CN114682809A - Turning tool for tantalum material and tantalum target material - Google Patents
Turning tool for tantalum material and tantalum target material Download PDFInfo
- Publication number
- CN114682809A CN114682809A CN202210473668.2A CN202210473668A CN114682809A CN 114682809 A CN114682809 A CN 114682809A CN 202210473668 A CN202210473668 A CN 202210473668A CN 114682809 A CN114682809 A CN 114682809A
- Authority
- CN
- China
- Prior art keywords
- tantalum
- turning
- turning tool
- face
- target material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/02—Cutting tools with straight main part and cutting edge at an angle
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2200/00—Details of cutting inserts
- B23B2200/08—Rake or top surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
- B23B2222/28—Details of hard metal, i.e. cemented carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
- B23B2222/32—Details of high speed steel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/12—Boron nitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2226/00—Materials of tools or workpieces not comprising a metal
- B23B2226/18—Ceramic
Abstract
The invention provides a turning tool for a tantalum material and a tantalum target material, and is characterized in that the turning tool comprises a first surface and a second surface, wherein a cutting edge is formed at the joint of the first surface and the second surface, the second surface comprises a concave curved surface formed from the cutting edge, and the concave curved surface is a chip removal groove. The turning tool can improve the machining efficiency of the tantalum material and simultaneously ensure that the surface roughness of the tantalum target material meets the machining requirement. The cutter is not only suitable for processing the tantalum target blank, but also suitable for processing the finished tantalum target material.
Description
Technical Field
The invention belongs to the field of target material manufacturing, relates to a tantalum target material, and particularly relates to a turning tool for a tantalum material and the tantalum target material.
Background
Generally, a sputtering target is mainly composed of a target blank and a backing plate, and the shape is mainly circular. The general process for producing a qualified target material is as follows: firstly, cutting off high-purity raw materials, and then carrying out plastic processing and heat treatment to improve the microstructure of the high-purity raw materials to prepare a target blank; the target blank is welded with a back plate in a clean environment after being machined to prepare a basic target; then fine machining is carried out to ensure the precision requirement of the target material; and finally, conveying the finished target material to a clean room for cleaning and packaging, removing any inorganic matters and organic matters attached to the surface, and filling the target material into a special plastic bag to prevent oxidation, pollution and humidity.
The target product must be processed with precise external dimension before being finished, and the precision needs to reach more than 0.1mm, so that the target product meets the installation requirements of an electric field, a magnetic field, a cooling water channel and the like. The large-size Ta target generally needs to be precisely machined on a large lathe or a large machining center. Because Ta is softer than the hardness texture of other metals, hardness can reach 6 ~ 6.5, simultaneously is rich in ductility, therefore has very high requirement to the design selection of cutter in machining, need select different cutters to different processing steps. The cutter suitable for finish machining of the Ta target is a diamond cutter. Ta is easy to generate surface oxidation at high temperature, so that the heat generated when a cutter contacts a tantalum material is expected to be as small as possible in the finishing process, the cutting feed amount needs to be controlled and cannot be too fast, the cutting feed amount is generally selected to be less than 0.01mm, and the surface roughness of a tantalum target is controlled to be Ra <0.5 mu m so as to ensure the surface quality and the sputtering service performance of the target.
However, the application of the existing technology for processing tantalum target material can generate a turning extrusion layer on the surface of the target material, which affects the uniformity of the sputtering process. And if the turning extrusion layer is removed to meet the use requirement of sputtering, subsequent grinding treatment is needed, and a large amount of labor cost and time cost are consumed.
CN 108672720a discloses a turning method for high-purity tantalum target, which adopts a machining mode that a blade is fed towards the center of the high-purity tantalum target along the diameter direction of the high-purity tantalum target, and the turning speed is strictly limited. The turning method is simple to operate and has low requirements on equipment. Aiming at the tantalum target material, when the turning speed is limited to 250-300m/min, the processed high-purity tantalum target material has better surface quality, and can better avoid surface defects such as bulges, pits and the like and the appearance of a turning extrusion layer. However, the cone at the center is removed by polishing through an abrasive belt machine, and the conditions of uneven polishing, edge collapse and the like can occur after long-time polishing, even the sputtering surface is deformed, so that the quality and the service life of the target material are seriously influenced.
CN112828541A discloses a processing method of a tantalum target material and a sputtering surface thereof, wherein the processing method comprises turning and polishing which are carried out in sequence; the turning is to feed a cutter blade from the edge to the center along the diameter direction of the tantalum target material; the turning comprises rough turning and finish turning which are carried out in sequence, and the tool insert amount is kept constant in the rough turning and finish turning processes; the finish turning comprises 8-12 cutter turning, and the remaining allowance of the finish turning is 0.3-0.6 mm; the polishing comprises the steps of firstly adopting sand paper and then adopting scouring pad to polish the turning surface of the tantalum target material; the roughness Ra of the sputtering surface of the tantalum target material is less than or equal to 0.4 mu m. The processing method provided by the invention effectively prevents the surface defects of bulges, pits and the like on the surface of the target material and the turning of the extrusion layer in the processing process, but has more processing passes, long processing period and low production efficiency.
Disclosure of Invention
In order to solve the technical problems in the prior art, the invention provides a turning tool for a tantalum material and a tantalum target material. The cutter is not only suitable for processing the tantalum target blank, but also suitable for processing the finished tantalum target material.
In order to achieve the technical effect, the invention adopts the following technical scheme:
one of the purposes of the invention is to provide a turning tool made of tantalum material, which comprises a first surface and a second surface, wherein a cutting edge is formed at the joint of the first surface and the second surface, the second surface comprises a concave curved surface formed from the cutting edge, and the concave curved surface is a chip groove.
In the invention, the chip groove formed by the concave curved surface arranged at a proper position can reduce the friction resistance when contacting with the tantalum target blank, so that the tantalum target blank is always kept in a low-temperature state. By adopting the cutter, the retention time of chips on the cutter is reduced, the chips can be smoothly and timely discharged, the generation of accumulated chip lumps is prevented, the surface defects of bulges, pits and the like in the machining process and the generation of a turning extrusion layer are avoided, and the machining size precision of a product can be effectively improved.
In a preferred embodiment of the present invention, the curvature of the concave curved surface is R5-25 mm, such as R6mm, R7mm, R8mm, R9mm, R10mm, R11mm, R12mm, R13mm, R14mm, R15mm, R16mm, R17mm, R18mm, R19mm, R20mm, R21mm, R22mm, R23mm, or R24mm, but the curvature is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
In the invention, the radian of the concave curved surface has an important influence on the chip groove and the smoothness of chip discharge, and when the radian is too large or too small, the processing requirement of the tantalum target material cannot be met.
In a preferred embodiment of the present invention, the angle between the first surface and the second surface is 50 to 85 °, such as 55 °, 60 °, 65 °, 70 °, 75 °, or 80 °, but not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
In the invention, the included angle formed by the first surface and the second surface has important influence on the chip groove and the smoothness of chip discharge, and when the included angle is too large or too small, the processing requirement of the tantalum target material cannot be met.
As a preferred technical solution of the present invention, the tantalum material includes any one of a tantalum target, a tantalum plate, a tantalum tube, a tantalum alloy target, a tantalum alloy plate, or a tantalum alloy tube.
As a preferable technical solution of the present invention, the material of the turning tool includes any one of high speed steel, boron nitride, ceramic, and cemented carbide.
As a preferable technical scheme of the invention, the material of the turning tool is high-speed steel or hard alloy.
As a preferable technical scheme of the invention, the material of the turning tool is hard alloy.
As a preferred technical solution of the present invention, the turning tool is a single-head tool or a multi-head tool including at least 2 cutting heads.
The second purpose of the invention is to provide a tantalum target material, which is prepared by the turning tool of the tantalum target material provided by the first purpose.
In the present invention, the specific processing steps and parameters for processing the tantalum target material can be properly selected according to the performance and size requirements of the tantalum target material, and are not further limited herein.
Compared with the prior art, the invention has at least the following beneficial effects:
the invention provides a turning tool for a tantalum material and a tantalum target material. The cutter is not only suitable for processing the tantalum target blank, but also suitable for processing the finished product of the tantalum target.
Drawings
FIG. 1 is a schematic mechanical diagram of a tool used in an embodiment of the present invention;
fig. 2 is a schematic view showing the mechanism of the cutter used in comparative example 5 of the present invention.
The present invention is described in further detail below. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
Detailed Description
To better illustrate the invention and to facilitate the understanding of the technical solutions thereof, typical but non-limiting examples of the invention are as follows:
example 1
The embodiment provides a turning cutter of tantalum material, its structure is shown in fig. 1, the material of turning cutter is tungsten cobalt carbide, the turning cutter includes first face and second face, first face with the second face junction forms the blade, the second face includes the sunken curved surface that forms from the blade, sunken curved surface is the chip groove. The radian of the concave curved surface is R5mm, and the included angle formed by the first surface and the second surface is 50 degrees.
Example 2
The embodiment provides a turning cutter of tantalum material, its structure is shown in fig. 1, the material of turning cutter is tungsten cobalt carbide, the turning cutter includes first face and second face, first face with the second face junction forms the blade, the second face includes the sunken curved surface that forms from the blade, sunken curved surface is the chip groove. The radian of the concave curved surface is R10mm, and the included angle formed by the first surface and the second surface is 55 degrees.
Example 3
The embodiment provides a turning cutter of tantalum material, its structure is shown in fig. 1, the material of turning cutter is tungsten cobalt carbide, the turning cutter includes first face and second face, first face with the second face junction forms the blade, the second face includes the sunken curved surface that forms from the blade, sunken curved surface is the chip groove. The radian of the concave curved surface is R15mm, and the included angle formed by the first surface and the second surface is 65 degrees.
Example 4
The embodiment provides a turning cutter of tantalum material, its structure is shown in fig. 1, the material of turning cutter is tungsten cobalt carbide, the turning cutter includes first face and second face, first face with the second face junction forms the blade, the second face includes the sunken curved surface that forms from the blade, sunken curved surface is the chip groove. The radian of the concave curved surface is R20mm, and the included angle formed by the first surface and the second surface is 75 degrees.
Example 5
The embodiment provides a turning cutter of tantalum material, its structure is as shown in fig. 1, the material of turning cutter is the tungsten cobalt carbide, the turning cutter includes first face and second face, first face with the second face junction forms the blade, the second face includes the sunken curved surface that forms from the blade, sunken curved surface is the chip groove. The radian of the concave curved surface is R25mm, and the included angle formed by the first surface and the second surface is 85 degrees.
Example 6
The conditions of this example were the same as those of example 3 except that the material of the cutter was cubic boron nitride.
Comparative example 1
This comparative example was the same as example 3 except that the concave curve was not provided.
Comparative example 2
This comparative example was conducted under the same conditions as example 3 except that the curvature of the concave curved surface was R35 mm.
Comparative example 3
This comparative example was identical to example 3 except that the angle formed by the first face and the second face was 88 °.
Comparative example 4
This comparative example was the same as example 3 except that the angle formed by the first face and the second face was 45 °.
Comparative example 5
The cutter used in this comparative example was a cutter having a versatile flute, and its structure was as shown in fig. 2.
The surfaces of the tantalum targets were turned using the cutters provided in examples 1 to 6 and comparative examples 1 to 5, and the surface roughness was measured using a roughness meter, and the results are shown in table 1.
The specific turning method comprises the following steps: carrying out rough turning treatment and fine turning treatment in sequence, wherein the constant speed is S95/min in the rough turning process, the feed rate is 0.10mm/r, and the cutting feed rate is 0.20 mm; in the process of finish turning, the constant speed is S100/min, the feed rate is 0.10mm/r, and the cutting feed rate is 0.10 mm.
TABLE 1
| Roughness Ra/mum | |
| Example 1 | 0.38 |
| Example 2 | 0.35 |
| Example 3 | 0.30 |
| Example 4 | 0.32 |
| Example 5 | 0.35 |
| Example 6 | 0.40 |
| Comparative example 1 | 0.53 |
| Comparative example 2 | 0.46 |
| Comparative example 3 | 0.47 |
| Comparative example 4 | 0.48 |
| Comparative example 5 | 0.85 |
The test results in table 1 show that the turning tool for tantalum materials provided by the invention can meet the machining requirement that the surface of the tantalum target material has the roughness Ra of less than or equal to 0.4 μm after the turning treatment is carried out on the tantalum target material, and can improve the turning efficiency. And comparative examples 1 and 2 are respectively provided with a concave structure, or the radian of the concave structure is larger than a limited radian range, so that the turning effect is reduced. The included angles of the first and second faces of the inserts in comparative examples 3 and 4, respectively, are too large or too small, which also results in a reduction in turning performance. According to the traditional general chip groove cutter, after the turning processing is carried out on the tantalum target material, the surface roughness of the tantalum target material cannot meet the processing requirement.
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.
Claims (9)
1. The utility model provides a turning cutter of tantalum material which characterized in that, the turning cutter includes first face and second face, first face with second face junction forms the blade, the second face includes the sunken curved surface that forms from the blade, sunken curved surface is the chip groove.
2. The turning tool according to claim 1, wherein the curvature of the concave curved surface is R5-25 mm.
3. The turning tool according to claim 1 or 2, wherein the angle formed by the first face and the second face is 50-85 °.
4. The turning tool according to any one of claims 1 to 3, wherein the tantalum material comprises any one of a tantalum target, a tantalum plate, a tantalum tube, a tantalum alloy target, a tantalum alloy plate, or a tantalum alloy tube.
5. The turning tool according to any one of claims 1-4, wherein the material of the turning tool comprises any one of high speed steel, boron nitride, ceramic or cemented carbide.
6. The turning tool of claim 5 wherein the material of the turning tool is high speed steel or cemented carbide.
7. The turning tool of claim 6 wherein the material of the turning tool is cemented carbide.
8. The turning tool according to any one of claims 1-7, wherein the turning tool is a single-head tool or a multi-head tool comprising at least 2 cutting heads.
9. A tantalum target material, wherein said tantalum target material is machined by a turning tool according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210473668.2A CN114682809A (en) | 2022-04-29 | 2022-04-29 | Turning tool for tantalum material and tantalum target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210473668.2A CN114682809A (en) | 2022-04-29 | 2022-04-29 | Turning tool for tantalum material and tantalum target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114682809A true CN114682809A (en) | 2022-07-01 |
Family
ID=82145346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210473668.2A Pending CN114682809A (en) | 2022-04-29 | 2022-04-29 | Turning tool for tantalum material and tantalum target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114682809A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07328815A (en) * | 1994-06-06 | 1995-12-19 | Mitsubishi Materials Corp | Throw away chip |
| CN103240471A (en) * | 2012-02-10 | 2013-08-14 | 发那科株式会社 | Wire electric discharge machine, turning tool machining method with wire electric discharge machine |
| CN203281894U (en) * | 2013-03-13 | 2013-11-13 | 鸿亿成企业有限公司 | Turning tool structure and turning tool blade thereof |
| CN106312108A (en) * | 2015-06-15 | 2017-01-11 | 宁波江丰电子材料股份有限公司 | Turning tool and manufacturing method thereof |
| CN106424777A (en) * | 2015-08-12 | 2017-02-22 | 宁波江丰电子材料股份有限公司 | Target material side face grooving tool |
| CN209565495U (en) * | 2019-03-08 | 2019-11-01 | 深圳市明辉刀具有限公司 | Slot knife blade, slot knife and numerically controlled lathe |
-
2022
- 2022-04-29 CN CN202210473668.2A patent/CN114682809A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07328815A (en) * | 1994-06-06 | 1995-12-19 | Mitsubishi Materials Corp | Throw away chip |
| CN103240471A (en) * | 2012-02-10 | 2013-08-14 | 发那科株式会社 | Wire electric discharge machine, turning tool machining method with wire electric discharge machine |
| CN203281894U (en) * | 2013-03-13 | 2013-11-13 | 鸿亿成企业有限公司 | Turning tool structure and turning tool blade thereof |
| CN106312108A (en) * | 2015-06-15 | 2017-01-11 | 宁波江丰电子材料股份有限公司 | Turning tool and manufacturing method thereof |
| CN106424777A (en) * | 2015-08-12 | 2017-02-22 | 宁波江丰电子材料股份有限公司 | Target material side face grooving tool |
| CN209565495U (en) * | 2019-03-08 | 2019-11-01 | 深圳市明辉刀具有限公司 | Slot knife blade, slot knife and numerically controlled lathe |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105563665A (en) | Diamond coating cutter, and preparation method and application thereof in high speed graphite processing | |
| JP2011073140A (en) | Method of manufacturing forging die | |
| CN102145403B (en) | Machining method for milling tungsten alloy target material | |
| WO2020223989A1 (en) | Cutting tool and tool bit structure thereof | |
| CN113547390B (en) | Tungsten target assembly and surface processing method thereof | |
| WO2021190529A1 (en) | Pcd cutter for realizing machining by means of milling instead of grinding, and preparation method therefor and use thereof | |
| CN105290470B (en) | The milling method of graphene aluminum matrix composite | |
| JP3299523B2 (en) | Tool for turning groove of hard foam resin pad | |
| Okada et al. | Cutting characteristics of direct milling of cemented tungsten carbides using diamond-coated carbide end mills with untreated and treated cutting edge | |
| JP7112584B2 (en) | Diamond cutting tools for hard brittle and difficult-to-cut materials | |
| CN114682809A (en) | Turning tool for tantalum material and tantalum target material | |
| Wen et al. | Experimental research on micro mill-grinding AISI 1045 steel with a cold spraying compound micro cutting tool | |
| JP3497492B2 (en) | Hard foam resin grooved pad for semiconductor device processing and pad turning groove processing tool | |
| CN101905489A (en) | Machining method of precise and fine graphite electrodes by using diamond coated cutting tool | |
| CN209140722U (en) | A kind of Ceramic manufacturing cutter | |
| CN203197758U (en) | Grinding wheel for highly efficient and deep grinding | |
| JP5786770B2 (en) | Cutting insert | |
| CN114986106B (en) | Processing method of tantalum sputtering target end face seal groove | |
| JP5906838B2 (en) | Square end mill | |
| JP2000198012A (en) | Working method of material hard in cutting | |
| CN112077338A (en) | Processing method for eliminating size difference between coating and substrate for rotary casing | |
| CN109128324B (en) | Milling cutter and die lip milling method using same | |
| CN220112361U (en) | Sintered diamond cutter | |
| CN218836330U (en) | Rod-like chamfer sword of MCD of processing mirror surface effect | |
| CN117165913A (en) | Cutter with submicron diamond coating and preparation method and application thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |