CN106449494A - Wafer-dedicated storage frame - Google Patents
Wafer-dedicated storage frame Download PDFInfo
- Publication number
- CN106449494A CN106449494A CN201610877792.XA CN201610877792A CN106449494A CN 106449494 A CN106449494 A CN 106449494A CN 201610877792 A CN201610877792 A CN 201610877792A CN 106449494 A CN106449494 A CN 106449494A
- Authority
- CN
- China
- Prior art keywords
- wafer
- storage frame
- carriage
- cross member
- head piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
Abstract
The invention relates to a wafer-dedicated storage frame comprising a top beam, a bottom beam and a plurality of support frames mounted between the top and bottom beams. The support frames are arranged between the top and bottom beams. The upper and lower ends of each support frame are provided with rotating shafts by means of which the top beam and the bottom beam are in rotational connection. Each support frame is provided with a through groove capable of receiving a wafer. The upper and lower ends of each groove are provided with cushions. The support frames are arranged at intervals. The wafer is easy to place. The angles of the support frames can be adjusted so that the storage frame can be placed in a packing box when necessary. The wafer-dedicated storage frame is easy to use.
Description
Technical field
The present invention relates to technical field of integrated circuits, particularly to the storage device of wafer.
Background technology
The general collection of existing wafer is loaded in storage bin, unreasonable due to placing, and can contact with each other, also exist between wafer
, thus there is certain breakage rate in the situation of collision chamber interior wall.
Content of the invention
The problems referred to above existing for existing wafer storage device, applicant is studied and is improved, and provides a kind of wafer
Dedicated storage frame, wafer is positioned in the carriage that can rotate in the range of certain angle, it is to avoid bumped wafer, adjusts laying angle
Degree, facilitates accumulating.
In order to solve the above problems, the present invention adopts following scheme：
A kind of wafer dedicated storage frame, including head piece, cross member and be installed between described head piece and cross member
Multiple carriages, between head piece and cross member, the upper and lower ends of carriage are equipped with rotating shaft to described carriage arranged for interval,
Rotate by described rotating shaft and head piece and cross member and be connected, carriage be provided with insertion, the mounting groove that wafer is inserted can be held,
The upper and lower ends of described mounting groove have cushion.
The method have technical effect that：
In the present invention, spaced carriage, laying of wafer is simple to operate, carriage adjustable-angle, convenient storage
Deposit frame to insert as needed in packing cratess, easy to use.
Brief description
Fig. 1 is the structural representation of the present invention.
In figure：1st, head piece；2nd, cross member；3rd, carriage；4th, rotating shaft；5th, mounting groove；6th, cushion.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described further.
As shown in figure 1, the wafer dedicated storage frame of the present embodiment, including head piece 1, cross member 2 and be installed on head piece 1
Multiple carriages 3 and cross member 2 between, carriage 3 arranged for interval between head piece 1 and cross member 2, carriage 3 upper
Lower two ends are equipped with rotating shaft 4, rotate by rotating shaft 4 and head piece 1 and cross member 2 and are connected, carriage 3 be provided with insertion, can
Hold the mounting groove 5 that wafer is inserted, the upper and lower ends of mounting groove 5 have cushion 6.During use, wafer is directly snapped in mounting groove 5
In, due to the setting of cushion 6, can prevent wafer from departing from.After wafer is put into, can suitable rotational support frame 3 angle, put
Enter in packing cratess.
In the present invention, spaced carriage, laying of wafer is simple to operate, carriage adjustable-angle, convenient storage
Deposit frame to insert as needed in packing cratess, easy to use.
Embodiment provided above is the better embodiment of the present invention, is only used for the convenient explanation present invention, not to this
Bright make any pro forma restriction, any those of ordinary skill in the art, if without departing from the carried skill of the present invention
In the range of art feature, using the Equivalent embodiments locally changed done by disclosed technology contents or modify, and
Without departing from the technical characteristic content of the present invention, all still fall within the range of the technology of the present invention feature.
Claims (1)
1. a kind of wafer dedicated storage frame it is characterised in that：Including head piece (1), cross member (2) and be installed on described head piece
(1) the multiple carriages (3) and cross member (2) between, described carriage (3) arranged for interval is in head piece (1) and cross member (2)
Between, the upper and lower ends of carriage (3) are equipped with rotating shaft (4), turn with head piece (1) and cross member (2) by described rotating shaft (4)
It is dynamically connected, mounting groove (5) that carriage (3) is provided with insertion, wafer can be held inserting, the upper and lower ends of described mounting groove (5)
There is cushion (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610877792.XA CN106449494A (en) | 2016-10-08 | 2016-10-08 | Wafer-dedicated storage frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610877792.XA CN106449494A (en) | 2016-10-08 | 2016-10-08 | Wafer-dedicated storage frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106449494A true CN106449494A (en) | 2017-02-22 |
Family
ID=58172181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610877792.XA Withdrawn CN106449494A (en) | 2016-10-08 | 2016-10-08 | Wafer-dedicated storage frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106449494A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5011041A (en) * | 1988-09-14 | 1991-04-30 | Kakizaki Mfg. Co., Ltd. | Basket for processing thin plates |
| WO1998008754A1 (en) * | 1996-08-29 | 1998-03-05 | Scp Global Technologies, A Division Of Preco, Inc. | Compliant process cassette |
| US6089377A (en) * | 1996-08-26 | 2000-07-18 | Nec Corporation | Semiconductor wafer carrier |
| CN202503018U (en) * | 2012-03-02 | 2012-10-24 | 江苏泰氟隆科技有限公司 | Solar silicon wafer carrier with cushion |
| CN203690269U (en) * | 2014-01-17 | 2014-07-02 | 中芯国际集成电路制造(北京)有限公司 | Wafer boat structure |
-
2016
- 2016-10-08 CN CN201610877792.XA patent/CN106449494A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5011041A (en) * | 1988-09-14 | 1991-04-30 | Kakizaki Mfg. Co., Ltd. | Basket for processing thin plates |
| US6089377A (en) * | 1996-08-26 | 2000-07-18 | Nec Corporation | Semiconductor wafer carrier |
| WO1998008754A1 (en) * | 1996-08-29 | 1998-03-05 | Scp Global Technologies, A Division Of Preco, Inc. | Compliant process cassette |
| CN202503018U (en) * | 2012-03-02 | 2012-10-24 | 江苏泰氟隆科技有限公司 | Solar silicon wafer carrier with cushion |
| CN203690269U (en) * | 2014-01-17 | 2014-07-02 | 中芯国际集成电路制造(北京)有限公司 | Wafer boat structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20170222 |