CN106346359A - Electromagnetic feed and multitasking grinder with electromagnetic feed - Google Patents
Electromagnetic feed and multitasking grinder with electromagnetic feed Download PDFInfo
- Publication number
- CN106346359A CN106346359A CN201610545936.1A CN201610545936A CN106346359A CN 106346359 A CN106346359 A CN 106346359A CN 201610545936 A CN201610545936 A CN 201610545936A CN 106346359 A CN106346359 A CN 106346359A
- Authority
- CN
- China
- Prior art keywords
- pressing component
- working substance
- groove portion
- magnetic pole
- magnechuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/04—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a rotary work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
Abstract
Electromagnetic chucks 61 to 64 each have: an electromagnetic chuck body (170) having magnetic pole portions (172) on an upper surface of a face plate (171), and groove portions (173) respectively formed between adjacent magnetic pole portions (172), wherein the electromagnetic chuck body (170) is configured to apply a workpiece W to upper surfaces of the chuck, Magnetic pole portions (172) by a magnetic force; Pressing members 180 provided in the respective groove portion (173) so as to be movable and when the workpiece W is mounted on the upper surfaces of the magnetic pole portions (172) press the workpiece W in a pressing direction with a force smaller than an attracting force adhesive force applied to the workpiece W by the magnetic pole portions (172); sets of biasing members 183 biasing the corresponding urging members (180) in the pressing direction; and sets of guide members (190, 191) which guide the respective pressing members (180) in a direction of depth toward the groove portions (173) and restrict movement of the pressing members (180) in a direction in which the groove portions (173) extend.
Description
Technical field
The present invention relates to magnechuck and the compound grinding machine possessing this magnechuck.
Background technology
In the past, have working substance is cut and the processing such as grinding in the case of, and non-used passes through pawl etc. and carries out
The common mechanical chuck of fastening is fixing working substance, but the shape according to working substance and position to be processed, using electromagnetism
Magnetic attraction be fixed on the technology on panel as absorption affinity.Special with reference to Japanese Unexamined Patent Application 53-111584 publication, Japan
Open clear 54-90674 publication.
However, the technology disclosed in Japanese Unexamined Patent Application 53-111584 publication, Japanese Unexamined Patent Application 54-90674 publication
In, the material of the panel of magnechuck of working substance and fixing working substance is all generally metal.Therefore, the working substance of contact
Coefficient of friction between lower surface and the upper surface of panel easily diminishes.Thus, for example in the grinding of working substance, solid exceeding
Determine the magnetic attraction of working substance larger power be applied in working substance in the case of, worry working substance deviate on panel initially
Position.In this regard, considering, by increasing number of turn of the magnitude of current of flowing or increase coil etc. in coil, to improve to working substance
Magnetic attraction, thus improving the countermeasure to the retentivity of working substance.However, in the feelings increasing the magnitude of current of flowing in coil
Under condition, there is the problem of caloric value increase etc.In addition, in the case of the volume number increasing coil, there is the body of magnechuck
The big problem of long-pending change.
Content of the invention
Can be small-sized using the fixing working substance of enough retentivitys when an object of the present invention is to provide for processing
Magnechuck and the compound grinding machine possessing magnechuck.
Magnechuck as one embodiment of the present invention has: magnechuck main body, and it possesses in panel upper surface
Along multiple magnetic pole pieces and the groove portion being formed between adjacent above-mentioned magnetic pole piece of prescribed direction arrangement, above-mentioned magnechuck main body
By the magnetic force of above-mentioned magnetic pole piece, working substance absorption is fixed on the upper surface of above-mentioned magnetic pole piece；Pressing component, it is with being capable of edge
The mode of depth direction movement is configured at above-mentioned groove portion, is fixed on the situation of the upper surface of above-mentioned magnetic pole piece in above-mentioned working substance
Under, with respect to above-mentioned working substance lower surface with the power less to the absorption affinity of above-mentioned working substance than above-mentioned magnetic pole piece by above-mentioned work
Thing presses direction pressing towards the direction in opposite direction with above-mentioned absorption；Force application part, it is pressed along above-mentioned to above-mentioned pressing component
Pressure direction force, so that above-mentioned pressing component presses the above-mentioned following table of above-mentioned working substance with the above-mentioned power less than above-mentioned absorption affinity
Face；And guide member, it supports above-mentioned pressing component, and the above-mentioned depth direction along above-mentioned groove portion guides above-mentioned pressing component simultaneously
And limit the direction movement that above-mentioned pressing component extends towards the above-mentioned groove portion in above-mentioned panel.
So, the press section of the lower surface pressing working substance along pressing direction is configured in the groove portion being formed at panel upper surface
Part.Pressing component to be carried out to the force of pressing component pressed through force application part to the lower surface of working substance.Now, press
Part guided member is along the depth direction guiding of groove portion, and the movement in the direction extending towards the groove portion in panel is limited.
Therefore, even if pressing component is exerted a force along pressing direction by force application part, without the worry side of pressing component and the side of groove portion
Face presses securely.Thus, without worry force application part towards pressing component pressing direction active force due to pressing component
Side contact with the side of groove portion is consumed and reduces.Therefore, by pressing component the lower surface to working substance pressing, press
Frictional force between the upper surface of splenium part and the lower surface of working substance improves, when being processed to working substance, working substance
Can be held in well on panel.
Compound grinding machine as other embodiments of the present invention has: turntable, and it can rotate around rotation axiss；Many
Individual fast headstock, they are respectively arranged on the circumference centered on above-mentioned rotation axiss of above-mentioned turntable, and having can be around flat
The working-spindle of the main shaft rotation in above-mentioned rotation axiss for the row；Multiple holding meanss, they are arranged at multiple above-mentioned work masters
Axle, is able to keep above-mentioned working substance；And multiple emery wheel, they are respectively with being capable of relative movement with respect to above-mentioned turntable
Mode arrange, above-mentioned working substance is conveyed successively by the rotation of above-mentioned turntable, thus above-mentioned working substance be positioned correspond to
Each grinding position of rotation in the case of, the corresponding above-mentioned working substance of grinding, above-mentioned holding meanss are above-mentioned magnechucks.
So, it is operated in continuous several times in the holding meanss of compound grinding machine of the grinding of thing and apply above-mentioned electric magnetic card
Disk, thus working substance work in-process will not deviate on panel and being capable of stably grinding.Thus, the machining accuracy of working substance carries
High.
By the detailed description referring to the drawings embodiments of the present invention example being carried out, the present invention above-mentioned and its
He can become more fully apparent feature and advantage, and wherein, identical reference represents identical key element.
Brief description
Fig. 1 is the sketch being monolithically fabricated of the compound grinding machine representing present embodiment.
Fig. 2 is the top view of turntable that possesses of compound grinding machine of Fig. 1.
Fig. 3 is the sectional view of the e-e direction of arrow of the turntable of Fig. 2.
Fig. 4 is the axonometric chart of the magnechuck of first embodiment.
Fig. 5 is the top view of the magnechuck of first embodiment.
Fig. 6 is the sectional view of the f-f direction of arrow of the magnechuck of the Fig. 5 of the state being fixed with working substance.
Fig. 7 is the sectional view of the h-h direction of arrow of the magnechuck of the Fig. 5 of the state being fixed with working substance.
Fig. 8 a is the first figure of the state that compound grinding machine is described.
Fig. 8 b is the second figure of the state that compound grinding machine is described.
Fig. 8 c is the 3rd figure of the state that compound grinding machine is described.
Fig. 8 d is the 4th figure of the state that compound grinding machine is described.
Fig. 8 e is the 5th figure of the state that compound grinding machine is described.
Fig. 8 f is the 6th figure of the state that compound grinding machine is described.
Fig. 8 g is the 7th figure of the state that compound grinding machine is described.
Fig. 9 is the sectional view of the f-f direction of arrow of the magnechuck of the Fig. 5 of the state that working substance is not fixed.
Figure 10 is the sectional view of the h-h direction of arrow of the magnechuck of the Fig. 5 of the state that working substance is not fixed.
Figure 11 is comparable to the sectional view of the second embodiment of Figure 10.
Specific embodiment
Hereinafter, each holding meanss 61,62,63,64 to the magnechuck of the first embodiment that will be equivalent to the present invention
The situation being applied to compound grinding machine 1 illustrates, with the outer ring wa to the bearing as working substance w for the above-mentioned compound grinding machine 1
And inner ring wb carries out multiple grindings.Additionally, in Fig. 1, orthogonal direction on horizontal plane is set to x-axis direction and y-axis
Direction, the direction orthogonal with x-axis direction and y-axis direction is set to z-axis line direction.As shown in figure 1, compound grinding machine 1 has
Standby lathe 2, lathe 2 possesses turntable 5, pillar 3a, 3b, 3c and can by omit the drive mechanism that illustrate and around putting down
The turning arm 3d of the zd axis rotation in z-axis line direction for the row.
Turntable 5 is configured to by the drive mechanism 51 shown in Fig. 3 around the c-axis line (rotation parallel to z-axis line direction
Shaft axis) rotation.As shown in Figure 1 and Figure 2, on turntable 5, on the same circumference centered on c-axis line angularly between
(90 degree of interval) is provided with 4 holding meanss 61～64 (magnechuck describes in detail afterwards).As shown in figure 3, keeping dress each
Put 61～64 and be separately installed with fast headstock 81～84.Wherein, illustrate only holding meanss 61 and fast headstock as representative in Fig. 3
81.Here each holding meanss 61～64 are identical devices, and fast headstock 81～84 is also identical fast headstock.Fast headstock 81 possesses
Spindle main body 811 and working-spindle 812.Working-spindle 812 is arranged to: can be by being built in province's sketch map of spindle main body 811
The drive mechanism shown and around g axis (main shaft) rotation parallel to c-axis line direction, and project from the upper end of spindle main body 811.
It is fixed with holding meanss (showing holding meanss 61 in Fig. 3) in the upper end of working-spindle 812.
The turntable 5 configuring each holding meanss 61～64 extends through and is provided with through hole 52.And, fast headstock 81
Spindle main body 811 fix at turntable 5 back side corresponding with each through hole 52, working-spindle 812 insertion of fast headstock 81
It is installed on each through hole 52.Each holding meanss 61～64 by magnetic force attract outer ring wa or inner ring wb (working substance w) and by its
It is held in the upper surface of panel, rotate around g axis together with working-spindle 812.
The holding meanss that outer ring wa or inner ring wb is located at left side on the paper of Fig. 2 (are holding meanss in the state of Fig. 2
61, replaced due to the rotation of turntable 5.Similarly hereinafter.) move into, the holding meanss (shape of Fig. 2 of downside is located at from the paper of Fig. 2
It is holding meanss 64 under state, replaced due to the rotation of turntable 5.Similarly hereinafter.) take out of.Outer ring wa or inner ring wb move into
And take out of and carried out by the robot that omission illustrates.Robot can be in the central axis making outer ring wa or inner ring wb and holding dress
Put 61 center of rotation consistent in the state of move into outer ring wa or inner ring wb.Additionally, outer ring wa or inner ring wb move into
And take out of and can also be carried out by operator, the above-mentioned center para-position in the case of being somebody's turn to do is carried out using fixture etc..
Turntable 5 to convey outer ring wa or inner ring wb along the predetermined angular that turns clockwise of Fig. 2, is described in detail later.And,
In fig. 2, in the holding meanss 61 positioned at left side, carry out outer peripheral face in the case that the working substance w being moved to is outer ring wa and grind
Cut.In addition, carrying out inner peripheral surface grinding in the case that the working substance w being moved to is inner ring wb.In the holding meanss positioned at upside
62, the grinding carrying out the rail groove wag to the inner peripheral surface being arranged at outer ring wa is outer race track groove face grinding.
In addition, in the holding meanss 63 positioned at right side, carrying out grinding of the rail groove wbg to the outer peripheral face being arranged at inner ring wb
Cut i.e. inner race track groove face grinding.And, in the holding meanss 64 positioned at downside, the track to the inner peripheral surface being arranged at outer ring wa
Groove wag carries out outer race track groove face microstoning grinding, or in the rail groove wbg of the outer peripheral face being arranged at inner ring wb is carried out
Circle track groove face microstoning grinding, then takes out of.Additionally, in the following description, in turntable 5, the position in above-mentioned left side
Put and refer to side face grinding position pp, the position of above-mentioned upside refers to outer ring grinding position po, and the position on above-mentioned right side refers to inner ring
Grinding position pi, the position of above-mentioned downside refers to microstoning grinding position pb.
Pillar 3a, 3b, 3c can be by drive mechanism drive mechanism 3a of pillar 3a (Fig. 1 illustrate only), respectively along flat
Row moves back and forth (advance and retreat) in the xa axis direction in x-axis direction, xb axis direction, xc axis direction.As shown in figure 1, each
The side of pillar 3a, 3b, 3c possesses respectively can be by drive mechanism 41a, 41b, 41c respectively along parallel to z-axis line direction
Za axis direction, zb axis direction, zc axis direction lifting (advance and retreat) emery wheel platform 4a, 4b, 4c.Each emery wheel platform 4a, 4b, 4c
Possess respectively can by drive mechanism 91a, 91b, 91c rotating around za axis (emery wheel axis), around zb axis (emery wheel axis),
Rotary-type emery wheel 9a, 9b, 9c around zc axis (emery wheel axis) rotation driving.Each emery wheel 9a, 9b, 9c are respectively held in court
Holding shaft 92a, 92b of lower section extension, the lower end of 92c.
So that each emery wheel 9a, 9b, 9c can be respectively relative to side face grinding position pp, outer ring grinding position po, inner ring grind
Cut the mode of position pi advance and retreat, each pillar 3a, 3b, 3c are configured on lathe 2.Emery wheel 9a carries out the outer peripheral face grinding of outer ring wa
Or the inner peripheral surface grinding of inner ring wb, so for example using cubic boron nitride (cbn) emery wheel.In addition, emery wheel 9b,
9c carries out inner race track groove face grinding (outer peripheral face) of outer race track groove face grinding (inner peripheral surface) of outer ring wa, inner ring wb, so
For example using alundum wheel.
Turning arm 3d possesses can be along the ze axis direction liter parallel to z-axis line direction by omitting the drive mechanism illustrating
Fall and the emery wheel 9d of the monolithic type that can rotate around ze axis (emery wheel axis).Emery wheel 9d is with the grinding portion of emery wheel 9d towards vertically
Mode in the direction of ze axis is held in from the bottom of holding shaft 92d that the front end of turning arm 3d extends downwards
Side face.Emery wheel 9d carries out the outer race track face microstoning grinding of the inner peripheral surface of outer ring wa or the inner ring of the outer peripheral face of inner ring wb
Orbital plane microstoning grinding, so for example using cbn emery wheel.In addition it is also possible to replace monolithic type with rotary-type emery wheel
Emery wheel 9d.
Next, each holding meanss 61～64 of the magnechuck as the present invention to be described with reference to Fig. 4～Fig. 7.As Fig. 4
Shown in～Fig. 7, holding meanss 61～64 possess magnechuck main body 170, pressing component 180, multiple spring 183 (quite respectively
In force application part) and two guide members 190,191.Additionally, holding meanss 61～64 are also equipped with solenoid etc., due to being
Known, so omitting the detailed description of its structure and action.In addition, Fig. 4 illustrate only a part pressing component 180 with
And guide member 190,191.
Magnechuck main body 170 is for example formed as bottom being circular panel 171 as upper by the magnetic material of ferrum system
Side have bottom tube-like.As shown in Figure 4, Figure 5, the upper surface of panel 171 possesses magnetic pole piece 172 and groove portion 173.Magnetic pole piece 172 exists
On panel 171 along panel 171 circumference (being equivalent to prescribed direction) be arranged with multiple.In the present embodiment, be formed as fan-shaped
8 magnetic pole pieces 172 equally spaced arrange in the circumferential around the g axis (main shaft) of panel 171.The upper table of 8 magnetic pole pieces 172
Face is highly all identical.Additionally, following be referred to as holding face 172a by the upper surface of magnetic pole piece 172.If 8 magnetic pole pieces 172 are by magnetic
Change, then circumferentially form s pole, n pole (with reference to Fig. 5) in order.In addition, groove portion 173 is adjacent by the circumferential array in panel 171
Magnetic pole piece 172 between recess formed in the way of along the radially extending of panel 171.
As shown in figure 5, the center (g axis) that the width of groove portion 173 is formed as from panel 171 broadens to periphery.Additionally, simultaneously
It is not limited to which, the width of groove portion 173 can also be parallel to periphery from the center (g axis) of panel 171.In addition, groove
The center (g axis) that the width in portion 173 can also be formed as from panel 171 narrows to periphery.In addition, magnetic pole piece 172 and groove
The quantity in portion 173 can be less than 8 it is also possible to arrange more than 8.
As shown in fig. 6, groove portion 173 possesses side 173a, 173a and bottom surface 173b.As described above, groove portion 173 is along magnetic pole
The side in portion 172 broadens to periphery from the center (g axis) of panel 171, and is formed as radial on panel 171.In addition, such as
Shown in Fig. 7, groove portion 173 is formed as: throughout the total length of the centrally directed radial outside from panel 171, makes upper from magnetic pole piece 172
The distance (depth) of surface to bottom surface 173b is certain.The part being impaled by groove portion 173 becomes space, so being non-magnetic region.
As shown in fig. 7, the bottom surface 173b of the groove portion 173 possessing in magnechuck main body 170 is fixed with hexahedron
The inner side fixed part 174 of shape and outside fixed part 175.Now, fixing method does not limit, but in the present embodiment,
It has been protrusively provided protuberance respectively in the lower surface of inner side fixed part 174 and outside fixed part 175, each protuberance has been pressed into
Each embedded hole of setting on the 173b of bottom surface.Inner side fixed part 174 is fixed in the bottom of immediate vicinity in the radially inner side of panel 171
On the 173b of face.On the bottom surface 173b of radial outside that outside fixed part 175 is fixed in panel 171.From inner side fixed part 174 with
And the upper surface of outside fixed part 175 is internally formed with female thread 174a, 175a.
Pressing component 180 is formed by nonmagnetic material.In addition, pressing component 180 (is equivalent to groove portion along the radial direction of panel 171
The direction of 173 extensions) extend formation, in groove portion 173, configuration is between inner side fixed part 174 and outside fixed part 175.This
Outward, in the following description, radially refer to the radial direction of panel 171 in case of no particular description.Pressing component 180 is to join
The mode closing the shape of each groove portion 173 being respectively formed between adjacent each magnetic pole piece 172 is formed and embedding with each groove portion 173
Close.
As shown in Figure 6, Figure 7, pressing component 180 possesses most surface part 181 and supporting mass 182.Supporting mass 182 possesses
Hold phosphor bodies 182a, medial end 182b and the (reference of outboard end 182c for linking each guide member 190,191 respectively
Fig. 7).Medial end 182b and outboard end 182c respectively from the radially opposite sides of supporting phosphor bodies 182a towards radial outside or
Person's radially inner side projects and is formed.Upper surface and the medial end 182b of supporting phosphor bodies 182a and outboard end 182c each
Upper surface is parallel to each other.From the upper surface of medial end 182b and outboard end 182c to lower surface, female thread is all insertion
Formed.
The upper surface of medial end 182b and outboard end 182c is arranged at and more leans on than the upper surface of most surface part 181
The relatively low position of the bottom surface 173b side of groove portion 173.Additionally, as shown in fig. 6, panel 171 circumference, the two of groove portion 173
Rule are possessed between each side 180d, 180e of side 173a, 173a and the pressing component 180 being opposite to each side 173a, 173a
Fixed clearance t.The clearance t of regulation is set to move along the depth direction (above-below direction of Fig. 6) of groove portion 173 in pressing component 180
When dynamic, side 180d, 180e can be moved in the way of not contacted with side 173a, 173a of groove portion 173.
Pressing component 180 is adsorbed and fixing situation by the holding face 172a of magnetic pole piece 172 by magnetic force in working substance w
Under, lower surface to working substance w, with absorption affinity fmag (magnetic attraction to working substance w more produced than the magnetization of magnetic pole piece 172
Power) little pressing force fg by working substance w towards with adsorb direction (pressing direction) pressing (fmag ＞ fg) in opposite direction.Therefore,
As shown in Figure 6, Figure 7, possess n between the lower surface and the bottom surface 173b of groove portion 173 of pressing component 180 (in this embodiment party
It is 5 in formula) spring 183 (force application part).Pressing component 180 is total by each counteracting force of each spring 183 of being compressed
Press towards the direction (pressing direction) in opposite direction with absorption with by working substance w.That is, pressing force fg is equal to a spring 183
Pressing force fg × n (fg=fg × n).In present embodiment, as shown in Figure 5, Figure 7, spring 183 from the center of panel 171 to
Radial outside is for example configured with 5.
Most surface part 181 is arranged at the upper surface of supporting phosphor bodies 182a.Most surface part 181 is by the non magnetic bodily form
Become, upper surface is abutted with the lower surface of working substance w.Most surface part 181 is for example by being mixed into ring by the abrasive particle of the particle diameter of regulation
Oxygen tree fat and formed.In detail, most surface part 181 by most surface part 181 upper surface and working substance w lower surface it
Between high bigger than the coefficientoffrictionμ 1 between face 172a and the lower surface of working substance w for the holding of magnetic pole piece 172 of coefficientoffrictionμ 2
Friction material forms (μ 1 ＜ μ 2).But, it is not limited to which or μ 1 >=μ 2.In this case, with most surface
The situation that part 181 is not abutted with the lower surface of working substance w compares, the lower surface of working substance w and holding meanss 61,62,63,64
Upper surface between frictional force also can improve and contact area increase corresponding amount, it is possible to suitably obtaining the present invention's
Effect.
Supporting mass 182 is for example formed by nonmagnetic materials such as sus304, sus316.Supporting mass 182 is installed in most surface part
Between 181 and spring 183.Supporting mass 182 is formed by the hardness high hardness material higher than most surface part 181.By so joining
Put, it is to avoid most surface part 181 is abutted with the direct of spring 183, can effectively prevent the most surface part being caused by spring 183
181 abrasion.But, it is not limited to this embodiment, the hardness of supporting mass 182 can also be the hard of most surface part 181
Below degree.
In addition, the material of supporting mass 182 is not limited to the metals such as sus304, sus316 it is also possible to by resin formation.This
When, the hardness of supporting mass 182 is preferably high than the hardness of most surface part 181.However, as described above, the hardness of supporting mass 182
Can be below the hardness of most surface part 181.As long as additionally, pressing component 180 can be suitable along depth direction in groove portion 173
Freely mobile, then in side 180d, 180e of pressing component 180 side of a side and opposed groove portion 173 side 173a
Between can also somewhat contact.
Spring 183 (force application part) is for example formed by nonmagnetic materials such as sus304, sus316.In the present embodiment, bullet
Spring 183 is multiple (n) leaf spring comprising wave washer.As described above, spring 183 is between supporting mass 182 and bottom surface 173b
Configure number in need (n).And, it is adsorbed being fixed on the holding face 172a of magnetic pole piece 172 in working substance w by magnetic force
When, most surface part 181 is abutted with the lower surface of working substance w, is applied to this lower surface with desired pressing force fg (=fg × n)
Power.Additionally, in the present embodiment, as an example, spring 183 is respectively joined between supporting mass 182 and bottom surface 173b respectively
It is equipped with 5.
Guide member 190,191 is for example formed by sk material (jisg4802), is of similar shape.As Fig. 5, Fig. 7, figure
Shown in 10, guide member 190,191 is created as the lamellar part of the cubic shaped of thinner thickness.And, guide member
190th, 191 by long side direction along panel 171 radial direction (groove portion 173 extend direction) extend in the way of configure.Guide member
190th, 191 be in the tensile force of the long side direction size that is applied in regulation extending can in elastic deformation domain elastic deformation
Leaf spring.Additionally, in the present embodiment, guide member 190,191 uses in the elastic deformation domain of bearing of trend.In guiding
The long side direction both ends of part 190,191 are separately provided for inserting the through hole of the axle portion of bolt b1～b4 described later.
Guide member 190 will be arranged at the medial end 182b of pressing component 180 and is arranged at groove portion using bolt b1, b2
173 inner side fixed part 174 links and supports pressing component 180.In addition, guide member 191 will be arranged at using bolt b3, b4
Outboard end 182c of pressing component 180 is linked with the outside fixed part 175 being arranged at groove portion 173 and supports pressing component 180.
Now, as shown in Figure 10, do not pass through magnetic-adsorption in the case of the holding face 172a of magnetic pole piece 172 in working substance w, press section
Part 180 becomes the state of the upper end of spring 183 being placed in free long status.In such a state, guide member 190,
191 by make the planar portions of guide member 190,191 parallel to the bottom surface 173b of groove portion 173 in the way of, solid by bolt b1～b4
Due to medial end 182b, inner side fixed part 174, outboard end 182c and outside fixed part 175.
So, the consolidating of the medial end 182b of pressing component 180 and outboard end 182c and magnechuck main body 170
Fixed inner side fixed part 174 and outside fixed part 175, link via guide member 190,191 and fix.Thus, guide member
190th, 191 from radially (direction that groove portion 173 extends) two-side supporting pressing component 180, and the depth direction along groove portion 173 guides,
And limit pressing component 180 well towards the circumference (orientation of magnetic pole piece 172) of panel 171 and the movement of radial direction.
The magnechuck (holding meanss 61,62,63,64) so constituting passes through to being wound in magnechuck main body 170
Coil (the omitting diagram) energising of magnetic pole steel (omit diagram) and so that magnetic pole piece 172 is magnetized.Thus, will be carried using magnetic force
The working substance w being placed on the most surface part 181 of pressing component 180 is attracted on the 172a of holding face, by the lower surface of working substance w
It is close to fixing (with reference to Fig. 6, Fig. 7) with the holding face 172a of magnetic pole piece 172.Now, pressing component 180 (most surface part 181)
It is pressed into the lower surface of working substance w, be accommodated in groove portion 173.
As shown in figure 1, compound grinding machine 1 possesses control device 30, as the functional structure of control device 30, carry out pillar
The conveying control of 3a, 3b, 3c, the elevating control of emery wheel platform 4a, 4b, 4c, the Spin Control of turntable 5, fast headstock 81～84
The control of attraction of rotation and holding meanss 61～64, the Spin Control of emery wheel 9a, 9b, 9c, the rotation of turning arm 3d and emery wheel
The rotation of 9d and elevating control and data, the record of program etc..Control device 30 according to control data set in advance,
Control each device, implement multiple grinding operations.
Next, as the grinding of multiple working substance w, with reference to Fig. 2 and Fig. 8 a～Fig. 8 g to the outer ring wa carrying out bearing
Outer peripheral face grinding, the inner peripheral surface grinding of outer race track face grinding, outer race track face microstoning grinding and inner ring wb, inner ring
The action of the compound grinding machine 1 of orbital plane grinding and inner race track face microstoning grinding illustrates.Here, compound grinding machine 1
In, the state (state shown in Fig. 2, Fig. 8 a) that holding meanss 61 are located in side face grinding position pp is set to original state,
The position of rotation of turntable 5 now is set to 0 degree of reference position.
First, initial outer ring waa is attracted to be fixed on holding meanss 61 by control device 30 using the magnetic attraction of magnetic
The holding face 172a (reference picture 8a) of magnetic pole piece 172.And, control device 30 is according to outer peripheral face grinding programme-control outer ring waa
Outer peripheral face grinding (reference picture 8a).
Now, for the outer peripheral face of grinding outer ring waa, emery wheel 9a is pressed on the outer peripheral face of outer ring waa.Thus, outer ring
Waa is subject to very big grinding resistance in normal direction and tangential direction in the contact with emery wheel 9a.Holding meanss 61 need
It is subject to so big grinding resistance also will not move on panel (keeping face 172a) even if being fixed to outer ring waa from emery wheel 9a
Dynamic.The purpose of the present invention is to make holding meanss 61 produce very big fixing force (absorption affinity) so that outer ring in this case
Waa does not move on panel.In addition, in each grinding of the inner peripheral surface to outer ring wa and each track groove face, or to inner ring wb
Each grinding of outer peripheral face, inner peripheral surface and each track groove face in, outer ring wa or inner ring wb is same as described above, also from each emery wheel
It is subject to very big grinding resistance.It is therefore an objective to make holding meanss 61～64 produce enough fixing forces (absorption affinity) so that i.e.
Make by such grinding resistance, outer ring wa or inner ring wb also (keeps face 172a) not on the panel of holding meanss 61～64
Mobile.Additionally, outer ring wa or inner ring wb is fixed on holding meanss by the absorption affinity that the magnetic using present embodiment is described in detail in detail afterwards
61～64 details.
Next, after the outer peripheral face grinding of outer ring waa terminates, control device 30 makes turntable 5 ratate 90 degrees (reference
Fig. 8 b).Thus, holding meanss 61 are located in outer ring grinding position po, and holding meanss 64 are located in side face grinding position pp.
And, initial inner ring wba is installed on holding meanss 64 (reference picture 8c figure) by control device 30.Now, with holding meanss 61
Outer ring waa identical, inner ring wba is fixed on the holding face 172a of the magnetic pole piece 172 of holding meanss 64 by the magnetic attraction of magnetic.
And, control device 30 according to the inner peripheral surface grinding of inner peripheral surface grinding programme-control inner ring wba, and according to outer ring
Outer race track groove face grinding (reference picture 8c) of track groove face grinding programme-control outer ring waa.Above-mentioned control is carried out simultaneously.This
Outward, after, for holding meanss 62,63, outer ring wa or inner ring wb are fixed on holding meanss 64 using the absorption affinity of magnetic
Magnetic pole piece 172 holding face 172a.
Next, control device 30 is tied in the inner peripheral surface grinding of inner ring wba and the outer race track groove face grinding of outer ring waa
After bundle, turntable 5 is made to rotate 180 degree (reference picture 8d).Thus, holding meanss 61 are located in microstoning grinding position
pb.Holding meanss 64 are located in inner ring grinding position pi, and holding meanss 62 are located in side face grinding position pp.In addition, protecting
The state holding the sky that device 63 is not adsorbed with outer ring wa and inner ring wb is located in outer ring grinding position po.
Next, control device 30 utilizes magnetic force that next outer ring wab is fixed holding meanss 62 (reference picture 8e).And,
Control device 30 is according to the outer peripheral face grinding of outer peripheral face grinding programme-control outer ring wab.In addition, control device 30 is according to inner ring rail
The inner race track groove face grinding of road groove face grinding programme-control inner ring wba.And, control device 30 grinds according to outer ring microstoning
Cut outer race track groove face microstoning grinding (reference picture 8e) of programme-control outer ring waa.Above-mentioned control is carried out simultaneously.
Next, control device 30, after the outer ring microstoning grinding terminating outer ring waa, makes emery wheel 9d to position of readiness
Keep out of the way.And, control device 30 releases the magnetic adsorbability of holding meanss 61, and outer ring waa is taken out (reference picture from holding meanss 61
8e).
Next, control device 30 is tied in the outer peripheral face grinding of outer ring waa and the inner race track groove face grinding of inner ring wba
After bundle, turntable 5 is made to ratate 90 degrees (reference picture 8f).Thus, holding meanss 61 are located in side face grinding position pp, keep
Device 62 is located in outer ring grinding position po, and holding meanss 64 are located in microstoning grinding position pb.And, keep dress
The state putting 63 skies not being adsorbed with outer ring wa and inner ring wb is located in inner ring grinding position pi.
Next inner ring wbb is fixed on holding meanss 61 (reference picture 8g) using magnetic force by control device 30.And, control dress
Put 30 according to the inner peripheral surface grinding of inner peripheral surface grinding programme-control inner ring wbb.In addition, control device 30 is according to outer race track groove face
Outer race track groove face grinding (inner peripheral surface) of grinding programme-control outer ring wab.And, control device 30 is according to inner race track groove face
Inner race track groove face microstoning grinding (outer peripheral face) (reference picture 8g) of microstoning grinding programme-control inner ring wba.Above-mentioned
Control and carry out simultaneously.
Next, control device 30 is after the inner ring microstoning of inner ring wba terminates, emery wheel 9d is made to move back to position of readiness
Keep away.And, control device 30 releases the magnetic adsorbability of holding meanss 64, and inner ring wba is taken out (reference picture from holding meanss 64
8g).
Next, describing the effect of holding meanss 61～64 (magnechuck) in detail.As representing in explanation, to utilization
Outer ring waa is attracted to be fixed on the holding of the magnetic pole piece 172 of holding meanss 61 (magnechuck) by the absorption affinity (magnetic attraction) of magnetic
The situation of face 172a illustrates.
First, illustrate that outer ring waa is not placed in the state of the holding face 172a of magnetic pole piece 172.In outer ring, waa does not have
In the state of being placed on the holding face 172a of magnetic pole piece 172, constitute most surface part 181 and the supporting of pressing component 180
Body 182 and spring 183 (force application part), guide member 190,191 are configured to the shape shown in Fig. 9, Figure 10 in groove portion 173
State.In present embodiment, for example respectively it is configured with 5 springs 183 (with reference to Fig. 5, Figure 10) in a groove portion 173.Thus, most surface
Part 181 is from somewhat prominent (the size l) with reference to Fig. 9, Figure 10 of opening up side of groove portion 173.This be due to spring 183 not by
Compress and be in free height (freely growing) state.E.g. tens of μm of the size that the opening from groove portion 173 now projects
～hundreds of μm about.But, it is not limited to this embodiment, as long as from prominent size l of the opening of groove portion 173 in working substance w
Be adsorbed on holding meanss 61 holding face 172a when, pressing component 180 can be accommodated in groove portion 173 completely, then permissible
Arbitrarily it is set as any size.
Now, as shown in Figure 10, the bottom surface 173b of the upper surface (plane) of guide member 190,191 and groove portion 173 is substantially
Parallel.That is, guide member 190,191 is neither to produce bending stress nor the free length producing the tensile stress towards bearing of trend
State.
Next, being energized the coil (omitting diagram) being wound in magnetic pole steel (omitting diagram) by magnetic pole piece 172 magnetic
Change.Thus, the underrun magnetic force of outer ring waa attracted the holding face 172a of each magnetic pole piece 172, the lower surface of outer ring waa
It is close to be fixed on each holding face 172a (with reference to Fig. 6, Fig. 7).
So, the lower surface in outer ring waa is fixed on by the absorption of magnetic force on the holding face 172a of magnetic pole piece 172
In the case of, the lower surface of outer ring waa will be from the most surface part that the opening upwards side of groove portion 173 is prominent before absorption affinity produces
181 upper table faced downwards press and move it.And, the upper surface of most surface part 181 becomes phase with keeping face 172a
Same face height.It is accompanied by this, the upper end of the spring 183 (force application part) abutting with the lower surface of supporting mass 182 is via
Surface elements 181, supporting mass 182 are pressed downwards, towards amount of bow δ (=l) of compression direction bending regulation.Now, if will
The spring constant of one spring 183 is set to k, then pressing force fg of each spring 183 is fg=k δ.Thus, altogether it is configured with n
Individual spring 183 by the use of pressing force fg (=fg × n) of the counteracting force as bending, by outer ring waa towards and absorption direction phase
Anti- direction pressing.
Now, as shown in fig. 7, pressing component 180 is due to being fixed on the effect of the guide member 190,191 of radially opposite sides,
Move by power in a balanced way and towards the direction of the bottom surface 173b of groove portion 173 from radially opposite sides.It is accompanied by this, guide member 190,
191 balancedly flexural deformations in elastomeric domain shown in Fig. 7, and in elastomeric domain, balancedly extend along bearing of trend, generation is drawn
Stretch stress p.So deforming in a balanced way by guide member 190,191, pressing component 180 is put down in the depth direction of groove portion 173
It is directed and stably moves to the direction of the bottom surface 173b of groove portion 173 weighing apparatus.In addition, in such a state, pressing component
180 also utilize guide member 190,191 to limit the movement of radial direction and circumference.In other words, pressing component 180 is due to from two ends
Guide member 190,191 effect, during depth direction (pressing direction) is mobile in the plane parallel with bottom surface 173b
Limited with occupying a good place.
Therefore, side 180d, 180e of pressing component 180 is mobile very big, with groove in the plane parallel with bottom surface 173b
Side 173a, the 173a in portion 173 abut securely, without worry multiple springs 183 to pressing component 180 pressing force upward
Fg can reduce.Thus, the most surface part 181 of pressing component 180 utilizes pressing force fg to press the lower surface of outer ring waa, makes outer
Frictional force between the lower surface of circle waa and most surface part 181 increases, and keeps outer ring waa well.
Further, since the flexural deformation of guide sections part 190,191 and the counteracting force stretching deformation, pressing component
180 have situation about being exerted a force from guide member 190,191 towards pressing direction.Now, pressing force fg for spring 183 (=
Fg × n) for, the pressing force of guide member 190,191 is taken into account row operation of going forward side by side.But, because explanation becomes
Complexity, so do not consider to carry out based on the pressing force deforming the counteracting force producing of guide sections part 190,191 later
Explanation.
In above-mentioned, pressing force fg is set as magnetization than magnetic pole piece 172 to the outer ring waa (absorption affinity of working substance w)
The little pressing force of fmag (fmag ＞ fg).Therefore, by using magnetic force, outer ring waa is fixed on the 172a of holding face, thus
Surface elements 181 are abutted with the lower surface of outer ring waa, pressing component 180 (most surface part 181, supporting mass 182 and spring
183) reliably it is pressed into and is accommodated in the inside of groove portion 173.
As described above, outer ring waa (frictional force f between working substance w) and holding meanss 61 is obtained by (formula 1) formula.
F=μ 1 × (fmag-n × fg)+μ 2 × n × fg (formula 1),
F: outer ring waa (frictional force between working substance w) and holding meanss 61,
Coefficient of friction between 8 holdings face 172a (upper surface) of μ 1: each magnetic pole piece 172 and the lower surface of outer ring waa,
The absorption affinity to outer ring waa for the magnetization of fmag: magnetic pole piece 172,
Coefficient of friction between 2:8 most surface part 181 of μ and the lower surface of outer ring waa,
The total number of n: spring 183,
fg；The pressing force (load on spring) (fg=k δ) of each spring 183
From above-mentioned (formula 1), in the case of the change of absorption affinity fmag, by changing total number n of spring 183, or
Person changes the spring constant k of composition pressing force fg (load on spring) of each spring 183 or at least one party of amount of bow δ to enter
Row is tackled.And, by make frictional force f regulation value more than in the way of set each numerical value.Additionally, the regulation of frictional force f
Value beforehand through experiment etc. set.
As described above, being not only holding meanss 61, there are the mutually isostructural holding meanss 62～64 with holding meanss 61
In, ((working substance w) is firmly fixed to keep dress working substance w) or inner ring wba outer ring waa also by enough frictional force f
Put each holding face 172a of 61～64 each magnetic pole piece 172.Thus, working substance w initial not from being configured at holding meanss 61～64
Upper surface position deviation, it is possible to accurately carrying out each grinding.
As shown in the above description, the holding meanss 61～64 (magnechuck) according to above-mentioned first embodiment, possess: electricity
Magnetic card disc main body 170, its circular panel 171 upper surface possess the multiple magnetic pole pieces 172 arranging along prescribed direction (circumferential),
And the groove portion 173 being formed between adjacent magnetic pole piece 172, above-mentioned magnechuck main body 170 will using the magnetic force of magnetic pole piece 172
The upper surface of magnetic pole piece 172 is fixed in working substance w, wa, wb absorption；Pressing component 180, it is with can be along depth direction movement
Mode is configured at groove portion 173, in the case that working substance w is fixed on the upper surface of magnetic pole piece 172, with respect under working substance w
Working substance w is pressed towards the direction in opposite direction with absorption by surface with the power less to the absorption affinity of working substance w than magnetic pole piece 172
The pressing of pressure direction；Force application part 183, it is so that pressing component 180 presses the lower surface of working substance w with the power less than absorption affinity
Mode exerts a force towards pressing direction to pressing component 180；And guide member 190,191, they support pressing component 180, along groove
The depth direction in portion 173 guides pressing component 180 and limits pressing component 180 (groove portion 173 extends towards the radial direction of panel 171
Direction) movement.
So, in the groove portion 173 of the upper surface being formed at panel 171, configuration presses the following table of working substance w along pressing direction
The pressing component 180 in face.Pressing component 180 to the lower surface of working substance w pressed through spring 183 (force application part) to pressing
The force of part 180 is carrying out.Now, pressing component 180 guided member 190,191 supporting, along the depth direction of groove portion 173
It is directed, and the movement towards the radial direction of panel 171 is limited.Therefore, when pressing component 180 is configured at groove portion 173, only
Side 180d, 180e of wanting pressing component 180 are not contiguously configured securely with side 173a, 173a of groove portion 173, even if
In the case that pressing component 180 is exerted a force towards pressing direction due to spring 183 (force application part), without worry pressing component
180 side 180d, 180e is firmly pressed on side 173a, 173a of groove portion 173.
Thus, without worry spring 183 (force application part) to pressing component 180 towards pressing direction pressing force fg (=fg
× n) consumed due to side 180d, 180e contact with side 173a, 173a of groove portion 173 of pressing component 180 and reduce.
Therefore, in addition to the frictional force between the lower surface and the panel 171 of holding meanss 61～64 (magnechuck) of working substance w,
Also add the frictional force between the lower surface of working substance w and pressing component 180, so working substance w is fine when grinding is processed
Be held on panel 171.
In addition, according to above-mentioned embodiment, guide member 190,191 limits pressing component 180 towards the circumference of panel 171
The movement in (direction of magnetic pole piece 172 arrangement).Thus, without the upper surface of worry pressing component 180 and the lower surface of working substance w
Circumferentially relative movement and so that surface is mutually worn and torn.
In addition, according to above-mentioned embodiment, radially (direction that groove portion 173 extends) extends formation to pressing component 180, draws
Outboard end 182c of the medial end 182b and outside that lead the inner side of radial direction in pressing component 180 for the part 190,191 will
Pressing component 180 is fixed on magnechuck main body 170.Thereby, it is possible at the lower surface of pressing component 180 and the bottom of groove portion 173
Significantly guarantee between the 173b of face to configure the space of spring 183 (force application part).Press pressing spring therefore, it is possible to widely obtain
The adjustment amplitude of 183 pressing force of pressing component 180, improves versatility.
In addition, according to above-mentioned embodiment, guide member 190,191 is that radially (direction that groove portion 173 extends) extends
And can be in the leaf spring of the direction elastic deformation extending.Thereby, it is possible to the radial direction two supports pressing component in pressing component 180
180, so in the radial direction central authorities keeping face 172a, shadow is subject to without worry magnetic force due to the presence of guide member 190,191
Ring, it is possible to adsorbing working substance w well.
In addition, according to above-mentioned embodiment, the upper surface of the guide member 190,191 of leaf spring is formed at and compares pressing component
180 and working substance w contact surface more leans on the bottom surface 173b side of groove portion 173.Thus, easily exclusion projects upwards from holding face 172a
Part, so without worry working substance w with from keep face 172a project component interference.
In addition, according to above-mentioned embodiment, possessing: the turntable 5 that compound grinding machine 1 can rotate around rotation axiss；Have
Circumference centered on the rotation axiss of turntable 5 is respectively provided with and can rotate around the main shaft parallel to rotation axiss
Working-spindle 812～842 (working-spindle 822,832,842 is not shown) multiple fast headstocks 81～84；It is arranged at work master
Axle 812～842 simultaneously can keep multiple holding meanss 61～64 of working substance w respectively；And be respectively relative to turntable 5 can
Relatively movably arrange and by the rotation of turntable 5 successively transportation work thing w thus be located in corresponding each in working substance w
Multiple emery wheels of grinding corresponding working substance w in the case of grinding position of rotation, holding meanss 61～64 are above-mentioned magnechuck.
So, carry out in continuous several times the holding meanss 61 of the compound grinding machine 1 of the inner ring of bearing and the grinding of outer ring～
The magnechuck of the present invention is applied in 64, thus will not be in face by the working substance w work in-process of grinding resistance in x-y axial plane
Deviate on plate 171 and being capable of stably grinding.Thus, the machining accuracy of inner ring wb and outer ring wa improves.In addition, as work
Thing w, it is also possible to improve processing in the case of processing the multiple parts (being combined into the part of product) needing machining accuracy at the same time
Efficiency (as working substance w, in the case of applying bearing, other compound artifacts etc. such as ball bearing, sliding bearing).
In the above-described first embodiment, guide member 190,191 is made to become plate-shaped member, by guide member 190,191
It is fixed between pressing component 180 and magnechuck main body 170.However, being not limited to this embodiment.As the second embodiment party
Formula, guide member 290 shown in Figure 11,291 can also by bushing 283,283, pin 284,284 constitutes.Additionally, in the second embodiment party
In formula, there is the reference only changed with first embodiment different piece to illustrate, omit the explanation of constant part,
And using with first embodiment in explanation identical reference situation about illustrating.
As shown in figure 11, in this second embodiment, radially (direction that groove portion 173 extends) extends pressing component 280.
It is provided with most surface part 181 in the upper surface of pressing component 280 comprehensively.And, pressing component 280 respectively has at the two ends of radial direction
A standby open pore 281,282 in lower surface opening.In open pore 281,282, as 283,283 points of the bushing of dry type bearing
It is not pressed into each open pore 281,282.In addition, pin 284,284 is by being pressed into thirty years of age of the press-in hole of the bottom surface 173b of groove portion 173
Play setting.And, each pin 284,284 and each bushing 283,283, engaging in the way of relative movement in the axial direction, are constituted
Guide member 290,291.Thus, guide member 290,291 guides pressing component 280 and limits along the depth direction of groove portion 173
Pressing component 280 processed is to the radial direction (groove portion 173 extend direction) of panel 171 and circumference (direction of magnetic pole piece 172 arrangement)
Movement.Thereby, it is possible to expect and first embodiment identical effect.
Additionally, in above-mentioned first, second embodiment, by holding meanss 61～64 (magnechuck) application of the present invention
In compound grinding machine 1, but it is not limited to this embodiment.Holding meanss 61～64 can apply to the holding of arbitrary processing machine
Device.In addition it is not limited to processing machine, the fixing tool as fixed component can apply to arbitrary device.Thus also can
Enough expect identical effect.
In addition, in above-mentioned first, second embodiment, illustrating that most surface part 181 for example mixes in the epoxy
Enter the abrasive particle of the particle diameter of regulation and formed.However, being not limited to this embodiment.Most surface part 181 can be by arbitrary
Part is formed.It is, for example possible to use generally used in the variable-speed motor of automobile clutch plate.Alternatively, it is also possible in various gold
Belong to plate surface setting concavo-convex improving coefficient of friction.In addition, as described above, coefficientoffrictionμ 2 can also be than coefficientoffrictionμ 1
Little.Furthermore, it is also possible to there is no most surface part 181, in this case, make the upper surface of supporting mass 182 direct and working substance w
Lower surface abuts.
In addition, in above-mentioned first, second embodiment, the magnetization of the magnetic pole piece 172 of magnechuck is passed through to being wound in
Magnetic pole to be realized with coil (the omitting diagram) energising of steel (omitting diagram).However, being not limited to this embodiment.Also may be used
Pass through the permanent magnet (omit diagram) in Mobile electromagnetic chuck main body 170 and come with the magnetization of magnetic pole piece 172 being magnechuck
The mode realized.Thus also can obtain identical effect.
In addition, in above-mentioned first, second embodiment, the depth direction along groove portion 173 guides drawing of pressing component 180
The radial direction (direction that groove portion 173 extends) leading part 190,191,290,291 in panel 171 is arranged at pressing component 180,280
Two ends.However, being not limited to this embodiment.Guide member 190,191,290,291 can also be only arranged at radial direction
The end of any one party of pressing component 180,280.Thus it is also possible to fully limit pressing component 180 towards the movement of radial direction.Separately
Outward, the guide member 190,191 (290,291) of an any one party, in guide member 190,191 (290,291), is only set
In the case of, the shifting that baffle plate to be restrained from circumference (direction of magnetic pole piece 172 arrangement) can be set in pressing component 180,280
Dynamic.
In addition, in the above-described 2nd embodiment, illustrate the situation that bushing 283,283 is dry type bearing.However, not
It is defined in this embodiment.As long as with respect to the bearing of the axle towards lateral force direction relative movement for the pin, then can be any
's.Can be for example needle bearing, ball bearing.
Claims (7)
1. a kind of magnechuck, wherein, has:
Magnechuck main body, it possesses the multiple magnetic pole pieces arranging along prescribed direction in panel upper surface and is formed at adjacent institute
State the groove portion between magnetic pole piece, working substance absorption is fixed on described by described magnechuck main body by the magnetic force of described magnetic pole piece
The upper surface of magnetic pole piece；
Pressing component, it is configured at described groove portion in the way of can moving along depth direction, is fixed on institute in described working substance
In the case of stating the upper surface of magnetic pole piece, with respect to described working substance lower surface with than described magnetic pole piece to described working substance
Described working substance is pressed direction pressing towards the direction in opposite direction with described absorption by the little power of absorption affinity；
Force application part, it exerts a force along described pressing direction to described pressing component, so that described pressing component is with than described absorption
The little described power of power presses the described lower surface of described working substance；And
Guide member, it supports described pressing component, along described groove portion described depth direction guide described pressing component and
Limit the direction movement that described pressing component extends towards the described groove portion in described panel.
2. magnechuck according to claim 1, wherein,
Described guide member is configured to limit described pressing component towards the orientation of the plurality of magnetic pole piece in described panel
Mobile.
3. magnechuck according to claim 1, wherein,
The direction that described pressing component is formed as along described groove portion extends extends,
Described guide member is configured to described pressing component in the medial end on the direction that described groove portion extends and outer
At least one party of side end is fixed on described magnechuck main body.
4. magnechuck according to claim 2, wherein,
The direction that described pressing component is formed as along described groove portion extends extends,
Described guide member is configured to described pressing component in the medial end on the direction that described groove portion extends and outer
At least one party of side end is fixed on described magnechuck main body.
5. magnechuck according to claim 4, wherein,
Described guide member be along described groove portion extend direction extend and can be in the plate of the direction elastic deformation of described extension
Spring.
6. magnechuck according to claim 5, wherein,
The upper surface of described leaf spring is formed at the bottom more leaning on described groove portion than the contact surface of described pressing component and described working substance
The position of surface side.
7. a kind of compound grinding machine, has:
Turntable, it can rotate around rotation axiss；
Multiple fast headstocks, they are respectively arranged on the circumference centered on described rotation axiss of described turntable, have energy
Enough working-spindles around the main shaft rotation parallel to described rotation axiss；
Multiple holding meanss, they are arranged at multiple described working-spindles, are able to keep described working substance；And
Multiple emery wheels, they respectively can arrange in the way of relative movement with respect to described turntable, by described turntable
Rotation convey described working substance successively, thus in the case that described working substance is positioned corresponding each grinding position of rotation,
The corresponding described working substance of grinding,
Described holding meanss are the magnechucks any one of claim 1～6.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015140371A JP6575192B2 (en) | 2015-07-14 | 2015-07-14 | Electromagnetic chuck and composite grinding machine equipped with electromagnetic chuck |
| JP2015-140371 | 2015-07-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106346359A true CN106346359A (en) | 2017-01-25 |
| CN106346359B CN106346359B (en) | 2019-11-22 |
Family
ID=57630119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610545936.1A Expired - Fee Related CN106346359B (en) | 2015-07-14 | 2016-07-12 | Magnechuck and the compound grinding machine for having magnechuck |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6575192B2 (en) |
| CN (1) | CN106346359B (en) |
| DE (1) | DE102016112726A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110911296A (en) * | 2018-09-18 | 2020-03-24 | 三星电子株式会社 | Chuck driving device and substrate processing apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6981006B2 (en) | 2017-02-03 | 2021-12-15 | 日本電産株式会社 | motor |
| JP6809310B2 (en) * | 2017-03-14 | 2021-01-06 | 株式会社ジェイテクト | Control method of electromagnetic chuck device and electromagnetic chuck device |
| CN114147254B (en) * | 2021-11-15 | 2023-06-02 | 中电建(西安)港航船舶科技有限公司 | Processing and manufacturing system and manufacturing method for heliostat bearing structural part |
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| JP2005014176A (en) * | 2003-06-27 | 2005-01-20 | Tateno Kikai Seisakusho:Kk | Inner-outer peripheral surface grinding work system of glass disc |
| JP3165203U (en) * | 2010-10-22 | 2011-01-06 | パスカルエンジニアリング株式会社 | Magnetic fixing device |
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| JPS5695578A (en) * | 1979-12-28 | 1981-08-03 | Olympus Optical Co Ltd | Polishing device |
| EP0868975A1 (en) * | 1997-04-04 | 1998-10-07 | Tokyo Seimitsu Co.,Ltd. | Polishing apparatus |
| CN201645225U (en) * | 2010-04-30 | 2010-11-24 | 广东省第二农机厂 | Novel electromagnetic chuck |
| CN103447898A (en) * | 2013-09-06 | 2013-12-18 | 无锡大元机床制造有限公司 | Adjustable electromagnetic chuck |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110911296A (en) * | 2018-09-18 | 2020-03-24 | 三星电子株式会社 | Chuck driving device and substrate processing apparatus |
| CN110911296B (en) * | 2018-09-18 | 2023-07-25 | 三星电子株式会社 | Chuck driving device and substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102016112726A1 (en) | 2017-01-19 |
| CN106346359B (en) | 2019-11-22 |
| JP6575192B2 (en) | 2019-09-18 |
| JP2017019073A (en) | 2017-01-26 |
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