CN106374775B - A kind of travelling wave supersonic motor containing flexible shaft - Google Patents

A kind of travelling wave supersonic motor containing flexible shaft Download PDF

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Publication number
CN106374775B
CN106374775B CN201610850216.6A CN201610850216A CN106374775B CN 106374775 B CN106374775 B CN 106374775B CN 201610850216 A CN201610850216 A CN 201610850216A CN 106374775 B CN106374775 B CN 106374775B
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flexible shaft
stator
ball bearing
angular contact
contact ball
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CN106374775A (en
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李锦棒
崔玉国
于爱兵
刘洋
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Ningbo University
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Ningbo University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

A kind of travelling wave supersonic motor containing flexible shaft, it is related to a kind of travelling wave supersonic motor, to solve the lack of homogeneity of existing travelling wave supersonic motor stator rotor contact, the problem of run stability of motor is poor, it includes pedestal, preceding angular contact ball bearing, shell, flexible shaft, rear angular contact ball bearing, stator and rotor;Shell and pedestal are detachably connected, and flexible shaft is mounted on preceding angular contact ball bearing and rear angular contact ball bearing;Rotor and stator arrangement are between preceding angular contact ball bearing and rear angular contact ball bearing, rotor is disposed adjacent with housing and on the annular ridge of flexible shaft, stator is mounted on pedestal, one layer of annular friction material with stator contact is equipped on the end face of the wheel rim of rotor, stator is equipped with ring-shaped piezo ceramic layer on the end face adjacent with pedestal;Flexible hinge structure or flexible folding girder construction are machined on the shaft part of flexible shaft between rotor and stator.The present invention is used for precision actuation.

Description

A kind of travelling wave supersonic motor containing flexible shaft
Technical field
The present invention relates to a kind of travelling wave supersonic motors, and in particular to a kind of travelling wave supersonic motor containing flexible shaft.Belong to pressure Electric drive technology field.
Background technology
Ultrasound electric machine is that a kind of inverse piezoelectric effect using piezoelectric material converts electrical energy into a kind of new micro- of mechanical energy Type motor.The stator of ultrasound electric machine is typically the composite elastic body for the given shape being made of piezoelectric ceramics and metal elastomer, It is realized by the alternating voltage for applying supersonic frequency to piezoelectric ceramics in stator elastomeric with the excitation of frequency mechanical oscillation, Jin Er Stator surface forms the movement locus with driving effect, and the running orbit of particle is ellipse under normal circumstances, by stator and Friction coupling between rotor, realizes the output of rotor macroscopic motion.Compared with traditional electromagnetic machine, ultrasound electric machine is big with low speed Torque, fast response time, without electromagnetic interference, cut off self-lock the advantages that.With the rapid development of the causes such as China's aerospace, surpass The advantages of acoustic-electric machine, is increasingly taken seriously, but also proposes higher requirement to the run stability of ultrasound electric machine simultaneously.Cause This, develops the travelling wave supersonic motor with high run stability and has a very important significance.
Publication No. CN201742324U, publication date are on February 09th, 2011, and patent name is " rotary type travelling wave ultrasonic Motor " is disadvantageous in that do not possess flexible shaft structure, and cannot eliminate the clearance of lower bearing, makes the run stability of motor It is not high.Publication No. CN202111634U, publication date are on 01 11st, 2012, and patent name is " nut adjusts precompression The patent of invention of rotary type travelling wave ultrasonic motor " is machined with one section of screw thread on output shaft, will be connected firmly by rotating pre-load nut Rotor in shaft is tensed to the direction of stator, by the way that pre-load nut is controlled to be moved in the center line of shaft along the direction of stator Precompression between distance controlling stator and rotor, is disadvantageous in that do not possess flexible shaft structure, if using deep-groove ball Then the radial internal clearance of bearing is difficult to eliminate bearing, and the run stability of motor is difficult to ensure that;It is fixed if using angular contact bearing The relative position of son and rotor is fixed, it is impossible to automatic adjusument, it is difficult to be ensured that stator face is uniformly contacted with the close of rotor cover, be dropped The driving force and run stability of low motor.Publication No. CN105207520A, publication date be on December 30th, 2015, patent Entitled " a kind of rotary type travelling wave ultrasonic motor and its stator and rotor pre-tension method ", applies precompression by circlip, It is disadvantageous in that do not possess flexible shaft structure, and the deep groove ball bearing of use is difficult to eliminate bearing clearance so that the fortune of motor Turn stability to be difficult to ensure that.
The content of the invention
The present invention is to solve the lack of homogeneity of existing travelling wave supersonic motor stator rotor contact, the run stability of motor The problem of poor, and then a kind of travelling wave supersonic motor containing flexible shaft is provided.
The present invention adopts the technical scheme that solve above-mentioned technical problem:
Scheme one:A kind of travelling wave supersonic motor containing flexible shaft include pedestal, preceding angular contact ball bearing, flexible shaft, shell, Rear angular contact ball bearing, rotor and stator;
Shell and pedestal are detachably connected, and preceding angular contact ball bearing is equipped on pedestal, rear angular contact is equipped on shell Ball bearing, flexible shaft are mounted on preceding angular contact ball bearing and rear angular contact ball bearing;Rotor and stator arrangement are in preceding angular contact Between ball bearing and rear angular contact ball bearing, rotor is disposed adjacent with housing and on the annular ridge of flexible shaft, fixed Son is mounted on pedestal, and one layer of annular friction material with stator contact, stator and bottom are equipped on the end face of the wheel rim of rotor Seat is equipped with ring-shaped piezo ceramic layer on adjacent end face;It is machined on the shaft part of flexible shaft between rotor and stator soft Property hinge arrangement or flexible folding girder construction;
N number of whole circle arc groove that flexible hinge structure is mainly radially processed by flexible shaft is formed, wherein N >=1;
It is more between the multiple grooves and groove of the interlaced arrangement that folding girder construction is mainly radially processed by flexible shaft A beam is formed.
Scheme two:A kind of travelling wave supersonic motor containing flexible shaft includes pedestal, flexible shaft, shell, rotor, stator and two Angular contact ball bearing;
Shell and pedestal are detachably connected, and an angular contact ball axis is separately installed on pedestal and the opposite side of shell It holds, two back-to-back settings of angular contact ball bearing, the both ends of flexible shaft are separately mounted on two angular contact ball bearings, two angles Rotor and stator are disposed between contact ball bearing, rotor is disposed adjacent with shell and mounted on the annular ridge of flexible shaft On, stator is mounted on pedestal, and one layer of annular friction material with stator contact, stator are equipped on the end face of the wheel rim of rotor Ring-shaped piezo ceramic layer is equipped on the end face adjacent with pedestal;It is processed on the shaft part of flexible shaft between rotor and stator Flexible hinge arrangement or flexible folding girder construction;
N number of whole circle arc groove that flexible hinge structure is mainly radially processed by flexible shaft is formed, wherein N >=1;Folded beam Multiple beams between the multiple grooves and groove of the interlaced arrangement that structure is mainly radially processed by flexible shaft are formed.
The present invention has the following effects that compared with prior art:The present invention uses flexible hinge structure and flexible folding beam knot The flexible shaft structure of structure composition, make contact of the stator with rotor can adaptive axial unbalance loading, guarantee stator and rotor are uniform Contact, and using the clearance of angular contact bearing elimination bearing, improve the operation stability of ultrasound electric machine, enhance the negative of motor Loading capability.Flexible hinge structure can generate certain deformation under the action of moment of flexure, can transfer torque, exempt to assemble, and nothing is rubbed Scouring is damaged.
Description of the drawings
Fig. 1 is the ultrasound electric machine that the present invention carries flexible hinge structure;
Fig. 2 is the present invention with the ultrasound electric machine for folding girder construction;
Fig. 3 is the ultrasound electric machine of angular contact bearing before specific embodiment three is pre-tightened with pre-load nut;
Fig. 4 is two angular contact ball bearings that specific embodiment seven pre-tightens back-to-back installation with pre-load nut and block Ultrasound electric machine.
Specific embodiment
Specific embodiment one:Illustrate with reference to Fig. 1-Fig. 3, a kind of traveling-wave ultrasonic electricity containing flexible shaft of present embodiment Machine, it includes pedestal 1, preceding angular contact ball bearing 3, flexible shaft 4, shell 9, rear angular contact ball bearing 10, rotor 12 and stator 13;
Shell 9 and pedestal 1 are detachably connected, angular contact ball bearing 3 before being equipped on pedestal 1, and relief angle is equipped on shell 9 Contact ball bearing 10, flexible shaft 4 are mounted on preceding angular contact ball bearing 3 and rear angular contact ball bearing 10;Rotor 12 and stator 13 Before being arranged between angular contact ball bearing 3 and rear angular contact ball bearing 10, rotor 12 is disposed adjacent with housing 9 and mounted on soft Property axis 4 annular ridge 4-1 on, stator 13 be mounted on pedestal 1 on, be equipped on the end face of the wheel rim of rotor 12 and connect with stator 13 One layer of tactile annular friction material 8, stator 13 are equipped with ring-shaped piezo ceramic layer 6 on the end face adjacent with pedestal 1;Positioned at rotor Flexible hinge structure or flexible folding girder construction are machined on the shaft part of flexible shaft 4 between 12 and stator 13;
N number of whole circle arc groove 4-2 that flexible hinge structure is mainly radially processed by flexible shaft 4 is formed, wherein N >=1;
Fold the multiple groove 4-3 and groove 4-3 of interlaced arrangement that girder construction mainly radially processed by flexible shaft 4 it Between multiple beam 4-4 form.
The stator 13 of present embodiment is connected by screw 2 with pedestal 1, and rotor 12 is connected by bolt 11 with shell 9, outside Shell 9 and pedestal 1 are connected by trip bolt 7.
Preceding angular contact ball bearing 3 and rear angular contact ball bearing 10 individually pre-tighten, and ensure the normal use of motor.
The advantageous effect of present embodiment is:Present embodiment is using flexible hinge structure or folds girder construction composition flexibility Axis realizes the automatic adjusument of rotor and stator contact, and the size of flexible hinge is calculated by given working condition requirement, folded beam The depth and width of the arc groove of structure with angle by being calculated to provisioning request, can to avoid due to flexible shaft both ends fix band It is uneven to carry out contact of the rotor with stator, contact of the stator with rotor is allow to carry out automatic adjusument according to contact situation, is increased The run stability of motor.
Specific embodiment two:Illustrate with reference to Fig. 1 and Fig. 2, a kind of traveling-wave ultrasonic electricity containing flexible shaft of present embodiment Machine further includes circlip 5, and preceding angular contact ball bearing 3 is pre-tightened the inner ring of stator 13 by circlip 5.It is so set, pre- It is tight convenient and reliable, using simple.It is other same as the specific embodiment one.
Specific embodiment three:Illustrate with reference to Fig. 1 and Fig. 3, a kind of traveling-wave ultrasonic electricity containing flexible shaft of present embodiment Machine further includes pre-load nut 15, and the shaft part close to preceding angular contact ball bearing 3 of flexible shaft 4 is threaded shaft section, and pre-load nut 15 revolves It is screwed on threaded shaft section, preceding angular contact ball bearing 3 is pre-tightened the inner ring of stator 13 by pre-load nut 15.So set, it pre-tightens Nut applies pretightning force, improves the uniformity of pre-pressure loading, and cooperation flexible shaft uses, and can further improve motor operating Stability and load capacity.It is other same as the specific embodiment one.
Specific embodiment four:Illustrate with reference to Fig. 1-Fig. 3, the pedestal 1 of present embodiment and preceding 3 interference of angular contact ball bearing Cooperation or transition cooperation;Shell 9 is interference fitted with rear angular contact ball bearing 10 or transition coordinates.So set, corner connection before ensureing It touches ball bearing and rear angular contact ball bearing is reliable and stable, improve motor operation run stability.Other and specific embodiment one, Two or three is identical.
Specific embodiment five:Illustrate with reference to Fig. 1 and Fig. 3, the quantity of the arc groove 4-1 of present embodiment is 2.So It sets, certain deformation can be generated under the action of moment of flexure, torque can be transferred, exempts to assemble, no fretting wear ensures motor It operates reliable and stable.It is other identical with specific embodiment four.
Specific embodiment six:The annular friction material 8 of present embodiment be oil-containing friction material, the oil-containing friction material Including following component by percentage to the quality:
Polymeric matrix:45%-80%;
Friction modifier:10%-30%;
Carbon micron tube:1%-30%;
The polymeric matrix is polytetrafluoroethylene (PTFE) and polybenzoate, polyimides or double maleic amides groups of any one It closes;
The friction modifier for copper powder, nickel powder, copper oxide, molybdenum disulfide, graphite, nano-diamond powder, carbon fiber, The combination of one or more of glass fibre and rare earth powder.
Present embodiment can accurately control the oil content of friction material, and improve it using carbon micron tube as containing oil carrier Containing oil-retaining power, the basis material species of oil-containing material is not limited, ultrasound electric machine under suitable different operating modes can be prepared and rub Material;
The friction material makes the smooth running of ultrasound electric machine, output torque big, improves motor and restarts performance, greatly improves The service life of ultrasound electric machine effectively avoids the bonding of the rotor after storing for a long time;The run stability of ultrasound electric machine is improved, Enhance the load capacity of motor.Coefficient of friction is 0.07-0.18, and wear rate is 1.0 × 10-8mm3/Nm-2×10-8mm3/Nm。 It is other identical with specific embodiment four.
Specific embodiment seven:Illustrate with reference to Fig. 4, a kind of travelling wave supersonic motor containing flexible shaft of present embodiment includes Pedestal 1, flexible shaft 4, shell 9, rotor 12, stator 13 and two angular contact ball bearings 14;
Shell 9 and pedestal 1 are detachably connected, and an angular contact ball is separately installed on pedestal 1 and the opposite side of shell 9 Bearing 14, two 14 back-to-back settings of angular contact ball bearing, the both ends of flexible shaft 4 are separately mounted to two angular contact ball bearings 14 On, rotor 12 and stator 13 are disposed between two angular contact ball bearings 14, rotor 12 is disposed adjacent and is mounted on shell 9 On the annular ridge 4-1 of flexible shaft 4, stator 13 is mounted on pedestal 1, is equipped on the end face of the wheel rim of rotor 12 and stator 13 One layer of annular friction material 8 of contact, stator 13 are equipped with ring-shaped piezo ceramic layer 6 on the end face adjacent with pedestal 1;Positioned at turn Flexible hinge structure or flexible folding girder construction are machined on the shaft part of flexible shaft 4 between son 12 and stator 13;Flexible hinge N number of whole circle arc groove 4-2 that structure is mainly radially processed by flexible shaft 4 is formed, wherein N >=1;Girder construction is folded mainly by soft Property the axis 4 multiple groove 4-3 of interlaced arrangement that radially process and groove 4-3 between multiple beam 4-4 form.
The stator 13 of present embodiment is connected by screw 2 with pedestal 1, and rotor 12 is connected by bolt 11 with shell 9, outside Shell 9 and pedestal 1 are connected by trip bolt 7.Present embodiment uses two bearings of same size, and uses back-to-back pairing Installation, two bearing fits ensure that motor operating is reliable and stable using pre-tightening.
The advantageous effect of present embodiment is:Present embodiment is using flexible hinge structure or folds girder construction composition flexibility Axis realizes the automatic adjusument of rotor and stator contact, and the size of flexible hinge is calculated by given working condition requirement, folded beam The depth and width of the arc groove of structure with angle by being calculated to provisioning request, can to avoid due to flexible shaft both ends fix band It is uneven to carry out contact of the rotor with stator, contact of the stator with rotor is allow to carry out automatic adjusument according to contact situation, is increased The run stability of motor.
Specific embodiment eight:Illustrate with reference to Fig. 4, a kind of travelling wave supersonic motor containing flexible shaft of present embodiment also wraps Include pre-load nut 15, No.1 block 16 and No. two blocks 17;No.1 block 16 is set on flexible shaft 4, No.1 block 16 and bottom The inner ring of angular contact ball bearing 14 on seat 1 is in contact, and is threaded on the shaft part of the neighbouring No.1 block 16 of flexible shaft 4, Pre-load nut 15 is screwed on screw thread, and the end face adjacent with shell 9 of flexible shaft 4 is threaded hole, and No. two blocks 17 pass through The screw that presses closer being screwed in threaded hole is fixed on flexible shaft 4 and is in contact with the inner ring of angular contact ball bearing 14.
Present embodiment is threaded in the front end of flexible shaft 4, and rear end is machined with screw hole, No.1 block 16 and corner connection The inner ring contact of contact bearing 14, No. two blocks 17 are fixed on inner ring on flexible shaft 4 with angular contact bearing 14 by pressing closer screw The loading that pre-load nut 15 realizes precompression between rotor by closing shafting is tightened in contact.Using two angular contact ball bearings Back-to-back installation applies precompression to rotor using shafting is closed, improves the uniformity of pre-pressure loading, coordinate flexible shaft It uses, motor run stability and load capacity can be further improved.It is other identical with specific embodiment seven.
Specific embodiment nine:The annular friction material 8 of present embodiment be oil-containing friction material, the oil-containing friction material Including following component by percentage to the quality:
Polymeric matrix:45%-80%;Friction modifier:10%-30%;Carbon micron tube:1%-30%;
The polymeric matrix is polytetrafluoroethylene (PTFE) and polybenzoate, polyimides or double maleic amides groups of any one It closes;
The friction modifier for copper powder, nickel powder, copper oxide, molybdenum disulfide, graphite, nano-diamond powder, carbon fiber, The combination of one or more of glass fibre and rare earth powder.
Present embodiment can accurately control the oil content of friction material, and improve it using carbon micron tube as containing oil carrier Containing oil-retaining power, the basis material species of oil-containing material is not limited, ultrasound electric machine under suitable different operating modes can be prepared and rub Material;
The friction material makes the smooth running of ultrasound electric machine, output torque big, improves motor and restarts performance, greatly improves The service life of ultrasound electric machine effectively avoids the bonding of the rotor after storing for a long time;The run stability of ultrasound electric machine is improved, Enhance the load capacity of motor.Coefficient of friction is 0.07-0.18, and wear rate is 1.2 × 10-8mm3/Nm-2×10-8mm3/Nm。 It is other identical with specific embodiment eight.

Claims (9)

1. a kind of travelling wave supersonic motor containing flexible shaft, it is characterised in that:It include pedestal (1), preceding angular contact ball bearing (3), Flexible shaft (4), shell (9), rear angular contact ball bearing (10), rotor (12) and stator (13);
Shell (9) and pedestal (1) are detachably connected, and preceding angular contact ball bearing (3) is equipped on pedestal (1), and shell is installed on (9) There is rear angular contact ball bearing (10), flexible shaft (4) is mounted on preceding angular contact ball bearing (3) and rear angular contact ball bearing (10); Rotor (12) and stator (13) are arranged between preceding angular contact ball bearing (3) and rear angular contact ball bearing (10), rotor (12) with Housing (9) is disposed adjacent and on the annular ridge (4-1) of flexible shaft (4), and stator (13) is mounted on pedestal (1), The one layer of annular friction material (8) contacted with stator (13), stator (13) and bottom are equipped on the end face of the wheel rim of rotor (12) Seat (1) is equipped with ring-shaped piezo ceramic layer (6) on adjacent end face;Flexible shaft between rotor (12) and stator (13) (4) flexible hinge structure or flexible folding girder construction are machined on shaft part;
N number of whole circle arc groove (4-2) that flexible hinge structure is mainly radially processed by flexible shaft (4) is formed, wherein N >=1;
Fold multiple grooves (4-3) of interlaced arrangement and the groove (4-3) that girder construction is mainly radially processed by flexible shaft (4) Between multiple beams (4-4) form.
2. a kind of travelling wave supersonic motor containing flexible shaft according to claim 1, it is characterised in that:It further includes elastic gear It encloses (5), preceding angular contact ball bearing (3) is pre-tightened the inner ring of stator (13) by circlip (5).
3. a kind of travelling wave supersonic motor containing flexible shaft according to claim 1, it is characterised in that:It further includes preload spiral shell Female (15), the shaft part close to preceding angular contact ball bearing (3) of flexible shaft (4) is threaded shaft section, and pre-load nut (15) is screwed in spiral shell On line shaft part, preceding angular contact ball bearing (3) is pre-tightened the inner ring of stator (12) by pre-load nut (15).
4. a kind of travelling wave supersonic motor containing flexible shaft according to claim 1,2 or 3, it is characterised in that:Pedestal (1) with Preceding angular contact ball bearing (3) interference fit or transition cooperation;Shell (9) is interference fitted with rear angular contact ball bearing (10) or transition Cooperation.
5. a kind of travelling wave supersonic motor containing flexible shaft according to claim 4, it is characterised in that:Arc groove (4-2) Quantity is 2.
6. a kind of travelling wave supersonic motor containing flexible shaft according to claim 4, it is characterised in that:Annular friction material (8) it is oil-containing friction material, which includes following component by percentage to the quality:
Polymeric matrix:45%-80%;
Friction modifier:10%-30%;
Carbon micron tube:1%-30%;
The polymeric matrix is polytetrafluoroethylene (PTFE) and polybenzoate, polyimides or double maleic amides combinations of any one;
The friction modifier is copper powder, nickel powder, copper oxide, molybdenum disulfide, graphite, nano-diamond powder, carbon fiber, glass The combination of one or more of fiber and rare earth powder.
7. a kind of travelling wave supersonic motor containing flexible shaft, it is characterised in that:It include pedestal (1), flexible shaft (4), shell (9), Rotor (12), stator (13) and two angular contact ball bearings (14);
Shell (9) and pedestal (1) are detachably connected, and a corner connection is separately installed on pedestal (1) and the opposite side of shell (9) Ball bearing (14) is touched, two back-to-back settings of angular contact ball bearing (14), the both ends of flexible shaft (4) are separately mounted to two corner connections Touch on ball bearing (14), be disposed with rotor (12) and stator (13) between two angular contact ball bearings (14), rotor (12) with outside Shell (9) is disposed adjacent and on the annular ridge (4-1) of flexible shaft (4), and stator (13) is mounted on pedestal (1), turns The one layer of annular friction material (8) contacted with stator (13), stator (13) and pedestal are equipped on the end face of the wheel rim of sub (12) (1) ring-shaped piezo ceramic layer (6) is equipped on adjacent end face;Flexible shaft (4) between rotor (12) and stator (13) Shaft part on be machined with flexible hinge structure or flexible folding girder construction;
N number of whole circle arc groove (4-2) that flexible hinge structure is mainly radially processed by flexible shaft (4) is formed, wherein N >=1;
Fold multiple grooves (4-3) of interlaced arrangement and the groove (4-3) that girder construction is mainly radially processed by flexible shaft (4) Between multiple beams (4-4) form.
8. a kind of travelling wave supersonic motor containing flexible shaft according to claim 7, it is characterised in that:It further includes preload spiral shell Female (15), No.1 block (16) and No. two blocks (17);No.1 block (16) is set on flexible shaft (4), No.1 block (16) It is in contact with the inner ring of the angular contact ball bearing (14) on pedestal (1), on the shaft part of the neighbouring No.1 block (16) of flexible shaft (4) It is threaded, pre-load nut (15) is screwed on screw thread, and the end face adjacent with shell (9) of flexible shaft (4) is threaded Hole, No. two blocks (17) are fixed on by the pre-loading screw being screwed in threaded hole on flexible shaft (4) and and angular contact ball bearing (14) inner ring is in contact.
9. a kind of travelling wave supersonic motor containing flexible shaft according to claim 8, it is characterised in that:Annular friction material (8) it is oil-containing friction material, which includes following component by percentage to the quality:
Polymeric matrix:45%-80%;
Friction modifier:10%-30%;
Carbon micron tube:1%-30%;
The polymeric matrix is polytetrafluoroethylene (PTFE) and polybenzoate, polyimides or double maleic amides combinations of any one;
The friction modifier is copper powder, nickel powder, copper oxide, molybdenum disulfide, graphite, nano-diamond powder, carbon fiber, glass The combination of one or more of fiber and rare earth powder.
CN201610850216.6A 2016-09-26 2016-09-26 A kind of travelling wave supersonic motor containing flexible shaft Active CN106374775B (en)

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Publication number Priority date Publication date Assignee Title
CN107947631B (en) * 2017-11-27 2024-02-09 中国工程物理研究院电子工程研究所 MEMS traveling wave type micro-motor structure
CN110535302B (en) * 2019-09-04 2021-04-02 哈尔滨工业大学 Preparation method of oil-containing friction material sheet and rotor or stator composite
CN110768424B (en) * 2019-10-23 2021-04-06 广东工业大学 Rigid-flexible coupling high-precision galvanometer motor and control method thereof

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Publication number Priority date Publication date Assignee Title
JPS6130972A (en) * 1984-07-18 1986-02-13 Taga Denki Kk Supersonic motor device
JPH02214478A (en) * 1989-02-15 1990-08-27 Aisin Seiki Co Ltd Ultrasonic motor
CN201742324U (en) * 2010-06-08 2011-02-09 江苏春生超声电机有限公司 Rotary travelling wave ultrasonic motor
CN103312213A (en) * 2013-06-03 2013-09-18 沈阳大学 Ultrasonic motor with mesh type traveling wave
CN105897039A (en) * 2016-06-27 2016-08-24 哈尔滨工业大学 Angular contact ball bearing supported ultrasonic motor, and stator and rotor pre-tightening method
CN105958863A (en) * 2016-06-27 2016-09-21 哈尔滨工业大学 Ultrasonic motor with high rotation accuracy structure and stator and rotor pre-tightening method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130972A (en) * 1984-07-18 1986-02-13 Taga Denki Kk Supersonic motor device
JPH02214478A (en) * 1989-02-15 1990-08-27 Aisin Seiki Co Ltd Ultrasonic motor
CN201742324U (en) * 2010-06-08 2011-02-09 江苏春生超声电机有限公司 Rotary travelling wave ultrasonic motor
CN103312213A (en) * 2013-06-03 2013-09-18 沈阳大学 Ultrasonic motor with mesh type traveling wave
CN105897039A (en) * 2016-06-27 2016-08-24 哈尔滨工业大学 Angular contact ball bearing supported ultrasonic motor, and stator and rotor pre-tightening method
CN105958863A (en) * 2016-06-27 2016-09-21 哈尔滨工业大学 Ultrasonic motor with high rotation accuracy structure and stator and rotor pre-tightening method

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