CN106393015A - 用于集成电路生产的操作台 - Google Patents

用于集成电路生产的操作台 Download PDF

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Publication number
CN106393015A
CN106393015A CN201610867124.9A CN201610867124A CN106393015A CN 106393015 A CN106393015 A CN 106393015A CN 201610867124 A CN201610867124 A CN 201610867124A CN 106393015 A CN106393015 A CN 106393015A
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CN
China
Prior art keywords
ventilating duct
support feet
integrated circuit
operating floor
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610867124.9A
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English (en)
Inventor
吕耀安
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUXI HI-NANO TECHNOLOGY Co Ltd
Original Assignee
WUXI HI-NANO TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WUXI HI-NANO TECHNOLOGY Co Ltd filed Critical WUXI HI-NANO TECHNOLOGY Co Ltd
Priority to CN201610867124.9A priority Critical patent/CN106393015A/zh
Publication of CN106393015A publication Critical patent/CN106393015A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
    • B25H1/02—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby of table type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
    • B25H1/20—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for shielding the work area
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment

Abstract

本发明涉及一种用于集成电路生产的操作台，包括台面及支撑脚，所述操作台的下方的车间地面埋设有通风道，所述通风道与吸尘器连接，所述支撑脚为空心管结构，支撑脚的下端借助导尘管与所述通风道连通，支撑脚的管壁上设有吸尘孔。本发明中，将吸尘器的吸尘管集中设置在操作台上的台面下方及支撑脚上，其结构紧凑、吸尘效果好，不额外占用空间，保证车间布置整洁、美观。

Description

用于集成电路生产的操作台
技术领域
本发明涉及集成电路的生产车间，特别涉及生产车间中的操作台。
背景技术
目前，用于集成电路生产车间中，为保证车间的无尘环境，通常在车间的顶部、侧面设置多个除尘器，由于集成电路主要在操作台上操作，而除尘器的除尘管离操作台较远，导致除尘效果不佳，除尘时间较长，能耗较高。
发明内容
本申请人针对现有用于集成电路生产车间存在的上述缺点，提供一种用于集成电路生产的操作台，其配置有除尘管，采用地埋式布置，简化除尘结构。
本发明所采用的技术方案如下：
一种用于集成电路生产的操作台，包括台面及支撑脚，所述操作台的下方的车间地面埋设有通风道，所述通风道与吸尘器连接，所述支撑脚为空心管结构，支撑脚的下端借助导尘管与所述通风道连通，支撑脚的管壁上设有吸尘孔。
作为上述技术方案的进一步改进：
所述台面的下表面安装有一圈吸尘管，所述吸尘管与支撑脚的上端连通。
本发明的有益效果如下：
本发明中，将吸尘器的吸尘管集中设置在操作台上的台面下方及支撑脚上，其结构紧凑、吸尘效果好，不额外占用空间，保证车间布置整洁、美观。
附图说明
图1为本发明的结构示意图。
图中：1、台面；2、支撑脚；3、通风道；4、导尘管；5、吸尘孔；6、吸尘管。
具体实施方式
下面结合附图，说明本发明的具体实施方式。
如图1所示，本实施例的用于集成电路生产的操作台，包括台面1及支撑脚2，操作台的下方的车间地面埋设有通风道3，通风道3与吸尘器连接，支撑脚2为空心管结构，支撑脚2的下端借助导尘管4与通风道3连通，支撑脚2的管壁上设有吸尘孔5。
为进一步提高操作台的吸尘效果，台面1的下表面安装有一圈吸尘管6，吸尘管6与支撑脚2的上端连通。吸尘管6隐藏于台面1的下方，不额外占用空间。吸尘管6的管壁具有吸附孔，该吸附孔布置于管壁外侧。
吸尘器工作时，通过通风道3对支撑脚2及吸尘管6进行抽吸，由于支撑脚2及吸尘管6接近于操作台，故其对操作台周围及台面1上的灰尘的吸除效果好。
以上描述是对本发明的解释，不是对发明的限定，本发明所限定的范围参见权利要求，在不违背本发明的精神的情况下，本发明可以作任何形式的修改。

Claims (2)

1.一种用于集成电路生产的操作台，包括台面(1)及支撑脚(2)，其特征在于：所述操作台的下方的车间地面埋设有通风道(3)，所述通风道(3)与吸尘器连接，所述支撑脚(2)为空心管结构，支撑脚(2)的下端借助导尘管(4)与所述通风道(3)连通，支撑脚(2)的管壁上设有吸尘孔(5)。
2.根据权利要求1所述的用于集成电路生产的操作台，其特征在于：所述台面(1)的下表面安装有一圈吸尘管(6)，所述吸尘管(6)与支撑脚(2)的上端连通。
CN201610867124.9A 2016-09-29 2016-09-29 用于集成电路生产的操作台 Pending CN106393015A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610867124.9A CN106393015A (zh) 2016-09-29 2016-09-29 用于集成电路生产的操作台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610867124.9A CN106393015A (zh) 2016-09-29 2016-09-29 用于集成电路生产的操作台

Publications (1)

Publication Number Publication Date
CN106393015A true CN106393015A (zh) 2017-02-15

Family

ID=59228579

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610867124.9A Pending CN106393015A (zh) 2016-09-29 2016-09-29 用于集成电路生产的操作台

Country Status (1)

Country Link
CN (1) CN106393015A (zh)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE836401C (de) * 1950-07-20 1952-04-10 Wilhelm Dichmann Ii Verfahren und Tisch zum Halten von Papier, Pappe, Holzfurnieren, Metallfolien od. dgl.
US4647295A (en) * 1986-04-28 1987-03-03 Christ Clifford W Worktop air cleaner
JPH0663786A (ja) * 1992-08-12 1994-03-08 Murata Mach Ltd レーザ加工機の集塵ダクト装置
JP2001018088A (ja) * 1999-07-06 2001-01-23 Amada Co Ltd 熱切断装置用テーブル装置
GB2366228B (en) * 2000-08-31 2003-11-05 William Barry A modular workbench assembly
KR100846663B1 (ko) * 2007-05-28 2008-07-16 박노은 식물의 조직편을 소편으로 만드는 작업을 위한 작업테이블
CN202318004U (zh) * 2011-10-20 2012-07-11 无锡市西漳环保设备有限公司 下抽风式清理打磨除尘系统
CN204262000U (zh) * 2014-11-14 2015-04-15 安徽金诚复合材料有限公司 除尘工作台
CN105312609A (zh) * 2015-11-04 2016-02-10 天津市宝坻区兴达家具厂 一种新型台式钻床
CN105479409A (zh) * 2016-01-19 2016-04-13 魏会芳 内嵌式吸尘工作台

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE836401C (de) * 1950-07-20 1952-04-10 Wilhelm Dichmann Ii Verfahren und Tisch zum Halten von Papier, Pappe, Holzfurnieren, Metallfolien od. dgl.
US4647295A (en) * 1986-04-28 1987-03-03 Christ Clifford W Worktop air cleaner
JPH0663786A (ja) * 1992-08-12 1994-03-08 Murata Mach Ltd レーザ加工機の集塵ダクト装置
JP2001018088A (ja) * 1999-07-06 2001-01-23 Amada Co Ltd 熱切断装置用テーブル装置
GB2366228B (en) * 2000-08-31 2003-11-05 William Barry A modular workbench assembly
KR100846663B1 (ko) * 2007-05-28 2008-07-16 박노은 식물의 조직편을 소편으로 만드는 작업을 위한 작업테이블
CN202318004U (zh) * 2011-10-20 2012-07-11 无锡市西漳环保设备有限公司 下抽风式清理打磨除尘系统
CN204262000U (zh) * 2014-11-14 2015-04-15 安徽金诚复合材料有限公司 除尘工作台
CN105312609A (zh) * 2015-11-04 2016-02-10 天津市宝坻区兴达家具厂 一种新型台式钻床
CN105479409A (zh) * 2016-01-19 2016-04-13 魏会芳 内嵌式吸尘工作台

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Application publication date: 20170215