CN106404022A - Power connecting device used for large-area MCP (Micro Channel Plate) scrubbing test - Google Patents
Power connecting device used for large-area MCP (Micro Channel Plate) scrubbing test Download PDFInfo
- Publication number
- CN106404022A CN106404022A CN201610693582.5A CN201610693582A CN106404022A CN 106404022 A CN106404022 A CN 106404022A CN 201610693582 A CN201610693582 A CN 201610693582A CN 106404022 A CN106404022 A CN 106404022A
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- tetrafluoro
- vacuum chamber
- ring
- metal
- mcp
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The invention provides a power connecting device used for a large-area MCP (Micro Channel Plate) scrubbing test, which comprises a vacuum chamber rotary plate, a vacuum chamber upper cover, a rotating shaft, a rotating plate, MCPs, fluorescent screen assemblies, power connecting electrode assemblies, power connecting bolt assemblies and connecting flanges, wherein the vacuum chamber base plate is arranged along the horizontal plane, the vacuum chamber upper cover and the vacuum chamber base plate are closed in a concentric manner and can be separated at a non operating state, the rotating shaft is arranged at the middle position of the vacuum chamber base plate and penetrates through the vacuum chamber base plate, the rotating plate is arranged above the rotating shaft and rotates under driving of the rotating shaft, four connecting flanges are arranged along the circumferential direction of the vacuum chamber base plate by taking a central axis of the rotating shaft as a center, four power connecting assemblies are arranged on the flanges respectively, four sets of MCPs and fluorescent screen assemblies are electrically connected with the power connecting bolt assemblies and arranged along the circumferential direction of the rotating plate by taking the central axis of the rotating shaft as a center, and the power connecting bolt assemblies are contacted with the upper ends of the power connecting electrode assemblies respectively.
Description
Technical field
The present invention relates to low-light measuring technology, particularly a kind of power connection equipment cleaning test for large area MCP with water.
Background technology
Electron scrubbing is an up the effective means of MCP performance, and MCP domestic at present cleans test system with water and is not suitable for big face
Long-pending MCP (50mm × 100mm) clean test with water, the research cleaning test with water for large area MCP has no report.For this existing
Shape, large area MCP devising a set of four stations cleans test system with water.Clean with water in test process, need corresponding part is applied
Plus certain voltage, being wherein used for the face electron source cleaned with water needs to apply three road voltages, and the MCP being cleaned with water needs to apply 2 road voltages,
Fluorescent screen needs 1 road voltage, and wherein front 5 road voltages control in several hectovolts, and when testing, fluoroscopic voltage reaches several kilovolts, because
This requires higher to this road power connection equipment.In the system of four stations, four stations all can be cleaned with water to large area MCP, and
One of station possesses test function, cleans test station with water and can mutually change.So needing the power connection equipment of design activity,
And need orientation problem when solving station conversion and the integrity problem connecing electricity.
Content of the invention
It is an object of the invention to provide a kind of power connection equipment cleaning test for large area MCP with water, this device can solve
What certainly large area MCP of four stations cleaned test system all parts operationally with water connects electric problem, and be capable of cleaning with water with
Positioning in power connection equipment active procedure during test station conversion and integrity problem.
A kind of power connection equipment cleaning test for large area MCP with water, including lid on vacuum chamber rotating disk, vacuum chamber, rotating shaft, turns
Disk, MCP and luminescent screen assembly, receiving electrode assembly, connect electric bolt assembly, adpting flange；Wherein vacuum chamber chassis is in level and puts down
Face, on vacuum chamber, lid is concentric with vacuum chamber chassis closes, by rubber sealing, separable under off working state；Rotating shaft is arranged at
Relevant position in the middle of vacuum chamber chassis, is connected to inside and the outside of vacuum chamber, indoor to vacuum outside achievable vacuum chamber
The rotation of portion's spindle portion controls；Rotating disk is arranged above rotating shaft, is bolted, and can realize turning under the drive of rotating shaft
Dynamic；Adpting flange is arranged on the circumference of tray bottom end face centered on spindle central axle, and quantity is 4；Receiving electrode assembly
It is arranged at adpting flange, correspondence is tightly connected, quantity is 4；MCP and luminescent screen assembly may be contained within connecing electric bolt assembly
Above rotating disk, on the circumference that is respectively distributed to different-diameter centered on spindle central axle, quantity is 4；Wherein connect electric spiral shell
Bolt assembly and receiving electrode assembly upper-end contact, positioning in rotation process for the achievable rotating disk.
The present invention compared with prior art, has advantages below：(1) present invention has initiated and has cleaned test with water for big face MCP
Power connection equipment；(2) present invention can achieve the orientation problem cleaned with water with test station transformation process；(3) present configuration design
Rationally, realize each part connect safe and reliable during electricity.
With reference to Figure of description, the present invention is described further.
Brief description
Fig. 1 is overall structure diagram of the present invention, wherein Fig. 1 (a) solid axonometric drawing, Fig. 1 (b) phantom.
Fig. 2 is MCP of the present invention and luminescent screen assembly structural representation, and wherein Fig. 2 (a) is three-dimensional axonometric drawing, and Fig. 2 (b) is
Sectional view.
Fig. 3 is receiving electrode modular construction schematic diagram, and wherein Fig. 3 (a) is three-dimensional axonometric drawing, and Fig. 3 (b) is phantom.
Fig. 4 is to connect electric bolt assembly structural representation, and wherein Fig. 4 (a) is the three-dimensional axle survey topic of Positioning screw, and Fig. 4 (b) connects
The sectional view of electric bolt assembly.
Specific embodiment
In conjunction with Fig. 1 (a) (b), a kind of power connection equipment cleaning test for large area MCP with water, including the vacuum of horizontal positioned
Room chassis 1；Concentric with vacuum chamber chassis 1 close, and using rubber sealing vacuum chamber on cover 2；It is arranged in vacuum chamber chassis
Between relevant position rotating shaft 3, rotating shaft 3 be connected to the inside of vacuum chamber with outside, indoor to vacuum outside achievable vacuum chamber
The rotation of portion's spindle portion controls；It is connected in the rotating disk 4 of rotating shaft 3 upper end, rotating disk 4 is fixed using bolt with rotating shaft 3, can be in rotating shaft
Realize under 3 drive rotating；It is connected in the adpting flange 8 of vacuum chamber chassis 1 lower surface, adpting flange 8 with rotating shaft 3 central shaft is
Center is uniformly arranged on the circumference of chassis lower surface, and quantity is 4；The receiving electrode assembly 6 being connected with adpting flange 8, with company
The receiving electrode assembly 6 of acting flange 8 adopts the compression sealing of anaerobic copper band, and quantity is 4；It is arranged at the MCP of rotating disk 4 upper surface and glimmering
Light screen assembly 5 with connect electric bolt assembly 7, they all, centered on rotating shaft 3 central shaft, are respectively distributed to the circumference of different-diameter
On, quantity is 4, wherein connects electric bolt assembly 7 and receiving electrode assembly 6 upper-end contact, achievable rotating disk 4 is in rotation process
Positioning.
On vacuum chamber when cleaning with water, lid 2 is closed with vacuum chamber chassis 1, and vacuum chamber is in high vacuum state, and rotating shaft 3 drives rotating disk
4 rotations, make rotating disk 4 upper end connects electric bolt assembly 7 lower end and receiving electrode assembly 6 upper end firm contact, each several part applied voltage,
Start to clean with water；During test, 4 described MCP and luminescent screen assembly 7 are four work stations, all can achieve and MCP is cleaned with water,
One of station has test function, first the MCP being in test station is tested, after this MCP is completed, rotating shaft
3 drive the MCP being on rotating disk 4 and luminescent screen assembly 5 to rotate, and make to clean the conversion that station carries out on position with test station with water,
Successively remaining 3 MCP are tested.On vacuum chamber, lid 2 place directly over test station is provided with observation window, and convenient observation is clear
Brushing effects.Test station below observation window, this work different from other three input voltages cleaning station with water in energising
The voltage of position needs to light to fluorescent screen greatly, and other stations need not light fluorescent screen.
In conjunction with Fig. 2 (a) (b), MCP according to the present invention and luminescent screen assembly 5 include 90 ° and are uniformly distributed in rotating disk 4 perforate
Circumference on, four support column 5-11 being welded and fixed with rotating disk 4；It is arranged at the tetrafluoro base in the circle of support column 5-11 composition
5-1, its excircle and 4 support column 5-11 tight fits；Energising base 5-2 friction tight with the inner periphery of tetrafluoro base 5-1；If
It is placed in the tetrafluoro shading ring 5-3 of energising base 5-2 upper end；It is arranged at the electrified metal seat 5-4 of tetrafluoro shading ring 5-3 upper end, its
The cylindrical and tetrafluoro base 5-1 stretching out is screwed；It is arranged at the stretch metal circle 5-9 of energising base 5-2 ladder in the hole；If
It is placed in the conductive metal ring 5-6 on stretch metal circle 5-9, rely on the resilient support of stretch metal circle 5-9；It is arranged at electrified metal
Tetrafluoro back-up ring 5-5 between seat 5-4 and conductive metal ring 5-6, its effect is to keep apart the two；It is arranged at conductive metal ring 5-
The MCP5-8 of 6 upper ends；It is arranged at MCP5-8 upper end, the metal backup shoe being simultaneously fixedly connected with electrified metal seat 5-4 by screw
5-10, MCP5-8 is compressed by it by coordinating stretch metal circle 5-9；Fluorescent screen 5-7 is positioned over 4 support column 5-11 tops and constitutes
Plane on.
MCP and luminescent screen assembly 5 major function are to power to fluorescent screen and MCP to be cleaned with water；Wherein fluorescent screen 5-7 is direct
It is connected with wire；Energising base is connected with another line conductor, is given by stretch metal circle 5-9 conducting conductive metal ring 5-6 and leads
The MCP supplying power for input end of electric metal ring 5-6 contact；Another line conductor is connected with electrified metal seat 5-4, by the gold contacting
Belong to gland 5-10 to turn on MCP outfan, supply power for；The tetrafluoro that the duplex feeding of MCP is made up of polytetrafluoroethylmaterial material every
Come from ring 5-3 and tetrafluoro back-up ring 5-5 insulation.
In conjunction with Fig. 3 (a) (b), described receiving electrode assembly 6 includes adopting the compression sealing of anaerobic copper band even with adpting flange 8
The base flange 6-2 connecing；It is respectively arranged in the corresponding perforate of base flange 6-2, common with base flange 6-2 sealing welding
Binding post 6-1 and high tension terminal 6-18, the quantity of wherein common binding post 6-1 is 8, and the quantity of high tension terminal 6-18 is
1；120 ° of three screw thread in the holes being uniformly arranged on base flange circumference and the locked screw rod 6-4 of lower end M6 nut 6-3；Logical
Cross support plate 6-5 that M6 nut is installed on screw rod 6-4 correct position, its height adjustable；It is fixed on the corresponding aperture of support plate 6-5
Two metal ferrule 6-7 at place, by the tetrafluoro sleeve 6-6 that holding screw is fixing with metal ferrule 6-7；
It is fixed on the high-pressure metal cutting ferrule 6-15 at the corresponding aperture of support plate 6-5, by holding screw and high-pressure metal
The fixing high pressure tetrafluoro sleeve 6-16 of cutting ferrule 6-15；It is arranged at tetrafluoro sleeve 6-6 and the endoporus of high pressure tetrafluoro sleeve 6-16
Three motion bar 6-12, its lower end extension is connected with M6 nut, and center section part is arranged with spring 6-17；It is stuck in motion bar 6-12
Tangent plane at high pressure tetrafluoro tabletting 6-14, be connected with high pressure tetrafluoro sleeve 6-16 by three equally distributed M6 screws；If
It is placed in the rolling ring 6-11 of motion bar 6-12 upper end, is connected with jump ring 6-9 by connecting shaft 6-10, rolling ring 6-11 can achieve certainly
By rolling.High tension terminal 6-18 is electrically connected with the motion bar 6-12 in high pressure tetrafluoro sleeve 6-16；8 common binding post 6-1
In two electrically connect with the motion bar 6-12 in tetrafluoro sleeve 6-6, separately have three common binding post 6-1 respectively with energising base
5-2, electrified metal seat 5-4, fluorescent screen 5-7 electrical connection, remaining three common binding post 6-1 reserve；High tension terminal 6-18 and
Common binding post 6-1 is also connected with external power source respectively.
Using above-mentioned test device, described adpting flange 8 adopts anaerobic copper band compression with base flange 6-2 sealing even
Connect, base flange 6-2 and common binding post 6-1 and high tension terminal 6-18 sealing welding all ensure that the sealing of brush device for cleaning
Property；Support plate 6-5 is adjusted to proper height by the M6 nut being installed on screw rod 6-4；And motion bar 6-12 pushing away in spring 6-17
Have, under power effect, the trend moved upwards, the nut being installed on motion bar 6-12 lower end then limits motion bar 6-12 upwards freely
Motion so as to by after external force can only rise and fall within the specific limits, rolling ring 6-11 can be adjusted by adjusting this nut
To proper height；By the angle adjustable rolling ring 6-11 of M6 screw on regulation high pressure tetrafluoro tabletting angle circumferentially.
In conjunction with Fig. 4 (a) (b), according to the present invention connect electric bolt assembly 7 and include being arranged in the corresponding perforate of rotating disk 4
Positioning screw 7-1；It is placed on the ceramics seat 7-2 between the corresponding perforate lower end of rotating disk 4 and Positioning screw 7-1；It is placed on what rotating disk 4 was answered
Ceramic ring 7-3 in Positioning screw 7-1 of perforate upper end；It is arranged at the locking nut 7-4 of ceramic ring 7-3 upper end, with positioning spiral shell
Wire is locked by nail 7-1 cooperation.Described Positioning screw 7-1, ceramics seat 7-2, ceramic ring 7-3 quantity are three.
Using above-mentioned test device, when changing station, rotate rotating disk 4, at Positioning screw 7-1 fluting first with rolling ring
6-11 contacts, and rotating disk 4 is rotated further, and rolling ring 6-11 is subject to compressing to promote motion bar 6-12 to decline, rolling ring 6-11 rolling simultaneously
Dynamic advance, rolling ring 6-11 enters at the medial launder of Positioning screw, and spring 6-17 promotes motion bar 6-12 thus driving rolling ring
6-11 has risen, and now rolling ring 6-11 is stuck at the middle fluting of Positioning screw 7-1, using spring 6-17 thrust when turn
Disk positions, and makes to roll spring 6-17 with the close contact of Positioning screw 7-1 it is ensured that connecing the reliability of electricity；It is rotated further
Rotating disk 4, then rolling ring 6-11 continue to roll to advance and roll out along at the oblique fluting of Positioning screw 7-1, rotating disk 4 and receiving electrode assembly 6
Realize separating.
Claims (4)
1. a kind of for large area MCP clean with water test power connection equipment it is characterised in that include vacuum chamber rotating disk (1), vacuum chamber
Upper lid (2), rotating shaft (3), rotating disk (4), MCP and luminescent screen assembly (5), receiving electrode assembly (6), connect electric bolt assembly (7), connect
Flange (8)；Wherein
Vacuum chamber chassis (1) is arranged along horizontal plane,
Cover separable under (2) closure concentric with vacuum chamber chassis (1) and off working state on vacuum chamber,
Rotating shaft (3) is arranged at vacuum chamber chassis (1) centre position and through vacuum chamber chassis (1),
Rotating disk (4) is arranged above rotating shaft (3) and being rotated by rotating shaft (3),
Adpting flange (8) centered on rotating shaft (3) central shaft circumferentially disposed 4 along vacuum chamber chassis (1),
Receiving electrode assembly (6) has 4 and is respectively arranged on each flange (8),
MCP and luminescent screen assembly (5) electrically connect between electric bolt assembly (7) and edge turn centered on rotating shaft (3) central shaft with connecing
Circumferentially disposed 4 groups and connect electric bolt assembly (7) and receiving electrode assembly (6) upper-end contact of disk (4).
2. device according to claim 1 is it is characterised in that described every MCP and luminescent screen assembly (5) include tetrafluoro bottom
Seat (5-1), energising base (5-2), tetrafluoro shading ring (5-3), electrified metal seat (5-4), tetrafluoro back-up ring (5-5), conducting ring (5-
6), fluorescent screen (5-7), MCP (5-8), stretch metal circle (5-9), metal backup shoe (5-10), support column (5-11)；Wherein
Described support column (5-11) is some and goes up along circumferentially fixed (4) in rotating disk of perforate along rotating disk (4),
Tetrafluoro base (5-1) is fixed on the through hole that support column (5-11) is upper and setting is concentric with rotating disk perforate,
Energising base (5-2) is fixed in the through hole of tetrafluoro base (5-1) and is arranged the through hole concentric with rotating disk perforate,
Tetrafluoro shading ring (5-3) is arranged at energising base (5-2) upper end；
Electrified metal seat (5-4) be arranged at tetrafluoro shading ring (5-3) upper end and be fixedly connected with tetrafluoro base (5-1) and arrange with
The concentric through hole of rotating disk perforate；
Stretch metal circle (5-9) is arranged in the through hole of energising base (5-2),
Conductive metal ring (5-6) is arranged on stretch metal circle (5-9)；
Tetrafluoro back-up ring (5-5) is arranged between electrified metal seat (5-4) and conductive metal ring (5-6),
MCP (5-8) is arranged at conductive metal ring (5-6) upper end,
Metal backup shoe (5-10) is arranged at MCP (5-8) upper end and is fixedly connected and coordinates stretch metal with electrified metal seat (5-4)
MCP (5-8) is compressed by circle (5-9),
Fluorescent screen (5-7) is arranged in the plane of support column (5-11) top composition.
3. device according to claim 2 is it is characterised in that described receiving electrode assembly (6) includes common binding post (6-
1), base flange (6-2), screw rod (6-4), support plate (6-5), tetrafluoro sleeve (6-6), metal ferrule (6-7), tetrafluoro tabletting
(6-8), jump ring (6-9), connecting shaft (6-10), rolling ring (6-11), motion bar (6-12), high pressure tetrafluoro tabletting (6-14), height
Pressure metal ferrule (6-15), high pressure tetrafluoro sleeve (6-16), spring (6-17), high tension terminal (6-18)；Wherein
Base flange (6-2) is tightly connected with adpting flange (8),
Common binding post (6-1) and high tension terminal (6-18) be respectively arranged in the corresponding perforate of base flange (6-2) and with
Base flange (6-2) is tightly connected, and wherein common binding post (6-1) quantity is 8, and high tension terminal quantity is 1,
Support plate (6-5) is arranged above base flange (6-2) by screw rod (6-4) and height adjustable,
Metal ferrule (6-7) has at two corresponding aperture being separately fixed at support plate (6-5),
Tetrafluoro sleeve (6-6) has two to be respectively arranged in metal ferrule (6-7) and fix,
High-pressure metal cutting ferrule (6-15) is fixed at the corresponding aperture of support plate (6-5),
High pressure tetrafluoro sleeve (6-16) is arranged in high-pressure metal cutting ferrule (6-15) and fixes,
Motion bar (6-12) have three and be respectively arranged at tetrafluoro sleeve (6-6) and the endoporus of high pressure tetrafluoro sleeve (6-16) and
Its lower end extension is connected with nut and its stage casing part is provided with spring (6-17),
Tetrafluoro tabletting (6-8) is provided with through hole and is set in motion bar (6-12) above and is connected with tetrafluoro sleeve (6-6) by screw,
High pressure tetrafluoro tabletting (6-14) is provided with through hole and is set in motion bar (6-12) above and by screw and high pressure tetrafluoro sleeve
(6-16) it is connected,
Rolling ring (6-11) is arranged at motion bar (6-12) upper end and is connected with jump ring (6-9) by connecting shaft (6-10)；
High tension terminal (6-18) is electrically connected with the motion bar (6-12) in high pressure tetrafluoro sleeve (6-16),
Two in 8 common binding posts (6-1) are electrically connected with the motion bar (6-12) in tetrafluoro sleeve (6-6), separately have three
Common binding post (6-1) is electrically connected with energising base (5-2), electrified metal seat (5-4), fluorescent screen (5-7) respectively, remaining three
Common binding post (6-1) is reserved,
High tension terminal (6-18) and common binding post (6-1) are also connected with external power source respectively.
4. device according to claim 3 is it is characterised in that the described electric bolt assembly (7) that connects includes Positioning screw (7-
1), ceramics seat (7-2), ceramic ring (7-3), locking nut (7-4)；Wherein
The groove that Positioning screw (7-1) is arranged in the corresponding perforate of rotating disk (4) and end face setting is mated with rolling ring (6-11),
Ceramics seat (7-2) is located at rotating disk (4) accordingly between perforate and Positioning screw (7-1)；
Ceramic ring (7-3) is placed in the Positioning screw (7-1) of the corresponding perforate upper end of rotating disk (4)；
Locking nut (7-4) is arranged at ceramic ring (7-3) upper end and is locked wire with Positioning screw (7-1) cooperation.
Described Positioning screw (7-1), ceramics seat (7-2), ceramic ring (7-3) quantity are three.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610693582.5A CN106404022B (en) | 2016-08-20 | 2016-08-20 | A kind of power connection equipment for cleaning test with water for large area MCP |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610693582.5A CN106404022B (en) | 2016-08-20 | 2016-08-20 | A kind of power connection equipment for cleaning test with water for large area MCP |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106404022A true CN106404022A (en) | 2017-02-15 |
| CN106404022B CN106404022B (en) | 2019-01-04 |
Family
ID=58004273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610693582.5A Expired - Fee Related CN106404022B (en) | 2016-08-20 | 2016-08-20 | A kind of power connection equipment for cleaning test with water for large area MCP |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106404022B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102367971A (en) * | 2011-10-17 | 2012-03-07 | 林智勇 | Rotating bathroom heater and fan |
| US20120234497A1 (en) * | 2011-03-14 | 2012-09-20 | Samsung Electronics Co., Ltd | Debonder to manufacture semiconductor and debonding method thereof |
| EP2522992A2 (en) * | 2003-05-09 | 2012-11-14 | Ebara Corporation | Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| CN102896494A (en) * | 2012-11-07 | 2013-01-30 | 上海无线电设备研究所 | Full-automatic flexible assembly line of light emitting diode (LED) bulb lamp |
| CN202877861U (en) * | 2012-11-07 | 2013-04-17 | 上海无线电设备研究所 | Full-automatic flexible assembly line of light-emitting diode (LED) bulb lamp |
| CN203573938U (en) * | 2013-10-06 | 2014-04-30 | 佛山电器照明股份有限公司 | Hydrogen ignition device of double-ended halogen light tubes |
| CN204917194U (en) * | 2015-07-20 | 2015-12-30 | 昆山周晋电子科技有限公司 | Many functional test and pad pasting all -in -one |
| CN205384234U (en) * | 2015-12-31 | 2016-07-13 | 苏州日和科技有限公司 | Full automated optical inspection robot of display screen |
-
2016
- 2016-08-20 CN CN201610693582.5A patent/CN106404022B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2522992A2 (en) * | 2003-05-09 | 2012-11-14 | Ebara Corporation | Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| US20120234497A1 (en) * | 2011-03-14 | 2012-09-20 | Samsung Electronics Co., Ltd | Debonder to manufacture semiconductor and debonding method thereof |
| CN102367971A (en) * | 2011-10-17 | 2012-03-07 | 林智勇 | Rotating bathroom heater and fan |
| CN102896494A (en) * | 2012-11-07 | 2013-01-30 | 上海无线电设备研究所 | Full-automatic flexible assembly line of light emitting diode (LED) bulb lamp |
| CN202877861U (en) * | 2012-11-07 | 2013-04-17 | 上海无线电设备研究所 | Full-automatic flexible assembly line of light-emitting diode (LED) bulb lamp |
| CN203573938U (en) * | 2013-10-06 | 2014-04-30 | 佛山电器照明股份有限公司 | Hydrogen ignition device of double-ended halogen light tubes |
| CN204917194U (en) * | 2015-07-20 | 2015-12-30 | 昆山周晋电子科技有限公司 | Many functional test and pad pasting all -in -one |
| CN205384234U (en) * | 2015-12-31 | 2016-07-13 | 苏州日和科技有限公司 | Full automated optical inspection robot of display screen |
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| Publication number | Publication date |
|---|---|
| CN106404022B (en) | 2019-01-04 |
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Granted publication date: 20190104 Termination date: 20200820 |