CN106404168B - A kind of method for obtaining laser power meter different wave length correction factor - Google Patents

A kind of method for obtaining laser power meter different wave length correction factor Download PDF

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Publication number
CN106404168B
CN106404168B CN201610859483.XA CN201610859483A CN106404168B CN 106404168 B CN106404168 B CN 106404168B CN 201610859483 A CN201610859483 A CN 201610859483A CN 106404168 B CN106404168 B CN 106404168B
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China
Prior art keywords
power meter
correction factor
laser
calibrated
wavelength
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Expired - Fee Related
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CN201610859483.XA
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Chinese (zh)
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CN106404168A (en
Inventor
贾亚青
陈赤
孙向林
张建亮
崔磊
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BEIJING Institute OF METROLOGY
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BEIJING Institute OF METROLOGY
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Priority to CN201610859483.XA priority Critical patent/CN106404168B/en
Publication of CN106404168A publication Critical patent/CN106404168A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/0295Constructional arrangements for removing other types of optical noise or for performing calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum

Abstract

This patent discloses a kind of method for obtaining laser power meter different wave length correction factor.By measuring the correction factor under a certain wavelength of power meter, and measurement power meter detector spectrum response curve is combined, to obtain the correction factor of power meter under different wave length, the power accurate measurement of various wavelength lasers in its respective range can be used for.The beneficial effects of the invention are as follows:The project achievement in research provides a kind of method for obtaining correction factor under different light sources for laser power meter using unit, reduces its calibration amount at different wavelengths, reduces calibration cost;Avoid and be only used for the limitation for being calibrated wavelength, the working range that expansion of laser light power meter accurately measures;The limited deficiency of calibration lasing light emitter number is compensate for, the accurate measurement for new wavelength laser source provides possibility, and it is significant to accurately measure field in laser power.

Description

A kind of method for obtaining laser power meter different wave length correction factor
Technical field
This patent is a kind of method for obtaining laser power meter different wave length correction factor, is mainly used in gauge check field With strict field of precision measurement.Especially in the very high ophthalmology laser of laser power accuracy requirement, beauty laser, military affairs In laser and laser precision machining field, in the measurement process to laser power, the calibration measurement of laser power meter is very heavy Will.
Background technology
Laser power meter is the instrument for measuring laser source power.Before accurately measuring, metering inspection is typically arrived Survey department calibrates to power meter, to ensure the accuracy of testing result.Typically to the stabilized lasers source of a certain wavelength, use Reference power meter measured value and the ratio between power meter measured value is calibrated, as the correction factor for being calibrated power meter.With this by school When power meter measures other laser source powers of the wavelength, measurement result should be multiplied by correction factor, just can obtain this lasing light emitter Calibration power value.Response of the detector of laser power meter to different wave length laser is different, therefore, under a certain wavelength Correction factor obtained by calibration, it is only used for measuring the power measurement in the wavelength laser source.And it is used for multi-wavelength's Laser Measuring The power meter of amount, it should multiple wavelength are calibrated, draw the correction factor under different wave length.And this is difficult to accomplish, a side Face is due to experiment condition limitation, the laser of a lasing light emitter generally one to two kinds of wavelength of output, typically calibrates laser power meter Standard set-up can not possibly be equipped with many lasing light emitters.On the other hand, the consigner for being calibrated instrument can also be caused very big Financial burden.
The content of the invention
In view of the above problems, the invention provides a kind of method for obtaining laser power meter different wave length correction factor.It is logical The adjusted coefficient K crossed under the measurement a certain wavelength of power meterλm, and measurement power meter detector spectrum response curve S (λ) is combined, come Obtain the adjusted coefficient K of power meter under different wave lengthλn=Kλm×S(λm)/S(λn), it can be used for various in its respective range The power accurate measurement of wavelength laser.
The beneficial effects of the invention are as follows:The project achievement in research provides a kind of acquisition difference for laser power meter using unit The method of correction factor under light source, its calibration amount at different wavelengths is reduced, reduce calibration cost;Avoiding to use In the working range that the limitation for being calibrated wavelength, expansion of laser light power meter accurately measure;It compensate for calibration lasing light emitter number Limited deficiency, the accurate measurement for new wavelength laser source provide possibility, had in the laser power field of accurately measuring Significance.
Brief description of the drawings
Fig. 1 is laser power meter correction factor detection method schematic block diagram at a particular wavelength.(101. stabilized lasers sources 102. standard laser power meter 103. is calibrated laser power meter)
Fig. 2 is the measuring method schematic block diagram of laser power meter detector spectral response curve.(the stable light of 201. wide spectrums The standard detector 204. of 202. monochromator of source 203. is calibrated laser power meter detector)
Fig. 3 is a kind of detector spectral response curve for being calibrated laser power meter.
Embodiment
1st, as shown in figure 1, measuring same stabilized lasers source, reference power meter indicating value and the power meter indicating value phase being calibrated Than acquisition is calibrated adjusted coefficient K of the power meter under the wavelength light sourceλm=PλmReference power meter indicating value/PλmIt is calibrated power Count indicating value;
2nd, as shown in Fig. 2 wide spectrum stabilized light source is by monochromator output different wave length monochromatic light, respectively measurement standard spy Survey device and be calibrated the output current value of the detector of power meter at different wavelengths, acquisition is calibrated power meter detector not Spectral response curve S (λ)=I (λ) under co-wavelength is by school output current/I (λ) standard output electric current;
3rd, found on spectral response curve as shown in Figure 3 in 1st step and surveyed wavelength points λm, then the laser power meter exist Adjusted coefficient K under other wavelengthλn=Kλm×S(λm)/S(λn)。

Claims (1)

1. a kind of method for obtaining laser power meter different wave length correction factor, including:(1) same stabilized lasers source, mark are measured For quasi- power meter indicating value compared with the power meter indicating value being calibrated, acquisition is calibrated correction factor of the power meter under the wavelength light source Kλm=Pλ m reference power meter indicating values/Pλ m are calibrated power meter indicating value;(2) wide spectrum stabilized light source is by monochromator output different wave length monochromatic light, difference Measurement standard detector is calibrated power meter with being calibrated the output current value of the detector of power meter at different wavelengths, acquisition Relative spectral response curve S (the λ)=I (λ) of detector at different wavelengthsBy school output current/I(λ)Standard output electric current;(3) laser power Count the adjusted coefficient K under other wavelengthλn=Kλm×S(λm)/S(λn)。
CN201610859483.XA 2016-09-29 2016-09-29 A kind of method for obtaining laser power meter different wave length correction factor Expired - Fee Related CN106404168B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610859483.XA CN106404168B (en) 2016-09-29 2016-09-29 A kind of method for obtaining laser power meter different wave length correction factor

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CN201610859483.XA CN106404168B (en) 2016-09-29 2016-09-29 A kind of method for obtaining laser power meter different wave length correction factor

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CN106404168B true CN106404168B (en) 2018-01-23

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106840391B (en) * 2017-02-17 2019-03-26 中国人民解放军92493部队计量测试中心 Broadband, large range laser power meter calibrating installation
CN108132097A (en) * 2017-12-18 2018-06-08 北京泊菲莱科技有限公司 A kind of detector probe, light power meter and optical power measurement method
CN112082737B (en) * 2020-08-24 2022-06-24 中国电子科技集团公司第四十一研究所 Terahertz pulse laser energy calibration device and method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0600636A1 (en) * 1992-11-19 1994-06-08 Varian Associates, Inc. Self-calibrated power meter
JPH11241946A (en) * 1998-02-24 1999-09-07 Miyachi Technos Corp Laser output measuring device
JP2002048642A (en) * 2000-08-01 2002-02-15 Fujitsu Quantum Devices Ltd Optical power measuring method and device
CN102353446A (en) * 2011-07-08 2012-02-15 西安炬光科技有限公司 Method and system for testing power of pulsing laser
JP2013171007A (en) * 2012-02-22 2013-09-02 Hioki Ee Corp Optical power meter
CN105813344B (en) * 2015-01-03 2018-02-06 珠海天启技术有限公司 The optical power control system and control method of a kind of optical module
CN104836613A (en) * 2015-05-13 2015-08-12 四川华拓光通信股份有限公司 Method for calibrating receiving end optical power of optical module
CN105737977A (en) * 2016-04-15 2016-07-06 博创科技股份有限公司 Wide-range optical power meter

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Inventor after: Jia Yaqing

Inventor after: Chen Chi

Inventor after: Sun Xianglin

Inventor after: Zhang Jianliang

Inventor after: Cui Lei

Inventor before: Jia Yaqing

Inventor before: Sun Xianglin

Inventor before: Zhang Jianliang

Inventor before: Cui Lei

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Termination date: 20190929