CN106294126B - The automation formula correctness management method and device of SEN ion injection machine table - Google Patents
The automation formula correctness management method and device of SEN ion injection machine table Download PDFInfo
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- CN106294126B CN106294126B CN201610585587.6A CN201610585587A CN106294126B CN 106294126 B CN106294126 B CN 106294126B CN 201610585587 A CN201610585587 A CN 201610585587A CN 106294126 B CN106294126 B CN 106294126B
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F11/00—Error detection; Error correction; Monitoring
- G06F11/36—Preventing errors by testing or debugging software
- G06F11/3604—Software analysis for verifying properties of programs
Abstract
The invention discloses a kind of automation formula correctness managing device of SEN ion injection machine table and methods, this method comprises: receiving the selection operation of user, selection target board server；After receiving the selection operation of user, is operated according to the user's choice from target machine server and download formula to be checked；Parameter to be checked is collected to each formula using missile attack method, generates parameter report to be checked；Correctness checking is carried out to formula and parameter to be checked, outgoing inspection is as a result, the present invention can not only save manpower when manual inspection automatically to SEN board formula progress Correctness checking, and more can guarantee 100% detection formula mistake, avoid loss caused by formula mistake.
Description
Technical field
The present invention relates to field of manufacturing semiconductor devices, more particularly to a kind of automation journey of SEN ion injection machine table
Formula correctness management method and device.
Background technique
Currently, ion implanting is highly important process procedure in chip manufacturing proces.But the technique is without the image of Buddha
Other techniques are equally monitored online with means such as film thickness, critical dimensions, could when arriving electrical testing once formula is wrong
It was found that will cause heavy losses.So industry common practice are as follows: after formula foundation, engineer is arranged to answer formula
Inspection, to correct formula mistake before using formula.But in view of the numerous complexity with board software of ion implanting formula parameter
Property, engineer's reinspection is also difficult to 100% detection mistake.
Summary of the invention
In order to overcome the deficiencies of the above existing technologies, purpose of the present invention is to provide a kind of SEN ion injection machine tables
Automation formula correctness management method and device, can automatically to SEN board formula carry out Correctness checking, not only save
Manpower when less manpower checks, and more can guarantee 100% detection formula mistake, mistake is strangled to avoid formula before running goods
It is lost caused by mistake.
In view of the above and other objects, the present invention proposes a kind of automation formula correctness pipe of SEN ion injection machine table
Manage device, comprising:
Receiving unit, for receiving the selection operation of user, with selection target board server；
Download unit is requested, operated after the receiving unit receives the selection operation of user according to the user's choice
Formula to be checked is downloaded from target machine server；
Parameter collection unit to be checked is collected parameter to be checked to each formula using missile attack method, is generated to be checked
Look into parameter report；
Formula correctness inspection unit carries out Correctness checking, outgoing inspection result to formula and parameter to be checked.
Further, which includes:
Array definition module, for defining parameter name array to be collected and parameter array to be collected；
Spider module, for traversing formula to be checked line by line；
Judgment module, for judging whether the parameter name of current line is located in parameter name array to be collected；
The parameter value of current line is placed in wait collect ginseng by processing module when the judging result of the judgment module is "Yes"
Number array corresponding position, otherwise enables spider module go to formula next line.
Further, which checks regular way to manage using modularization, automaticly inspects formula
And whether parameter is correct, and knows different parameters using white four colour code of green reddish yellow.
Further, which carries out correctness to formula and parameter to be checked as follows
It checks:
Check formula name；
If formula is non-standard name, with the white indicia formula, and next formula is gone to；
If formula is that standard is named but names wrong, the formula is identified with yellow, and go to next formula；
If formula be standard name and name it is errorless, from formula name be precipitated parameter objectives value, check actual setting value
Whether it is consistent therewith, and checks that formula name is unlisted but needs the parameter that monitors whether correct:
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, used
Red mark wrong parameter and formula name.
Further, which is set to client, uses Distributed C/S structure with board server, which adopts
It is picked platform server with FTP technical battery.
In order to achieve the above objectives, the present invention also provides a kind of automation formula correctness management of SEN ion injection machine table
Method includes the following steps:
Step 1 receives the selection operation of user, selection target board server；
Step 2 operates under target machine server according to the user's choice after receiving the selection operation of user
Carry formula to be checked；
Step 3 collects parameter to be checked to each formula using missile attack method, generates parameter report to be checked；
Step 4 carries out Correctness checking, outgoing inspection result to formula and parameter to be checked.
Further, step 3 further comprises:
Define parameter name array to be collected and parameter array to be collected；
Formula to be checked is traversed line by line, judges whether the parameter name of current line is located in parameter name array to be collected；
If it is, the parameter value of current line is placed in parameter array corresponding position to be collected；If it is not, then going to formula
Next line.
Further, in step 4, regular way to manage is checked using modularization, whether automaticly inspects formula and parameter
Correctly, and using white four colour code of green reddish yellow know different parameters.
Further, step 4 further comprises:
Check formula name；
If formula then goes to next formula with the white indicia formula for non-standard name；
If formula is that standard is named but names wrong, the formula is identified with yellow, then goes to next formula；
If formula be standard name and name it is errorless, from formula name be precipitated parameter objectives value, check actual setting value
Whether it is consistent therewith, and checks that formula name is unlisted but needs the parameter that monitors whether correct:
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, used
Red mark wrong parameter and formula name.
Further, this method is applied to client, and the client and board server use Distributed C/S structure, adopt
It is picked platform server with FTP technical battery.
Compared with prior art, in conclusion a kind of automation formula correctness pipe of SEN ion injection machine table of the present invention
Device and method is managed by the way that automation formula correctness managing device is arranged in client, formula is taken from SEN board distribution
Business device downloads to client, and uses " missile attack " method by the parameter collection to be checked in formula into software, then root
According to formula naming rule and the correctness of user's definition rule inspection parameter, with the right and wrong of conspicuous color differentiation parameter,
Correctness checking can be carried out to SEN board formula automatically, not only save manpower when manual inspection, and more can guarantee
100% detection formula mistake, mistake is strangled to avoid loss caused by formula mistake before running goods.
Detailed description of the invention
Fig. 1 is a kind of system architecture diagram of the automation formula correctness managing device of SEN ion injection machine table of the present invention；
Fig. 2 is the flow diagram for using " bomb attacks " algorithm in the prior art；
Fig. 3 is the detail structure chart of parameter collection unit to be checked in present pre-ferred embodiments；
Fig. 4 is a kind of step flow chart of the automation formula correctness management method of SEN ion injection machine table of the present invention；
Fig. 5 is the interface schematic diagram that user selects formula place to be checked board server in the specific embodiment of the invention；
Fig. 6 is the step flow chart of the missile attack method used in the specific embodiment of the invention；
Fig. 7 is the flow chart of formula Correctness checking in the specific embodiment of the invention.
Specific embodiment
Below by way of specific specific example and embodiments of the present invention are described with reference to the drawings, those skilled in the art can
Understand further advantage and effect of the invention easily by content disclosed in the present specification.The present invention can also pass through other differences
Specific example implemented or applied, details in this specification can also be based on different perspectives and applications, without departing substantially from
Various modifications and change are carried out under spirit of the invention.
Fig. 1 is a kind of system architecture diagram of the automation formula correctness managing device of SEN ion injection machine table of the present invention.
As shown in Figure 1, a kind of automation formula correctness managing device of SEN ion injection machine table of the present invention, comprising: receiving unit
101, download unit 102, parameter collection unit to be checked 103 and formula correctness inspection unit 104 are requested.
Wherein, receiving unit 101, for receiving the selection operation of user, with selection target board server, with from target
Board server downloads formula；Download unit 102 is requested, with after receiving unit 101 receives the selection operation of user, according to
The selection operation of user downloads formula from target machine server；Parameter collection unit 103 to be checked uses missile attack method
Parameter to be checked is collected to each formula, generates parameter report to be checked；Formula correctness inspection unit 104 is to formula and to be checked
It looks into parameter and checks that regular way to manage carries out Correctness checking, outgoing inspection result using modularization.
Specifically, a kind of automation formula correctness managing device of SEN ion injection machine table of the present invention is set to visitor
Family end uses Distributed C/S (client/server) structure with board server, which is picked using FTP technical battery
Platform server realizes that user selects board to download formula, the harm that server file may cause directly is operated to avoid user,
Receiving unit 101 provides and receives board server (referred to as target machine server) where user selects formula to be checked,
In a preferred embodiment of the present invention, operation interface target machine server for selection by the user is provided, user only need to be at interface
Board server where middle selection formula to be checked, is clicked " inspection ", and request download unit can be automatically from selected board server
Download formula to be checked.
Usually used " bomb attacks " algorithm of the data-gathering process of the automation formula of SEN ion injection machine table at present,
As bomber launches bomb, fixed target can only be fried, mobile target can not be fried.For example, now need to collect the energy of formula,
Dosage, source kind respectively correspond formula the 3rd, 5,8 rows, then only needing to take the 3rd of each formula, 5,8 rows can be obtained in order
Energy, dosage, source kind, this is the canonical algorithm of semicon industry EAP (event analysis program).But if in formula original
Increase a parameter between two rows and former the third line newly, then energy, dosage, source kind three will respectively correspond new version formula the 4th,
6,9 row.If the parameter got will not be that energy, dosage, source kind so should modify program at this time take formula according to former algorithm
4th, 6,9 rows, so the algorithm has the shortcomings that parameter position is sensitive, maintenance is frequent, easily misrepresents deliberately according to specific algorithm process is as schemed
Shown in 2.And the present invention proposes and uses missile attack method, i.e., as launching a guided missile attack plane, can attack mobile target,
Fig. 3 is the detail structure chart of parameter collection unit to be checked in present pre-ferred embodiments, specifically, parameter collection to be checked
Unit 103 further comprises: array definition module 301, spider module 302, judgment module 303 and processing module 304, wherein
Array definition module 301 is for defining parameter name array to be collected and parameter array to be collected, and spider module 302 is for line by line time
Formula to be checked is gone through, judgment module 303 is handled for judging whether the parameter name of current line is located in parameter name array to be collected
It is corresponding that module 304 is placed in parameter array to be collected when the judging result of judgment module 303 is "Yes", by the parameter value of current line
Otherwise position enables spider module go to formula next line, in this way, even if target component change in location, parameter collection list to be checked
Member 103, which is not required to any modification, also can accurately get target component.
In the specific embodiment of the invention, formula correctness inspection unit 104 is using following steps to formula and to be checked
Parameter carries out Correctness checking: first checking for formula name, if formula is non-standard name, with the white indicia formula, then
Go to next formula；If formula is that standard is named but names wrong, the formula is identified with yellow, then goes to next formula；
If formula be standard name and name it is errorless, from formula name be precipitated parameter objectives value, check actual setting value therewith whether
It is consistent, and checks that formula name is unlisted but needs the parameter that monitors whether correct: is to be checked with green mark if all correct
Look into parameter and formula name；Otherwise, correct parameter is identified with green, with red mark wrong parameter and formula name.
Fig. 4 is a kind of step flow chart of the automation formula correctness management method of SEN ion injection machine table of the present invention.
As shown in figure 4, a kind of automation formula correctness management method of SEN ion injection machine table of the present invention, includes the following steps:
Step 401, the selection operation of user, selection target board server are received.
Step 402, it after receiving the selection operation of user, is operated under target machine server according to the user's choice
Carry formula.
Step 403, parameter to be checked is collected to each formula using missile attack method, generates parameter report to be checked.
Specifically, step 403 further comprises following steps:
Define parameter name array to be collected and parameter array to be collected；
Formula to be checked is traversed line by line, judges whether the parameter name of current line is located in parameter name array to be collected；
If it is, the parameter value of current line is placed in parameter array corresponding position to be collected；If it is not, then going to formula
Next line.
Step 404, regular way to manage, which carries out Correctness checking, to be checked using modularization to formula and parameter to be checked, it is defeated
Inspection result out.Specifically, step 404 further comprises following steps:
Formula name is checked, if formula then goes to next formula with the white indicia formula for non-standard name；
If formula is that standard is named but names wrong, the formula is identified with yellow, then goes to next formula；
If formula be standard name and name it is errorless, from formula name be precipitated parameter objectives value, check actual setting value
Whether it is consistent therewith, and checks that formula name is unlisted but needs the parameter that monitors whether correct:
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, used
Red mark wrong parameter and formula name.
Hereinafter the present invention will be further illustrated by a specific embodiment:
Fig. 5 is the interface schematic diagram that user selects formula place to be checked board server in the specific embodiment of the invention:
Check All is clicked, whole boards can be chosen；Uncheck All is clicked, can cancel and choose whole boards；It clicks
DOUBLE CHECK, runs software, automatic downloading have selected the formula of board, automatically from formula collection parameter to be checked, automatic inspection
Look into formula correctness.
Fig. 6 is the step flow chart of the missile attack method used in the specific embodiment of the invention.Define parameter to be collected
Name array and parameter array to be collected (construction array 1 and array 2)；Formula to be checked is traversed line by line, judges the parameter of current line
Whether name is located in parameter name array to be collected；If it is, it is corresponding that the parameter value of current line is placed in parameter array to be collected
Position；If it is not, then going to formula next line.
Fig. 7 is the flow chart of formula Correctness checking in the specific embodiment of the invention.Formula name is first checked for, if formula
Next formula is then gone to the white indicia formula for non-standard name；If formula be standard name but name it is wrong,
The formula is identified with yellow, then goes to next formula；If formula be standard name and name it is errorless, from formula name be precipitated
Parameter objectives value, checks whether actual setting value is consistent therewith, and checks that formula name is unlisted but need the parameter that monitors to be
It is no correct: if all correct, to identify parameter and formula name to be checked with green；Otherwise, correct parameter is identified with green, use is red
Colour code knows wrong parameter and formula name.
In conclusion the automation formula correctness managing device and method of a kind of SEN ion injection machine table of the present invention are logical
It crosses and automation formula correctness managing device is set in client, formula is downloaded into client from SEN board distributed server
End, and use " missile attack " method by the parameter collection to be checked in formula into software, then according to formula naming rule
And the correctness of user's definition rule inspection parameter can be automatically to SEN board with the right and wrong of conspicuous color differentiation parameter
Formula carries out Correctness checking, not only saves manpower when manual inspection, and more can guarantee 100% detection formula mistake,
Mistake is strangled to avoid loss caused by formula mistake before running goods.
Compared with prior art, the present invention has the advantage that
1. using FTP technology, board server is connected, realizes that user selects board to download formula, it is direct to avoid user
The harm that operation server file may cause
2. collecting parameter to be checked using " missile attack " method, parameter report to be checked is generated, journey can be automatically prevented from
False alarm caused by formula structure change is not alarmed, while reducing maintenance frequency and difficulty
3. check regular way to manage using modularization, whether correct, with green reddish yellow Bai Sise if automaticly inspecting formula parameter
Identify different parameters
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.Any
Without departing from the spirit and scope of the present invention, modifications and changes are made to the above embodiments by field technical staff.Therefore,
The scope of the present invention, should be as listed in the claims.
Claims (10)
1. a kind of automation formula correctness managing device of SEN ion injection machine table, comprising:
Receiving unit, for receiving the selection operation of user, with selection target board server；
Download unit is requested, operated according to the user's choice from mesh after the receiving unit receives the selection operation of user
It marks board server and downloads formula to be checked；
Parameter collection unit to be checked collects parameter to be checked to each formula using missile attack method, generates ginseng to be checked
Number report,
Wherein, missile attack method includes: to define parameter name array to be collected and parameter array to be collected；It traverses line by line to be checked
Formula, judges whether the parameter name of current line is located in parameter name array to be collected；If so, the parameter value of current line is placed in
Parameter array corresponding position to be collected；Conversely, then going to formula next line；
Formula correctness inspection unit carries out Correctness checking, outgoing inspection result to formula and parameter to be checked.
2. a kind of automation formula correctness managing device of SEN ion injection machine table as described in claim 1, feature exist
In the parameter collection unit to be checked includes:
Array definition module, for defining parameter name array to be collected and parameter array to be collected；
Spider module, for traversing formula to be checked line by line；
Judgment module, for judging whether the parameter name of current line is located in parameter name array to be collected；
The parameter value of current line is placed in parameter number to be collected when the judging result of the judgment module is "Yes" by processing module
Group corresponding position, otherwise enables spider module go to formula next line.
3. a kind of automation formula correctness managing device of SEN ion injection machine table as claimed in claim 2, feature exist
In: the formula correctness inspection unit checks regular way to manage using modularization, automaticly inspects formula and whether parameter is correct,
And different parameters are known using white four colour code of green reddish yellow.
4. a kind of automation formula correctness managing device of SEN ion injection machine table as claimed in claim 3, feature exist
In the formula correctness inspection unit carries out Correctness checking to formula and parameter to be checked as follows:
Check formula name；
If formula is non-standard name, with the white indicia formula, and next formula is gone to；
If formula is that standard is named but names wrong, the formula is identified with yellow, and go to next formula；
If formula be standard name and name it is errorless, from formula name be precipitated parameter objectives value, check actual setting value therewith
Whether it is consistent, and checks that formula name is unlisted but needs the parameter that monitors whether correct:
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, with red
Identify wrong parameter and formula name.
5. a kind of automation formula correctness managing device of SEN ion injection machine table as claimed in claim 4, feature exist
In: the device is set to client, uses Distributed C/S structure with board server, which is picked using FTP technical battery
Platform server.
6. a kind of automation formula correctness management method of SEN ion injection machine table, includes the following steps:
Step 1 receives the selection operation of user, selection target board server；
Step 2, after receiving the selection operation of user, operate according to the user's choice from target machine server downloading to
Check formula；
Step 3 collects parameter to be checked to each formula using missile attack method, generates parameter report to be checked, wherein
Missile attack method is the following steps are included: define parameter name array to be collected and parameter array to be collected；It traverses line by line to be checked
Formula, judges whether the parameter name of current line is located in parameter name array to be collected；If so, the parameter value of current line is placed in
Parameter array corresponding position to be collected；Conversely, then going to formula next line；
Step 4 carries out Correctness checking, outgoing inspection result to formula and parameter to be checked.
7. a kind of automation formula correctness management method of SEN ion injection machine table as claimed in claim 6, feature exist
In step 3 further comprises:
Define parameter name array to be collected and parameter array to be collected；
Formula to be checked is traversed line by line, judges whether the parameter name of current line is located in parameter name array to be collected；
If it is, the parameter value of current line is placed in parameter array corresponding position to be collected；If it is not, then going to one under formula
Row.
8. a kind of automation formula correctness management method of SEN ion injection machine table as claimed in claim 7, feature exist
In: in step 4, regular way to manage is checked using modularization, formula is automaticly inspected and whether parameter is correct, and utilize green
White four colour code of reddish yellow knows different parameters.
9. a kind of automation formula correctness management method of SEN ion injection machine table as claimed in claim 8, feature exist
In: step 4 further comprises:
Check formula name；
If formula then goes to next formula with the white indicia formula for non-standard name；
If formula is that standard is named but names wrong, the formula is identified with yellow, then goes to next formula；
If formula be standard name and name it is errorless, from formula name be precipitated parameter objectives value, check actual setting value therewith
Whether it is consistent, and checks that formula name is unlisted but needs the parameter that monitors whether correct:
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, with red
Identify wrong parameter and formula name.
10. a kind of automation formula correctness management method of SEN ion injection machine table as claimed in claim 9, feature
Be: this method is applied to client, and the client and board server are used Distributed C/S structure, connected using FTP technology
Board server.
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| CN107943696A (en) * | 2017-11-22 | 2018-04-20 | 上海华力微电子有限公司 | A kind of automation formula managing device and method for ion injection machine table |
| CN110400074A (en) * | 2019-07-24 | 2019-11-01 | 上海华力微电子有限公司 | The correctness verification method and device of ion implanting formula |
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| CN1459052A (en) * | 2000-09-15 | 2003-11-26 | 先进微装置公司 | Adaptive sampling method for improved control in semiconductor manufacturing |
| CN103021897A (en) * | 2012-11-12 | 2013-04-03 | 上海华力微电子有限公司 | Method for detecting semiconductor device electrical property failure |
| CN103645966A (en) * | 2013-11-08 | 2014-03-19 | 上海华力微电子有限公司 | WAT test program backup method and backup device |
| CN103942127A (en) * | 2014-02-21 | 2014-07-23 | 上海华力微电子有限公司 | Backup structure and backup method for WAT |
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| US8273610B2 (en) * | 2010-11-18 | 2012-09-25 | Monolithic 3D Inc. | Method of constructing a semiconductor device and structure |
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| CN1459052A (en) * | 2000-09-15 | 2003-11-26 | 先进微装置公司 | Adaptive sampling method for improved control in semiconductor manufacturing |
| CN103021897A (en) * | 2012-11-12 | 2013-04-03 | 上海华力微电子有限公司 | Method for detecting semiconductor device electrical property failure |
| CN103645966A (en) * | 2013-11-08 | 2014-03-19 | 上海华力微电子有限公司 | WAT test program backup method and backup device |
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