CN106353965B - 曲面形光罩、具彩色光阻图案的曲面装置及其制作方法 - Google Patents
曲面形光罩、具彩色光阻图案的曲面装置及其制作方法 Download PDFInfo
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- CN106353965B CN106353965B CN201510977406.XA CN201510977406A CN106353965B CN 106353965 B CN106353965 B CN 106353965B CN 201510977406 A CN201510977406 A CN 201510977406A CN 106353965 B CN106353965 B CN 106353965B
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- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 140
- 238000004519 manufacturing process Methods 0.000 title abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 239000000463 material Substances 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims description 48
- 239000002131 composite material Substances 0.000 claims description 27
- 238000005507 spraying Methods 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical group [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- GALOTNBSUVEISR-UHFFFAOYSA-N molybdenum;silicon Chemical compound [Mo]#[Si] GALOTNBSUVEISR-UHFFFAOYSA-N 0.000 claims description 2
- 239000002210 silicon-based material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 4
- 238000012545 processing Methods 0.000 abstract description 12
- 238000005516 engineering process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 3
- 230000001133 acceleration Effects 0.000 abstract description 2
- 238000000206 photolithography Methods 0.000 description 3
- 239000003086 colorant Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 235000000177 Indigofera tinctoria Nutrition 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229940097275 indigo Drugs 0.000 description 1
- COHYTHOBJLSHDF-UHFFFAOYSA-N indigo powder Natural products N1C2=CC=CC=C2C(=O)C1=C1C(=O)C2=CC=CC=C2N1 COHYTHOBJLSHDF-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010147 laser engraving Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000010023 transfer printing Methods 0.000 description 1
Images
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- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104123106A TWI605298B (zh) | 2015-07-16 | 2015-07-16 | 曲面型光罩、具彩色光阻圖案之曲面裝置及其製作方法 |
TW104123106 | 2015-07-16 |
Publications (2)
Publication Number | Publication Date |
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CN106353965A CN106353965A (zh) | 2017-01-25 |
CN106353965B true CN106353965B (zh) | 2020-10-16 |
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CN201510977406.XA Active CN106353965B (zh) | 2015-07-16 | 2015-12-23 | 曲面形光罩、具彩色光阻图案的曲面装置及其制作方法 |
Country Status (2)
Country | Link |
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CN (1) | CN106353965B (zh) |
TW (1) | TWI605298B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106827845B (zh) * | 2017-02-17 | 2019-09-10 | 然斯康波达机电设备(深圳)有限公司 | 一种3d曲面玻璃图案的印刷方法及装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201974632U (zh) * | 2011-04-12 | 2011-09-14 | 京东方科技集团股份有限公司 | 掩膜版及掩膜版组 |
CN102645783A (zh) * | 2011-05-18 | 2012-08-22 | 京东方科技集团股份有限公司 | 彩膜基板的制造方法 |
CN205318085U (zh) * | 2015-07-16 | 2016-06-15 | 许铭案 | 具彩色光阻图案的曲面装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101310757B1 (ko) * | 2007-03-16 | 2013-09-25 | 엘지전자 주식회사 | 휴대 단말기 |
TWI471774B (zh) * | 2011-09-30 | 2015-02-01 | Wintek Corp | 觸控裝置及觸控顯示裝置 |
-
2015
- 2015-07-16 TW TW104123106A patent/TWI605298B/zh not_active IP Right Cessation
- 2015-12-23 CN CN201510977406.XA patent/CN106353965B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201974632U (zh) * | 2011-04-12 | 2011-09-14 | 京东方科技集团股份有限公司 | 掩膜版及掩膜版组 |
CN102645783A (zh) * | 2011-05-18 | 2012-08-22 | 京东方科技集团股份有限公司 | 彩膜基板的制造方法 |
CN205318085U (zh) * | 2015-07-16 | 2016-06-15 | 许铭案 | 具彩色光阻图案的曲面装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI605298B (zh) | 2017-11-11 |
CN106353965A (zh) | 2017-01-25 |
TW201704840A (zh) | 2017-02-01 |
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Effective date of registration: 20211019 Address after: No. 8, Shuangxing Avenue, Biquan street, Bishan District, Chongqing Patentee after: Chongqing Fubang New Material Technology Co.,Ltd. Address before: 442-1 Zhonghua Road, Toufen Town, Miaoli County Patentee before: Xu Mingan Patentee before: Lin Wenfu |
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CI03 | Correction of invention patent |
Correction item: Patentee|Address|Patentee Correct: Xu Mingan|Taiwan County, Miaoli, China Town, No. 442-1 Zhonghua Road|Lin Wenfu False: Chongqing Fubang New Material Technology Co.,Ltd.|402760 No.8, Shuangxing Avenue, Biquan street, Bishan District, Chongqing Number: 44-02 Volume: 37 |
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Effective date of registration: 20220816 Address after: Unit 706, happy news building, 1 champley street, Hong Kong, China Patentee after: Hengxu Electronic Materials International Co.,Ltd. Address before: 442-1, Zhonghua Road, head town, Miaoli County Patentee before: Xu Mingan Patentee before: Lin Wenfu |
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