CN106405700A - Multizone structure phase type waveband plate - Google Patents
Multizone structure phase type waveband plate Download PDFInfo
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- CN106405700A CN106405700A CN201510487379.8A CN201510487379A CN106405700A CN 106405700 A CN106405700 A CN 106405700A CN 201510487379 A CN201510487379 A CN 201510487379A CN 106405700 A CN106405700 A CN 106405700A
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Abstract
The invention discloses a multizone structure phase type waveband plate including a light-transmitting substrate and a light-transmitting film coating the light-transmitting substrate, N concentric rings are etched on the light-transmitting film, N >=3, the annular band phase difference of the adjacent concentric rings is pi, the phase type waveband plate is divided into M areas along the radial direction, 2<=M<=10, the annual band number N and the annular belt position g(n) of each zone satisfy the following relation: the annular belt position g(n) decides the annual band radius as shown in the description, wherein the radius of a first annular band is shown in the description, and Lambda refers to the work wavelength and f refers to the work focal length, if the annular band position gi (n) of the i-th zone refers to the linear variation associated with the annular band sequence n, namely, gi(n)=ain+bi, wherein ai and bi represent position coefficients, and ai and bi are integers. The multizone structure phase type waveband plate has a larger numerical aperture and a smaller focal spot size compared with a conventional waveband plate in the case of the same number of rings and the same focal length, and the bandwidth of the waveband plate is increased, so that the waveband plate is easy to process.
Description
Technical field
The invention belongs to diffraction optical element technical field is and in particular to a kind of multiple zone structural phase-type zone plate.
Background technology
Zone plate is to be made first in 1871 by Lord Rayleigh as the important diffraction optical device of a class
Successfully, and in 1875 first related article has been delivered by Sorer.1898, first development of Wood
Zone plate research work under visible light illumination, has opened zone plate as class new optical devices in light
The new page in field.Because compared with the traditional optical image-forming components such as lens zone plate have larger aberration with
Aberration, decades ask never larger development and application.1961, Baez proposed Fresnel ripple first
Strap can evoke people to zone plate as the image-forming component of extreme ultraviolet radiation to this wave band of grenz ray
Attention.Afterwards, Rogers place group in 1972 reports fresnel's zone plate in gamma ray imaging side
The work in face.1980, Keamey place group achieved focusing using zone plate and is imaged to neutron.
The group that Takuma and Doak is located achieves Fresnel ripple respectively at 1991 and priority in 1999 again
Strap.
Conventional wave strap depends on outermost ring width in the resolution of imaging field and numerical aperture, and this size is subject to existing
In the restriction of processing technique, its numerical aperture and resolution are difficult to be further improved.And focal spot size is big
Little be inversely proportional to resolution, that is, the less resolution of focal spot size is higher.
China Patent No. is CN102681060A, it discloses a kind of compound-type wave zone plate photon screen, this photon
Sieve instead of the printing opacity annulus of zone plate using the printing opacity aperture of position random distribution, thus can effectively suppress other
Lobe effect and high order diffraction, improve resolution.But the aperture of substantial amounts of random distribution increases design and adds
The difficulty of work, and its numerical aperture still limited by outer shroud orifice size, minimum orifice size is by limiting
Processing technique processed determines.
Content of the invention
It is an object of the invention to provide a kind of multiple zone structural phase-type zone plate, one kind can increase numerical aperture
Footpath and reduction focal spot size, carry high-resolution.
The technical solution realizing the object of the invention is：
A kind of multiple zone structural phase-type zone plate it is characterised in that：Including light-transmissive substrates and be plated in described printing opacity
Light transmission film on substrate, etches N number of donut on described light transmission film, N >=3, described adjacent with
The annulus phase of heart annulus is π, radially phase-type zone plate is divided into M region, 2≤M
≤ 10, the annulus number N in each region and annulus position g (n) meet following relation：
Described annulus position g (n) determines girdle radius rn,The radius of wherein first annulusλ is operation wavelength, and f is working focal distance；Assume the annulus position g of ith zoneiN () is and ring
With the relevant linear change of sequence n, i.e. gi(n)=ain+bi, wherein aiAnd biRepresent position parameter, aiAnd biAll
It is integer, the numerical aperture of multiple zone structural phase-type zone plate isAdjustment aiAnd biCan
Increase numerical aperture, and then reduce focal spot size, improve resolution.
Described multiple zone structural phase-type zone plate, because the annulus of adjacent area is continuous, aiAnd biFull
Sufficient ai(ni+1)+bi=ai+1(ni+1)+bi+1.
Described multiple zone structural phase-type zone plate, aiMeet following relation：1 ＜ a1＜ a2＜ ... ＜ ai＜
... ＜ aM.
The present invention compared with prior art, its remarkable advantage：
(1) present invention is radially divided into multiple regions, is being not single region；And each region
Using different annulus location formulas, increase bandwidth it is easier to process.
(2) restriction that the present invention can break traditions zone plate numerical aperture and focal spot is led to due to processing technique,
Numerical aperture can be increased in the case of same annulus number and focal length, reduce focal spot size, improve resolution.
(3) present invention adopts phase-type zone plate structure, adjacent annulus position phase phase difference of pi, can improve diffraction effect
Rate.
Brief description
Fig. 1 is a kind of multiple zone structural phase-type zone plate structural representation of the present invention.
Fig. 2 is a kind of multiple zone structural phase-type zone plate design principle figure of the present invention.
Fig. 3 is the focus characteristics of multiple zone structural phase-type zone plate and conventional wave strap in the embodiment of the present invention
Analogous diagram.
Fig. 4 is a kind of multiple zone structural phase-type zone plate structure flow chart of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail.
In conjunction with Fig. 1～Fig. 4, a kind of multiple zone structural phase-type zone plate, including light-transmissive substrates and be plated in described
Light transmission film on light substrate, etches N number of donut on described light transmission film, and N >=3 are described adjacent
The annulus phase of donut is π, radially phase-type zone plate is divided into M region, 2≤
M≤10, the annulus number N in each region and annulus position g (n) meet following relation：
Described annulus position g (n) determines girdle radius rn,The half of wherein first annulus
Footpathλ is operation wavelength, and f is working focal distance；Assume the annulus position g of ith zonei(n) be with
The relevant linear change of annulus sequence n, i.e. gi(n)=ain+bi, wherein aiAnd biRepresent position parameter, aiWith
biIt is all integer, the numerical aperture of multiple zone structural phase-type zone plate is
Described multiple zone structural phase-type zone plate, because the annulus of adjacent area is continuous, aiAnd biFull
Sufficient ai(ni+1)+bi=ai+1(ni+1)+bi+1.
Described multiple zone structural phase-type zone plate, aiMeet following relation：1 ＜ a1＜ a2＜ ... ＜ ai＜
... ＜ aM.
Described backing material can be the light transmissive material such as simple glass or lucite, and light transmission film can be medium
Film.
As shown in figure 1, Fig. 1 is a kind of multiple zone structural phase-type zone plate structural representation, in equal annulus
During number, adjust annulus position and can increase bandwidth, increase bore, and then increase numerical aperture and reduce focal spot chi
Very little, improve resolution.
As shown in Fig. 2 Fig. 2 is a kind of multiple zone structural phase-type zone plate method for designing schematic diagram, multizone
The design of structure phase-type zone plate mainly includes the subregion to known annulus number, and that is, this structure has how many areas
Domain, the annulus number in each region and corresponding annulus position.Fig. 2 taking three regional structures as a example explanation
Its design process：
(1) annulus number and focal length known to, are divided into three regions；
(2) three regions are determined by two boundary conditions, first determine the first border, that is, in first region
Annulus number, then calculates the distribution of amplitudes of first area；
(3) determine the position at the second boundary place so that it may determine the annulus number in second area and the 3rd region
Mesh, and calculate second area and the distribution of amplitudes in the 3rd region, make the amplitude of the first area of calculating in step 2
The peak value that in distribution, the trough of first appearance is occurred with the distribution of amplitudes of second area overlaps, and is then superimposed as
New distribution of amplitudes, first trough of this new distribution of amplitudes also should be with the first of the distribution of amplitudes in the 3rd region
Individual peak value overlaps, and thus can get optimal diffraction amplitudes distribution.So using the second boundary as optimized variable,
, until minimum focal spot size and optimal Sidelobe Suppression effect in its position of constantly regulate.In this process
Annulus location formula is also changing.
As shown in figure 3, Fig. 3 is the focus characteristics emulation of three regional structure phase-type zone plates and conventional wave strap
Figure.Three regional structure phase-type zone plate focal spots are less than conventional wave strap, Sidelobe Suppression effect as can be seen from Figure
Become apparent from.
Embodiment 1
The present invention is a kind of multiple zone structural phase-type zone plate, including light-transmissive substrates and be plated in described light-transmissive substrates
On light transmission film, N number of donut etched on described light transmission film, N >=3, described neighboring concentric circle
The annulus phase of ring is π, radially phase-type zone plate is divided into M region, 2≤M≤10,
The annulus number N in each region and annulus position g (n) meet following relation：
Described annulus position g (n) determines girdle radius rn,The half of wherein first annulus
Footpathλ is operation wavelength, and f is working focal distance；Assume the annulus position g of ith zonei(n) be with
The relevant linear change of annulus sequence n, i.e. gi(n)=ain+bi, wherein aiAnd biRepresent position parameter, aiWith
biIt is all integer, the numerical aperture of multiple zone structural phase-type zone plate is
Described multiple zone structural phase-type zone plate, because the annulus of adjacent area is continuous, aiAnd biFull
Sufficient ai(ni+1)+bi=ai+1(ni+1)+bi+1.
Described multiple zone structural phase-type zone plate, aiMeet following relation：1 ＜ a1＜ a2＜ ... ＜ ai＜
... ＜ aM.
Described backing material can be the light transmissive material such as simple glass or lucite, and light transmission film can be medium
Film.
Operation wavelength described in this embodiment is 632.8nm, and working focal distance is 500mm, and annulus number is 100, will
It is divided into two regions, and front 40 rings are first region, and 60 rings are second area afterwards. The annulus position of first area is g (n)=2n-1, radius 1≤n≤40；Annulus position g (n) of second area=3n-42, radius 41≤n≤100.Annulus number be 100 conventional wave strap numerical aperture be 0.005625,
2 described regional structure phase-type zone plate numerical apertures are 0.009035, more than the numerical aperture of conventional wave strap
Footpath.From Ruili criterion, the bigger resolution of numerical aperture is higher.
Embodiment 2
The present invention be a kind of multiple zone structural phase-type zone plate it is characterised in that：Including light-transmissive substrates and being plated in
Light transmission film in described light-transmissive substrates, etches N number of donut, N >=3, institute on described light transmission film
The annulus phase stating neighboring concentric annulus is π, radially phase-type zone plate is divided into M region,
2≤M≤10, the annulus number N in each region and annulus position g (n) meet following relation：
Described annulus position g (n) determines girdle radius rn,The half of wherein first annulus
Footpathλ is operation wavelength, and f is working focal distance；Assume the annulus position g of ith zonei(n) be with
The relevant linear change of annulus sequence n, i.e. gi(n)=ain+bi, wherein aiAnd biRepresent position parameter, aiWith
biIt is all integer, the numerical aperture of multiple zone structural phase-type zone plate is
Described multiple zone structural phase-type zone plate, because the annulus of adjacent area is continuous, aiAnd biFull
Sufficient ai(ni+1)+bi=ai+1(ni+1)+bi+1.
Described multiple zone structural phase-type zone plate, aiMeet following relation：1 ＜ a1＜ a2＜ ... ＜ ai＜
... ＜ aM.
Described backing material can be the light transmissive material such as simple glass or lucite, and light transmission film can be medium
Film.
Described donut, number of rings is 1500 rings, and operation wavelength is 632.8nm, and working focal distance is 500mm,
It is divided into 3 regions, obtaining first region annulus by method for designing is 1≤n≤199, g (n)=3n-2；
Two Areas annulus 200≤n≤574, g (n)=5n-402；3rd region annulus be
575≤n≤1500, g (n)=7n-1552.The minimum band of three regional structure phase-type zone plates is a width of
20.82 μm, the minimum bandwidth of conventional wave strap is 7.26 μm.
The numerical aperture of conventional wave strap is 0.04357, and focal spot size is 17.76 μm；Three regional structure phase-types
Zone plate numerical aperture is 0.10642, and focal spot size is 8.54 μm.Find three regional structure phase-type zone plates
Numerical aperture is 2.44 times of conventional wave strap, and its focal spot size is 0.48 times of conventional wave strap, illustrates three
Regional structure phase-type zone plate can meet large-numerical aperture and the requirement of little focal spot size.
It is an advantage of the current invention that：(1) adopt multiple zone structural, there are different design parameters in each region, that is,
Annulus number and annulus position.(2) multiple zone structural can pass through annulus position modulation bandwidth, increases bandwidth,
Under the conditions of equal number of rings, it is possible to increase bore, and then increase numerical aperture, bandwidth increases easy to process.(3) with
Numerical aperture to increase, focal spot size can diminish, improve resolution.(4) on focal plane, multiple zone structural
Phase-type zone plate Sidelobe Suppression becomes apparent from than conventional wave strap.(5) can be increased using position phase zone plate structure and spread out
Penetrate efficiency.
Claims (3)
1. a kind of multiple zone structural phase-type zone plate it is characterised in that：Including light-transmissive substrates be plated in described
Light transmission film in light-transmissive substrates, etches N number of donut, N >=3, described phase on described light transmission film
The annulus phase of adjacent donut is π, radially phase-type zone plate is divided into M region, 2
≤ M≤10, the annulus number N in each region and annulus position g (n) meet following relation：
Described annulus position g (n) determines girdle radius rn,The radius of wherein first annulusλ is operation wavelength, and f is working focal distance；Assume the annulus position g of ith zoneiN () is and ring
With the relevant linear change of sequence n, i.e. gi(n)=ain+bi, wherein aiAnd biRepresent position parameter, aiAnd biAll
It is integer, the numerical aperture of multiple zone structural phase-type zone plate is
2. multiple zone structural phase-type zone plate according to claim 1 it is characterised in that：Due to phase
The annulus in neighbouring region is continuous, aiAnd biMeet ai(ni+1)+bi=ai+1(ni+1)+bi+1.
3. multiple zone structural phase-type zone plate according to claim 1 and 2 it is characterised in that：Institute
State aiMeet following relation：1 ＜ a1＜ a2＜ ... ＜ ai＜ ... ＜ aM.
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| CN201510487379.8A CN106405700B (en) | 2015-08-10 | 2015-08-10 | A kind of multiple zone structural phase-type zone plate |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510487379.8A CN106405700B (en) | 2015-08-10 | 2015-08-10 | A kind of multiple zone structural phase-type zone plate |
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| CN106405700B CN106405700B (en) | 2018-11-13 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108092991A (en) * | 2017-12-29 | 2018-05-29 | 威马智慧出行科技（上海）有限公司 | The method for identifying ID and device of vehicle |
| CN113345619A (en) * | 2021-06-16 | 2021-09-03 | 中国工程物理研究院激光聚变研究中心 | One-dimensional X-ray refraction blazed zone plate |
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| CN102062887A (en) * | 2010-12-10 | 2011-05-18 | 中国科学院上海光学精密机械研究所 | Damman wave zone plate |
| US7969654B1 (en) * | 2006-10-24 | 2011-06-28 | Purdue Research Foundation | Volume Fresnel zone plates fabricated by laser direct writing |
| CN102116885A (en) * | 2009-12-31 | 2011-07-06 | 上海科学院 | Super-resolution Fresnel wave zone plate |
| CN104898195A (en) * | 2015-06-30 | 2015-09-09 | 中国科学院上海光学精密机械研究所 | Generalized Fibonacci zone plate |
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2015
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7969654B1 (en) * | 2006-10-24 | 2011-06-28 | Purdue Research Foundation | Volume Fresnel zone plates fabricated by laser direct writing |
| CN101694532A (en) * | 2009-10-22 | 2010-04-14 | 中国科学院光电技术研究所 | Phase type photon sieve |
| CN102116885A (en) * | 2009-12-31 | 2011-07-06 | 上海科学院 | Super-resolution Fresnel wave zone plate |
| CN102062887A (en) * | 2010-12-10 | 2011-05-18 | 中国科学院上海光学精密机械研究所 | Damman wave zone plate |
| CN104898195A (en) * | 2015-06-30 | 2015-09-09 | 中国科学院上海光学精密机械研究所 | Generalized Fibonacci zone plate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108092991A (en) * | 2017-12-29 | 2018-05-29 | 威马智慧出行科技（上海）有限公司 | The method for identifying ID and device of vehicle |
| CN113345619A (en) * | 2021-06-16 | 2021-09-03 | 中国工程物理研究院激光聚变研究中心 | One-dimensional X-ray refraction blazed zone plate |
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