CN106370958B - A kind of the ltcc substrate test method and device of embedded fluid channel - Google Patents
A kind of the ltcc substrate test method and device of embedded fluid channel Download PDFInfo
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- CN106370958B CN106370958B CN201610934313.3A CN201610934313A CN106370958B CN 106370958 B CN106370958 B CN 106370958B CN 201610934313 A CN201610934313 A CN 201610934313A CN 106370958 B CN106370958 B CN 106370958B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
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- G01N2291/0232—Glass, ceramics, concrete or stone
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02881—Temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
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Abstract
The invention discloses a kind of ltcc substrate test method of embedded fluid channel and device, this method includes carrying out Preliminary detection to ltcc substrate sample；Low tempertaure storage test, high temperature storage test and high/low temperature loop test are carried out to the ltcc substrate sample by Preliminary detection respectively, and the ltcc substrate sample after each test is detected.This method and device have carried out the serial environment subject test such as low tempertaure storage, high temperature storage, temperature cycles to the ltcc substrate of embedded fluid channel, detect embedded fluid channel ltcc substrate quality is lossless and structural intergrity, obtain its in ground simulation use environment whether reliable qualitative conclusions.
Description
Technical field
The invention belongs to testing fields, and in particular to a kind of the ltcc substrate test method and device of embedded fluid channel.
Background technique
MEMS (MEMS, Micro-Electro-Mechanical System) is microcircuit and micromechanics by function
The integrated device on chip can be required, size is usually in millimeter or micron order, and this device is due to spies such as small in size, light weights
Point is used widely in key areas such as aviations, therefore the reliability of MEMS device and durability are particularly important, is directly determined
The work quality of MEMS device and service life；At high temperature, alternation mechanical load and in MEMS the case where generate failure
Frequent occurrence, especially those have the small movable structure made of low melting material.The influence in MEMS mass and service life because
Plain very much, low-temperature co-fired ceramics (LTCC, low temperature co-fired ceramic) is used as MEMS and radio frequency applications
Package substrate material, very big specific gravity is accounted in its influence factor, its reliability is to the performance for also directly determining MEMS.
Embedded fluid channel is the characteristic according to ltcc substrate, on the basis of ceramics injection change in shape is smaller, exploitation
Be mainly used for substrate heat dissipation microstructure, its radiating principle is that the cooling with certain property is passed through in fluid channel
Liquid is quickly taken away heat caused by chip under specific flow velocity and pressure, and so that it will not influence core because substrate overheats
The various performances of piece.According to the technical indicator of LTCC manufacturer, the current country, the main feature dimensional parameters of fluid channel are embedded
It is 200 μm or so, there are difficulty of processing that big, cavity wall surface becomes greater than 200 μm of cavity technique for working width in ltcc substrate
Series of problems, high temperature, low temperature and the biggish environment of the temperature difference such as shape and collapsing all have larger impact to ltcc substrate, if
The environmental suitability of ltcc substrate is unsatisfactory for requiring, and the cavity wall surface of fluid channel deformation occurs and collapses, then using the LTCC
The quality of the electronic product of substrate package and service life also will necessarily be impacted.Therefore, sintered ltcc substrate must be surveyed
Examination, detects the integrality of embedded fluid channel, verifies the connectivity of substrate, to guarantee the reliability of product.
Summary of the invention
The present invention provides a kind of ltcc substrate test side of embedded fluid channel to test the environmental suitability of ltcc substrate
Method and device carry out environment temperature test to sintered ltcc substrate, verify the reliability of substrate.
According to the first aspect of the invention, technical solution provided by the invention is as follows: a kind of LTCC of embedded fluid channel
Tester substrate method, comprising:
Preliminary detection is carried out to ltcc substrate sample；
Low tempertaure storage test, high temperature storage test and high/low temperature are carried out respectively to the ltcc substrate sample by Preliminary detection
Loop test, and the ltcc substrate sample after each test is detected.
In one preferably embodiment, the detection after Preliminary detection and each test to ltcc substrate sample is all using super
Sonomicroscope or metallographic microscope.
In one preferably embodiment, the project of Preliminary detection includes the fluid channel internal structure of the ltcc substrate sample
It is whether complete, if there are slight crack and to collapse, with the presence or absence of mechanical damage.
In one preferably embodiment, to the ltcc substrate sample carry out low tempertaure storage test test temperature be-
55 DEG C~-40 DEG C；The test temperature tested the high temperature storage that the ltcc substrate sample carries out is 85 DEG C~125 DEG C；It is described
The period of storage that low tempertaure storage test, high temperature storage are tested is 20~28 hours.
In one preferably embodiment, the cycle-index to the high/low temperature loop test that the ltcc substrate sample carries out is
5~15 times；The retention time of high temperature or low temperature is every time in the high/low temperature loop test carried out to the ltcc substrate sample
25min~35min；Again to the ltcc substrate sample after test after restoring 1.5~2.5 hours after the high/low temperature loop test
It is detected.
According to the second aspect of the invention, technical solution provided by the invention is as follows: a kind of LTCC of embedded fluid channel
Tester substrate device, described device include:
Detection unit, for ltcc substrate sample carry out Preliminary detection and to the ltcc substrate sample after every test into
Row detection；
Low tempertaure storage test cell, for carrying out low tempertaure storage test to by the ltcc substrate sample of Preliminary detection；
High temperature storage test cell, for carrying out high temperature storage test to by the ltcc substrate sample of Preliminary detection；
High/low temperature loop test unit is surveyed for carrying out high/low temperature circulation to the ltcc substrate sample by Preliminary detection
Examination.
It is aobvious using ultrasound that detection is carried out to the ltcc substrate sample in one preferably embodiment, in the detection unit
Micro- imaging or metallography microscope imaging.
In one preferably embodiment, the detection unit is used to detect the fluid channel internal junction of the ltcc substrate sample
Whether structure is complete, and/or with the presence or absence of slight crack and collapses, and/or whether there is mechanical damage.
In one preferably embodiment, the low tempertaure storage test cell is used to carry out temperature to the ltcc substrate sample
The low tempertaure storage test for being 20~28 hours for -55 DEG C~-40 DEG C, period of storage；The high temperature storage test cell for pair
The ltcc substrate sample carries out the high temperature storage test that temperature is 85 DEG C~125 DEG C, period of storage is 20~28 hours.
In one preferably embodiment, the high/low temperature loop test unit is for following the ltcc substrate sample
The high/low temperature loop test that ring number is 5~15 times and the retention time of high temperature or low temperature is 25min~35min every time；Institute
Stating the recovery time after high/low temperature loop test is 1.5~2.5 hours.
The beneficial effects of the present invention are: the present invention embeds the ltcc substrate test method of fluid channel to verify ltcc substrate
Requirement to use environment has carried out the series such as low tempertaure storage, high temperature storage, temperature cycles to the ltcc substrate of embedded fluid channel
The test of environment subject, detect embedded fluid channel ltcc substrate quality is lossless and structural intergrity, show that it makes in ground simulation
With in environment whether reliable qualitative conclusions.
This method tests in low tempertaure storage, high temperature storage test and preferred extreme test temperature when high/low temperature loop test
It is the temperature use scope of electronic component required by order to meet national military standard and sets, if it can passes through setting
The test of extreme test temperature, then can work under the conditions of more extreme temperature, usable range is more extensive.This several
Test is all by prolonged temperature change environmental test, to determine that product can be in the temperature environment of a wide range of variation
Whether structural intergrity is able to maintain, and test method and the equipment used are all relatively simple, and the reliability of test is higher.
Detailed description of the invention
Fig. 1 is the flow chart of the ltcc substrate test method embodiment one of the embedded fluid channel of the present invention；
Fig. 2 is the flow chart of the ltcc substrate test method embodiment two of the embedded fluid channel of the present invention；
Fig. 3 is the schematic diagram of the ltcc substrate test device embodiment of the embedded fluid channel of the present invention；
Fig. 4 a, Fig. 4 b are respectively that the fluid channel ltcc substrate low tempertaure storage test of 4 kinds of the present invention different width of flow path is forward and backward
The micro- schematic diagram of ultrasound；
Fig. 5 a, Fig. 5 b are respectively that the fluid channel ltcc substrate high temperature storage test of 4 kinds of the present invention different width of flow path is forward and backward
The micro- schematic diagram of ultrasound；
Before the fluid channel ltcc substrate high/low temperature loop test of respectively 4 kinds of the present invention different width of flow path of Fig. 6 a, Fig. 6 b,
Ultrasonic micro- schematic diagram afterwards.
Specific embodiment
Below by specific embodiment combination attached drawing, invention is further described in detail.The present invention can be with a variety of
Different forms is realized, however it is not limited to embodiment described in the present embodiment.The purpose of following specific embodiments is provided
Be easy for becoming apparent from the disclosure of invention thorough explanation, however those skilled in the art may be aware that it is therein
One or more detail descriptions can be omitted, and in some instances, some embodiments are not described or do not have
Detailed description.
In addition, technical characteristic described herein, technical solution can also be in one or more embodiments arbitrarily to close
Suitable mode combines.For those skilled in the art, it should be readily appreciated that method related with embodiment provided herein
Step or operation order can also change.Therefore, any sequence in drawings and examples is merely illustrative purposes, not secretly
Show requirement in a certain order, is required unless expressly stated according to a certain sequence.
In embodiments of the present invention, the present invention simulates environment temperature, then by the LTCC base of Preliminary detection qualification
Plate sample is tested in analog temperature environment, detect the integrality of the micro-channel structure of ltcc substrate and be have slight crack or
Damage, whether verifying ltcc substrate is qualified, is illustrated below in conjunction with specific drawings and examples.
Referring to FIG. 1, the invention discloses a kind of embodiments of the ltcc substrate test method of embedded fluid channel, comprising:
S1: Preliminary detection is carried out to ltcc substrate sample；
S2: low tempertaure storage test, high temperature storage test and height are carried out respectively to the ltcc substrate sample by Preliminary detection
Low-temperature circulating test, and the ltcc substrate sample after each test is detected.
It is further preferred that another embodiment of test method provided by the invention is as shown in Fig. 2, as seen from the figure, be somebody's turn to do
Method includes step S11~S14, specific as follows:
Step S11: the ltcc substrate sample of embedded fluid channel is carried out using ultrasonic microscope or metallographic microscope preliminary
Quality is lossless and structural intergrity detection, check whether the fluid channel internal structure of ltcc substrate sample to be measured complete, if
There are slight crack and collapse, with the presence or absence of mechanical damage.
The environment temperature that the present embodiment is currently tested is 18.6 DEG C, air humidity 32.1%, certain environment
Temperature and humidity does not influence the result of test.There are four the present embodiment test ltcc substrate samples used, and fluid channel is preferably straight
Line style fluid channel, the cross-sectional height of fluid channel are all 200 μm, and width is respectively 250 μm, 500 μm, 750 μm, 1000 μm；
The specifications and models of ltcc substrate are 20mm*20mm.
For the continuity for guaranteeing test method of the present invention, the selected ltcc substrate sample of this test is can be by first pacing
The sample of examination.
Step S12: low tempertaure storage test is carried out to by the ltcc substrate sample of Preliminary detection, and to the sample after test
It is detected.
Since the operating temperature range of business level electronic component is 0 DEG C~70 DEG C, the operating temperature range of technical grade is-
40 DEG C~85 DEG C, test method of the invention sets the test temperature -55 of low tempertaure storage test to meet National Military Standard
DEG C~-40 DEG C, preferably -55 DEG C ± 3 DEG C of the present embodiment.
Sample to be tested is kept one section of long period by this test method under high or extremely low temperature, to ensure that product can
It is worked in high and low temperature environment for a long time without influencing its performance, guarantees that product material will not be such that structure meets in extreme temperatures
To destruction.Here retention time is typically chosen 20~28 hours.The low tempertaure storage time of the present embodiment preferably 24 hours.
Low tempertaure storage test still detects it using ultrasonic microscope or metallographic microscope after completing, as Fig. 4 a,
The fluid channel ltcc substrate sample low tempertaure storage test of respectively 4 kinds of the present embodiment different width of flow path shown in Fig. 4 b is forward and backward super
The micro- schematic diagram of sound, as seen from the figure, the internal structure of the LTCC fluid channel of this four samples are flawless, also have no mechanical damage.
Step S13: high temperature storage test is carried out to ltcc substrate sample, and the sample after test is detected.
According to the extreme temperature test condition of National Military Standard set high temperature test test temperature, generally 85 DEG C~
125 DEG C, preferably 125 DEG C ± 2 DEG C of the present embodiment；And the high temperature storage time is it is also preferred that 24 hours.
High temperature storage test still detects it using ultrasonic microscope or metallographic microscope after completing, as Fig. 5 a,
The fluid channel ltcc substrate high-temperature sample storage test of respectively 4 kinds of the present embodiment different width of flow path shown in Fig. 5 b is forward and backward super
The micro- schematic diagram of sound, as seen from the figure, the internal structure of the LTCC fluid channel of this four samples are flawless, also have no mechanical damage.
Step S14: high/low temperature loop test is carried out to ltcc substrate sample, and the sample after test is detected.
Since the fluid channel of ltcc substrate is mainly based upon designed by heat dissipation consideration, it is contemplated that actual application environment has can
Sometimes hot and sometimes cold situation can be will appear, this test method will also carry out high/low temperature loop test, the test to ltcc substrate sample
It is exactly to determine in high and low temperature extreme range, temperature change is influenced caused by the use of product.
High and low temperature set temperature still distinguishes preferably 125 DEG C ± 2 DEG C and -55 DEG C in the high/low temperature loop test of the present embodiment
± 3 DEG C, since rate of temperature change is 5-10 DEG C/min during cyclic test, in order to ensure temperature can reach in cyclic process
The highest or minimum temperature of setting, thus set each temperature (high temperature, low temperature) retention time t1 range as 25min~
35min；The range of the cycle-index n of high and low temperature is 5~15 times.The present embodiment preferred t1=30min ± 2min, n=15 times,
To observe stress fatigue phenomenon of the product after repeatedly recycling for a long time.
In addition, when carrying out high and low temperature switching in cyclic process, setting one shorter switching time t2, preferably t2≤
1min, to guarantee to quickly complete the switching of extreme temperature.
The process of the loop test is as follows: ltcc substrate sample to be measured being placed into sweat box, first set temperature case
Temperature be 125 DEG C high temperature, then the temperature in sweat box will be begun to ramp up from original environment temperature, until reaching setting
High temperature values；The timing since sweat box sets temperature, laggard trip temperature switching in 30 minutes, switching is sought to will in 1 minute
The desired temperature of sweat box is adjusted to -55 DEG C of low temperature by 125 DEG C, and the temperature of sweat box is gradually reduced by 125 DEG C at this time,
Until reach the low-temperature values of setting, carried out again after 30 minutes since sweat box sets low temperature high temperature switching ... ... according to
The above process carries out 15 high/low temperature circulations, completes this test.
After loop test, ltcc substrate sample to be measured is taken out from sweat box, is carried out again after restoring a period of time
Detection, recovery time here are generally 1.5~2.5 hours, and the present embodiment preferably 2 hours.
The fluid channel ltcc substrate cycles samples of respectively 4 kinds of the present embodiment different width of flow path as shown in Fig. 6 a, Fig. 6 b
The forward and backward micro- schematic diagram of ultrasound is tested, as seen from the figure, the internal structure of the LTCC fluid channel of this four samples is flawless,
It has no mechanical damage.
In above-mentioned several steps, low tempertaure storage test, high temperature storage test or high/low temperature loop test, are all to use
Sweat box carry out environment temperature simulation；In addition, the Preliminary detection to ltcc substrate sample and the detection institute after test every time
What is used is all ultrasonic microscope or metallographic microscope.Here sweat box and ultrasonic microscope, metallographic microscope can be existing
Some products, or following there is the products of identical function, repeat no more here to its structure.
In addition, either Preliminary detection still test after detection, be all from following to ltcc substrate sample to be measured
Standard judges: (1) substrate overall structure is complete, zero defect；(2) substrate surface is flawless；(3) substrate miniflow pipeline joint is complete
It is whole, no blocking, no collapsing；(4) ultrasonic microscope scanning display flow passage structure is complete, no blocking, no collapsing；(5) in line type stream
Free from flaw between road；(6) sample after testing, is passed through deionized water in water inlet, outlet there are flowing out, structural integrity.If
Testing result meets above-mentioned requirements, and the reliability for being considered as ltcc substrate to be measured is higher, can satisfy business and the army of country
Use standard；Otherwise it is considered as non-qualified product.
It should be understood that above-mentioned low tempertaure storage is tested, high temperature storage tests still its sequence of high/low temperature loop test
It is not uniquely, which arbitrarily first to be surveyed and is ok, this variation belongs to the ordinary skill in the art, falls in protection of the invention
In range.
The ltcc substrate test method of embedded fluid channel of the invention is using ultrasonic microscope or metallographic microscope to embedded
The ltcc substrate of fluid channel carries out environment temperature test, successively carries out the serial environment such as low tempertaure storage, high temperature storage, temperature cycles
Subject test after, observe the integrality of micro-channel structure, obtain LTCC fluid channel device in ground simulation use environment can
By property conclusion.
As shown in figure 3, the present invention also provides a kind of embodiments of the ltcc substrate test device of embedded fluid channel, by scheming
It is found that the device includes that detection unit 21, low tempertaure storage test cell 22, high temperature storage test cell 23 and high/low temperature circulation are surveyed
Unit 24 is tried, is specifically described below.
Detection unit 21 is used to carry out ltcc substrate sample Preliminary detection and to the ltcc substrate sample after every test
It is detected.In one embodiment, detection unit 21 be used to carry out ltcc substrate sample detection using ultrasonic micro-imaging or
Metallography microscope imaging；Preliminary detection project includes whether the fluid channel internal structure of ltcc substrate sample is complete, and/or deposit
It in slight crack and collapses, and/or whether there is mechanical damage.
Low tempertaure storage test cell 22 is used to carry out low tempertaure storage test to by the ltcc substrate sample of Preliminary detection.
Preferably, the test temperature of low tempertaure storage test ltcc substrate sample carried out in low tempertaure storage test cell
It is -55 DEG C~-40 DEG C；The period of storage of low tempertaure storage test is 20~28 hours.
High temperature storage test cell 23 is used to carry out high temperature storage test to by the ltcc substrate sample of Preliminary detection.
Preferably, it is to the test temperature of the high temperature storage test of ltcc substrate sample progress in high temperature storage test cell
85 DEG C~125 DEG C；The period of storage of high temperature storage test is 20~28 hours.
High/low temperature loop test unit 24 is used to carry out high/low temperature circulation to the ltcc substrate sample by Preliminary detection to survey
Examination.
Preferably, in the test cell to ltcc substrate sample carry out high/low temperature loop test cycle-index be 5~
15 times；The retention time of each high temperature or low temperature is 25min~35min；Recovery time after high/low temperature loop test is
1.5~2.5 hours.
The specific test process of the device is referring to above-mentioned test method, and which is not described herein again.
The above content is specific embodiment is combined, further detailed description of the invention, and it cannot be said that this hair
Bright specific implementation is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, it is not taking off
Under the premise of from present inventive concept, a number of simple deductions or replacements can also be made.
Claims (4)
1. a kind of ltcc substrate test method of embedded fluid channel, which is characterized in that the described method includes:
Preliminary detection is carried out to ltcc substrate sample；
Low tempertaure storage test, high temperature storage test and high/low temperature circulation are carried out respectively to the ltcc substrate sample by Preliminary detection
Test, and the ltcc substrate sample after each test is detected；
Cycle-index to the high/low temperature loop test that the ltcc substrate sample carries out is 5~15 times；Each high temperature or low
The retention time of temperature is 25min~35min；After restoring 1.5~2.5 hours after the high/low temperature loop test again to test after
Ltcc substrate sample detected；
Wherein, the project of Preliminary detection includes whether the fluid channel internal structure of the ltcc substrate sample is complete, and/or whether
It there are slight crack and collapses, and/or whether there is mechanical damage；
The test temperature tested the low tempertaure storage that the ltcc substrate sample carries out is -55 DEG C~-40 DEG C；To the LTCC base
The test temperature for the high temperature storage test that plate sample carries out is 85 DEG C~125 DEG C；The low tempertaure storage test, high temperature storage test
Period of storage be 20~28 hours.
2. the ltcc substrate test method of embedded fluid channel as described in claim 1, which is characterized in that ltcc substrate sample
Preliminary detection and every time test after detection all use ultrasonic microscope or metallographic microscope.
3. a kind of ltcc substrate test device of embedded fluid channel, which is characterized in that described device includes:
Detection unit, for carrying out Preliminary detection to ltcc substrate sample and being examined to the ltcc substrate sample after every test
It surveys；
Low tempertaure storage test cell, for carrying out low tempertaure storage test to by the ltcc substrate sample of Preliminary detection；
High temperature storage test cell, for carrying out high temperature storage test to by the ltcc substrate sample of Preliminary detection；
High/low temperature loop test unit, for carrying out high/low temperature loop test to by the ltcc substrate sample of Preliminary detection；
Cycle-index to the high/low temperature loop test that the ltcc substrate sample carries out is 5~15 times；Each high temperature or low
The retention time of temperature is 25min~35min；After restoring 1.5~2.5 hours after the high/low temperature loop test again to test after
Ltcc substrate sample detected；
Whether whether the fluid channel internal structure that the detection unit is used to detect the ltcc substrate sample is complete, and/or deposit
It in slight crack and collapses, and/or whether there is mechanical damage；
The low tempertaure storage test cell is used to carry out the ltcc substrate sample temperature to be -55 DEG C~-40 DEG C, period of storage
It is tested for 20~28 hours low tempertaure storages；The high temperature storage test cell is used to carry out temperature to the ltcc substrate sample
For 85 DEG C~125 DEG C, the high temperature storage test that period of storage is 20~28 hours.
4. the ltcc substrate test device of embedded fluid channel as claimed in claim 3, which is characterized in that in the detection unit
Detection is carried out using ultrasonic micro-imaging or metallography microscope imaging to the ltcc substrate sample.
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| CN103344862A (en) * | 2013-07-05 | 2013-10-09 | 北京航空航天大学 | Electronic device comprehensive environment accelerated storage testing device |
| CN103601501A (en) * | 2013-10-29 | 2014-02-26 | 中国电子科技集团公司第五十五研究所 | Low temperature co-fired ceramic method by mixed conductor structure |
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