CN203690269U - Wafer boat structure - Google Patents
Wafer boat structure Download PDFInfo
- Publication number
- CN203690269U CN203690269U CN201420031375.XU CN201420031375U CN203690269U CN 203690269 U CN203690269 U CN 203690269U CN 201420031375 U CN201420031375 U CN 201420031375U CN 203690269 U CN203690269 U CN 203690269U
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- Prior art keywords
- brilliant boat
- boat structure
- wafer
- wafer boat
- utility
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Abstract
The utility model provides a wafer boat structure. The wafer boat structure comprises two connecting columns located at the bottom of the wafer boat structure; a front baffle plate and a rear baffle are respectively fixed to two ends of the connecting columns; a plurality of parallel and spaced supporting plates are arranged between the front baffle plate and the rear baffle; and the supporting plates are of bottom edge-free frame structures which are wide at the lower parts and are narrow at the upper parts. With the supporting plates of the wafer boat structure of the utility model adopted, the slot width of clamping slots can be decreased, and thinned wafers can be excellently fixed, and a crystal box with the wafer boat can be directly utilized to store and transfer the thinned wafers, and the thinned wafers are not required to be transferred to a round box or a black box from the crystal box, and therefore, unnecessary repeat labor can be decreased, and at the same time, the deformation and fragmentation of the wafers caused by sloshing when the wafers are stored and transferred in a crystal box with an ordinary wafer boat can be avoided, and as a result, the yield of the thinned wafers can be increased, and normal operation of subsequent processes can be ensured.
Description
Technical field
The utility model relates to a kind of field of semiconductor devices, particularly relates to a kind of brilliant boat structure.
Background technology
Brilliant boat, as the bogey of wafer, has been widely used in field of semiconductor manufacture.In the storage and transportation of wafer; because wafer is very thin; very fragile; if directly by Wafer exposure in air, will directly cause wafer to be polluted or be subject to external force injury and damaged, so need to carry out packaging protecting to wafer; in the time that wafer is packed; be generally to use with the crystal box of brilliant boat, wafer to be preserved, avoid the direct contact stain thing of wafer and external force, affect its serviceability.Brilliant boat is the wafer mounting apparatus that an inside is provided with many clamp bar slots, each wafer can be separated and puts separately, can not produce the friction between wafer and wafer, cause the wearing and tearing of crystal column surface, reduce wafer rocking in crystal box simultaneously, in the process that ensures to the full extent to store and transport, wafer is intact.
For the wafer that is greater than 15Mil for thickness, it stores with transport and all can under existing brilliant boat fixing, complete.But, along with the development in modern semiconductor technology field, the thickness of wafer is by attenuate again and again, below wafer thickness is thinned to 15Mil time, attenuate wafer is very fragile, very easily bending, due to the defect in the brilliant boat draw-in groove design of tradition, the groove bit width of the brilliant boat of establishing in crystal box is excessive can not fix attenuate wafer well, if directly stored with the crystal box with brilliant boat or transport attenuate wafer, be easy to shake, cause attenuate wafer to deform and the situation of fragmentation, reduce the yields of attenuate wafer; In order to ensure the safety of attenuate wafer in transportation, also can adopt now round box or black box to pack, but there is again following problem in this: be all the crystal box with brilliant boat due to what use before packaging, therefore while packaging, need to use vacuum WAND manually to put in round box or black box piecemeal attenuate wafer, will certainly bring like this duplication of labour and inefficiency, have very large fragmentation risk simultaneously.At present in order to reduce these unnecessary wafer damages as far as possible, can require operating personnel as far as possible careful in the time of operation, and require express delivery and logistics company in the time of transport wafer, will avoid the barbarous operation of goods and clash into, but these solutions all produce little effect, can not fundamentally solve even fragmentation problem of the distortion of attenuate wafer in transportation completely, improve the yields of attenuate wafer.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of brilliant boat structure, in storage and transportation, be out of shape the even problem of fragmentation for solving prior art attenuate wafer, for the normal operation of subsequent technique provides safeguard, improve the yields of attenuate wafer.
For achieving the above object and other relevant objects, the utility model provides a kind of brilliant boat structure, described brilliant boat structure at least comprises: two joint pins that are positioned at bottom, described joint pin two ends are fixed with respectively front apron and backboard, between described front apron and described backboard, be provided with multiple parallel and spaced supporting brackets, described supporting bracket is the low wide and up narrow frame structure without base.
Preferably, described multiple supporting bracket is evenly arranged.
Preferably, the groove bit width between any two adjacent supporting brackets is 0.8mm～1.2mm.
Preferably, described frame structure is trapezoidal, and its lower edge lengths is 84mm～86mm, and upper edge lengths is 18.5mm～19.5mm.
Preferably, the height of described supporting bracket is 101mm～103mm.
Preferably, the framework width of described ladder-shaped frame body structure is 7.5mm～8.5mm.
Preferably, the projection of described supporting bracket in the plane along thickness W3 direction comprises rectangular lower and is positioned at the trapezoidal upper in described rectangular lower.
Preferably, the rectangular lower thickness of described supporting bracket is 4.8mm～5.2mm.
Preferably, the width of described joint pin is 12.5mm～13.5mm, is highly 7.5mm～8.5mm.
As mentioned above, the utility model provides a kind of brilliant boat structure, described brilliant boat structure at least comprises: two joint pins that are positioned at bottom, described joint pin two ends are fixed with respectively front apron and backboard, between described front apron and described backboard, be provided with multiple parallel and spaced supporting brackets, described supporting bracket is the low wide and up narrow frame structure without base.The utlity model has following beneficial effect: supporting plate structure provided by the utility model has reduced the groove bit width of draw-in groove, well fix attenuate wafer, can be directly with storing and transport attenuate wafer with the crystal box of this crystalline substance boat, do not need attenuate wafer from crystal box, to transfer in round box or black box, reduce the unnecessary duplication of labour, while avoiding attenuate wafer store in the crystal box with common brilliant boat and transport, run into simultaneously because rocking the even situation of fragmentation of being out of shape, improve the yields of attenuate wafer, ensure the normal operation of subsequent technique.
Brief description of the drawings
Fig. 1 is shown as the structural representation of brilliant boat structure of the present utility model in crystal box.
Fig. 2 is shown as the Facad structure schematic diagram of brilliant boat structure of the present utility model.
Fig. 3 is shown as the side structure schematic diagram of brilliant boat structure of the present utility model.
Element numbers explanation
The brilliant boat structure that 1 the utility model provides
2 crystal boxes
3 attenuate wafers
11 joint pins
12 front aprons
13 backboards
14 supporting brackets
The lower edge lengths of L1 ladder-shaped frame body structure
The upper edge lengths of L2 ladder-shaped frame body structure
The inclined plane length of L3 supporting bracket trapezoidal upper
The length that L4 occupies from front apron to backboard on joint pin
The cross-sectional width of W1 joint pin
Groove bit width between any two adjacent supporting brackets of W2
The thickness of W3 supporting bracket rectangular lower
The framework width of W4 ladder-shaped frame body structure
The depth of section of H1 joint pin
The height of H2 supporting bracket
The height of H3 supporting bracket rectangular lower
Embodiment
By specific instantiation, execution mode of the present utility model is described below, those skilled in the art can understand other advantages of the present utility model and effect easily by the disclosed content of this specification.The utility model can also be implemented or be applied by other different embodiment, and the every details in this specification also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present utility model.
Refer to Fig. 1 to Fig. 3.It should be noted that, the diagram providing in the present embodiment only illustrates basic conception of the present utility model in a schematic way, satisfy and only show with assembly relevant in the utility model in graphic but not component count, shape and size drafting while implementing according to reality, when its actual enforcement, kenel, quantity and the ratio of each assembly can be a kind of random change, and its assembly layout kenel also may be more complicated.
As shown in Figure 1, in figure, shown that the brilliant boat structure 1 that the utility model provides coordinates crystal box 2 to load the structural representation of attenuate wafer 3.The low wide and up narrow structure of brilliant boat structure 1 that the utility model provides is more stable, can firmly be positioned in crystal box 2, can not bring rocking between brilliant boat structure 1 that the utility model provides and crystal box 2; The brilliant boat structure 1 that attenuate wafer 3 provides at the utility model has been avoided rocking on fore-and-aft direction under fixing, and crystal box 2 is fixed again attenuate wafer 3 on left and right directions simultaneously.Hence one can see that, and attenuate wafer 3 is loaded in the crystal box 2 of the brilliant boat structure 1 providing with the utility model, can effectively avoid rocking in storage and transportation, and protection attenuate wafer 3 indeformable even fragmentations, ensure the normal operation of subsequent technique.
As shown in Figures 2 and 3, the brilliant boat structure 1 of one that the utility model provides, described brilliant boat structure 1 at least comprises two joint pins 11 that are positioned at bottom, described joint pin 11 two ends are fixed with respectively front apron 12 and backboard 13, between described front apron 12 and described backboard 13, be provided with multiple parallel and spaced supporting brackets 14, described supporting bracket 14 is the low wide and up narrow frame structure without base.In the present embodiment, be preferably ladder-shaped frame body structure.
The cylinder that joint pin 11 in the utility model is rectangle for cross section, the cross-sectional width W1 of described joint pin 11 is set as 12.5mm～13.5mm, and height H 1 is set as 7.5mm～8.5mm, in the present embodiment, the cross-sectional width W1 of described joint pin is set as 13mm, and height H 1 is set as 8mm.Two joint pins 11 of the present utility model can effectively be fixed front apron 12, backboard 13 and supporting bracket 14, in conjunction with the supporting bracket 14 of the low wide and up narrow ladder-shaped frame body structure without base, the brilliant boat structure 1 providing for the utility model provides solid, firm supporting structure, brilliant boat 1 stabilized structure that the utility model is provided.
The supporting bracket 14 of evenly arranging in the brilliant boat structure 1 that the utility model provides, groove bit width W2 between any two adjacent supporting brackets 14 is set as 0.8mm～1.2mm, in the present embodiment, described groove bit width W2 is set as 1.2mm, this groove bit width W2 is the half of common brilliant boat groove bit width, and effectively fixed thickness is the attenuate wafer of general wafer thickness half, the height H 2 of described supporting bracket 14 is set as 101mm～103mm, in the present embodiment, the height H 2 of described supporting bracket is set as 102mm, the following length L 1 of the low wide and up narrow ladder-shaped frame body structure without base of supporting bracket 14 is set as 84mm～86mm, top length L 2 is set as 18.5mm～19.5mm, the framework width W 4 of ladder-shaped frame body structure is set as 7.5mm～8.5mm, in the present embodiment, the following length L 1 of described ladder-shaped frame body structure is set as 85mm, top length L 2 is set as 19mm, framework width W 4 is set as 8mm, lower wide design makes chassis more steady, upper narrow design reduces contact area relatively, can effectively fix attenuate wafer 3, can reduce again the injury of contact-making surface to attenuate wafer 3.Simultaneously, the projection of supporting bracket on side plane comprises rectangular lower and is positioned at the trapezoidal upper in described rectangular lower, this rectangular lower height H 3 is set as 79mm～81mm, rectangular lower thickness W3 is set as 4.8mm～5.2mm, the inclined plane length L 3 of this trapezoidal upper is set as 22mm～24mm, in the present embodiment, rectangular lower height H 3 is set as 80mm, thickness W3 is set as 5mm, the inclined plane length L 3 of trapezoidal upper is set as 23mm, this design makes upper end, groove position wider, can be convenient to attenuate wafer 3 to insert in brilliant boat 1 structure that the utility model provides, design consideration comparison can highlight hommization.
In sum, the utility model provides a kind of brilliant boat structure, described brilliant boat structure at least comprises two joint pins that are positioned at bottom, described joint pin two ends are fixed with respectively front apron and backboard, between described front apron and described backboard, be provided with multiple parallel and spaced supporting brackets, described supporting bracket is the low wide and up narrow frame structure without base.Supporting plate structure provided by the utility model has reduced the groove bit width of draw-in groove, well fix attenuate wafer, can be directly with storing and transport attenuate wafer with the crystal box of this crystalline substance boat, do not need attenuate wafer from crystal box, to transfer in round box or black box, reduce the unnecessary duplication of labour, while avoiding attenuate wafer store in the crystal box with common brilliant boat and transport, run into simultaneously because rocking the even situation of fragmentation of being out of shape, improve the yields of attenuate wafer, ensure the normal operation of subsequent technique.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all can, under spirit of the present utility model and category, modify or change above-described embodiment.Therefore, have in technical field under such as and conventionally know that the knowledgeable modifies or changes not departing from all equivalences that complete under spirit that the utility model discloses and technological thought, must be contained by claim of the present utility model.
Claims (9)
1. a brilliant boat structure, it is characterized in that, described brilliant boat structure at least comprises: two joint pins that are positioned at bottom, described joint pin two ends are fixed with respectively front apron and backboard, between described front apron and described backboard, be provided with multiple parallel and spaced supporting brackets, described supporting bracket is the low wide and up narrow frame structure without base.
2. brilliant boat structure according to claim 1, is characterized in that: described multiple supporting brackets are evenly arranged.
3. brilliant boat structure according to claim 1, is characterized in that: the groove bit width between any two adjacent supporting brackets is 0.8mm～1.2mm.
4. brilliant boat structure according to claim 1, is characterized in that: described frame structure is trapezoidal, and its lower edge lengths is 84mm～86mm, and upper edge lengths is 18.5mm～19.5mm.
5. brilliant boat structure according to claim 4, is characterized in that: the framework width of described ladder-shaped frame body structure is 7.5mm～8.5mm.
6. brilliant boat structure according to claim 1, is characterized in that: the height of described supporting bracket is 101mm～103mm.
7. brilliant boat structure according to claim 1, is characterized in that: the projection of described supporting bracket in the plane along thickness W3 direction comprises rectangular lower and be positioned at the trapezoidal upper in described rectangular lower.
8. brilliant boat structure according to claim 7, is characterized in that: the rectangular lower thickness of described supporting bracket is 4.8mm～5.2mm.
9. brilliant boat structure according to claim 1, is characterized in that: the width of described joint pin is 12.5mm～13.5mm, is highly 7.5mm～8.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420031375.XU CN203690269U (en) | 2014-01-17 | 2014-01-17 | Wafer boat structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420031375.XU CN203690269U (en) | 2014-01-17 | 2014-01-17 | Wafer boat structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203690269U true CN203690269U (en) | 2014-07-02 |
Family
ID=51012141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420031375.XU Expired - Fee Related CN203690269U (en) | 2014-01-17 | 2014-01-17 | Wafer boat structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203690269U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106449494A (en) * | 2016-10-08 | 2017-02-22 | 无锡宏纳科技有限公司 | Wafer-dedicated storage frame |
| CN111785669A (en) * | 2020-07-15 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Substrate bearing device and cleaning equipment |
-
2014
- 2014-01-17 CN CN201420031375.XU patent/CN203690269U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106449494A (en) * | 2016-10-08 | 2017-02-22 | 无锡宏纳科技有限公司 | Wafer-dedicated storage frame |
| CN111785669A (en) * | 2020-07-15 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Substrate bearing device and cleaning equipment |
| CN111785669B (en) * | 2020-07-15 | 2023-08-18 | 北京北方华创微电子装备有限公司 | Substrate bearing device and cleaning equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140702 Termination date: 20190117 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |