CN106406193A - Dynamically monitoring system for radio frequency power supply with integrated control panel - Google Patents
Dynamically monitoring system for radio frequency power supply with integrated control panel Download PDFInfo
- Publication number
- CN106406193A CN106406193A CN201611158856.7A CN201611158856A CN106406193A CN 106406193 A CN106406193 A CN 106406193A CN 201611158856 A CN201611158856 A CN 201611158856A CN 106406193 A CN106406193 A CN 106406193A
- Authority
- CN
- China
- Prior art keywords
- power supply
- frequency power
- radio
- radio frequency
- control chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0428—Safety, monitoring
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/24—Pc safety
- G05B2219/24215—Scada supervisory control and data acquisition
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
Abstract
The invention discloses a dynamically monitoring system for radio frequency power supply with integrated control panel. The system comprises a control chip integrated in the control panel, an interface circuit, a TFT display, a direct current/direct current converter, and a digital dial plate. The interface circuit is connected with the radio frequency power supply through a simulated user's interface. The control chip conducts real-time scanning and controls the interface circuit to obtain the running data of the radio frequency power supply and displays the result on the TFT display dynamically in a real-time manner. The digital dial plate is used for setting the output power of the radio frequency power supply. The control chip adopts an external interrupt triggering mode to scan the digital dial plate, to obtain the set output power and to control the power of the radio frequency power supply through the interface circuit. According to the invention, it is possible to monitor the working state of radio frequency equipment effectively in a real time manner so that equipment in fault can be spotted and replaced as early as possible. For the data display on the TFT display screen, the dynamic data of equipment running can be seen obviously. For the employment of the digital and adjustable pole difference, the output power can be controlled. The system can be easily operated and the cost of the system is also reduced.
Description
Technical field
The present invention relates to radio frequency arts, more particularly, to a kind of radio-frequency power supply dynamic monitoring system.
Background technology
Over nearly one, 20 years, microelectronic industry fast development, with the continuous progress of lower temperature plasma technology, various
The plasma apparatus of function such as radio frequency (or radio frequency magnetron) sputtering, plasma etching (PE), reactive ion etching (RIE),
Plasma deposition (PECVD) etc., is also taken seriously more and more, and has obtained widely applying in many fields.First
The application of first etch silicon nitride, polysilicon, aluminum, deposit silicon nitride in the semiconductor industry.Other industrial expansions also exist therewith
Actively use this new technique, such as deposit various optical thin films, sensitive thin film, and minimally invasive medical, chemical fibre, Organic substance are carried out
Surface modification etc..These new techniques, new technology, the popularization and application of new equipment, are required for substantial amounts of radio-frequency signal generator.
In these applications, the job stability of radio-frequency power supply is matter of utmost importance.Due to continual work throughout the year,
And be up to a hundred and work simultaneously, the whether normal yield being directly connected to its product of device power supply (DPS) and quality.
Radio-frequency power supply on the market, particularly import radio-frequency power supply, need to be connected with computer by serial ports at present, in meter
Its special daemon software is run on calculation machine, by English interface operational control power-supply device, observes its working condition.This mould
Formula not only configures a stage body and amasss computer big, that cost is high, all brings very big to scene application and the practical operation of equipment
Difficulty.
Content of the invention
The purpose of the present invention is that the system adopts advanced micro-control electronics and digital technology it is achieved that monitor in real time and display
Function.
For achieving the above object, the technical scheme is that：Radio-frequency power supply with integrated control panel is dynamically supervised
Control system, including integrated control chip on the control panel, interface circuit, TFT display screen, DC-DC converter, number
Driver plate；Described interface circuit is connected with radio-frequency power supply by analog subscriber mouth；
Described control chip real time scan and control interface obtain radio-frequency power supply service data, and by result real-time dynamicly
It is shown on TFT display screen；
Described number driver plate is used for arranging radio-frequency power supply output, described control chip external interrupt triggering mode scanning digital
Driver plate, obtains the output of setting, controls radio-frequency power supply power by interface circuit.
A kind of preferably as the present invention, described control chip obtains radio-frequency power supply service data and includes forward power, reflection
Power, bearing power, temperature, humidity, each switching value and alarm parameter.
As the present invention another kind of preferably described control chip includes the timing acquisition time chip of internal battery, by when
Between and the date send TFT display screen to show, and when can continue to away in the case of system power failure.
The invention has the beneficial effects as follows：
1. in real time, effectively monitor the working condition of radio-frequency apparatus, find faulty equipment the replacing of active in time early；
So greatly improving system reliability, being that enterprise improves yield rate, greatly reducing loss.
Screen data shows, directly perceived, convenient, the dynamic data that equipment runs is very clear；
3. by the way of numeral, scalable extreme difference, control the output of radio-frequency power supply, and simple to operate；
4., relative to PC background system, greatly reduce system cost, quasiconductor and other use radio-frequency power supply industry, be worth
Promote and extensive application.
Brief description
Fig. 1 is the structural representation of the present invention.
Specific embodiment
Below in conjunction with accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described.
As shown in figure 1, the radio-frequency power supply dynamic monitoring system with integrated control panel, including being integrated on control panel 6
Control chip 1, interface circuit 2, TFT display screen 3, DC to DC converter 4, digital driver plate 5；Described interface circuit 2 passes through
Analog subscriber mouth（In figure is not shown）With radio-frequency power supply（In figure is not shown）Connect.
Described control chip 1 real time scan and the service data of control interface 2 acquisition radio-frequency power supply, and by calculating
Change into the normal data of radio-frequency power supply, and be dynamically displayed in during by fructufy on TFT display screen 3.
Described number driver plate 5 is used for arranging radio-frequency power supply output, and described control chip 1 external interrupt triggering mode is swept
Retouch digital driver plate 5, obtain the output of setting, radio-frequency power supply power output is controlled by interface circuit 2.
Described control chip 1 obtain radio-frequency power supply service data include forward power, reflection power, bearing power, temperature,
Humidity, each switching value and alarm parameter.
Described control chip 1 also includes the timing acquisition time chip of internal battery, and time and date is sent TFT display screen
Display, and when can continue to away in the case of system power failure.
Work process of the present invention is as follows：
A. after radio-frequency power supply powers up, the system module initialization modules：
Intervalometer sets;
Each I/O mouth sets；
Each serial ports sets；
Each interruption sets；
Load primary data；
TFT display screen initially and shows.
The analog subscriber mouth of control chip 1 timing scan radio-frequency power supply, the critical data of collection radio-frequency power supply, and analyze,
Calculate and adjust；
Through control chip 1 internal arithmetic and conversion, send TFT display screen 3 in time by each data display out.
Each switching value of timing scan power-supply device and temperature value, also can timely be shown on TFT display screen 3.
External interrupt triggering mode scanning digital driver plate, obtains the performance number arranging, through analog subscriber mouth control device
Power.
The mass data of preservation can be sent to backstage, for analysis by the connection of detection background devices by serial ports
Use.
Additionally, the monitoring system of the present invention also spare interface, more multi-functional to extend：
As timing scan can obtain the number such as Bus DC voltage, Bus DC current, CTL-BUS voltage, whole machine EFF
According to, and shown in real time by TFT display screen.
Described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Based on the present invention
In embodiment, the every other enforcement that those of ordinary skill in the art are obtained under the premise of not making creative work
Example, broadly falls into the scope of protection of the invention.
Claims (3)
1. radio-frequency power supply dynamic monitoring system with integrated control panel it is characterised in that include integrated on the control panel
Control chip, interface circuit, TFT display screen, DC to DC converter, digital driver plate；Described interface circuit passes through analog subscriber
Mouth is connected with radio-frequency power supply；
Described control chip real time scan and control interface obtain radio-frequency power supply service data, and by result real-time dynamicly
It is shown on TFT display screen；
Described number driver plate is used for arranging radio-frequency power supply output, described control chip external interrupt triggering mode scanning digital
Driver plate, obtains the output of setting, controls radio-frequency power supply power by interface circuit.
2. the radio-frequency power supply dynamic monitoring system with integrated control panel according to claim 1 is it is characterised in that described
Control chip obtains radio-frequency power supply service data and includes forward power, reflection power, bearing power, temperature, humidity, each switch
Amount and alarm parameter.
3. the radio-frequency power supply dynamic monitoring system with integrated control panel according to claim 1 is it is characterised in that described
Control chip includes the timing acquisition time chip of internal battery, time and date is sent TFT display screen to show, and falls in system
When can continue to away in the case of electricity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611158856.7A CN106406193A (en) | 2016-12-15 | 2016-12-15 | Dynamically monitoring system for radio frequency power supply with integrated control panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611158856.7A CN106406193A (en) | 2016-12-15 | 2016-12-15 | Dynamically monitoring system for radio frequency power supply with integrated control panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106406193A true CN106406193A (en) | 2017-02-15 |
Family
ID=58087805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611158856.7A Pending CN106406193A (en) | 2016-12-15 | 2016-12-15 | Dynamically monitoring system for radio frequency power supply with integrated control panel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106406193A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101566674A (en) * | 2008-04-24 | 2009-10-28 | 中芯国际集成电路制造(上海)有限公司 | Radio-frequency power supply testing device |
| CN203492261U (en) * | 2013-10-22 | 2014-03-19 | 北京吉兆源科技有限公司 | Radio frequency plasma source |
| CN103941694A (en) * | 2014-04-22 | 2014-07-23 | 福建三元达通讯股份有限公司 | Exciter monitoring system and DPD real-time monitoring and regulating method thereof |
| US20140203821A1 (en) * | 2013-01-24 | 2014-07-24 | Tokyo Electron Limited | Test apparatus and plasma processing apparatus |
| CN203912107U (en) * | 2014-04-22 | 2014-10-29 | 福建三元达通讯股份有限公司 | Digital television exciter monitoring system |
| CN104349567A (en) * | 2013-07-29 | 2015-02-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Radio frequency power supply system and a method for performing impedance matching by utilizing radio frequency power supply system |
-
2016
- 2016-12-15 CN CN201611158856.7A patent/CN106406193A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101566674A (en) * | 2008-04-24 | 2009-10-28 | 中芯国际集成电路制造(上海)有限公司 | Radio-frequency power supply testing device |
| US20140203821A1 (en) * | 2013-01-24 | 2014-07-24 | Tokyo Electron Limited | Test apparatus and plasma processing apparatus |
| CN104349567A (en) * | 2013-07-29 | 2015-02-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Radio frequency power supply system and a method for performing impedance matching by utilizing radio frequency power supply system |
| CN203492261U (en) * | 2013-10-22 | 2014-03-19 | 北京吉兆源科技有限公司 | Radio frequency plasma source |
| CN103941694A (en) * | 2014-04-22 | 2014-07-23 | 福建三元达通讯股份有限公司 | Exciter monitoring system and DPD real-time monitoring and regulating method thereof |
| CN203912107U (en) * | 2014-04-22 | 2014-10-29 | 福建三元达通讯股份有限公司 | Digital television exciter monitoring system |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170215 |