageously, the bottom in semiconductor chip package 100 is provided with one and climbs Electric groove 60, to increase the creep age distance between described lead wire and described chip attachment disk, That is, source-leakage creep age distance.This climbs electric groove 60 can be after semiconductor chip package completes Formed, in the molding material between described chip attachment disk and described lead wire.By setting Put this and climb electric groove, the semiconductor chip package of the present invention can increase climbs electricity between source-leakage Distance, thus be applied to high voltage high power electronic product and be greater than the SiC of 1200V More preferable insulating properties is provided during device.
Fig. 2 illustrates the section of the semiconductor chip package according to one embodiment of the invention Figure.Fig. 3 illustrates the perspective of the semiconductor chip package according to one embodiment of the invention Figure.
In conjunction with Fig. 1, can be more clearly visible that from Fig. 2 and Fig. 3, source lead piece has cruelly It is exposed at the source lead terminal 301 outside semiconductor chip package and be located at semiconductor chip envelope Inside end 303 inside piece installing.Similarly, grid lead piece also has and is exposed to quasiconductor Grid lead terminal 302 outside chip package and being located inside semiconductor chip package Inside end 304.The source lead terminal 301 of described source lead piece and inside end 303 It is ladder-like arranged.Similarly, the grid lead terminal 302 of described grid lead piece and Qi Nei Portion end 304 is also ladder-like arranged.The inside end 303 of described source lead piece and described The inside end 304 of grid lead piece can be with the semiconductor core being arranged on chip attachment disk 50 Piece 201 and 202 flushes, is higher or lower than described semiconductor chip 201 and 202.
Preferably, described semiconductor chip package 100 further includes source electrode attachment clips Piece 401 and a grid connect intermediate plate 402.Described source electrode connects intermediate plate 401 and is connected electrically in The inside end 303 of described semiconductor chip DIODE 201 and corresponding source lead piece it Between.Described grid connects intermediate plate 402 and is connected electrically in described semiconductor chip FET 202 and phase Between the inside end 304 of corresponding grid lead piece.Replace tradition by using connecting intermediate plate Wire, can achieve relatively low packaged resistance/inductance, and high current can be carried.
In the inside end 303 of described source lead piece and the inside end of described grid lead piece In the case that 304 are flushed with the semiconductor chip 201 and 202 being arranged on chip attachment disk 50, It can be a flat shape that described source electrode connects intermediate plate 401 and described grid connection intermediate plate 402 Connector (as shown in Figure 2).In the inside end 303 of described source lead piece and described The horizontal level of the inside end 304 of grid lead piece is higher or lower than described semiconductor chip When 201 and 202, described source electrode connects intermediate plate 401 and described grid connection intermediate plate 402 is permissible It is correspondingly the connector of a stairstepping.In addition, the inside end of described source lead piece 303 and the upper surface of inside end 304 of described grid lead piece can be covered with for source electrode respectively Connect intermediate plate 401 and grid connects electroconductive binder or the solder of intermediate plate 402.
Preferably, described climb electric groove 60 and be located at described connection intermediate plate 400 and described lead wire Below connecting portion between 300 inside end, to form compact space arrangement.Described climb The width W1 in the basal surface direction along chip attachment disk 50 for the electric groove 60 can be more than or equal to 1mm, So that creep age distance can be calculated along the recessed profile climbing electric groove.Described climb electric groove edge Depth D1 perpendicular to chip attachment disk direction can be more than or equal to 0.5mm.Described chip is attached The edge between disk and described lead terminal climb electric groove profile creep age distance L1 (as Fig. 2 In the length climbing power path represented by black line) 7.8mm can be more than or equal to.Due to climbing electricity The calculation of distance is relevant with the shape and size of groove and internal deposition conditions, above-mentioned pass It is not restricted in the concrete example climbing electric groove, those skilled in the art can be according to reality Border application selects suitably to climb the shape and size of electric groove, as long as disclosure satisfy that required climbing Electrical distance.
Fig. 4 illustrates that the semiconductor chip package according to one embodiment of the invention is encapsulating Sectional view before.Fig. 5 illustrates the semiconductor chip envelope according to one embodiment of the invention Piece installing axonometric chart before encapsulation.
In a preferred embodiment, described semiconductor chip package further includes one Heating column 70, this heating column 70 is disposed on described chip attachment disk neighbouring described quasiconductor Chip, and the top surface of this heating column 70 can expose from the top of semiconductor chip package Go out (as shown in Figure 2).As clearly visible in Fig. 4, the side of this heating column is provided with edge The recess of its length direction extension, to form the cross sectional shape of basic " work " shape.So exist In molding process, this heating column can be better locked onto in molding material.Preferably, should Heating column can be made up of Heat Conduction Material known in the art (for example, the metal material such as copper), Preferably it is transmitted to the outside of semiconductor chip package with the heat energy producing semiconductor chip.
Fig. 6 illustrates the top view of the lead frame according to one embodiment of the invention.Fig. 7 The side view of the lead frame of Fig. 6 is shown.Fig. 8 illustrates the axonometric chart of the lead frame of Fig. 6.
Fig. 6-8 shows that three of initial acquisition connect the lead frame of arrangement side by side.As Fig. 6 Shown in, a lead frame includes a chip attachment disk 50 and two lead wire, and described two Individual lead wire includes being stepped the outer leg terminal 301 of arrangement and 302 and inside end 303 and 304.The lead frame of the present invention can form thicker lead by being stamped and formed out Framework, thus reaching more preferable radiating effect, and can installed by surface mount mode During to circuit substrate, obtain the more stable surface mount device (SMD) of performance.In addition, this The lead plate shape of the lead frame of invention can form compact Layout with climbing electric groove so that While increasing creep age distance, also will not expand the size of semiconductor chip package, thus more Meet related request well.
Fig. 9 is shown in showing of the semiconductor chip package completing on the lead frame of Fig. 6 It is intended to.Figure 10 illustrates the axonometric chart of the semiconductor chip package of Fig. 9.
Three semiconductor die package being arranged in juxtaposition having completed are shown in Fig. 9 and 10 Part, after they being cut apart and pass through other subsequent process steps such as example polish, An independent semiconductor chip package 100 as shown in Figures 2 and 3 can be obtained.
Figure 11 illustrates the inclusion semiconductor chip package according to one embodiment of the invention A system axonometric chart.Figure 12 illustrates the sectional view of the system of Figure 11.
The semiconductor chip package 100 having completed can be pacified by surface-pasted mode It is filled to a circuit substrate 80, thus forming the electricity of an inclusion semiconductor chip package 100 Gas system.As shown in FIG. 11 and 12, this system can further include a top heat sink 90, This top heat sink 90 is installed in the top surface of semiconductor chip package 100, and and cloth The heating column 70 put on chip attachment disk directly or indirectly contacts.So, semiconductor core Heat within chip package can not only be conducted by the circuit substrate 80 of bottom, and can lead to Cross heating column 70 and be conducted to top heat sink 90, thus reach two-sided cooling (that is, top and Bottom cools down simultaneously) effect.
In addition, can arrange an opening 801 in described circuit substrate, this opening 801 is located at The described lower section climbing electric groove 60 and extending, to increase source along the length direction climbing electric groove The air gap between pole and drain electrode is climbed it is ensured that can calculate along the recessed profile climbing electric groove Electrical distance.Preferably, in the case that described system includes top heat sink 90, this system is also May further include an insulating trip (not shown), this insulating trip is disposed in top heat sink And the top surface of semiconductor chip package between.
Figure 13 illustrates the inclusion semiconductor die package according to another embodiment of the invention The axonometric chart of another system of part.Figure 14 illustrates the sectional view of the system of Figure 13.
To include a top heat sink different from the system in Figure 11 and 12, in Figure 13 and 14 The system illustrating includes a bottom heat spreader 90 ', and this bottom heat spreader 90 ' is installed in half The basal surface of conductor chip packaging part, and directly or indirectly connect with the basal surface of chip attachment disk Touch, but described in not covering, climb electric groove 60.The top surface of described semiconductor chip package can Be mounted to a circuit substrate 80 ', described circuit substrate 80 ' be arranged in chip attachment disk On a heating column 70 directly or indirectly contact.In addition, quasiconductor as shown in Figure 14 The stairstepping of the lead wire in chip package and the semiconductor die package shown in Figure 12 The stairstepping of the lead wire in part is on the contrary so that the outer leg terminal of lead wire can be upwards Extend to be attached to the circuit substrate 80 ' of top.
Similarly, the system shown in Figure 13 and 14 also can reach two-sided cooling (that is, top Cool down with bottom simultaneously) effect, and due to bottom heat spreader 90 ' with drain electrode output area straight Contact is such that it is able to realize more preferable radiating effect.In addition, this system can also include one Individual insulating trip (not shown), this insulating trip can be disposed in bottom heat spreader 90 ' and quasiconductor Between the basal surface of chip package.
Yet another aspect, although not shown, the present invention also provides one kind to be used for manufacturing quasiconductor The method of chip package, the method comprises the following steps:
A () obtains a lead frame, this lead frame includes a chip attachment disk and at least One lead wire, at least one semiconductor chip is bonded to the chip attachment disk of lead frame;
B () covers chip attachment disk and at least one lead of described lead frame with molding material Around at least a portion of piece, to form semiconductor chip package;And
C () forms electric recessed for increasing climbing of creep age distance in the bottom of semiconductor chip package Groove, this climbs the mould that electric groove is located between described chip attachment disk and at least one lead wire described In prepared material.
Preferably, said method also includes a step (d):One heating column is arranged on institute State neighbouring described semiconductor chip on chip attachment disk.This step (d) can in step (b) or Execute before (c).
Preferably, can perform a step (e) after step (c):By a radiator It is attached to top surface or the basal surface of semiconductor chip package.This radiator can be that top dissipates Hot device 90 or bottom heat spreader 90 '.
Above-mentioned manufacture method may be adapted to manufacture SiC device.
It should be understood that present disclosure is not limited to specific embodiments described above. In the case of without departing from spirit and scope of the appended claims, present disclosure can be entered The multiple modification of row and replacement, for example, can carry out selecting combination to above-mentioned technical characteristic, described many Plant modification and replacement should be understood as being within the scope of the present invention.

Claims (10)

1. a kind of semiconductor chip package is it is characterised in that include:
Lead frame, described lead frame includes a chip attachment disk and to be arranged in this chip attached At least one lead wire of disk side;
At least one semiconductor chip, at least one semiconductor chip described be disposed in described in draw On the described chip attachment disk of wire frame;
Molding material, for covering at least a portion of described chip attachment disk and described lead wire, To form semiconductor chip package;
Wherein the bottom in semiconductor chip package is provided with and climbs electricity for increase creep age distance Groove, this climbs the molding material that electric groove is located between described chip attachment disk and described lead wire In.
2. semiconductor chip package according to claim 1, wherein said at least one Lead wire has the lead terminal being exposed to outside semiconductor chip package and is located at semiconductor core Inside end inside chip package, the lead terminal of at least one lead wire described and inside end End is ladder-like arranged.
3. semiconductor chip package according to claim 2, further includes at least one Individual connection intermediate plate, described at least one connect intermediate plate be respectively electrically connected to described at least one half Between the inside end of conductor chip and corresponding lead wire.
4. semiconductor chip package according to claim 3, wherein said climbs electric groove Below the described connecting portion connecting between intermediate plate and the inside end of described lead wire.
5. semiconductor chip package according to claim 1, further includes that one is led Plume, this heating column is disposed on described chip attachment disk neighbouring described semiconductor chip, and And the top surface of heating column exposes from the top of semiconductor chip package.
6. a kind of system is it is characterised in that include:
One semiconductor chip package, this semiconductor chip package includes:
Lead frame, described lead frame includes a chip attachment disk and is arranged in this core At least one lead wire of piece attachment disk side;
At least one semiconductor chip, at least one semiconductor chip described is disposed in institute State on the described chip attachment disk of lead frame;
Molding material, for covering at least the one of described chip attachment disk and described lead wire Part, to form semiconductor chip package;
Wherein it is provided with for increasing creep age distance in the bottom of semiconductor chip package Climb electric groove, this is climbed electric groove and is located between described chip attachment disk and described lead wire In molding material;And
One circuit substrate, semiconductor chip package is mounted to by surface-pasted mode This circuit substrate.
7. system according to claim 6, further includes a top heat sink, should Top heat sink is installed in the top surface of semiconductor chip package, and be arranged in chip A heating column on attachment disk directly or indirectly contacts, and described circuit substrate is attached to partly leads The basal surface of body chip package.
8. system according to claim 7, is wherein provided with one in described circuit substrate Individual opening, this opening climbs the lower section of electric groove and along the length side climbing electric groove positioned at described To extension.
9. system according to claim 6, further includes a bottom heat spreader, should Bottom heat spreader is installed in the basal surface of semiconductor chip package, and with chip attachment disk Basal surface directly or indirectly contact, but described in not covering, climb electric groove.
10. a kind of manufacture method is it is characterised in that comprise the following steps:
A () obtains a lead frame, this lead frame includes a chip attachment disk and at least one Individual lead wire, at least one semiconductor chip is bonded to the chip attachment disk of lead frame;
B () covers chip attachment disk and at least one lead of described lead frame with molding material Around at least a portion of piece, to form semiconductor chip package;And
C () forms electric recessed for increasing climbing of creep age distance in the bottom of semiconductor chip package Groove, this climbs the mould that electric groove is located between described chip attachment disk and at least one lead wire described In prepared material.
CN201510514194.1A 2015-08-20 2015-08-20 Semiconductor chip package, system and manufacture method Pending CN106469704A (en)

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CN109473410A (en) * 2017-09-08 2019-03-15 英飞凌科技奥地利有限公司 SMD encapsulation with top side cooling end
CN110518814A (en) * 2019-09-19 2019-11-29 江西精骏电控技术有限公司 A kind of two-sided cooling structure for vehicle-mounted inverter
CN118299356A (en) * 2024-05-14 2024-07-05 日月新半导体(威海)有限公司 Front side heat dissipation structure of semiconductor chip and packaging method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109473410A (en) * 2017-09-08 2019-03-15 英飞凌科技奥地利有限公司 SMD encapsulation with top side cooling end
CN109473410B (en) * 2017-09-08 2023-11-28 英飞凌科技奥地利有限公司 SMD package with topside cooling
CN110518814A (en) * 2019-09-19 2019-11-29 江西精骏电控技术有限公司 A kind of two-sided cooling structure for vehicle-mounted inverter
CN118299356A (en) * 2024-05-14 2024-07-05 日月新半导体(威海)有限公司 Front side heat dissipation structure of semiconductor chip and packaging method thereof

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