CN106424777B - target side grooving cutter - Google Patents
target side grooving cutter Download PDFInfo
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- CN106424777B CN106424777B CN201510493047.0A CN201510493047A CN106424777B CN 106424777 B CN106424777 B CN 106424777B CN 201510493047 A CN201510493047 A CN 201510493047A CN 106424777 B CN106424777 B CN 106424777B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2220/00—Details of turning, boring or drilling processes
- B23B2220/12—Grooving
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- Mechanical Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
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Abstract
The present invention provides a kind of target side grooving cutter, and the cutter includes：Knife bar, the knife bar include first end face and second end face, and the side between the first end face and second end face in the direction of extension；Cutter head, it is set to the knife bar first end face and side intersection, the side for being provided with cutter head is connection side, the cutter head includes the first knife face being connected with the first end face, the back side that is opposite with first knife face and being connected with the connection side, the angle between the back side and the connection side is obtuse angle.By the present invention in that cutter cutter head and knife bar angle in obtuse angle, when being processed to target side using the cutter, it can rub to avoid knife bar and target, avoid the influence for entering target side depth to the cutter simultaneously, after the tool sharpening target, forms skewed slot in the target side and the target side chute size meets process specification.
Description
Technical field
The present invention relates to semiconductor applications more particularly to a kind of target side grooving cutters.
Background technology
Physical vaporous deposition (Physical Vapor Deposition；PVD it is) the most general in semiconductor chip manufacture
Time one of technique, and PVD is wiring material, liquid crystal flat panel display, optical lens, electronic imaging, the sun with sputtering target material
Particularly important one of raw material in the manufacturing process such as energy battery.
The purity of target is higher or the crystal grain of target is orientated more uniform, and the performance of sputtered film is better, the higher target of purity
Material is used more and more widely, such as：The pure titanium target material that purity reaches 99.8% or more has become one of common used material.
But it is usually V-type skewed slot using the target side of high purity titanium, and the shape and size of V-type skewed slot are special, existing city
Do not have to be suitble to the cutter of processing this type target side V-type skewed slot on field.
Invention content
Problems solved by the invention is to provide a kind of target side grooving cutter, to obtain having the target of side V-type skewed slot
Material.
To solve the above problems, the present invention provides a kind of target side grooving cutter.Wait for that grooving target is set to a backboard
On, the target is located at the central area of backboard and exposes the fringe region of backboard, and the cutter includes：
Knife bar, the knife bar include first end face and second end face in the direction of extension, and the first end face is for cutting
Towards the target side when slot, the knife bar further includes the side between the first end face and second end face；
Cutter head, protrusion are set to the knife bar first end face and side intersection, and the side for being provided with cutter head is connecting side
Face；The cutter head includes the first knife face being connected with the first end face, it is opposite with first knife face and with the connection
The connected back side in side, and the second knife face between first knife face and the back side and backwards to the knife bar；Described
Two knife faces form skewed slot with first knife face for removing some materials of target side in grooving；Second knife face with
The back side connection is the first rib, the fringe region for being resisted against backboard during the cutting process；The back side with it is described
Angle is obtuse angle between connecting side.
Optionally, angle is 165 ° to 170 ° between the back side and the connection side.
Optionally, the cutter head further includes：The arc being connected between the first knife face and the back side and with second knife face
Connected in star face.
Optionally, the arc radius in the arc groove face is 6.5mm to 7.5mm.
Optionally, the knife bar is quadrangle, the knife bar and the arc in the cross section on extending direction
The connected side of groove surface is first side, and the first side is connected with the connection side.
Optionally, the first side further includes：The first side further includes：With the connection side connection
Second rib；The third rib opposite with second rib, the third rib is parallel with second rib, second rib with it is described
The spacing of third rib is 13mm to 14mm.
Optionally, the arc groove face and second knife face connection are tetragonous；The arc groove face with
The first side connection is the 5th rib, and the tetragonous is parallel with the 5th rib, the tetragonous and described the
The spacing of five ribs is 11mm to 12mm.
Optionally, the tetragonous and the first end face are in the folder that the projection towards first side direction is in 20 ° to 25 °
Angle.
Optionally, first knife face and second knife face connection are the 6th rib, the 6th rib and described the
Tetragonous is connected with rounded structure, and first rib is connected with the tetragonous with rounded structure.
Optionally, the radius of corner of the rounded structure is 0.15mm to 0.25mm.
Optionally, first knife face and second knife face connection are the 6th rib, towards the connection side
On the perspective plane in direction, the 6th rib protrudes from first rib.
Optionally, on the perspective plane towards first side direction, the distance of the 6th rib to the second end face is
135mm to 140mm.
Optionally, on the perspective plane towards the connection side, the 6th rib is with first rib in 5 ° to 7 °
Angle.
Optionally, the spacing between side is 11mm to 13mm to the first side corresponding thereto.
Compared with prior art, technical scheme of the present invention has the following advantages：The back side of the cutter with connect side
Between angle be obtuse angle, that is to say, that the angle between the cutter head and knife bar of the cutter is designed to obtuse angle, using described
When cutter is processed target side, the knife bar can be avoided to rub with target, and then avoided to the cutter
Cutter head enters the influence of target side depth, after being processed to target side using the cutter, in target side shape
Size and shape at skewed slot and the target side chute meets process specification.
Description of the drawings
Fig. 1 and Fig. 2 is structural schematic diagram of grooving cutter one embodiment in target side of the present invention in different angle；
Fig. 3 is the usage state diagram of one embodiment of target side of the present invention grooving cutter；
Fig. 4 is vertical view of the target side grooving cutter towards first side direction shown in Fig. 1 and Fig. 2；
Fig. 5 is front view of the target side grooving cutter shown in Fig. 1 and Fig. 2 towards connection side surface direction；
Fig. 6 is the schematic diagram being processed to target material assembly using target side grooving cutter shown in Fig. 1 and Fig. 2；
Fig. 7 is the target material structure side after being processed to target material assembly using target side grooving cutter shown in Fig. 1 and Fig. 2
View.
Specific implementation mode
Target side using high purity titanium is usually V-type skewed slot, and the structure snd size of the V-type skewed slot are special, existing skill
Art is not suitble to the cutter of processing this type target side V-type skewed slot.
To solve the above-mentioned problems, the present invention provides a kind of target side grooving cutter, and the cutter includes：Knife bar, institute
It includes first end face and second end face to state knife bar in the direction of extension, and the first end face is used in grooving towards the target
Side, the knife bar further include the side between the first end face and second end face；Cutter head, protrusion are set to the knife
Bar first end face and side intersection, the side for being provided with cutter head are connection side；The cutter head includes and the first end face
The first knife face being connected, it is opposite with first knife face and with the back side that is connected of connection side, and be located at described the
The second knife face between one knife face and the back side and backwards to the knife bar；Second knife face is used for first knife face in grooving
When removal target side some materials form skewed slot；Second knife face is the first rib with the back side connection, is used for
It is resisted against the fringe region of backboard during the cutting process；Angle is obtuse angle between the back side and the connection side.
In the present invention, the angle between the connection side of the back side of the cutter head and the knife bar is designed to obtuse angle, makes knife
The cutter head of tool is in a special angle with knife bar.When being processed to target side using the cutter head, the obtuse angle can be to avoid
The knife bar rubs with target, and then avoids the influence for entering target side depth to the cutter, using the cutter
After processing the target, forms required skewed slot in the target side and the target side chute size and shape meets technique
Specification.
To make the above purposes, features and advantages of the invention more obvious and understandable, below in conjunction with the accompanying drawings to the present invention
Specific embodiment be described in detail.
With reference to figure 1, Fig. 2 and Fig. 3, one embodiment of target side of the present invention grooving cutter is respectively illustrated in different angle
Structural schematic diagram and usage state diagram.
In the present embodiment, as shown in figure 3, target material assembly 400 includes target 410 and backboard 420, the target 410 is arranged
In on the backboard 420, the target 410 is located at the central area of the backboard 420 and exposes the marginal zone of the backboard 420
Domain.The target 410 is the back side with the face that the backboard 420 fits, and the face opposite with the back side is sputter face.The target
Material 410 further includes the side between the back side and the sputter face.Target side provided by the invention grooving cutter is used
It is processed in the side 450 to target 410, to form required skewed slot.In the present embodiment, in 410 side 450 of the target
The skewed slot of formation is V-type skewed slot 700.Specifically, with reference to figure 1 and Fig. 2, the cutter includes：
Knife bar 100, the knife bar 100 include first end face 101 and second end face on extending direction (X-direction in such as figure)
102, the first end face 101 is used in grooving towards 410 side 450 of the target, and the second end face 102 is in grooving
Backwards to the side 450 of the target 410.
The knife bar 100 further includes the side between the first end face 101 and second end face 102, the knife bar
The quantity of 100 sides is multiple.In the present embodiment, the knife bar 100 is cube extended in extending direction (X-direction in such as figure)
Body structure, the knife bar 100 are quadrangle, correspondingly, the first end face in the cross section on the extending direction
101 and second end face 102 be quadrilateral structure, the quantity of the side is 4.
Cutter head 200, protrusion are set to 100 first end face 101 of the knife bar and side intersection, are provided with cutter head 200
Side is connection side 104.
In the present embodiment, the cutter head 200 also has cube structure.The cutter head 200 includes and the first end face
101 the first knife faces 201 being connected, it is opposite with first knife face 201 and with the back side 202 that is connected of connection side 104,
And the second knife face 203 between first knife face 201 and the back side 202 and backwards to the knife bar；Second knife face
203 form tiltedly with first knife face 201 for removing some materials of 410 side 450 (as shown in Figure 3) of target in grooving
Slot.Specifically, first knife face 201 constitutes V-knife face structure with second knife face 203, in the side of target 410
450 form the V-type skewed slot 700 (as shown in Figure 3) to match with V-knife face planform, and the V-type skewed slot 700 includes
The first side wall 701 (as shown in Figure 3) and second sidewall 702 (as shown in Figure 3).
Second knife face 203 and 202 connection of the back side are the first rib 211, for during the cutting process against
In the fringe region of backboard 420；Angle between the back side 202 and the connection side 104 is obtuse angle.
Angle between the back side 202 and the connection side 104 is obtuse angle, in this way, during the cutting process, when first
End face 101 is towards the side of the target 410, and when the first rib 211 is resisted against the fringe region of the backboard 420, the knife
Bar 100 be elevated and with one determining deviation of the holding of the backboard 420, to make the connection side 104 of the knife bar 100 be not easy
It rubs with 420 surface of the backboard, and then avoids the influence for entering 410 side of target, 450 depth to the cutter, use
After target 410 described in the tool sharpening, V-type skewed slot 700 and the V-type skewed slot 700 are formed in 410 side 450 of the target
Size and shape meet process specification.
It should be noted that when the angle between the back side 202 and the connection side 104 is excessive, in processing shape
During the first side wall 701 at the V-type skewed slot 700, first knife face 201 is easy and follow-up required second formed
The target 401 in 702 region of side wall is easy to happen friction, to influence the cutter enter 410 side 450 of target depth and
The pattern for the second sidewall 702 being subsequently formed, and then the size and shape of 410 side V-type skewed slot 700 of the target is caused to be difficult to
Meet process specification, or even target 410 is caused to scratch；Angle mistake between the back side 202 and the connection side 104
Hour, the cutter is easy to happen during processing use and fractures.For this purpose, combine with reference to figure 4, in the present embodiment, the back of the body
The angle of angle α between face 202 and the connection side 104 is 165 ° to 170 °.
It continues to refer to figure 1 and Fig. 2, the cutter head 200 further includes：One arc groove face 204 is located at 201 He of the first knife face
It is connected between the back side 202 and with second knife face 203.The arc groove face 204 is carried out as to 410 side 450 of target
The problem of chip space in process, the metal fillings that can be generated to avoid processing makes target material assembly 400 scratch, to improve
State processing effect of the cutter to 410 side 450 of target.
In conjunction with reference to figure 4 and Fig. 5, respectively illustrate vertical view of the cutter shown in Fig. 1 towards first side direction and towards
Connect the front view of side surface direction.In the present embodiment, side that the knife bar 100 is connected with the arc groove face 204 is the
One side 103, the first side 103 are connected with the connection side 104, the knife bar 100 perpendicular to extending direction (such as
X-direction in figure) on cross section be quadrangle, the first side 103 further includes：With 104 connection of connection side
The second rib 111；The third rib 112 opposite with second rib 111, the third rib 112 are equal with second rib 111
Row.In the present embodiment, the spacing e of second rib 111 and the third rib 112 is 13mm to 14mm.That is, the knife
The width of bar 100 is 13mm to 14mm, can ensure that 100 width of the knife bar is enough big having sufficient mechanical strength in this way, together
When neatly the side 450 of the target 410 can be cut.
The arc groove face 204 is tetragonous 212 with 203 connection of the second knife face；The arc groove face
204 with 103 connection of the first side be the 5th rib 213.In the present embodiment, the tetragonous 212 and the 5th rib
213 is parallel, and the spacing g of the tetragonous 212 and the 5th rib 213 is 11mm to 12mm.That is, the arc is recessed
The opening size of groove face 204 is 11mm to 12mm, to ensure can have during the cutting process by the arc groove face 204
Effect ground discharge metal fillings.
In the present embodiment, the arc groove face 204 is circular groove face, specifically, the arc groove face 204
Arc radius R3 is 6.5mm to 7.5mm, to make the circular groove face be projected as minor arc on the first knife face 201, this
On the one hand metal fillings that sample is formed during the cutting process is not easy to remain in the bottom in the arc groove face 204, is conducive to reality
The discharge of existing metal fillings；On the other hand, the arc groove face 204 of minor arc structure can ensure that the cutter head 200 has foot
Enough mechanical strengths are to complete the cutting to 410 side 450 of target.
It should be noted that as shown in Fig. 2, first knife face 201 and 203 connection of the second knife face are the 6th
Rib 214, the 6th rib 214 are connected with the tetragonous 212 with rounded structure, first rib 211 and the tetragonous
212 are connected with rounded structure.In the present embodiment, as shown in figure 4, the radius of corner R1 (R2) of the rounded structure is 0.15mm
To 0.25mm.The first rib 211 and 214 one side of the 6th rib with rounded structure can ensure to form required 700 shape of V-type skewed slot
While shape, avoids knife face from being excessively sharp and the target material assembly 400 is made to be scratched, on the other hand, the with rounded structure
One rib 211 and the 6th rib 214 can make the cutter head 200 more wear-resisting, to improve the cutting-tool's used life.
With reference to figure 1, the tetragonous 212 is with the first end face 101 in the projection towards 103 direction of the first side
In 20 ° to 25 ° of angle β (as shown in Figure 4).Because during the cutting process, the first end face 101 is towards target to be cut
410 sides 450 are simultaneously parallel with 410 side 450 of the target, and therefore, second knife face 203 can be made by designing the angle β
Angle between 410 side 450 of the target substantially in the range of 20 ° to 25 °, meets work to form size and shape
The V-type skewed slot 700 of skill specification.
Wherein, the tetragonous 212 includes：Close to the first end point B (as shown in Figure 4), Yi Jiyuan of the third rib 112
The second terminal A (as shown in Figure 4) from the third rib 112.The distance a of second terminal A to the third rib 112 is
The distance b of 17mm to 18mm, second terminal A to second rib 111 are 3.5mm to 5mm.
When the 6th rib 214 is in the distance of the projection towards 103 direction of the first side to the second end face 102
When too small, i.e., when the length of the described cutter is too short, the cutter is caused to be difficult to be assembled with tool apron 600；When the 6th rib 214 exists
When the distance of projection to the second end face 102 towards 103 direction of the first side is excessive, i.e., the length of the described cutter is spent
When long, do not have an impact to the formation effect of 410 side chute of target, the material for processing the cutter can be wasted instead, improves
Cost of manufacture.For this purpose, in the present embodiment, in order to ensure that the cutter can be used normally, and make the V-type skewed slot 700 to be formed
Size and shape meets process specification, and in the projection towards 103 direction of the first side, the 6th rib 214 is to described
(i.e. the distance f) of first end point B to the second end face 102 is 135mm to 140mm to the distance of second end face 102 in Fig. 4.
Correspondingly, in order to make the size of cutter head while can form V-type skewed slot 700 holding structure it is compact, in face
Into the projection in 103 direction of the first side, the distance of the 6th rib 214 to the first end face 101 (i.e. institute in Fig. 4
The distance c for stating first end point B to the first end face 101 is 8mm to 9mm.
The cutter head 200 further includes the 7th rib 113 at the back side 202 and connection 104 connection of side, described
The intersection point of 7th rib 113 and second rib 111 is third endpoint C.In vertical view as shown in Figure 4, the first end point B with
The third endpoint C is 21mm to 22mm in the projection spacing d towards connection 104 direction of side.
As shown in figure 5, the spacing between side is h to the first side 103 corresponding thereto, the h is located at 11mm extremely
In the range of 13mm, that is to say, that the thickness of the knife bar 100 is located in the range of 11mm to 13mm.Knife bar 100 is stated when described
Thickness be less than 11mm when, since the knife bar 100 is too thin, is easy to happen fractures in process；When the knife bar 100
When thickness is more than 13mm, since the knife bar 100 is blocked up, to make the cutter be difficult to be assembled with tool apron 600.
In addition, on the direction towards the connection side 104 (as shown in Figure 5), the 6th rib 214 protrudes from described the
One rib 211, specifically, on towards 104 direction of connection side, the 6th rib 214 and first rib 211 towards
Projection on connection 104 direction of side is in 5 ° to 7 ° of angle γ.During the cutting process, due to the first end face 101
Towards 410 side 450 of target to be cut and parallel with 410 side 450 of the target, thus the angle γ can make it is described
A part for second knife face 203 first touches target side and carries out grooving, and the angle γ can improve second knife face
203 pairs of target sides carry out grooving to form the efficiency of 700 the first side wall 701 of V-type skewed slot.
Fig. 6 is the schematic diagram being processed to target material assembly using target side grooving cutter shown in Fig. 1 and Fig. 2, and Fig. 7 is
Target material structure side view after being processed to target material assembly using target side grooving cutter shown in Fig. 1 and Fig. 2.The cutter
It is processed for 410 side of target to target material assembly 400, forms V-type skewed slot.
With reference to figure 6, in the present embodiment, the target material assembly 400 includes target 410 and backboard 420, the target 410
It is set on backboard 420, the target 410 is located at the central area of backboard 420 and exposes the fringe region of backboard 420.
The step of being processed to 410 side of the target include mainly：Lathe (not marking), target side grooving are provided
Cutter, the lathe include tool apron 600, for fixing target side grooving cutter.
The target material assembly 400 is fixed on the tool apron 600 of the lathe, the target material assembly 400 is made to surround target
Target side grooving cutter is fixed on the tool apron 600 by center rotating, using target side grooving cutter
Cutter head 200 is processed 410 side of the target, and the V around 410 side of the target is formed in 410 side of the target
Type skewed slot 700.
It recombines with reference to figure 1 and Fig. 2, specifically, first passes through the first rib 211, the second knife face 203 and the 6th rib 214
It is in contact successively with 410 side of target and carries out grooving and process the first side wall 701 to form V-type skewed slot, continue to 410 side of target
Face carries out grooving processing, is in contact and is cut with 410 side of target successively with the first knife face 201 by the 6th rib 214
Groove processing forms the second sidewall 702 of V-type skewed slot.Due to towards it is described connection side 104 direction on, the 6th rib 214
First rib 211 is protruded, to make first knife face 201 and second knife face 203 constitute V-knife face structure, is used for
The skewed slot to match with V-knife face planform is formed in the side of target 410, and then forms 410 side V of required target
Type skewed slot 700.
For the present invention by setting an obtuse angle on cutter, it is in a special angle to make the cutter head 100 of cutter and knife bar 200,
It, can be to avoid the connection side of the knife bar 100 when being processed to 410 side of target using the cutter of the special designing
104 rub with 420 surface of the backboard, further, it is also possible to avoid entering the depth of target and follow-up to the cutter
The influence of 700 second sidewall of V-type skewed slot, 702 pattern of formation, behind 410 side of target described in the tool sharpening, in institute
State the size and shape of V-type skewed slot 700 and the V-type skewed slot 700 that 410 side of target is formed around 410 side of the target
Meet process specification.
It should be noted that the present invention is not restricted the shape of knife bar, in this embodiment, the knife bar is perpendicular to institute
It is that quadrangle can also be the polygons such as pentagon, hexagon in other embodiments to state the cross section on knife bar extending direction
Or round or irregular shape.
Although oneself is disclosed in the preferred embodiments as above the present invention, present invention is not limited to this.Any art technology
Personnel can make various changes or modifications, therefore protection scope of the present invention is answered without departing from the spirit and scope of the present invention
When being subject to claim limited range.
Claims (13)
1. a kind of target side grooving cutter waits for that grooving target is set on a backboard, the target is located at the center of backboard
Domain and the fringe region for exposing backboard, which is characterized in that the cutter includes：
Knife bar, the knife bar include first end face and second end face in the direction of extension, and the first end face is used in grooving
Towards the target side, the knife bar further includes the side between the first end face and second end face；
Cutter head, protrusion are set to the knife bar first end face and side intersection, and the side for being provided with cutter head is connection side；Institute
It includes the first knife face being connected with the first end face to state cutter head, it is opposite with first knife face and with connection side phase
The back side even, and the second knife face between first knife face and the back side and backwards to the knife bar；Second knife face
With first knife face skewed slot is formed for removing some materials of target side in grooving；Second knife face and the back of the body
Face connection is the first rib, the fringe region for being resisted against backboard during the cutting process；The back side and the connecting side
Angle is obtuse angle between face；First knife face is the 6th rib with second knife face connection, towards the connection side
Direction perspective plane on, the 6th rib protrudes from first rib.
2. target side as described in claim 1 grooving cutter, which is characterized in that between the back side and the connection side
Angle is 165 ° to 170 °.
3. target side as described in claim 1 grooving cutter, which is characterized in that the cutter head further includes：Positioned at the first knife
The arc groove face being connected between face and the back side and with second knife face.
4. target side as claimed in claim 3 grooving cutter, which is characterized in that the arc radius in the arc groove face is
6.5mm to 7.5mm.
5. target side as claimed in claim 3 grooving cutter, which is characterized in that the knife bar is on extending direction
Cross section be quadrangle, the side that the knife bar is connected with the arc groove face be first side, the first side and
The connection side is connected.
6. target side as claimed in claim 5 grooving cutter, which is characterized in that the first side further includes：With it is described
Connect the second rib of side connection；The third rib opposite with second rib, the third rib are equal with second rib
The spacing of row, second rib and the third rib is 13mm to 14mm.
7. target side as claimed in claim 5 grooving cutter, which is characterized in that the arc groove face and second knife
Face connection is tetragonous；The arc groove face and the first side connection are the 5th rib, the tetragonous with
5th rib is parallel, and the spacing of the tetragonous and the 5th rib is 11mm to 12mm.
8. target side as claimed in claim 7 grooving cutter, which is characterized in that the tetragonous exists with the first end face
Projection towards first side direction is in 20 ° to 25 ° of angle.
9. target side as claimed in claim 7 grooving cutter, which is characterized in that first knife face and second knife face
Connection is the 6th rib, and the 6th rib is connected with the tetragonous with rounded structure, first rib and the described 4th
Rib is connected with rounded structure.
10. target side as claimed in claim 9 grooving cutter, which is characterized in that the radius of corner of the rounded structure is
0.15mm to 0.25mm.
11. target side as claimed in claim 5 grooving cutter, which is characterized in that in the projection towards first side direction
On face, the distance of the 6th rib to the second end face is 135mm to 140mm.
12. target side as described in claim 1 grooving cutter, which is characterized in that in the projection towards the connection side
On face, the 6th rib and the angle that first rib is in 5 ° to 7 °.
13. target side as claimed in claim 5 grooving cutter, which is characterized in that first side side corresponding thereto
Between spacing be 11mm to 13mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510493047.0A CN106424777B (en) | 2015-08-12 | 2015-08-12 | target side grooving cutter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510493047.0A CN106424777B (en) | 2015-08-12 | 2015-08-12 | target side grooving cutter |
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| Publication Number | Publication Date |
|---|---|
| CN106424777A CN106424777A (en) | 2017-02-22 |
| CN106424777B true CN106424777B (en) | 2018-08-10 |
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| CN201510493047.0A Active CN106424777B (en) | 2015-08-12 | 2015-08-12 | target side grooving cutter |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114682809A (en) * | 2022-04-29 | 2022-07-01 | 同创(丽水)特种材料有限公司 | Turning tool for tantalum material and tantalum target material |
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|---|---|---|---|---|
| US5362183A (en) * | 1993-10-05 | 1994-11-08 | Joseph Alario | Single point cutting tool |
| RU2149079C1 (en) * | 1996-09-18 | 2000-05-20 | Сидоренко Елена Стефановна | Apex free cutter |
| CN201329427Y (en) * | 2008-12-24 | 2009-10-21 | 贵州黎阳航空发动机公司 | Lathe cutter for processing annular deep U-shaped groove of part |
| CN203304589U (en) * | 2013-05-29 | 2013-11-27 | 广州导新模具注塑有限公司 | Cutting tool for machining Fresnel pattern |
| CN104493216A (en) * | 2014-12-19 | 2015-04-08 | 陕西国防工业职业技术学院 | Cut-off tool with A-shaped cutting edge |
| CN104785807A (en) * | 2015-04-30 | 2015-07-22 | 衡阳风顺车桥有限公司 | Annular deep and narrow groove turning tool |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106424777A (en) | 2017-02-22 |
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