CN106298584A - One removes glue constant temperature system - Google Patents
One removes glue constant temperature system Download PDFInfo
- Publication number
- CN106298584A CN106298584A CN201510297453.XA CN201510297453A CN106298584A CN 106298584 A CN106298584 A CN 106298584A CN 201510297453 A CN201510297453 A CN 201510297453A CN 106298584 A CN106298584 A CN 106298584A
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- glue
- corrosion
- pressurized tank
- deionized water
- adaptor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
The invention belongs to semiconductor crystal wafer remove photoresist field, specifically one removes glue constant temperature system, corrosion-resistant pressurized tank is connected with deionized water source, the deionized water flowed in corrosion-resistant pressurized tank is heated by the heater arranged in corrosion-resistant pressurized tank, and the liquid outlet of corrosion-resistant pressurized tank is connected with deionized water shower nozzle by sleeve pipe；It is provided with glue tube in corrosion-resistant pressurized tank, the one end removing glue tube is connected with the hydraulic coupling tank that removes photoresist, the other end is passed by the liquid outlet of corrosion-resistant pressurized tank, is nested in inside pipe casing, and it is connected to glue shower nozzle, corrosion-resistant pressurized tank and go to remove to be communicated with on glue tube compression pump between glue shower nozzle, compression pump input, the glue tube portion that goes at output two ends are arranged in parallel with sleeve pipe by adaptor.The present invention is completed the heating removing glue by the deionized water after heating, and is incubated with sleeve pipe, it is to avoid remove the heat losses of glue；Deionized water after heating is for cleaning the wafer after removing photoresist, the beneficially dehydration of wafer.
Description
Technical field
The invention belongs to remove photoresist field, specifically one of semiconductor crystal wafer and go to glue constant temperature system
System.
Background technology
At present, in quasiconductor stripping process, for making glue reach the most efficient temperature, logical
Often take the mode of twice heating to going glue to heat, be followed successively by pressurized tank heating with online
Heating, being heated to be going glue entirety to heat of pressurized tank.Owing to going glue mostly to be inflammable and explosive
Chemicals, be susceptible to danger, remove photoresist and need wafer is carried out clearly for removing glue afterwards
Wash；But in order to be prone to dehydration after making wafer cleaning, the most first apply isopropanol
(IPA) it is rinsed, facilitates the dehydration of wafer.Due to the inflammable lower boiling characteristic of IPA,
Cause the danger adding the board that removes photoresist.
Summary of the invention
Need with IPA, wafer to be carried out for after removing the heating state of glue and removing photoresist
And cause causing to increase the problem that the board that removes photoresist is dangerous, it is an object of the invention to provide one and go
Glue constant temperature system.This goes glue constant temperature system to utilize deionized water (DIW) to going glue to enter
Row heating and thermal insulation, ensure that with the DIW after heating removes photoresist simultaneously clean after the dehydration of wafer.
It is an object of the invention to be achieved through the following technical solutions:
The present invention includes remove photoresist hydraulic coupling tank, heater, corrosion-resistant pressurized tank, sleeve pipe, pressure
Pump, remove glue shower nozzle and deionized water shower nozzle, the most corrosion-resistant pressurized tank and deionized water source phase
Connection, the deionized water flowed in this corrosion-resistant pressurized tank sets by described corrosion-resistant pressurized tank
The heater heating put, the liquid outlet of described corrosion-resistant pressurized tank is by sleeve pipe and described deionization
Sprinkler head is connected；Being provided with glue tube in described corrosion-resistant pressurized tank, this goes the one of glue tube
End is connected with the described hydraulic coupling tank that removes photoresist, and the other end is by the liquid outlet of described corrosion-resistant pressurized tank
Pass, be nested in described inside pipe casing, and go glue shower nozzle, described corrosion-resistant pressure described in being connected to
Power tank and go going between glue shower nozzle to be communicated with described compression pump on glue tube, this compression pump is defeated
The glue tube portion that goes entering, exporting two ends is arranged in parallel with described sleeve pipe by adaptor；Described
The source of the gas going glue to be connected by hydraulic coupling tank that removes photoresist with this in hydraulic coupling of removing photoresist tank is pressed into
In described corrosion-resistant pressurized tank remove glue tube in, and by heating after deionized water add
Heat, goes glue to be pumped out by described compression pump to go glue shower nozzle to spray to described after heating, institute
The deionized water stated in sleeve pipe is flowed out by described deionized water shower nozzle.
Wherein: the input of described compression pump, output are respectively arranged at two ends with the first adaptor and second
Adaptor, this second adaptor and described remove glue shower nozzle and go to be provided with between sprinkler head the 3rd
Adaptor, by described corrosion-resistant pressurized tank pass to go glue tube and described sleeve pipe to be all connected to described
The entrance of the first adaptor, described in go glue tube by one of this first adaptor outlet through described
Compression pump is connected to an entrance of the second adaptor, and another outlet of described first adaptor is logical
Cross sleeve pipe and be connected to another entrance of the second adaptor, described in go glue tube and sleeve pipe at second turn
Joint is converged, and is respectively connected to described 3rd adaptor, is connect respectively by the 3rd adaptor
Remove glue shower nozzle described in Zhi and go from sprinkler head；Glue is removed between described first and second adaptor
Manage in parallel with sleeve pipe, at described 3rd adaptor and go going between glue shower nozzle to set on glue tube
There is pressure on-off valve, at described 3rd adaptor and go to be provided with on the pipeline between sprinkler head
Ionized water on-off valve B；
Described bushing outer surface is provided with sleeve pipe external thermal insulation；Described go glue tube at corrosion-resistant pressure
Part in tank is provided with one section of increase and removes the serpentine pipe of glue heat time heating time；Described corrosion-resistant pressure
Tank is provided with and makes the internal uniform agitator of deionized water heating-up temperature；Described corrosion-resistant pressurized tank leads to
Cross pipeline connection and have hands valve；Detection is installed on the described hydraulic coupling tank that removes photoresist and goes the liquid level of adhesive liquid quantity
Sensor, described corrosion-resistant pressurized tank is provided with the temperature sensing of detection deionized water temperature
Device；Described remove photoresist between hydraulic coupling tank and corrosion-resistant pressurized tank remove to be respectively equipped with on glue tube list
To valve and remove glue on-off valve；Described corrosion-resistant pressurized tank passes through deionization water pipe and deionized water
Source is connected, and is respectively equipped with deionized water air relief valve, Pressure gauge and goes on this deionization water pipe
Ionized water on-off valve A.
Advantages of the present invention with good effect is:
1. the present invention completes the heating removing glue, after heating by the deionized water after heating
The glue that goes be incubated in sleeve pipe, it is to avoid go the heat of glue to run off in pipeline；Meanwhile,
Deionized water after heating, for cleaning the wafer after removing photoresist, the beneficially dehydration of wafer, can save
The use of IPA.
2. the present invention saves the use of IPA, improves the safety of resist remover.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of the present invention；
Wherein: 1 is the hydraulic coupling tank that removes photoresist, and 2 is liquid level sensor, and 3 is check valve, and 4 for going
Ionized water air relief valve, 5 is Pressure gauge, and 6 is deionized water on-off valve A, and 7 for going glue break-make
Valve, 8 is hands valve, and 9 is agitator, and 10 is heater, and 11 is corrosion-resistant pressurized tank, 12
For temperature sensor, 13 is sleeve pipe external thermal insulation, and 14 is sleeve pipe, and 15 is the first adaptor,
16 is compression pump, and 17 is the second adaptor, and 18 is the 3rd adaptor, and 19 is pressure on-off valve,
20 is deionized water on-off valve B, and 21 is serpentine pipe, and 22 for removing glue shower nozzle, 23 for go from
Sub-sprinkler head, 24 for removing glue tube, and 25 is deionization water pipe.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings.
As it is shown in figure 1, the present invention includes remove photoresist hydraulic coupling tank 1, heater 10, corrosion-resistant pressure
Power tank 11, sleeve pipe 14, compression pump 16, remove glue shower nozzle 22 and deionized water shower nozzle 23,
On hydraulic coupling of wherein removing photoresist tank 1, liquid level sensor 2 is installed, removes photoresist hydraulic coupling tank for detection
The liquid measure of glue is gone in 1；Hydraulic coupling of removing photoresist tank 1 is connected with source of the gas by pipeline, this enforcement
The source of the gas of example is nitrogen.
Bottom in corrosion-resistant pressurized tank 11 is provided with heater 10, the heater 10 of the present embodiment
It can be electromagnetic oven；Corrosion-resistant pressurized tank 11 is by deionization water pipe 25 and deionized water (DIW)
Source is connected, and is respectively equipped with deionized water air relief valve 4, pressure on this deionization water pipe 25
Table 5 and deionized water on-off valve A6.The deionized water of deionized water source flows into corrosion-resistant pressure
In tank 11, by magnetic field induction eddy heating for heating, apply the use that this kind of method is easy in board,
The convenient temperature controlling deionized water simultaneously；On corrosion-resistant pressurized tank 11, temperature sensing is installed
Device 12, application temperature sensor 12 detects the temperature of the deionized water in corrosion-resistant pressurized tank 11
Degree.Be provided with glue tube 24 in corrosion-resistant pressurized tank 11, this go one end of glue tube 24 by
The inlet of corrosion-resistant pressurized tank 11 passes, and is connected with the hydraulic coupling tank 1 that removes photoresist；Going
Going between glue pressurized tank 1 and corrosion-resistant pressurized tank 11 is respectively equipped with unidirectional on glue tube 24
Valve 3 and remove glue on-off valve 7.Go the glue tube 24 part in corrosion-resistant pressurized tank 11 in
" U " type, it is serpentine pipe 21 that " U " type of being somebody's turn to do is positioned at a section of feed liquor, goes glue through this spiral shell
During coil 21, add flow distance, it is possible to preferably by going of being heated by heater 10 from
Son is to going glue to heat.Go to the other end the going out by corrosion-resistant pressurized tank 11 of glue tube 24
Liquid mouth passes, and is also communicated with sleeve pipe 14, by resistance at the liquid outlet of the most corrosion-resistant pressurized tank 11
The glue tube 24 that goes that corrosion pressurized tank 11 liquid outlet passes is nested in the inside of sleeve pipe 14.
Gone glue tube 24 after compression pump 16 by what corrosion-resistant pressurized tank 11 liquid outlet passed
Being connected to glue shower nozzle 22, sleeve pipe 14 is then connected to deionized water shower nozzle 23, at compression pump 16
Input, output be respectively arranged at two ends with the first adaptor 15 and the second adaptor 17, this is second years old
Adaptor 17 and remove glue shower nozzle 22 and remove to be provided with the 3rd adaptor 18 between sprinkler head 23,
First adaptor 15, second adaptor 17 of the present embodiment and the 3rd adaptor 18 are three
Logical.
Going glue to flow in removing glue tube 24, deionized water is removing glue tube 24 and sleeve pipe
Flow between 14；The sleeve pipe 14 and the inside thereof that connect with corrosion-resistant pressurized tank 11 liquid outlet are embedding
The glue tube 24 that goes passed by corrosion-resistant pressurized tank 11 liquid outlet overlapped is connected to first turn jointly
The same interface of joint 15.Go glue tube 24 by one of the first adaptor 15 outlet with
The input connection of compression pump 16, then it is connected to the second adaptor by the outfan of compression pump 16
One interface of 17, sleeve pipe 14 then by the first adaptor 15 another outlet with second turn
Another orifice of joint 17, then common by the same outlet of the second adaptor 17
It is communicated to the same interface of the 3rd adaptor 18, goes glue tube 24 by the 3rd adaptor 18
An outlet be connected to glue shower nozzle 22, another outlet of the 3rd adaptor 18 is then passed through
Pipeline is connected to deionized water shower nozzle 23；I.e. compression pump 16 input, export two ends remove glue tube
24 parts are by between first and second adaptor 15,17 and first and second adaptor 15,17
Sleeve pipe 14 be arranged in parallel, removing photoresist between corrosion-resistant pressurized tank 11 and the first adaptor 15
The glue tube that goes between liquid pipe and second and third adaptor 17,18 is all nested in sleeve pipe 14,
The outer surface of each section of sleeve pipe 14 is equipped with sleeve pipe external thermal insulation 13, this sleeve pipe external thermal insulation 13
Material can be that polyurethane heat-insulation is cotton.At the 3rd adaptor 18 and go between glue shower nozzle 22
Go glue tube 24 to be provided with pressure on-off valve 19, the 3rd adaptor 18 with go from sprinkler head
Pipeline between 23 is provided with deionized water on-off valve B20；The deionized water break-make of the present embodiment
Valve 6, glue on-off valve 7, pressure on-off valve 19 and deionized water on-off valve B20 is gone to be two
Position two-way valve.
Remove, in hydraulic coupling of removing photoresist tank 1, the nitrogen that glue is connected by hydraulic coupling tank 1 that removes photoresist with this
In what gas source of the gas was pressed in corrosion-resistant pressurized tank 11 removes glue tube 24, and by going after heating
Ionized water heats, and goes glue to pass through compression pump 16 to pump out to removing glue shower nozzle after heating
22 ejections, the deionized water in sleeve pipe 14 is flowed out by deionized water shower nozzle 23.
For making the temperature homogeneous heating of deionized water in corrosion-resistant pressurized tank 11, in corrosion-resistant pressure
Agitator 9 is installed on power tank 11, the deionized water in corrosion-resistant pressurized tank 11 is stirred
Mix；The agitator 9 of the present embodiment is prior art, is stirred for driven by motor stirring rod.
Corrosion-resistant pressurized tank 11 has hands valve 8 also by pipeline connection.
The operation principle of the present invention is:
When the liquid level sensor 2 installed on the hydraulic coupling tank 1 that removes photoresist has detected glue, nitrogen
Gas is by going glue to pass through check valve 3 and removing glue on-off valve 7 and enter in hydraulic coupling tank 1 of removing photoresist
In the serpentine pipe 21 of corrosion-resistant pressurized tank 11；Wherein check valve 3 prevents the backflow of glue,
Go glue on-off valve 7 for controlling to go the break-make of glue.Deionized water is reduced pressure by deionized water
Valve 4 enters in corrosion-resistant pressurized tank 11 with deionized water on-off valve A6, and wherein Pressure gauge 5 is used
In the pressure of monitoring deionized water, the pressure of deionized water air relief valve 4 is facilitated to adjust.Pass through hands
The folding of valve 8 makes to be full of in corrosion-resistant pressurized tank 11 deionized water, right by heater 10
Deionized water in corrosion-resistant pressurized tank 11 heats, and application temperature sensor 12 detects resistance to
The temperature of the deionized water in corrosion pressurized tank 11, when temperature sensor 12 detects corrosion-resistant pressure
When in power tank 11, the temperature of deionized water is less than design temperature, heater 12 continues heating.For
Making the homogeneous temperature of deionized water in corrosion-resistant pressurized tank 11, application agitator 9 is to corrosion-resistant
In pressurized tank 11, deionized water is stirred.When going glue to flow out from corrosion-resistant pressurized tank 11,
Glue tube 24 is gone to be soaked in the deionization equipped with the heating flowed out from corrosion-resistant pressurized tank 11
In the sleeve pipe 14 of water, it is tied with sleeve pipe external thermal insulation 13 in the outside of sleeve pipe 14, for set
Deionized water in pipe 14 is incubated, and prevents scattering and disappearing of heat.Owing to going glue by pressure
Pump 16 is got, for ensureing to go glue temperature to apply the first adaptor 15 and the second adaptor 17
Compression pump 16 is skipped；After going glue to be got by compression pump 16, continue application sleeve pipe 14
It is incubated with the mode of sleeve pipe external thermal insulation 13.When going glue will arrive pressure on-off valve 19,
Apply the second adaptor 18 glue tube 24 will to be gone to separate with the deionized water in sleeve pipe 14.Go
Glue then under the control of pressure on-off valve 19 by going glue shower nozzle 22 to spray, for crystalline substance
The degumming process of circle.Deionized water then passes through to go under the control of deionized water on-off valve B20
Deionized water nozzle 23 flows out, the cleaning after wafer removes photoresist.Wherein, glue is gone only to exist
Hydraulic coupling of removing photoresist tank 1 has nitrogen pressure, goes glue on-off valve 7 to open, and compression pump 16 works,
Can spray removing glue shower nozzle 22 when pressure on-off valve 19 is opened；Deionized water is then wanted
Deionized water on-off valve A6 and deionized water on-off valve B20 opens when, by going simultaneously
Deionized water nozzle 23 flows out.
In stripping process, application goes glue to be removed by the photoresist as etching barrier layer, removes photoresist
Liquid needs to be sprayed at crystal column surface under most highly active temperature conditions, thus completes degumming process.
In the process, for efficiently removing photoresist, go glue must reach most highly active.The most normal
The most highly active temperature removing glue N methyl pyrrolidone (NMP) be 95 DEG C.This
Bright by the way of heating in water bath, complete the heating removing glue.And, removing photoresist after heating
Liquid can be incubated in sleeve pipe 14, it is to avoid goes the heat of glue to run off in pipeline.With
Time, the wafer after cleaning is removed photoresist of the deionized water after heating, the beneficially dehydration of wafer, can
Save the use of IPA.
Claims (10)
1. one kind is removed glue constant temperature system, it is characterised in that: the hydraulic coupling tank (1) that includes removing photoresist,
Heater (10), corrosion-resistant pressurized tank (11), sleeve pipe (14), compression pump (16), remove photoresist
Liquid shower nozzle (22) and deionized water shower nozzle (23), the most corrosion-resistant pressurized tank (11) with go
Ion water source is connected, and flows into the deionized water in this corrosion-resistant pressurized tank (11) by described
Heater (10) heating arranged in corrosion-resistant pressurized tank (11), described corrosion-resistant pressurized tank
(11) liquid outlet is connected with described deionized water shower nozzle (23) by sleeve pipe (14)；
Being provided with glue tube (24) in described corrosion-resistant pressurized tank (11), this removes glue tube (24)
One end be connected with the described hydraulic coupling tank (1) that removes photoresist, the other end is by described corrosion-resistant pressure
The liquid outlet of tank (11) passes, it is internal to be nested in described sleeve pipe (14), and goes described in being connected to
Glue shower nozzle (22), described corrosion-resistant pressurized tank (11) and going between glue shower nozzle (22)
Remove to be communicated with on glue tube (24) described compression pump (16), this compression pump (16) input,
Glue tube (24) part of going at output two ends sets by adaptor is in parallel with described sleeve pipe (14)
Put；Described remove photoresist in hydraulic coupling tank (1) go glue by with this hydraulic coupling tank (1) that removes photoresist
In what the source of the gas being connected was pressed in described corrosion-resistant pressurized tank (11) removes glue tube (24),
And heated by the deionized water after heating, the glue that goes after heating passes through described compression pump
(16) pump out and go glue shower nozzle (22) to spray to described, in described sleeve pipe (14) go from
Sub-water is flowed out by described deionized water shower nozzle (23).
2. as described in claim 1, remove glue constant temperature system, it is characterised in that: described pressure
The input of power pump (16), output are respectively arranged at two ends with the first adaptor (15) and the second switching
Head (17), this second adaptor (17) removes glue shower nozzle (22) with described and go to spray from water
It is provided with the 3rd adaptor (18) between head (23), described corrosion-resistant pressurized tank (11) wears
Go glue tube (24) and the described sleeve pipe (14) that go out all are connected to described first adaptor (15)
Entrance, described in go glue tube (24) by one of this first adaptor (15) outlet through institute
State compression pump (16) and be connected to an entrance of the second adaptor (17), described first adaptor
(5) another outlet is connected to another of the second adaptor (17) by sleeve pipe (14)
Entrance, described in go glue tube (24) to converge at the second adaptor (17) place with sleeve pipe (14),
And it is respectively connected to described 3rd adaptor (18), connect respectively by the 3rd adaptor (18)
Remove glue shower nozzle (22) described in Zhi and go from sprinkler head (23).
3. as described in claim 2, remove glue constant temperature system, it is characterised in that: described
One, go glue tube (24) in parallel with sleeve pipe (14) between two adaptors (15,17),
At described 3rd adaptor (18) and go to remove glue tube (24) between glue shower nozzle (22)
Be provided with pressure on-off valve (19), described 3rd adaptor (18) with go from sprinkler head (23)
Between pipeline be provided with deionized water on-off valve B (20).
4. as described in claim 1,2 or 3, remove glue constant temperature system, it is characterised in that:
Described sleeve pipe (14) outer surface is provided with sleeve pipe external thermal insulation (13).
5. as described in claim 1,2 or 3, remove glue constant temperature system, it is characterised in that:
Described go the glue tube (24) part in corrosion-resistant pressurized tank (11) to be provided with one section of increase to go
The serpentine pipe (21) of glue heat time heating time.
6. as described in claim 1,2 or 3, remove glue constant temperature system, it is characterised in that:
Described corrosion-resistant pressurized tank (11) is provided with and makes the internal uniform agitator of deionized water heating-up temperature
(9)。
7. as described in claim 1,2 or 3, remove glue constant temperature system, it is characterised in that:
Described corrosion-resistant pressurized tank (11) has hands valve (8) by pipeline connection.
8. as described in claim 1,2 or 3, remove glue constant temperature system, it is characterised in that:
Detection is installed on the described hydraulic coupling tank (1) that removes photoresist and removes the liquid level sensor (2) of adhesive liquid quantity,
The temperature sensor of detection deionized water temperature is installed on described corrosion-resistant pressurized tank (11)
(12)。
9. as described in claim 1,2 or 3, remove glue constant temperature system, it is characterised in that:
Described remove photoresist between hydraulic coupling tank (1) and corrosion-resistant pressurized tank (11) remove glue tube (24)
On be respectively equipped with check valve (3) and remove glue on-off valve (7).
10. as described in claim 1,2 or 3, remove glue constant temperature system, it is characterised in that:
Described corrosion-resistant pressurized tank (11) is connected with deionized water source by deionization water pipe (25),
This deionization water pipe (25) is respectively equipped with deionized water air relief valve (4), Pressure gauge (5)
And deionized water on-off valve A (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510297453.XA CN106298584B (en) | 2015-06-02 | 2015-06-02 | One kind removing glue constant temperature system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510297453.XA CN106298584B (en) | 2015-06-02 | 2015-06-02 | One kind removing glue constant temperature system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106298584A true CN106298584A (en) | 2017-01-04 |
| CN106298584B CN106298584B (en) | 2018-09-28 |
Family
ID=57656101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510297453.XA Active CN106298584B (en) | 2015-06-02 | 2015-06-02 | One kind removing glue constant temperature system |
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| Country | Link |
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| CN (1) | CN106298584B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6427717B1 (en) * | 1998-07-02 | 2002-08-06 | Tokyo Electron Limited | Process solution supplying apparatus and fluid passageway opening-closing valve device for process solution supplying apparatus |
| CN101639633A (en) * | 2008-07-29 | 2010-02-03 | 和舰科技(苏州)有限公司 | Supply pipeline of developing solution |
| CN102298276A (en) * | 2010-06-25 | 2011-12-28 | 中国科学院微电子研究所 | Silicon wafer degumming device and method |
| CN103955123A (en) * | 2014-04-11 | 2014-07-30 | 武汉高芯科技有限公司 | Wet photoresist removing liquid and photoresist removing method of wafers after ion implantation |
| CN204007056U (en) * | 2014-08-20 | 2014-12-10 | 中芯国际集成电路制造(北京)有限公司 | A kind of liquid delivery system |
-
2015
- 2015-06-02 CN CN201510297453.XA patent/CN106298584B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6427717B1 (en) * | 1998-07-02 | 2002-08-06 | Tokyo Electron Limited | Process solution supplying apparatus and fluid passageway opening-closing valve device for process solution supplying apparatus |
| CN101639633A (en) * | 2008-07-29 | 2010-02-03 | 和舰科技(苏州)有限公司 | Supply pipeline of developing solution |
| CN102298276A (en) * | 2010-06-25 | 2011-12-28 | 中国科学院微电子研究所 | Silicon wafer degumming device and method |
| CN103955123A (en) * | 2014-04-11 | 2014-07-30 | 武汉高芯科技有限公司 | Wet photoresist removing liquid and photoresist removing method of wafers after ion implantation |
| CN204007056U (en) * | 2014-08-20 | 2014-12-10 | 中芯国际集成电路制造(北京)有限公司 | A kind of liquid delivery system |
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| Publication number | Publication date |
|---|---|
| CN106298584B (en) | 2018-09-28 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |