CN106425115A - Laser machining equipment and laser perforating detection device thereof - Google Patents
Laser machining equipment and laser perforating detection device thereof Download PDFInfo
- Publication number
- CN106425115A CN106425115A CN201610889534.3A CN201610889534A CN106425115A CN 106425115 A CN106425115 A CN 106425115A CN 201610889534 A CN201610889534 A CN 201610889534A CN 106425115 A CN106425115 A CN 106425115A
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- China
- Prior art keywords
- laser
- cutting head
- gas flow
- process equipment
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The invention discloses laser machining equipment and a laser perforating detection device thereof. The laser perforating detection device comprises a laser cutting head, a gas flow detector and a controller. The gas flow detector is arranged right below a cutting part of a material to be machined and detects gas flow right below the cutting part after the laser cutting head is started. The controller closes the laser cutting head when the gas flow right below the cutting part is larger than preset gas flow after the laser cutting head is started. After the material to be machined is perforated, the gas flow becomes large, which is detected by the gas flow detector, thus, the laser cutting head is closed, the perforating quality is guaranteed, for different machined materials, the laser cutting head does not need to be replaced, and the application range is wide.
Description
Technical field
The present invention relates to field of laser processing, particularly to the dress of a kind of laser process equipment and its detection laser beam perforation
Put.
Background technology
Laser cutting is to irradiate workpiece using the high power density laser bundle of line focus, so that irradiated material is melted rapidly
Change, vaporization, ablation or reach burning-point, blow down melt substance by the high velocity air coaxial with light beam, thus realizing work simultaneously
Part cuts open or bores a hole.
The gas of laser beam perforation process blowout, on the one hand as protective gas, protects cutting head interior optics not to be subject to
Perforation procedure slag pollutes, and on the one hand blows away machining area slag.
Impact can be produced on the laser beam perforation cycle in perforation procedure material internal purity with uneven thickness, be difficult to by constant
Energy hole perforation time.The device of traditional detection laser beam perforation is to carry out adding on the basis of cutting head interior optics
Dress, specifically installs CCD camera inside cutting head additional and passes through the devices such as refracting telescope, detect laser beam perforation process Laser Focusing material
On send the size of spark, go judgement whether to penetrate.Catch to grab because of vision and have higher wanting to ambient brightness and material surface reflectance
Ask, then can affect camera for stronger materials of surface reflectance such as detection copper aluminium and become phase, make perforation detect there is error.For
Some materials can produce substantial amounts of cigarette ash in perforation procedure, and this can greatly affect vision and catch the accuracy grabbed.And, producing
In, often cutting head impact production efficiency need to frequently be changed using different cutting heads because rapidoprint is different, and the inspection of market upper band
Survey the cutting head of perforation function few, need custom-made so that the device narrow application range of existing detection laser beam perforation.
Thus prior art could be improved and improves.
Content of the invention
In view of in place of above-mentioned the deficiencies in the prior art, it is an object of the invention to provide a kind of laser process equipment and its inspection
Survey the device of laser beam perforation, tackle different rapidoprints, laser cutting head need not be changed, applied widely.
In order to achieve the above object, this invention takes technical scheme below：
A kind of laser process equipment detects the device of laser beam perforation, including：
Laser cutting head；
It is arranged on the pneumatic detector of the underface of the cutting part of material to be processed, for detecting institute after laser cutting head unlatching
State the gas flow immediately below cutting part, and the gas flow of detection is exported to controller；
Controller, is more than pre-set gas flow for the gas flow immediately below cutting part described after laser cutting head is opened
When, close described laser cutting head.
Described laser process equipment detects in the device of laser beam perforation, and the device of described detection laser beam perforation also includes the
One driver, for driving pneumatic detector to move to the underface of the cutting part of material to be processed.
Described laser process equipment detects in the device of laser beam perforation, and the device of described detection laser beam perforation also includes sitting
Mark loader, for presetting the coordinate of each cutting part of material to be processed, and the coordinate of setting is exported to described control
Device.
Described laser process equipment detects in the device of laser beam perforation, and the device of described detection laser beam perforation also includes the
Two drivers, for moving to the surface of the cutting part of material to be processed by laser cutting head.
Described laser process equipment detects that in the device of laser beam perforation, described controller includes：
Start and stop unit, for moving to the underface of the cutting part of material to be processed in pneumatic detector, laser cutting head moves
Behind the surface of the cutting part moving material to be processed, open pneumatic detector and laser cutting head；Open in laser cutting head
When gas flow immediately below described cutting part after opening is more than pre-set gas flow, close described laser cutting head and air-flow inspection
Survey device；
Coordinate transmission unit, for receiving the coordinate of coordinate input device output, and described coordinate is exported to the first driver and
Second driver.
Described laser process equipment detects that in the device of laser beam perforation, described laser cutting head includes laser instrument, cutting
Casing and the lens for focusing on；Described lens are fixed on the inside of cutting casing, and described laser instrument will be swashed by optical fiber
To one end of cutting casing, the other end of described cutting casing is provided with for exporting laser and auxiliary gas light output
First hole, the side wall of described cutting casing is provided with the second hole for auxiliary gas input.
Described laser process equipment detects in the device of laser beam perforation, and described first driver includes the mobile dress of cross
Put, described cross mobile device includes X-axis moving assembly and the Y-axis moving assembly being arranged on X-axis moving assembly, described X-axis
Moving assembly drives Y-axis moving assembly to move in the X-axis direction, and described pneumatic detector is arranged on Y-axis moving assembly, described
Y-axis moving assembly drives pneumatic detector to move in the Y-axis direction.
Described laser process equipment detects that in the device of laser beam perforation, described coordinate input device includes touch-screen.
Described laser process equipment detects that in the device of laser beam perforation, described second driver includes mechanical arm.
A kind of laser process equipment, detects the device of laser beam perforation including laser process equipment as above.
In the laser process equipment providing compared to prior art, the present invention and its device of detection laser beam perforation, described
The device of detection laser beam perforation includes laser cutting head, pneumatic detector and controller.Described pneumatic detector is arranged on to be added
The underface of the cutting part of work material, the gas flow immediately below described cutting part after detection laser cutting head unlatching.Control
When gas flow immediately below described cutting part after laser cutting head unlatching for the device processed is more than pre-set gas flow, close described
Laser cutting head.After perforating material to be processed, gas flow becomes big, is detected by pneumatic detector, thus close laser cutting
Cut head, ensured perforation quality, tackle different rapidoprints, laser cutting head need not be changed, applied widely.
Brief description
The stereogram of the laser process equipment that Fig. 1 provides for the present invention.
Fig. 2 detects the sectional view of the device of laser beam perforation for the laser process equipment that the present invention provides.
Fig. 3 detects the structured flowchart of the device of laser beam perforation for the laser process equipment that the present invention provides.
Fig. 4 detects in the device of laser beam perforation for the laser process equipment that the present invention provides, the solid of cross mobile device
Figure.
Specific embodiment
The present invention provides a kind of laser process equipment and its device of detection laser beam perforation.For making the purpose of the present invention, skill
Art scheme and effect are clearer, clear and definite, and the present invention is described in more detail for the embodiment that develops simultaneously referring to the drawings.Should manage
Solution, specific embodiment described herein only in order to explain the present invention, is not intended to limit the present invention.
The present invention provides a kind of laser process equipment, refers to Fig. 1, described laser process equipment includes processing platform 10 He
The device of detection laser beam perforation.Arrange fluted on described processing platform 10, the device of described detection laser beam perforation is arranged on institute
State in groove.
See also Fig. 2 and Fig. 3, the device of described detection laser beam perforation, including laser cutting head 40, pneumatic detector
30 and controller 20.
Described pneumatic detector 30 is arranged on the underface of the cutting part of materials A to be processed, for detecting laser cutting
40 open after gas flow T1 immediately below described cutting part, and the gas flow of detection is exported to controller 20.Excellent
Choosing, described pneumatic detector 30 is target type meter, and its operation principle is when air-flow flows in measurement pipe, because of its own
Kinetic energy and target plate produce pressure reduction, and produce the active force to target plate, and correspond to into the process that specific voltage exports.
Described controller 20 is big for the gas flow T1 immediately below described cutting part after laser cutting head 40 is opened
When pre-set gas flow, close described laser cutting head 40.Preferably, described controller 20 is Programmable Logic Controller.
Described pre-set gas flow can be set according to actual conditions, and in the present embodiment, described pre-set gas flow is
Laser cutting head 40 opens the gas flow T0 that front pneumatic detector 30 detects at an arbitrary position.That is, described pneumatic detector
30 are additionally operable to the gas flow before detecting laser cutting head unlatching, and described gas flow is exported to controller 20.The position of detection
Put arbitrarily it is preferred that described pneumatic detector 30 is before laser cutting head unlatching, in the moving range of pneumatic detector 30,
Detect the gas flow of N number of position, take its mean value as pre-set gas flow.Described N is the positive integer more than or equal to 2, excellent
Choosing, described N is one of 4,5 and 6.Spacing between each test position is more than or equal to 100mm.
Described laser cutting head 40, pneumatic detector 30 are all connected with described controller 20.
After materials A to be processed perforation, gas flow becomes big, and the present invention utilizes this characteristic, is examined by pneumatic detector 30
Survey the gas flow before and after cutting, by controller 20, two flows are compared, thus judging whether perforation completes, in perforation
After the completion of close laser cutting head 40, ensured perforation quality, tackled different rapidoprints, laser cutting head need not be changed,
Applied widely.
Further, described laser cutting head 40 includes laser instrument 410, cutting casing 430 and the lens for focusing on
440；Described lens 440 are fixed on the inside of cutting casing 430, and laser is exported by described laser instrument 410 by optical fiber 420
One end of cutting casing 430, the other end of described cutting casing 430 be provided with for export laser and auxiliary gas the
One hole, the side wall of described cutting casing 430 is provided with the second hole 450 for auxiliary gas input, the flowing of auxiliary gas
Direction is as denoted by the arrows in fig. 2.Described laser instrument 410 connects described controller 20, controls laser instrument 410 by controller 20
Open and close.
The device of described detection laser beam perforation also includes the first driver 60, the second driver 50 and coordinate input device 70.
Described first driver 60, the second driver 50 and coordinate input device 70 are all connected with described controller 20.
Described coordinate input device 70, for presetting the coordinate of each cutting part of materials A to be processed, and the seat by setting
Mark output is to described controller 20.Described coordinate input device 70 includes touch-screen, it is of course also possible to be mouse, keyboard etc..Described
Controller 20 is additionally operable to receive the coordinate of coordinate input device 70 output, and described coordinate is exported to the first driver 60 and second
Driver 50.
Described first driver 60, for receiving the coordinate that controller 20 sends, drives air-flow detection according to described coordinate
Device 30 moves to the underface of the cutting part of material to be processed.Described pneumatic detector 30 is fixed on described first driver 60
On.Refer to Fig. 4, described first driver 60 includes cross mobile device, and described cross mobile device includes X-axis moving assembly
610 are arranged on processing platform with the Y-axis moving assembly 620 being arranged on X-axis moving assembly 610, described X-axis moving assembly 610
On 10.Described X-axis moving assembly 610 drives Y-axis moving assembly to move in the X-axis direction, and described pneumatic detector is arranged on Y-axis
On moving assembly 620, described Y-axis moving assembly 620 drives pneumatic detector 30 to move in the Y-axis direction.
Specifically, described X-axis moving assembly 610 includes X-axis pedestal 611, X-axis servomotor 612, X-axis screw mandrel 613, X-axis
The vehicle-mounted plate of guide rail 614, X-axis 615.Described X-axis servomotor 612, X-axis screw mandrel 613, X-axis guide rail 614 are arranged at X-axis pedestal
On 611, the drive shaft of X-axis servomotor 612 connects X-axis screw mandrel 613.The vehicle-mounted plate 615 of described X-axis is arranged on two and be arranged in parallel
X-axis guide rail 614 on, described X-axis screw mandrel 613 passes through the vehicle-mounted plate of X-axis 615 drive the vehicle-mounted plate of X-axis 615 to move along the x-axis.Described
Y-axis moving assembly 620 is arranged on the vehicle-mounted plate of described X-axis 615.Described Y-axis moving assembly 620 includes Y-axis pedestal 621, Y-axis is watched
Take motor 622, Y-axis screw mandrel 623, Y-axis guide rail 624, the vehicle-mounted plate of Y-axis 625.It is vehicle-mounted that described Y-axis pedestal 621 is arranged on described X-axis
On plate 615.Described Y-axis servomotor 622, Y-axis screw mandrel 623, Y-axis guide rail 624 are arranged on Y-axis pedestal 621, Y-axis servo
The drive shaft of motor 622 connects Y-axis screw mandrel 623.The vehicle-mounted plate 625 of described Y-axis is arranged on two Y-axis guide rails be arrangeding in parallel 624
On, described Y-axis screw mandrel 623 passes through the vehicle-mounted plate of Y-axis 625 and drives the vehicle-mounted plate of Y-axis 625 to move along Y-axis.Described pneumatic detector 30
It is arranged on the vehicle-mounted plate of described Y-axis 625.Certainly, in other embodiments, the setting of described X-axis moving assembly and Y-axis moving assembly
Put and can also turn around, i.e. X-axis moving assembly is arranged on Y-axis moving assembly, X-axis moving assembly is driven by Y-axis moving assembly
Mobile, principle is similar with structure, repeats no more.
Described first driver 60 is also included for driving the servo of X-axis servomotor 612 and Y-axis servomotor 622 to drive
Dynamic device.Described controller 20 passes through described servo-driver and controls described cross mobile device, thus realizing Aulomatizeted Detect gas
Body flow.
Described second driver 50, for receiving the coordinate that controller 20 sends, according to described coordinate by laser cutting head
The surface of 40 cutting parts moving to material to be processed.Described laser cutting head 40 is fixed on described second driver 50
On.Preferably, described second driver 50 includes mechanical arm.Described second driver 50 also includes robot control system,
Described controller 20, by the movement of described robot control system control machinery arm, realizes automation cutting.
Further, described controller 20 includes start and stop unit and coordinate transmission unit.Described start and stop unit connects first
Driver 60, the second driver 50, pneumatic detector 30 and laser cutting head 40；Described coordinate transmission unit connection coordinate input
Device 70, the first driver 60 and the second driver 50.
Described start and stop unit, for opening pneumatic detector 30 before laser cutting head 40 is opened, detection is closed after finishing
Pneumatic detector 30；Move to the underface of the cutting part of material to be processed in pneumatic detector 30, laser cutting head moves
To after the surface of the cutting part of material to be processed, open pneumatic detector 30 and laser cutting head 40；In laser cutting head
When gas flow T1 immediately below described cutting part after 40 unlatchings is more than pre-set gas flow（Preferably, when T1 is more than T0）,
Close described laser cutting head 40 and pneumatic detector 30.
Described coordinate transmission unit, for receiving the coordinate of coordinate input device 70 output, and described coordinate is exported to the
One driver 60 and the second driver 50.
The course of work of the laser process equipment that the present invention provides is as follows：
1st step, preset the cutting part of material to be processed by touch-screen（Drilling point）X, Y-coordinate, through RS485 communication
Agreement is sent to Programmable Logic Controller.
2nd step, unlatching pneumatic detector detect preperforative gas flow T0.
3rd step, Programmable Logic Controller send described coordinate to servo-driver with impulse form.
The mobile coordinate points extremely to be perforated of 4th step, servo driver drives cross mobile device.
5th step, when cross mobile device reach described coordinate points, servo-driver feed back a high level signal a give can be compiled
Range controller.
6th step, mechanical arm drive laser cutting head to reach above punch position point.
7th step, robot control system feed back a high level signal b to Programmable Logic Controller.
If the 8th step a+b=2, Programmable Logic Controller just opens laser instrument and airflow detecting device, carry out laser beam perforation with
The detection of gas flow T1.
9th step, when gas flow T1 is detected>During T0, Programmable Logic Controller closed gas flow detector, perforation completes.
It is to be perforated that 10th step, cross mobile device move to next punch position point etc..
In sum, the present invention installs the device of described detection laser beam perforation on the basis of existing equipment additional, convenient and swift,
Do not need to carry out the change of frame for movement.This equipment can continuously be bored a hole detection it is achieved that the perforation of full-automation detects.
This device is applied widely, can be applicable to optical fiber, carbon dioxide, etc. different wave length laser beam perforation cutting detection.
B, by this detection means and control system can fast and accurately control punch time, solution laser beam perforation do not wear
Thoroughly and the problems such as time of break-through is long, improve product quality, shorten the process-cycle.
It is understood that for those of ordinary skills, with technology according to the present invention scheme and its can send out
Bright design in addition equivalent or change, and all these change or replace the guarantor that all should belong to appended claims of the invention
Shield scope.
Claims (10)
1. a kind of laser process equipment detects the device of laser beam perforation, including laser cutting head it is characterised in that described detection swashs
The device of light perforation also includes：
It is arranged on the pneumatic detector of the underface of the cutting part of material to be processed, for detecting institute after laser cutting head unlatching
State the gas flow immediately below cutting part, and the gas flow of detection is exported to controller；
Controller, is more than pre-set gas flow for the gas flow immediately below cutting part described after laser cutting head is opened
When, close described laser cutting head.
2. laser process equipment according to claim 1 detects the device of laser beam perforation it is characterised in that described detection swashs
The device of light perforation also includes the first driver, for just driving the cutting part that pneumatic detector moves to material to be processed
Lower section.
3. laser process equipment according to claim 2 detects the device of laser beam perforation it is characterised in that described detection swashs
The device of light perforation also includes coordinate input device, for presetting the coordinate of each cutting part of material to be processed, and will arrange
Coordinate export to described controller.
4. laser process equipment according to claim 3 detects the device of laser beam perforation it is characterised in that described detection swashs
Light perforation device also include the second driver, for laser cutting head is moved to material to be processed cutting part just
Side.
5. laser process equipment according to claim 4 detects the device of laser beam perforation it is characterised in that described controller
Including：
Start and stop unit, for moving to the underface of the cutting part of material to be processed in pneumatic detector, laser cutting head moves
Behind the surface of the cutting part moving material to be processed, open pneumatic detector and laser cutting head；Open in laser cutting head
When gas flow immediately below described cutting part after opening is more than pre-set gas flow, close described laser cutting head and air-flow inspection
Survey device；
Coordinate transmission unit, for receiving the coordinate of coordinate input device output, and described coordinate is exported to the first driver and
Second driver.
6. laser process equipment according to claim 1 detects the device of laser beam perforation it is characterised in that described laser is cut
Cut head and include laser instrument, cutting casing and the lens for focusing on；Described lens are fixed on the inside of cutting casing, described
Laser is exported one end of cutting casing by laser instrument by optical fiber, and the other end of described cutting casing is provided with for defeated
Go out laser and the first hole of auxiliary gas, the side wall of described cutting casing is provided with the second hole for auxiliary gas input.
7. laser process equipment according to claim 2 detects the device of laser beam perforation it is characterised in that described first drives
Dynamic device includes cross mobile device, and described cross mobile device includes X-axis moving assembly and the Y being arranged on X-axis moving assembly
Axle moving assembly, described X-axis moving assembly drives Y-axis moving assembly to move in the X-axis direction, and described pneumatic detector is arranged on
On Y-axis moving assembly, described Y-axis moving assembly drives pneumatic detector to move in the Y-axis direction.
8. laser process equipment according to claim 3 detects the device of laser beam perforation it is characterised in that described coordinate is defeated
Enter device and include touch-screen.
9. laser process equipment according to claim 4 detects the device of laser beam perforation it is characterised in that described second drives
Dynamic device includes mechanical arm.
10. a kind of laser process equipment is it is characterised in that the Laser Processing including as described in claim 1-9 any one sets
The device of standby detection laser beam perforation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610889534.3A CN106425115B (en) | 2016-10-12 | 2016-10-12 | A kind of laser process equipment and its device for detecting laser beam perforation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610889534.3A CN106425115B (en) | 2016-10-12 | 2016-10-12 | A kind of laser process equipment and its device for detecting laser beam perforation |
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| CN106425115A true CN106425115A (en) | 2017-02-22 |
| CN106425115B CN106425115B (en) | 2019-03-05 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610889534.3A Expired - Fee Related CN106425115B (en) | 2016-10-12 | 2016-10-12 | A kind of laser process equipment and its device for detecting laser beam perforation |
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Cited By (4)
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| CN109290685A (en) * | 2018-12-03 | 2019-02-01 | 重庆至信实业集团有限公司 | Device is cut in a kind of laser cutting leakproof |
| US20190291215A1 (en) * | 2018-03-26 | 2019-09-26 | Fanuc Corporation | Machining condition adjustment apparatus and machine learning device |
| CN113492269A (en) * | 2020-03-20 | 2021-10-12 | 大族激光科技产业集团股份有限公司 | Laser processing method |
| CN117817151A (en) * | 2024-03-05 | 2024-04-05 | 北京卓镭激光技术有限公司 | Laser processing system |
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| JPH02205283A (en) * | 1989-02-03 | 1990-08-15 | Fanuc Ltd | Laser beam machine |
| CN101819027A (en) * | 2009-02-27 | 2010-09-01 | 王晓东 | Method and device for detecting blind hole depth |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20190291215A1 (en) * | 2018-03-26 | 2019-09-26 | Fanuc Corporation | Machining condition adjustment apparatus and machine learning device |
| CN109290685A (en) * | 2018-12-03 | 2019-02-01 | 重庆至信实业集团有限公司 | Device is cut in a kind of laser cutting leakproof |
| CN113492269A (en) * | 2020-03-20 | 2021-10-12 | 大族激光科技产业集团股份有限公司 | Laser processing method |
| CN117817151A (en) * | 2024-03-05 | 2024-04-05 | 北京卓镭激光技术有限公司 | Laser processing system |
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| Publication number | Publication date |
|---|---|
| CN106425115B (en) | 2019-03-05 |
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