CN106404244B - Pressure sensor and its signal calibration method - Google Patents
Pressure sensor and its signal calibration method Download PDFInfo
- Publication number
- CN106404244B CN106404244B CN201610778313.9A CN201610778313A CN106404244B CN 106404244 B CN106404244 B CN 106404244B CN 201610778313 A CN201610778313 A CN 201610778313A CN 106404244 B CN106404244 B CN 106404244B
- Authority
- CN
- China
- Prior art keywords
- calibration
- pressure
- signal
- pressure sensor
- range section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 37
- 230000003321 amplification Effects 0.000 claims abstract description 22
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 22
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 5
- 101001106432 Homo sapiens Rod outer segment membrane protein 1 Proteins 0.000 description 3
- 102100021424 Rod outer segment membrane protein 1 Human genes 0.000 description 3
- 230000006870 function Effects 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000012887 quadratic function Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/26—Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention provides a kind of pressure sensor and its signal calibration method, and pressure sensor includes at least two range sections, and the amplifier of corresponding amplification factor and the analog-digital converter of respective offsets amount are each equipped in each range section；Signal calibration method includes the selection base measuring pressure point in range section；According to the amplification factor and offset in the base measuring pressure point and corresponding range section taken, temperature compensation calibration is carried out to range section, obtains corresponding Calibration equation parameter, and store into corresponding memory；According to Calibration equation parameter corresponding in memory, calibration output is carried out to the collected raw pressure signal of pressure MEMS chip.It can be switched in different range sections according to use environment using foregoing invention, it is ensured that the measurement accuracy of pressure sensor.
Description
Technical field
The present invention relates to sensor technical fields, more specifically, are related to a kind of adjustable pressure biography in testing range section
Sensor and its signal calibration method.
Background technique
Currently, the range of digital pressure sensor is usually fixed inconvenience, a digital pressure sensor is one corresponding
Fixed accuracy guarantee range, but in actual application, it is even more according to the variation of application bar and use environment needs two
A accuracy guarantee range；In this case, first is that using multiple digital pressure sensors, second is that sacrificing common range section essence
Degree selects wide range measure；The former will increase product cost, and operability is low, and the latter will affect the use function of sensor,
Reduce measuring accuracy.Such as: on the one hand digital pressure sensor needs digital pressure sensor in mobile phone and wearable application
Height above sea level -1000m~9000m variation can be measured, i.e. pressure precision guarantees section at (30KPa~110KPa)；On the other hand
Needing to distinguish that height above sea level climbs building height between -700m~1000m, i.e. pressure guarantees section (90KPa~110KPa), if it is
The precision of (90KPa~110KPa) range can then be sacrificed by meeting (30KPa~110KPa) range.
Summary of the invention
In view of the above problems, the object of the present invention is to provide a kind of pressure sensor and its signal calibration methods, to solve
The problems such as range of pressure sensor immobilizes at present, and there are contradictions between measurement range and measurement accuracy.
According to an aspect of the present invention, a kind of pressure sensor signal calibration method is provided, pressure sensor includes extremely
Few two range sections, are each equipped with the amplifier of corresponding amplification factor and the modulus of respective offsets amount in each range section
Converter；Signal calibration method includes: the selection base measuring pressure point in range section；According to selected base measuring pressure point and phase
Amplification factor and offset in corresponding range section, carry out temperature compensation calibration to range section, obtain corresponding calibration side
Journey parameter, and store into corresponding memory；According to Calibration equation parameter corresponding in memory, pressure MEMS chip is adopted
The raw pressure signal collected carries out calibration output.
Furthermore it is preferred that scheme be, to range section carry out temperature compensation calibration during, joined according to Calibration equation
Number obtains corresponding Calibration equation, and Calibration equation is the equation with two unknowns of pressure and temperature；According to Calibration equation, to pressure MEMS core
The collected raw pressure signal of piece carries out calibration output.
Furthermore it is preferred that scheme be that pressure sensor further includes temperature MEMS chip, work as what temperature MEMS chip acquired
Preceding temperature signal and the raw pressure signal of pressure MEMS chip acquisition substitute into Calibration equation, and the pressure after obtaining calibration is defeated
It is worth out.
Furthermore it is preferred that scheme be during obtaining corresponding Calibration equation parameter, to establish in corresponding range section
Calibration equation model, Calibration equation model includes calibration factor to be solved；Several groups calibration pressure is chosen in range section
Force, the group number of base measuring pressure point is not less than the number of calibration factor to be solved in Calibration equation model, by every group of calibration pressure
Temperature signal and pressure signal in force substitute into Calibration equation model；It is solved in Calibration equation model according to least square method
Calibration factor, obtain the Calibration equation in the range section.
Furthermore it is preferred that scheme be, each range section use same form Calibration equation model；Alternatively, using different
The Calibration equation model of form.
Furthermore it is preferred that scheme be that base measuring pressure point is uniformly distributed in corresponding range section.
Furthermore it is preferred that scheme be that calibration output is being carried out to pressure MEMS chip collected raw pressure signal
In the process, display output is carried out to the pressure signal after calibration by display unit.
According to a further aspect of the invention, a kind of pressure sensor is provided, above-mentioned pressure sensor signal calibration method is utilized
Pressure sensing is calibrated；Wherein, pressure sensor includes the temperature MEMS chip of temperature collection signal, acquisition reset pressure
The pressure MEMS chip of signal, and believe with the sequentially connected compensation calibration unit of pressure MEMS chip, memory and number
Number processor；Wherein, pressure sensor includes at least two range sections, is each equipped with corresponding amplification in each range section
The amplification factor of device and the offset of AD conversion unit；Compensation calibration unit, according to the calibration chosen in range section
Amplification factor and offset in pressure spot and corresponding range section carry out temperature compensation calibration, acquisition pair to range section
The Calibration equation parameter answered, and store into corresponding memory；Digital signal processor, according to being calibrated accordingly in memory
Equation parameter carries out calibration output to the collected raw pressure signal of pressure MEMS chip.
Furthermore it is preferred that scheme be that compensation calibration unit further comprises amplifier and analog-digital converter, wherein amplification
Device is for amplifying the collected raw pressure signal of MEMS chip；Analog-digital converter is used for the amplified original of amplifier
Beginning pressure signal carries out analog-digital conversion.
Furthermore it is preferred that scheme be further include pressure display unit, pressure display unit is used for digital signal processor
Digital pressure signal after the calibration of acquisition carries out display output.
Using above-mentioned pressure sensor according to the present invention and its signal calibration method, it is provided with multiple range sections, needle
Corresponding Calibration equation parameter is configured with to different range sections, it, can be according to correspondence when selecting different range sections
Calibration equation parameter in section, calibrates the output voltage of pressure sensor, applied widely, the energy of pressure sensor
Enough ensure that the measurement accuracy of product is constantly in optimum state.
To the accomplishment of the foregoing and related purposes, one or more aspects of the present invention include be particularly described below and
The feature particularly pointed out in claim.Certain illustrative aspects of the invention is described in detail in the following description and the annexed drawings.
However, these aspects indicate only usable some of the various ways in the principles of the present invention.In addition, of the invention
It is intended to include all such aspects and their equivalent.
Detailed description of the invention
By reference to the following description in conjunction with the accompanying drawings and the contents of the claims, and with to it is of the invention more comprehensively
Understand, other objects and results of the present invention will be more clearly understood and understood.In the accompanying drawings:
Fig. 1 is the flow chart according to the pressure sensor signal calibration method of the embodiment of the present invention；
Fig. 2 is the pressure sensor functional block diagram according to the embodiment of the present invention.
Identical label indicates similar or corresponding feature or function in all the appended drawings.
Specific embodiment
In the following description, for purposes of illustration, it in order to provide the comprehensive understanding to one or more embodiments, explains
Many details are stated.It may be evident, however, that these embodiments can also be realized without these specific details.
In other examples, one or more embodiments for ease of description, well known structure and equipment are shown in block form an.
For the present invention is described in detail implement pressure sensor and its signal calibration method, below with reference to attached drawing to this hair
Bright specific embodiment is described in detail.
Fig. 1 shows the process of pressure sensor signal calibration method according to an embodiment of the present invention.
As shown in Figure 1, wherein pressure sensor includes in the pressure sensor signal calibration method of the embodiment of the present invention
At least two range sections are each equipped with the amplifier of corresponding amplification factor and the mould of respective offsets amount in each range section
Number converter；Signal calibration method the following steps are included:
S110: base measuring pressure point is chosen in range section；
S120: according to the amplification factor and offset in selected base measuring pressure point and corresponding range section, to amount
Journey section carries out temperature compensation calibration, obtains corresponding Calibration equation parameter, and store into corresponding memory；
S130: according to Calibration equation parameter corresponding in memory, the collected reset pressure of pressure MEMS chip is believed
Number carry out calibration output.
In the step s 120, it during carrying out temperature compensation calibration to range section, is obtained according to Calibration equation parameter
Corresponding Calibration equation is taken, Calibration equation is the equation with two unknowns of pressure and temperature, according to the Calibration equation of acquisition, to pressure MEMS
The collected raw pressure signal of chip carries out calibration output.Wherein, pressure sensor further includes temperature MEMS, by temperature MEMS
The current temperature signal of chip acquisition and the raw pressure signal of pressure MEMS chip acquisition substitute into Calibration equation, can obtain
Pressure output value after taking calibration.
In the specific embodiment of the present invention, during obtaining corresponding Calibration equation parameter, build first
Calibration equation model in vertical corresponding range section, Calibration equation model includes calibration factor to be solved, in range section
Several groups base measuring pressure point is chosen, the group number of base measuring pressure point is a not less than calibration factor to be solved in Calibration equation model
Number, will be in the temperature signal and pressure signal substitution Calibration equation model in every group of base measuring pressure point；Finally, according to least square
Method solves the calibration factor in Calibration equation model, obtains the Calibration equation in the range section.
Wherein, each range section can use the Calibration equation model of same form；Alternatively, using various forms of calibrations
Equation model；Meanwhile base measuring pressure point is uniformly distributed or is randomly distributed in corresponding range section.
It in step s 130, can be by display unit, for example, display screen or touch screen etc., to the pressure after calibration
Signal carries out display output.Wherein, display unit may further include pressure display unit and with range section display unit,
It, can be by pressure display unit, to the number after the calibration of digital signal processor acquisition after choosing different range sections
Word pressure signal carries out display output, and range section display unit can then show currently selected range, facilitates test
Personnel are to the reading of output data and post-processing etc..
It is corresponding with above-mentioned pressure sensor signal calibration method, the present invention also provides a kind of pressure sensor, in utilization
Pressure sensor signal calibration method is stated to calibrate pressure sensing.
Specifically, Fig. 2 shows pressure sensor principles according to an embodiment of the present invention.
As shown in Fig. 2, the pressure sensor of the embodiment of the present invention includes the temperature MEMS (Micro- of temperature collection signal
Electro-Mechanical System, MEMS) chip, acquire raw pressure signal pressure MEMS chip, and
With the sequentially connected compensation calibration unit of pressure MEMS chip, memory and digital signal processor；Wherein, pressure sensor
Including at least two range sections, the amplification factor and corresponding modulus of respective amplifier are each equipped in each range section
The offset of converting unit；Compensation calibration unit, according to the base measuring pressure point and corresponding range area chosen in range section
Interior amplification factor and offset carries out temperature compensation calibration to range section, obtains corresponding Calibration equation parameter, and store up
It deposits into corresponding memory；Digital signal processor, according to Calibration equation parameter corresponding in memory, to pressure MEMS core
The collected raw pressure signal of piece carries out calibration output.
Wherein, compensation calibration unit further comprises amplifier and analog-digital converter, wherein amplifier is used for according to correspondence
Amplification factor the collected raw pressure signal of MEMS chip is amplified；Analog-digital converter is for after amplifying amplifier
Raw pressure signal according to corresponding offset carry out analog-digital conversion, ultimately form at digital signal processor
The digital signal of reason.
In other words, the pressure sensor of the embodiment of the present invention include for temperature collection signal temperature MEMS chip, adopt
Collect initial pressure signal pressure MEMS chip, and with the sequentially connected amplifier of pressure MEMS chip, analog-digital converter, deposit
Reservoir and digital signal processor；Wherein, pressure sensor includes multiple range sections, is each equipped in each range section
The corresponding amplification factor of amplifier and the offset of analog-digital converter；Such as: amplification factor GAIN1 and corresponding offset
OFFSET1, amplification factor GAIN2 and corresponding offset OFFSET2 etc..
Combination pressure sensor signal calibration method chooses school during calibrating to pressure sensor first
Quasi- pressure spot carries out the range section according to the amplification factor and offset in range corresponding with base measuring pressure point section
Temperature compensation calibration to obtain Calibration equation parameter corresponding with the section, and is stored into corresponding memory, or
Person stores into the ROM1 of memory；Then, corresponding with memory ROM1 digital signal processor DSP 1 is according to memory
Corresponding Calibration equation parameter in ROM1, carries out calibration output to the collected raw pressure signal of pressure MEMS chip.
Specifically, it during carrying out temperature compensation calibration to range section, is obtained first according to Calibration equation parameter
Corresponding Calibration equation, Calibration equation is the equation with two unknowns of pressure and temperature, for example, temperature value [T1, T2, T3 ... Tn] and pressure
Being worth the relationship between [P1, P2, P3 ... Pn] (wherein, n is natural number) is quadratic function relation；Digital signal processor DSP 1
According to the Calibration equation of acquisition, the original pressure of the current temperature signal that temperature MEMS chip is acquired and the acquisition of pressure MEMS chip
Force signal substitutes into corresponding Calibration equation, the pressure output value after can obtaining calibration, passes through digital signal to realize
Processor carries out the purpose of calibration output to the collected raw pressure signal of pressure MEMS chip.
Wherein, when selecting different range sections, corresponding range area can be obtained according to corresponding amplification factor and offset
Interior Calibration equation, so that the pressure signal of output persistently keeps higher accuracy.
In the specific embodiment of the present invention, it can be built during obtaining corresponding Calibration equation parameter
Calibration equation model in vertical corresponding range section, Calibration equation model includes calibration factor to be solved, in range section
Choose several groups base measuring pressure point；Wherein, the group number of base measuring pressure point is not less than calibration system to be solved in Calibration equation model
Several numbers, by every group of base measuring pressure point temperature signal and pressure signal substitute into Calibration equation model in, according to minimum two
Multiplication solves the calibration factor in Calibration equation model, to finally obtain the Calibration equation in the range section.
In addition, each range section can use the Calibration equation model of same form；Alternatively, using various forms of calibrations
Equation model.Meanwhile the selection of base measuring pressure point can also use various ways, for example, base measuring pressure point is in corresponding range
It is uniformly distributed in section, or is mainly distributed on both ends and the medium position in range section.
In the specific embodiment of the present invention, pressure sensor can also include pressure display unit and range
Section display unit can obtain digital signal processor by pressure display unit after choosing different range sections
Calibration after digital pressure signal carry out display output, and range section display unit can then show current selection amount
Journey facilitates tester to the reading of output data and post-processing etc..
It should be noted that pressure sensor apparatus and its corresponding pressure sensor calibration side in the embodiment of the present invention
Method, something in common can be used for reference mutually, no longer be repeated one by one herein.
Shown in sum up, pressure sensor and its signal calibration method provided by the invention are provided with multiple and different ranges
Section is provided with matched Calibration equation for each range section, and user can select not according to different application scenarios
Same amplification factor, offset and Calibration equation, and calibration output is carried out to initial pressure signal according to corresponding Calibration equation,
Use scope is wide, at low cost, and when selecting different range sections, can pressure maintaining force snesor measurement accuracy.
Pressure sensor and its signal calibration method according to the present invention are described in an illustrative manner above with reference to attached drawing.But
It is, it will be appreciated by those skilled in the art that for pressure sensor and its signal calibration method that aforementioned present invention is proposed, also
Various improvement can be made on the basis of not departing from the content of present invention.Therefore, protection scope of the present invention should be by appended
The content of claims determines.
Claims (9)
1. a kind of pressure sensor signal calibration method, the pressure sensor includes at least two range sections, in each range
The amplifier of corresponding amplification factor and the analog-digital converter of respective offsets amount are each equipped in section；The signal calibration method
Including carrying out signal calibration respectively to each of at least two range section, wherein being carried out to each range section
Calibration includes:
Base measuring pressure point is chosen in the range section；
According to the amplification factor and offset in selected base measuring pressure point and corresponding range section, to the range section
Temperature compensation calibration is carried out, obtains corresponding Calibration equation parameter, and store into corresponding memory；
According to Calibration equation parameter corresponding in the memory, the collected raw pressure signal of pressure MEMS chip is carried out
Calibration output,
Wherein, the pressure sensor further includes temperature MEMS chip,
By the current temperature signal of temperature MEMS chip acquisition and the reset pressure letter of pressure MEMS chip acquisition
It number substitutes into the Calibration equation, the pressure output value after obtaining calibration.
2. pressure sensor signal calibration method as described in claim 1, wherein carrying out temperature benefit to the range section
During repaying calibration,
Corresponding Calibration equation is obtained according to the Calibration equation parameter, the Calibration equation is the binary side of pressure and temperature
Journey；
According to the Calibration equation, calibration output is carried out to the collected raw pressure signal of pressure MEMS chip.
3. pressure sensor signal calibration method as described in claim 1, wherein obtaining corresponding Calibration equation parameter
In the process,
The Calibration equation model in corresponding range section is established, the Calibration equation model includes calibration factor to be solved；
Several groups base measuring pressure point is chosen in the range section, the group number of the base measuring pressure point is not less than the calibration side
The number of calibration factor to be solved in journey model, by every group of base measuring pressure point temperature signal and pressure signal substitute into described in
In Calibration equation model；
The calibration factor in the Calibration equation model is solved according to least square method, obtains the calibration side in the range section
Journey.
4. pressure sensor signal calibration method as claimed in claim 3, wherein
Each range section uses the Calibration equation model of same form；Alternatively, using various forms of Calibration equation models.
5. pressure sensor signal calibration method as claimed in claim 3, wherein
The base measuring pressure point is uniformly distributed in corresponding range section.
6. pressure sensor signal calibration method as described in claim 1, wherein collected to the pressure MEMS chip
Raw pressure signal carry out calibration output during,
Display output is carried out to the pressure signal after calibration by display unit.
7. a kind of pressure sensor, using pressure sensor signal calibration method such as claimed in any one of claims 1 to 6 to pressure
Power sensing is calibrated；Wherein, the pressure sensor includes the temperature MEMS chip of temperature collection signal, acquisition reset pressure
The pressure MEMS chip of signal, and with the sequentially connected compensation calibration unit of the pressure MEMS chip, memory and number
Word signal processor；Wherein,
The pressure sensor includes at least two range sections, is each equipped with putting for corresponding amplifier in each range section
The offset of big multiple and analog-digital converter；
The compensation calibration unit, according in the base measuring pressure point and corresponding range section chosen in the range section
Amplification factor and offset carry out temperature compensation calibration to the range section, obtain corresponding Calibration equation parameter, and store
To in corresponding memory；
The digital signal processor, according to Calibration equation parameter corresponding in the memory, to the pressure MEMS chip
Collected raw pressure signal carries out calibration output.
8. pressure sensor as claimed in claim 7, wherein the compensation calibration unit further comprises amplifier and modulus
Converter, wherein
The amplifier is for amplifying the collected raw pressure signal of the MEMS chip；
The analog-digital converter is used to the amplified raw pressure signal of the amplifier carrying out analog-digital conversion.
9. pressure sensor as claimed in claim 7, wherein it further include pressure display unit,
The pressure display unit is used to show the digital pressure signal after calibration that the digital signal processor obtains
Show output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610778313.9A CN106404244B (en) | 2016-08-31 | 2016-08-31 | Pressure sensor and its signal calibration method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610778313.9A CN106404244B (en) | 2016-08-31 | 2016-08-31 | Pressure sensor and its signal calibration method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106404244A CN106404244A (en) | 2017-02-15 |
| CN106404244B true CN106404244B (en) | 2019-09-17 |
Family
ID=58003244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610778313.9A Active CN106404244B (en) | 2016-08-31 | 2016-08-31 | Pressure sensor and its signal calibration method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106404244B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019012013A (en) * | 2017-06-30 | 2019-01-24 | セイコーエプソン株式会社 | Force detection device and robot |
| CN107655612B (en) * | 2017-09-11 | 2019-09-13 | 台州长虹泵业有限公司 | A kind of pressure sensor of water pump and its detection data compensation method |
| CN109143053B (en) * | 2018-08-23 | 2020-12-01 | 国网河北省电力有限公司沧州供电分公司 | Temperature compensation calibration method and terminal equipment |
| CN111067539A (en) * | 2019-12-12 | 2020-04-28 | 上海航天控制技术研究所 | Gas sensitive sensing shoes for loading exoskeleton |
| CN112903000A (en) * | 2021-03-26 | 2021-06-04 | 歌尔光学科技有限公司 | Sensor control method, sensor control device and storage medium |
| CN114265376B (en) * | 2021-12-07 | 2023-09-01 | 中国电子科技集团公司第四十八研究所 | ZMD31050 chip debugging method and batch debugging system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202110034U (en) * | 2011-05-26 | 2012-01-11 | 北京康斯特仪表科技股份有限公司 | Multi-measuring range on-site automatic pressure and electric signal check meter |
| CN103968998A (en) * | 2014-04-12 | 2014-08-06 | 沈阳仪表科学研究院有限公司 | Method for conducting pressure calibration on diffused silicon sensors through upper computer |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130218502A1 (en) * | 2012-02-21 | 2013-08-22 | Dresser, Inc. | Temperature compensated pressure transducer |
| CN203824695U (en) * | 2014-03-26 | 2014-09-10 | 南京信息工程大学 | Apparatus for inhibiting sensitivity thermal drift and noise of silicon nanowire giant piezoresistive sensor |
| CN104897323A (en) * | 2014-10-05 | 2015-09-09 | 安徽贝莱电子科技有限公司 | Novel strain gauge |
| CN105258846A (en) * | 2015-10-08 | 2016-01-20 | 歌尔声学股份有限公司 | Method and device for calibrating pressure sensor |
| CN105352632A (en) * | 2015-10-08 | 2016-02-24 | 歌尔声学股份有限公司 | Digital pressure sensor and method for obtaining digital pressure signal |
-
2016
- 2016-08-31 CN CN201610778313.9A patent/CN106404244B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202110034U (en) * | 2011-05-26 | 2012-01-11 | 北京康斯特仪表科技股份有限公司 | Multi-measuring range on-site automatic pressure and electric signal check meter |
| CN103968998A (en) * | 2014-04-12 | 2014-08-06 | 沈阳仪表科学研究院有限公司 | Method for conducting pressure calibration on diffused silicon sensors through upper computer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106404244A (en) | 2017-02-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106404244B (en) | Pressure sensor and its signal calibration method | |
| CN102099662B (en) | Arrangement for linearizing non-linear sensor | |
| CN105224132B (en) | The calibration method and device of a kind of pressure sensor | |
| CN107621279B (en) | Data processing method, sensor data calibration method and device | |
| CN108107273B (en) | Device and method for testing capacitance and resistance value | |
| CN105352632A (en) | Digital pressure sensor and method for obtaining digital pressure signal | |
| CN206057424U (en) | A kind of current measuring device | |
| CA2476051A1 (en) | Calibration data compression | |
| CN106482868A (en) | Temperature difference calibration steps and its system | |
| CN102589741B (en) | Method and device for detecting temperature | |
| CN114859129B (en) | Wireless multi-channel micro impedance measurement method and device | |
| CN101344374A (en) | Texture measuring apparatus and method | |
| CN103579699B (en) | The calibration steps of cell voltage and device | |
| CN103284707A (en) | Sensor array and method for adjusting pulse pressure value | |
| JP2008196875A (en) | Optical power measuring device, and light signal receiving device equipped with device | |
| CN107036716B (en) | Self-calibration infrared thermopile temperature sensor and self-calibration method | |
| CN102594276B (en) | Gain calibration system for instrument amplifier and gain calibration method | |
| Saggio et al. | Shaping resistive bend sensors to enhance readout linearity | |
| CN201218838Y (en) | Natural variable temperature intelligent scaling apparatus of groundwork microwave radiometer | |
| CN106289043A (en) | A kind of capacitive distance measuring method, device and calibrating method thereof | |
| CN114370960A (en) | Pull rod load measuring method, device and system and storage medium | |
| CN202737817U (en) | Gain calibrating system of instrument amplifier | |
| CN209707422U (en) | A kind of expansion coefficients of metal wire measuring device and material temperature become length measurement device | |
| Sturm et al. | Wireless kayak on-water ergometry–Part 1: Paddle blade force | |
| CN105101031B (en) | The configuration method of microphone |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200608 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
|
| TR01 | Transfer of patent right |