CN106425115B - A kind of laser process equipment and its device for detecting laser beam perforation - Google Patents
A kind of laser process equipment and its device for detecting laser beam perforation Download PDFInfo
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- CN106425115B CN106425115B CN201610889534.3A CN201610889534A CN106425115B CN 106425115 B CN106425115 B CN 106425115B CN 201610889534 A CN201610889534 A CN 201610889534A CN 106425115 B CN106425115 B CN 106425115B
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- cutting head
- laser beam
- gas flow
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of laser process equipment and its device of detection laser beam perforation, the device of the detection laser beam perforation includes laser cutting head, pneumatic detector and controller.The underface of the cutting part of material to be processed, the gas flow after detection laser cutting head is opened immediately below the cutting part is arranged in the pneumatic detector.When gas flow of the controller after laser cutting head unlatching immediately below the cutting part is greater than pre-set gas flow, the laser cutting head is closed.After perforating material to be processed, gas flow becomes larger, and is detected by pneumatic detector, to close laser cutting head, has ensured perforation quality, has coped with different rapidoprints, no replacement is required laser cutting head, applied widely.
Description
Technical field
The present invention relates to field of laser processing, in particular to a kind of laser process equipment and its dress for detecting laser beam perforation
It sets.
Background technique
Laser cutting is the high power density laser beam irradiation workpiece using line focus, melts illuminated material rapidly
Change, vaporization, ablation reach burning point, while blowing down melt substance by with the coaxial high-speed flow of light beam, to realize work
Part cuts open or perforates.
Laser beam perforation process blowout gas, on the one hand be used as protective gas, protect cutting head interior optics not by
The pollution of perforation procedure slag, on the one hand blows away machining area slag.
The laser beam perforation period can be had an impact, be difficult by constant in perforation procedure material internal purity and uneven thickness
Energy hole perforation time.The device of traditional detection laser beam perforation is added on the basis of cutting head interior optics
Dress installs CCD camera additional by devices such as refracting telescopes specifically inside cutting head, and detection laser beam perforation process laser focuses material
The upper size for issuing spark, whether going judgement to penetrate.It catches to grab because of vision and has higher want to ambient brightness and material surface reflectance
It asks, camera then will affect into phase for stronger materials of surface reflectances such as detection copper aluminium, making perforation detection, there are errors.For
Certain materials can generate a large amount of cigarette ash in perforation procedure, this can greatly influence vision and catch the accuracy grabbed.Moreover, producing
In, often because rapidoprint difference need to use different cutting heads, frequently replacing cutting head influences production efficiency, and band inspection on the market
The cutting head of survey perforation function is simultaneously few, needs custom-made, so that the device narrow application range of existing detection laser beam perforation.
Thus the prior art could be improved and improve.
Summary of the invention
Place in view of above-mentioned deficiencies of the prior art, the purpose of the present invention is to provide a kind of laser process equipment and its inspections
The device for surveying laser beam perforation, copes with different rapidoprints, and no replacement is required laser cutting head is applied widely.
In order to achieve the above object, this invention takes following technical schemes:
A kind of device of laser process equipment detection laser beam perforation, comprising:
Laser cutting head；
The pneumatic detector of the underface of the cutting part of material to be processed is set, is opened for detecting laser cutting head
Gas flow immediately below the cutting part afterwards, and the gas flow that will test is exported to controller；
Controller is greater than pre-set gas for the gas flow immediately below the cutting part described after laser cutting head is opened
When flow, the laser cutting head is closed.
In the device of the described laser process equipment detection laser beam perforation, the device of the detection laser beam perforation further includes the
One driver is moved to the underface of the cutting part of material to be processed for certain driving air-flow detector.
In the device of the laser process equipment detection laser beam perforation, the device of the detection laser beam perforation further includes sitting
Loader, the coordinate of each cutting part for presetting material to be processed are marked, and the coordinate of setting is exported to the control
Device.
In the device of the described laser process equipment detection laser beam perforation, the device of the detection laser beam perforation further includes the
Two drivers, the surface of the cutting part for laser cutting head to be moved to material to be processed.
In the device of the laser process equipment detection laser beam perforation, the controller includes:
Start and stop unit, the underface of the cutting part for being moved to material to be processed in pneumatic detector, laser cutting
Behind the surface for the cutting part that head is moved to material to be processed, pneumatic detector and laser cutting head are opened；It is being cut by laser
When gas flow after head is opened immediately below the cutting part is greater than pre-set gas flow, it is gentle to close the laser cutting head
Current sensor；
Coordinate transmission unit is exported for receiving the coordinate of coordinate input device output, and by the coordinate to the first driving
Device and the second driver.
In the device of the laser process equipment detection laser beam perforation, the laser cutting head includes laser, cutting
Casing and lens for focusing；The lens are fixed on the inside of cutting casing, and the laser will be swashed by optical fiber
To one end of cutting casing, the other end of the cutting casing is provided with for exporting laser and assisting gas light output
First hole, it is described cutting casing side wall on be provided with for auxiliary gas input the second hole.
In the device of the laser process equipment detection laser beam perforation, first driver includes the mobile dress of cross
It sets, the cross mobile device includes X-axis moving assembly and the Y-axis moving assembly that is arranged on X-axis moving assembly, the X-axis
Moving assembly driving Y-axis moving assembly moves in the X-axis direction, and the pneumatic detector is arranged on Y-axis moving assembly, described
Y-axis moving assembly certain driving air-flow detector moves in the Y-axis direction.
In the device of the laser process equipment detection laser beam perforation, the coordinate input device includes touch screen.
In the device of the laser process equipment detection laser beam perforation, second driver includes mechanical arm.
A kind of laser process equipment, the device including laser process equipment as described above detection laser beam perforation.
Compared to the prior art, described in the device of laser process equipment provided by the invention and its detection laser beam perforation
The device for detecting laser beam perforation includes laser cutting head, pneumatic detector and controller.The pneumatic detector is arranged to be added
The underface of the cutting part of work material, the gas flow after detection laser cutting head is opened immediately below the cutting part.Control
When gas flow of the device processed after laser cutting head unlatching immediately below the cutting part is greater than pre-set gas flow, described in closing
Laser cutting head.After perforating material to be processed, gas flow becomes larger, and is detected by pneumatic detector, cuts to close laser
Head is cut, has ensured perforation quality, copes with different rapidoprints, no replacement is required laser cutting head is applied widely.
Detailed description of the invention
Fig. 1 is the perspective view of laser process equipment provided by the invention.
Fig. 2 is the sectional view for the device that laser process equipment provided by the invention detects laser beam perforation.
Fig. 3 is the structural block diagram for the device that laser process equipment provided by the invention detects laser beam perforation.
Fig. 4 is that laser process equipment provided by the invention detects in the device of laser beam perforation, the solid of cross mobile device
Figure.
Specific embodiment
The present invention provides a kind of laser process equipment and its detects the device of laser beam perforation.To make the purpose of the present invention, skill
Art scheme and effect are clearer, clear, and the present invention is described in more detail as follows in conjunction with drawings and embodiments.It should manage
Solution, described herein specific examples are only used to explain the present invention, is not intended to limit the present invention.
The present invention provides a kind of laser process equipment, referring to Fig. 1, the laser process equipment includes 10 He of processing platform
Detect the device of laser beam perforation.Be arranged on the processing platform 10 it is fluted, it is described detection laser beam perforation device be arranged in institute
It states in groove.
Referring to Figure 2 together and Fig. 3, the device of the detection laser beam perforation, including laser cutting head 40, pneumatic detector
30 and controller 20.
The underface of the cutting part of materials A to be processed is arranged in the pneumatic detector 30, for detecting laser cutting
Gas flow T1 after first 40 unlatching immediately below the cutting part, and the gas flow that will test is exported to controller 20.It is excellent
Choosing, the pneumatic detector 30 is target type meter, its working principle is that when air-flow flows in measurement pipe, because of its own
Kinetic energy and target plate generate pressure difference, and generate to the active force of target plate, and the corresponding process exported at specific voltage.
The controller 20 is big for the gas flow T1 after the unlatching of laser cutting head 40 immediately below the cutting part
When pre-set gas flow, the laser cutting head 40 is closed.Preferably, the controller 20 is programmable controller.
The pre-set gas flow can be set according to the actual situation, and in the present embodiment, the pre-set gas flow is
The gas flow T0 that pneumatic detector 30 detects at an arbitrary position before laser cutting head 40 is opened.That is, the pneumatic detector
30 are also used to detect the gas flow before laser cutting head is opened, and the gas flow is exported to controller 20.The position of detection
It sets any, it is preferred that the pneumatic detector 30 is before laser cutting head unlatching, in the moving range of pneumatic detector 30,
The gas flow for detecting N number of position takes its average value as pre-set gas flow.The N is the positive integer more than or equal to 2, excellent
Choosing, the N is one in 4,5 and 6.Spacing between each detection position is more than or equal to 100mm.
The laser cutting head 40, pneumatic detector 30 are all connected with the controller 20.
After materials A to be processed perforation, gas flow becomes larger, and the present invention utilizes the characteristic, is examined by pneumatic detector 30
The gas flow for surveying cutting front and back, is compared two flows by controller 20, to judge whether perforation is completed, is perforating
Laser cutting head 40 is closed after the completion, has been ensured perforation quality, has been coped with different rapidoprints, no replacement is required laser cutting head,
It is applied widely.
Further, the laser cutting head 40 includes laser 410, cutting casing 430 and the lens for focusing
440；The lens 440 are fixed on the inside of cutting casing 430, and laser is output to by the laser 410 by optical fiber 420
Cut one end of casing 430, the other end of the cutting casing 430 is provided with for exporting laser and assisting the of gas
One hole, it is described cutting casing 430 side wall on be provided with for auxiliary gas input the second hole 450, assist the flowing of gas
Direction is as denoted by the arrows in fig. 2.The laser 410 connects the controller 20, controls laser 410 by controller 20
It opens and closes.
The device of the detection laser beam perforation further includes the first driver 60, the second driver 50 and coordinate input device 70.
First driver 60, the second driver 50 and coordinate input device 70 are connect with the controller 20.
The coordinate input device 70, the coordinate of each cutting part for presetting materials A to be processed, and by the seat of setting
Mark output is to the controller 20.The coordinate input device 70 includes touch screen, it is of course also possible to be mouse, keyboard etc..It is described
Controller 20 is also used to receive the coordinate of the output of coordinate input device 70, and the coordinate is exported to the first driver 60 and second
Driver 50.
First driver 60 is detected for receiving the coordinate of the sending of controller 20 according to the coordinate certain driving air-flow
Device 30 is moved to the underface of the cutting part of material to be processed.The pneumatic detector 30 is fixed on first driver 60
On.Referring to Fig. 4, first driver 60 includes cross mobile device, the cross mobile device includes X-axis moving assembly
610 and the Y-axis moving assembly 620 that is arranged on X-axis moving assembly 610, the X-axis moving assembly 610 be arranged in processing platform
On 10.The X-axis moving assembly 610 drives Y-axis moving assembly to move in the X-axis direction, and the pneumatic detector is arranged in Y-axis
On moving assembly 620, the 620 certain driving air-flow detector 30 of Y-axis moving assembly moves in the Y-axis direction.
Specifically, the X-axis moving assembly 610 includes X-axis pedestal 611, X-axis servo motor 612, X-axis screw rod 613, X-axis
The vehicle-mounted plate 615 of guide rail 614, X-axis.The X-axis servo motor 612, X-axis screw rod 613, X-axis guide rail 614 are arranged at X-axis pedestal
On 611, the driving axis connection X-axis screw rod 613 of X-axis servo motor 612.The vehicle-mounted setting of plate 615 of X-axis is arranged in parallel at two
X-axis guide rail 614 on, the X-axis screw rod 613, which passes through, the vehicle-mounted plate 615 of X-axis and drives the vehicle-mounted plate 615 of X-axis to move along the x-axis.It is described
Y-axis moving assembly 620 is arranged on the vehicle-mounted plate 615 of the X-axis.The Y-axis moving assembly 620 is watched including Y-axis pedestal 621, Y-axis
Take the vehicle-mounted plate 625 of motor 622, Y-axis screw rod 623, Y-axis guide rail 624, Y-axis.The setting of Y-axis pedestal 621 is vehicle-mounted in the X-axis
On plate 615.The Y-axis servo motor 622, Y-axis screw rod 623, Y-axis guide rail 624 are arranged on Y-axis pedestal 621, Y-axis servo
The driving axis connection Y-axis screw rod 623 of motor 622.The vehicle-mounted plate 625 of Y-axis is arranged in two Y-axis guide rails 624 disposed in parallel
On, the Y-axis screw rod 623 passes through the vehicle-mounted plate 625 of Y-axis and the vehicle-mounted plate 625 of Y-axis is driven to move along Y-axis.The pneumatic detector 30
It is arranged on the vehicle-mounted plate 625 of the Y-axis.Certainly, in other embodiments, the X-axis moving assembly and Y-axis moving assembly are set
Setting can also turn around, that is, X-axis moving assembly is arranged on Y-axis moving assembly, drives X-axis moving assembly by Y-axis moving assembly
Mobile, principle is similar with structure, repeats no more.
First driver 60 further includes for driving the servo of X-axis servo motor 612 and Y-axis servo motor 622 to drive
Dynamic device.The controller 20 controls the cross mobile device by the servo-driver, to realize automatic detection gas
Body flow.
Second driver 50, for receiving the coordinate of the sending of controller 20, according to the coordinate by laser cutting head
40 are moved to the surface of the cutting part of material to be processed.The laser cutting head 40 is fixed on second driver 50
On.Preferably, second driver 50 includes mechanical arm.Second driver 50 further includes robot control system,
The controller 20 controls the movement of mechanical arm by the robot control system, realizes automation cutting.
Further, the controller 20 includes start and stop unit and coordinate transmission unit.The start and stop unit connection first
Driver 60, the second driver 50, pneumatic detector 30 and laser cutting head 40；The coordinate transmission unit connection coordinate input
Device 70, the first driver 60 and the second driver 50.
The start and stop unit is closed after detection for opening pneumatic detector 30 before laser cutting head 40 is opened
Pneumatic detector 30；Underface, the laser cutting head movement of the cutting part of material to be processed are moved in pneumatic detector 30
To after the surface of the cutting part of material to be processed, pneumatic detector 30 and laser cutting head 40 are opened；In laser cutting head
When gas flow T1 after 40 unlatchings immediately below the cutting part is greater than pre-set gas flow (preferred, when T1 is greater than T0),
Close the laser cutting head 40 and pneumatic detector 30.
The coordinate transmission unit is exported for receiving the coordinate of the output of coordinate input device 70, and by the coordinate to the
One driver 60 and the second driver 50.
The course of work of laser process equipment provided by the invention is as follows:
Step 1, preset by touch screen material to be processed cutting part (drilling point) X, Y coordinates, by RS485
Communications protocol is sent to programmable controller.
Step 2 opens the preperforative gas flow T0 of pneumatic detector detection.
The coordinate is sent to servo-driver with impulse form by step 3, programmable controller.
Step 4, servo driver drives cross mobile device are moved to coordinate points to be perforated.
Step 5 reaches the coordinate points when cross mobile device, and servo-driver feeds back a high level signal a to can be compiled
Range controller.
Step 6, mechanical arm drive laser cutting head to reach above punch position point.
Step 7, robot control system feed back a high level signal b to programmable controller.
If step 8, a+b=2, programmable controller just opens laser and airflow detecting device, carry out laser beam perforation with
The detection of gas flow T1.
Step 9, when detecting gas flow T1 > T0, programmable controller closed gas flow detector, perforation complete.
It is to be perforated that step 10, cross mobile device move to next punch position point etc..
In conclusion the present invention installs the device of the detection laser beam perforation additional on the basis of existing equipment, it is convenient and efficient,
The change of progress mechanical structure is not needed.The equipment can carry out detection of continuously perforating, and realize full-automatic perforation detection.
The device is applied widely, can be applied to optical fiber, carbon dioxide, etc. different wave lengths laser beam perforation cutting detection.
B, it control punch time, solution laser beam perforation can not worn fast and accurately by the detection device and control system
The problems such as thoroughly and time of break-through is too long, improves product quality, shortens the process-cycle.
It, can according to the technique and scheme of the present invention and its hair it is understood that for those of ordinary skills
Bright design is subject to equivalent substitution or change, and all these changes or replacement all should belong to the guarantor of appended claims of the invention
Protect range.
Claims (7)
1. a kind of device of laser process equipment detection laser beam perforation, including laser cutting head, which is characterized in that the detection swashs
The device of light perforation further include:
The pneumatic detector of the underface of the cutting part of material to be processed is set, for detecting institute after laser cutting head is opened
The gas flow immediately below cutting part is stated, and the gas flow that will test is exported to controller；
Controller is greater than pre-set gas flow for the gas flow immediately below the cutting part described after laser cutting head is opened
When, close the laser cutting head;
The device of the detection laser beam perforation further includes the first driver, is moved to material to be processed for certain driving air-flow detector
Cutting part underface;
The device of the detection laser beam perforation further includes coordinate input device, for presetting each cutting part of material to be processed
Coordinate, and the coordinate of setting is exported to the controller;
The pneumatic detector is target type meter；
First driver includes cross mobile device, and the cross mobile device includes X-axis moving assembly and is arranged in X-axis
Y-axis moving assembly on moving assembly, the X-axis moving assembly driving Y-axis moving assembly move in the X-axis direction, the gas
Current sensor is arranged on Y-axis moving assembly, and the Y-axis moving assembly certain driving air-flow detector moves in the Y-axis direction；
The X-axis moving assembly includes X-axis pedestal, X-axis servo motor, X-axis screw rod, X-axis guide rail, the vehicle-mounted plate of X-axis；The X-axis
Servo motor, X-axis screw rod, X-axis guide rail are arranged on X-axis pedestal, the driving axis connection X-axis screw rod of X-axis servo motor；It is described
The vehicle-mounted plate of X-axis is arranged in two X-axis guide rails disposed in parallel, and the X-axis screw rod passes through the vehicle-mounted plate of X-axis and drives X-axis vehicle-mounted
Plate moves along the x-axis；
The Y-axis moving assembly is arranged on the vehicle-mounted plate of the X-axis；The Y-axis moving assembly includes Y-axis pedestal, Y-axis servo electricity
Machine, Y-axis screw rod, Y-axis guide rail, the vehicle-mounted plate of Y-axis；The Y-axis pedestal is arranged on the vehicle-mounted plate of the X-axis；The Y-axis servo electricity
Machine, Y-axis screw rod, Y-axis guide rail are arranged on Y-axis pedestal, the driving axis connection Y-axis screw rod of Y-axis servo motor；The Y-axis vehicle
Support plate is arranged in two Y-axis guide rails disposed in parallel, and the Y-axis screw rod passes through the vehicle-mounted plate of Y-axis and drives the vehicle-mounted plate of Y-axis along Y
Axis is mobile；
First driver further includes the servo-driver for driving X-axis servo motor and Y-axis servo motor；The control
Device controls the cross mobile device by the servo-driver, to realize automatic detection gas flow；
The pneumatic detector in the moving range of pneumatic detector, detects the gas of N number of position before laser cutting head unlatching
Body flow takes its average value as pre-set gas flow.
2. the device of laser process equipment detection laser beam perforation according to claim 1, which is characterized in that the detection swashs
Light perforation device further include the second driver, for laser cutting head is moved to material to be processed cutting part just
Side.
3. the device of laser process equipment detection laser beam perforation according to claim 2, which is characterized in that the controller
Include:
Start and stop unit, the underface of the cutting part for being moved to material to be processed in pneumatic detector, laser cutting head move
Behind the surface for moving the cutting part of material to be processed, pneumatic detector and laser cutting head are opened；It is opened in laser cutting head
When opening the gas flow immediately below the rear cutting part greater than pre-set gas flow, the laser cutting head and air-flow inspection are closed
Survey device；
Coordinate transmission unit, for receiving the coordinate of coordinate input device output, and the coordinate exported to the first driver and
Second driver.
4. the device of laser process equipment detection laser beam perforation according to claim 1, which is characterized in that the laser is cut
Cutting head includes laser, cutting casing and the lens for focusing；The lens are fixed on the inside of cutting casing, described
Laser is output to one end of cutting casing by optical fiber by laser, and the other end of the cutting casing is provided with for defeated
Out laser and auxiliary gas the first hole, it is described cutting casing side wall on be provided with for auxiliary gas input the second hole.
5. the device of laser process equipment detection laser beam perforation according to claim 1, which is characterized in that the coordinate is defeated
Entering device includes touch screen.
6. the device of laser process equipment detection laser beam perforation according to claim 2, which is characterized in that described second drives
Dynamic device includes mechanical arm.
7. a kind of laser process equipment, which is characterized in that including laser process equipment as claimed in any one of claims 1 to 6
Detect the device of laser beam perforation.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610889534.3A CN106425115B (en) | 2016-10-12 | 2016-10-12 | A kind of laser process equipment and its device for detecting laser beam perforation |
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| CN201610889534.3A CN106425115B (en) | 2016-10-12 | 2016-10-12 | A kind of laser process equipment and its device for detecting laser beam perforation |
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| JP6767416B2 (en) * | 2018-03-26 | 2020-10-14 | ファナック株式会社 | Machining condition adjustment device and machine learning device |
| CN109290685A (en) * | 2018-12-03 | 2019-02-01 | 重庆至信实业集团有限公司 | Device is cut in a kind of laser cutting leakproof |
| CN113492269A (en) * | 2020-03-20 | 2021-10-12 | 大族激光科技产业集团股份有限公司 | Laser processing method |
| CN117817151B (en) * | 2024-03-05 | 2024-06-18 | 北京卓镭激光技术有限公司 | Laser processing system |
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| CN102922129B (en) * | 2011-08-08 | 2015-04-29 | 南京通孚轻纺有限公司 | Accurate cutting method based on laser identification cutting machine |
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|---|---|---|---|---|
| JPH02205283A (en) * | 1989-02-03 | 1990-08-15 | Fanuc Ltd | Laser beam machine |
| CN101819027A (en) * | 2009-02-27 | 2010-09-01 | 王晓东 | Method and device for detecting blind hole depth |
| CN102554479A (en) * | 2012-01-06 | 2012-07-11 | 昆山海大数控技术有限公司 | High-power CO2 (carbon dioxide) laser multistage punch control system device |
| DE102013100706A1 (en) * | 2013-01-24 | 2014-07-24 | Hugo Kern Und Liebers Gmbh & Co. Kg | Adjusting flow of test medium through opening of work piece e.g. perforated spray disc involves passing transmissive medium through opening, directing beam to ridge of work piece, rounding ridge with beam, and measuring flow rate of medium |
| CN105312781A (en) * | 2014-12-08 | 2016-02-10 | 牛得草 | Method for detecting whether materials are penetrated or not by using change of gas pressure or flow |
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| CN106425115A (en) | 2017-02-22 |
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