CN107943696A - A kind of automation formula managing device and method for ion injection machine table - Google Patents
A kind of automation formula managing device and method for ion injection machine table Download PDFInfo
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Abstract
The present invention provides a kind of automation formula managing device and method for ion injection machine table, including：Receiving unit, for being supplied to user input selection order；Download unit, after selection target board, downloads corresponding programming file to be checked；Parameter collection unit, for collecting parameter to be checked respectively to each formula in programming file to be checked according to default missile attack strategy, and parameter report to be checked is generated, missile attack strategy is to travel through file to be checked line by line according to the file format of file to be checked to obtain parameter to be checked；Formula correctness inspection unit, Correctness checking is carried out to obtain the inspection result of corresponding programming file to be checked for treating inspection parameter report.Beneficial effects of the present invention：Automatically Correctness checking can be carried out to the ion implanting formula of VARIAN ion injection machine tables, not only saves manpower during hand inspection, but also more can guarantee that 100% detection formula mistake, avoid loss caused by formula mistake.
Description
Technical field
The present invention relates to semiconductor device processing technology field, more particularly to a kind of automation for ion implanting formula
Formula managing device and method.
Background technology
At present, in chip manufacturing proces, ion implanting is highly important process procedure, usually utilizes ion implantation apparatus
Platform is completed.But the technique is without the image of Buddha that other techniques equally carry out on-line monitoring with means such as thickness, critical dimensions, once
Ion implanting formula is wrong, could be found to during electrical testing, can cause heavy losses.
In view of the above-mentioned problems, industry common practice is：After formula foundation, engineer is arranged to recheck formula, with
Formula mistake is corrected before using formula.But in view of formula parameter is numerous and the complexity of board software, engineer recheck
It is difficult to 100% detection mistake.
The content of the invention
For problems of the prior art, the present invention provides a kind of automation formula for ion injection machine table
Managing device and method, for carrying out Correctness checking to the formula of VARIAN ion injection machine tables, not only save hand inspection
When manpower, and can guarantee that 100% detection formula mistake, mistake strangled before goods is run, avoid damage caused by formula mistake
Lose.The present invention adopts the following technical scheme that：
A kind of automation formula managing device for ion injection machine table, it is described automation formula managing device with it is multiple
Ion injection machine table communicates to connect；The automation formula managing device includes：
Receiving unit, the receiving unit is used to be supplied to user input selection order, with from multiple ion implantings
Selection target board in board；
Download unit, the download unit connect the receiving unit, for selecting the target in the receiving unit
After board, corresponding programming file to be checked is downloaded from the target machine；
Parameter collection unit, the parameter collection unit connects the download unit, for according to default missile attack
Strategy collects parameter to be checked respectively to each formula in the programming file to be checked, and generates parameter report to be checked,
The missile attack strategy is travels through the file to be checked to obtain line by line according to the file format of the file to be checked
State parameter to be checked；
Formula correctness inspection unit, the formula correctness inspection unit Connecting quantity collector unit, for described
Parameter report to be checked carries out Correctness checking to obtain the inspection result of the corresponding programming file to be checked, and described in output
Inspection result.
Preferably, the automation formula managing device is arranged at a client, the client and multiple ions
Inject between the board server of board using Distributed C/S structured communications connection.
Preferably, the formula correctness inspection unit checks regular way to manage using modularization, automatically described in inspection
Whether each formula and corresponding parameter to be checked in programming file to be checked are correct, and utilize the white four kinds of face of green reddish yellow
Colour code knows different parameters.
Preferably, the formula correctness inspection unit is as follows to each in the programming file to be checked
The formula and the corresponding parameter to be checked carry out Correctness checking：
Check formula name；
If the formula is non-standard name, the formula described in white indicia, and goes to next formula；
If the formula is named for standard but names wrong, the formula is identified with yellow, and go to next journey
Formula；
If the formula is named for standard and names errorless, parameter objectives value is separated out from the formula name, is checked real
Whether whether border setting value is consistent therewith, and check that formula name is unlisted but need the parameter that monitors correct：
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, used
Red mark wrong parameter and formula name.
Preferably, the parameter collection unit to be checked first defines parameter name array to be collected and parameter array to be collected,
The initial position of each formula is positioned according to the file format of the programming file to be checked, and according to the journey to be checked
The file format of formula file travels through the programming file to be checked line by line, and is analysed from every a line of the programming file to be checked
Go out parameter name, and whether the parameter name for judging to separate out is located in parameter name array to be collected, if so, then by the parameter value of current line
Parameter array correspondence position to be collected is placed in, if it is not, then going to current formula next line.
A kind of automation formula management method for ion injection machine table, including：
Step S1, select command input by user, the selection target board from multiple ion injection machine tables are received；
Step S2, after the select command is received, the server according to the select command from the target machine
Download programming file to be checked；
Step S3, attacked using the guided missile for traveling through the file to be checked line by line according to the file format of the file to be checked
Hit strategy and parameter to be checked is collected to each formula in the file to be checked respectively, generate parameter report to be checked；
Step S4, Correctness checking is carried out to the parameter report to be checked to obtain the corresponding programming file to be checked
Inspection result, and export the inspection result.
Preferably, the automation formula managing device is arranged at a client, the client and multiple ions
Inject between the board server of board using Distributed C/S structured communications connection.
Preferably, in the step S4, regular way to manage is checked using modularization, checks the formula to be checked automatically
Whether each formula and corresponding parameter to be checked in file are correct, and utilize the white four kinds of colour code differences of green reddish yellow
Parameter.
Preferably, the step S4 further comprises to each formula and phase in the programming file to be checked
The parameter to be checked answered carries out Correctness checking, and carrying out Correctness checking to the parameter to be checked comprises the following steps that：
If the formula is non-standard name, the formula described in white indicia, and goes to next formula；
If the formula is named for standard but names wrong, the formula is identified with yellow, and go to next journey
Formula；
If the formula is named for standard and names errorless, parameter objectives value is separated out from the formula name, is checked real
Whether whether border setting value is consistent therewith, and check that formula name is unlisted but need the parameter that monitors correct：
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, used
Red mark wrong parameter and formula name.
Preferably, the step S3 includes：
Step S31, parameter name array to be collected and parameter array to be collected first are defined；
Step S32, the initial position of each formula is positioned according to the file format of the programming file to be checked；
Step S33, the programming file to be checked is traveled through according to the file format of the programming file to be checked line by line, and
Parameter name is separated out from every a line of the programming file to be checked, whether the parameter name for judging to separate out is located at parameter name to be collected
In array：
If the determination result is YES, the parameter value of current line is placed in the parameter array correspondence position to be collected；
If judging result is no, presently described formula next line is gone to.
Beneficial effects of the present invention：Automatically correctness can be carried out to the ion implanting formula of VARIAN ion injection machine tables
Check, not only save manpower during hand inspection, but also more can guarantee that 100% detection formula mistake, avoid formula mistake from causing
Loss.
Brief description of the drawings
Fig. 1 is in a preferred embodiment of the present invention, and a kind of automation formula management for ion injection machine table fills
The system architecture diagram put；
Fig. 2 is a kind of automation formula manager for ion injection machine table in a preferred embodiment of the present invention
The flow diagram of method；
Fig. 3 is the flow diagram of step S3 in a preferred embodiment of the present invention；
Fig. 4 is in the prior art, using the flow diagram of bomb attacks strategy；
Fig. 5 is in a kind of specific embodiment of the present invention, using the flow diagram of shell attack strategies
Embodiment
It should be noted that in the case where there is no conflict, following technical proposals, can be mutually combined between technical characteristic.
The embodiment of the present invention is further described below in conjunction with the accompanying drawings：
As shown in Figure 1, a kind of automation formula managing device for ion injection machine table, above-mentioned automation formula management
Device is communicated to connect with multiple ion injection machine tables；Above-mentioned automation formula managing device includes：
Receiving unit 1, above-mentioned receiving unit 1 are used to be supplied to user input selection order, to be noted from multiple above-mentioned ions
Enter selection target board in board；
Download unit 2, above-mentioned download unit 2 connect above-mentioned receiving unit 1, above-mentioned for being selected in above-mentioned receiving unit 1
After target machine, corresponding programming file to be checked is downloaded from above-mentioned target machine；
Parameter collection unit 3, above-mentioned parameter collector unit 3 connect above-mentioned download unit 2, for being attacked according to default guided missile
Hit strategy and parameter to be checked is collected respectively to each formula in above-mentioned programming file to be checked, and generate parameter report to be checked
Table, above-mentioned missile attack strategy be using first travel through by column the header line of above-mentioned programming file to be checked, travel through line by line again it is above-mentioned
File to be checked is to obtain above-mentioned parameter to be checked；
Formula correctness inspection unit 4, above-mentioned 4 Connecting quantity collector unit 3 of formula correctness inspection unit, for
State unit 4 to be checked and carry out Correctness checking to obtain the inspection result of corresponding above-mentioned programming file to be checked, and export above-mentioned
Inspection result.
In the present embodiment, by setting automation formula correctness managing device in client, by formula from VARIAN
Ion injection machine table distributed server downloads to client, and using first traveling through programming file header line, again line by line time by column
Go through programming file " missile attack " strategy by the parameter collection to be checked in formula into software, then according to formula name advise
Then and user defines the correctness of regular inspection parameter, can be automatically right with the right and wrong of conspicuous color differentiation parameter
VARIAN boards formula carries out Correctness checking, not only saves manpower during hand inspection, and more can guarantee that 100% detection
Formula mistake, mistake is strangled before goods is run, and avoids loss caused by formula mistake.
In preferred embodiment, above-mentioned automation formula managing device is arranged at a client, above-mentioned client with it is multiple
Using Distributed C/S structured communications connection between the board server of above-mentioned ion injection machine table.
In preferred embodiment, above-mentioned formula correctness inspection unit 4 checks regular way to manage using modularization, automatically
Check whether each above-mentioned formula in above-mentioned programming file to be checked and corresponding parameter to be checked are correct, and utilize green reddish yellow
Bai Si kind colour code different parameters.
In preferred embodiment, above-mentioned formula correctness inspection unit 4 is as follows to above-mentioned formula text to be checked
Each above-mentioned formula and corresponding above-mentioned parameter to be checked in part carry out Correctness checking：
Check formula name；
If above-mentioned formula is non-standard name, with the above-mentioned formula of white indicia, and next above-mentioned formula is gone to；
If above-mentioned formula is named for standard but names wrong, above-mentioned formula is identified with yellow, and go to next above-mentioned journey
Formula；
If above-mentioned formula is named for standard and names errorless, parameter objectives value is separated out from above-mentioned formula name, is checked real
Whether whether border setting value is consistent therewith, and check that formula name is unlisted but need the parameter that monitors correct：
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, used
Red mark wrong parameter and formula name.
In preferred embodiment, above-mentioned parameter collection unit 3 to be checked first defines parameter name array to be collected and waits to collect
Parameter array, the initial position of each above-mentioned formula is positioned according to the file format of above-mentioned programming file to be checked, and according to upper
The file format for stating programming file to be checked travels through above-mentioned programming file to be checked line by line, and from above-mentioned programming file to be checked
Parameter name is separated out in per a line, and whether the parameter name for judging to separate out is located in parameter name array to be collected, if so, then will be current
Capable parameter value is placed in parameter array correspondence position to be collected, if it is not, then going to current formula next line.
As shown in Fig. 2, a kind of automation formula management method for ion injection machine table, including：
Step S1, select command input by user, the selection target board from multiple ion injection machine tables are received；
Step S2, after above-mentioned select command is received, the server according to above-mentioned select command from above-mentioned target machine
Download programming file to be checked；
Step S3, attacked using the guided missile for traveling through above-mentioned file to be checked line by line according to the file format of above-mentioned file to be checked
Hit strategy and parameter to be checked is collected to each above-mentioned formula in above-mentioned file to be checked respectively, generate parameter report to be checked；
Step S4, Correctness checking is carried out to above-mentioned parameter report to be checked to obtain corresponding above-mentioned programming file to be checked
Inspection result, and export above-mentioned inspection result.
In preferred embodiment, above-mentioned automation formula managing device is arranged at a client, above-mentioned client with it is multiple
Using Distributed C/S structured communications connection between the board server of above-mentioned ion injection machine table.
In preferred embodiment, in above-mentioned steps S4, regular way to manage is checked using modularization, checks above-mentioned treat automatically
Whether each above-mentioned formula and corresponding parameter to be checked in inspection programming file are correct, and utilize the white four kinds of colors of green reddish yellow
Identify different parameters.
In preferred embodiment, above-mentioned steps S4 further comprises to each above-mentioned in above-mentioned programming file to be checked
Formula and corresponding above-mentioned parameter to be checked carry out Correctness checking, and carrying out Correctness checking to above-mentioned parameter to be checked specifically walks
It is rapid as follows：
Step a1, formula name is checked, to judge that formula name is all to name and whether name wrong for standard：
If above-mentioned formula is non-standard name, with the above-mentioned formula of white indicia, and next above-mentioned formula is gone to；
If above-mentioned formula is named for standard but names wrong, above-mentioned formula is identified with yellow, and go to next above-mentioned formula；
If above-mentioned formula is named for standard and names errorless, parameter objectives value is separated out from above-mentioned formula name, is checked actual
Whether whether setting value is consistent therewith, and check that formula name is unlisted but need the parameter that monitors correct：
If above-mentioned formula is named for standard and names errorless and formula name unlisted but need the parameter that monitors all correct,
Parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, with red mark wrong parameter and formula
Name.
In preferred embodiment, as shown in figure 3, above-mentioned steps S3 includes：
Step S31, parameter name array to be collected and parameter array to be collected first are defined；
Step S32, the initial position of each above-mentioned formula is positioned according to the file format of above-mentioned programming file to be checked；
Step S33, above-mentioned programming file to be checked is traveled through according to the file format of above-mentioned programming file to be checked line by line, and
Parameter name is separated out from every a line of above-mentioned programming file to be checked, whether the parameter name for judging to separate out is located at parameter name to be collected
In array：
If the determination result is YES, the parameter value of current line is placed in above-mentioned parameter array correspondence position to be collected；
If judging result is no, current above-mentioned formula next line is gone to.
In a specific embodiment, a kind of automation formula managing device of the present invention may be disposed at client, itself and machine
Platform server uses Distributed C/S (client/server) structure, and can be picked platform server using FTP technical batteries, realize user
Select board download formula, directly operated to avoid user server file may caused by harm, receiving unit 1 provide one behaviour
Make interface for user input selection order, board server where user only need to select formula to be checked in interface is (to be checked
The target machine server looked into) input selection order, download unit 2 can be automatically from selected board server download formula to be checked
File, user after target machine exports programming file to be checked, need to only automate formula by the download unit 2 of client
" importing " is clicked in the automation formula correctness management software interface of managing device, automation formula managing device is (in other words
Automation formula management software) parameter to be checked can be collected from programming file automatically, checks formula correctness automatically.
Wherein, programming file to be checked stores in the form of half formats text flow, and form is complicated：File header defines file
Comprising several Application Programming Sections, demarcated between Application Programming Section with Application Programming Section row；Application Programming Section row define contained in formula group name, Application Programming Section it is several
A formula, is demarcated with formula name row between formula；Formula includes some parameter groups, is demarcated with parameter group row；Parameter group row defines
Several parameter lines are contained in parameter group name, parameter group；Parameter line defines parameter name, parameter value.
Since in the prior art, the data-gathering process of the automation formula of ion injection machine table is usually using " bomb is attacked
Hit " algorithm, as bomber launches bomb, fixed target can only be fried, mobile target can not be fried.For example, now need to collect journey
The energy of formula, dosage, source kind, correspond to formula the 3rd, 5,8 rows respectively, then only need to take the 3rd, 5, the 8 of each formula in order
Row can obtain energy, dosage, source kind, this is the canonical algorithm of semicon industry EAP (event analysis program).But if
A parameter is increased newly between former second row of formula and former the third line, then energy, dosage, source kind three will correspond to new edition respectively
This formula the 4th, 6,9 rows.If according to former algorithm, the parameter got will not be energy, dosage, source kind, so should change at this time
Program, takes formula the 4th, 6,9 rows, so the algorithm has the shortcomings that parameter position is sensitive, safeguards frequently, easily misrepresents deliberately according to its is specific
Algorithm flow is as shown in Figure 4.
Therefore present invention employs " missile attack " strategy, as launching a guided missile attack plane, mobile target can be attacked.Tool
Body, first define parameter name array to be collected and parameter array to be collected；Then according to above-mentioned file format, each formula is found
Initial position, and travel through the formula line by line according to file format, parameter name separated out from row, judge whether positioned at waiting to collect ginseng
In several arrays：If it is, the parameter value of current line is placed in parameter array correspondence position to be collected；If it is not, then go to
Formula next line.So, even if target component change in location, which, which is not required to any modification, can also get target ginseng exactly
Number.Algorithm flow is as figure 5 illustrates.
To sum up above-mentioned, the present invention proposes a kind of automation formula managing device and method for ion injection machine table, by
Board end (including multiple ion injection machine tables), automation formula managing device (it is equipped with formula management software) composition.Can
Realize that formula correctness rechecks automation, 100% detection formula mistake.Collected using " missile attack " strategy from formula to be checked
Parameter is looked into, false alarm caused by preventing formula structure change, do not alarm, while can reduce program maintenance frequency.
By explanation and attached drawing, the exemplary embodiments of the specific structure of embodiment are given, it is smart based on the present invention
God, can also make other conversions.Although foregoing invention proposes existing preferred embodiment, however, these contents are not intended as
Limitation.
For a person skilled in the art, after reading described above, various changes and modifications undoubtedly will be evident.
Therefore, appended claims should regard whole variations and modifications of the true intention and scope that cover the present invention as.Weighing
Any and all scope and content of equal value, are all considered as still belonging to the intent and scope of the invention in the range of sharp claim.
Claims (10)
1. a kind of automation formula managing device for ion injection machine table, the automation formula managing device with it is multiple from
Son injection board communication connection；It is characterized in that, the automation formula managing device includes：
Receiving unit, the receiving unit is used to be supplied to user input selection order, with from multiple ion injection machine tables
Middle selection target board；
Download unit, the download unit connect the receiving unit, for selecting the target machine in the receiving unit
Afterwards, corresponding programming file to be checked is downloaded from the target machine；
Parameter collection unit, the parameter collection unit connects the download unit, for according to default missile attack strategy
Parameter to be checked is collected respectively to each formula in the programming file to be checked, and generates parameter report to be checked, it is described
Missile attack strategy is according to the file format of the file to be checked to travel through the file to be checked line by line to treat described in obtaining
Inspection parameter；
Formula correctness inspection unit, the formula correctness inspection unit Connecting quantity collector unit, for described to be checked
Look into parameter report and carry out Correctness checking to obtain the inspection result of the corresponding programming file to be checked, and export the inspection
As a result.
2. automation formula managing device according to claim 1, it is characterised in that the automation formula managing device
A client is arranged at, Distributed C/S is used between the client and the board server of multiple ion injection machine tables
Structured communication connects.
3. automation formula managing device according to claim 1, it is characterised in that the formula correctness inspection unit
Regular way to manage is checked using modularization, checks each formula in the programming file to be checked and corresponding automatically
Whether parameter to be checked is correct, and utilizes the white four kinds of colour code different parameters of green reddish yellow.
4. automation formula managing device according to claim 3, it is characterised in that the formula correctness inspection unit
Each formula in the programming file to be checked and the corresponding parameter to be checked are carried out just as follows
True property inspection：
Check formula name；
If the formula is non-standard name, the formula described in white indicia, and goes to next formula；
If the formula is named for standard but names wrong, the formula is identified with yellow, and go to next formula；
If the formula for standard name and name it is errorless, from the formula name separate out parameter objectives value, inspection actually set
Put whether value is consistent therewith, and check that formula name is unlisted but need the parameter that monitors whether correct：
If all correct, parameter and formula name to be checked are identified with green；Otherwise, correct parameter is identified with green, with red
Identify wrong parameter and formula name.
5. automation formula managing device according to claim 1, it is characterised in that the parameter collection unit to be checked
Parameter name array to be collected and parameter array to be collected first are defined, is positioned according to the file format of the programming file to be checked every
The initial position of a formula, and the formula to be checked is traveled through according to the file format of the programming file to be checked line by line
File, and parameter name is separated out from every a line of the programming file to be checked, and judge whether the parameter name of precipitation is located at and treat
Collect in parameter name array, if so, the parameter value of current line then is placed in parameter array correspondence position to be collected, if it is not, then turning
To current formula next line.
A kind of 6. automation formula management method for ion injection machine table, it is characterised in that including：
Step S1, select command input by user, the selection target board from multiple ion injection machine tables are received；
Step S2, after the select command is received, downloaded according to the select command from the server of the target machine
Programming file to be checked；
Step S3, using the missile attack plan for traveling through the file to be checked line by line according to the file format of the file to be checked
Parameter to be checked slightly is collected to each formula in the file to be checked respectively, generates parameter report to be checked；
Step S4, Correctness checking is carried out to the parameter report to be checked to obtain the inspection of the corresponding programming file to be checked
Look into as a result, and exporting the inspection result.
7. automation formula management method as claimed in claim 6, it is characterised in that the automation formula managing device is set
A client is placed in, using Distributed C/S knots between the client and the board server of multiple ion injection machine tables
Structure communicates to connect.
8. automation formula management method as claimed in claim 6, it is characterised in that in the step S4, using modularization
Check regular way to manage, check each formula in the programming file to be checked and corresponding parameter to be checked automatically
It is whether correct, and utilize the white four kinds of colour code different parameters of green reddish yellow.
9. automation formula management method as claimed in claim 8, it is characterised in that the step S4 further comprises pair
Each formula and the corresponding parameter to be checked in the programming file to be checked carry out Correctness checking, to described
Parameter to be checked carries out Correctness checking and comprises the following steps that：
Step a1, formula name is checked, to judge that formula name is all to name and whether name wrong for standard：
If the formula is non-standard name, the formula described in white indicia, and goes to next formula；
If the formula is named for standard but names wrong, the formula is identified with yellow, and go to next formula；
If the formula for standard name and name it is errorless, from the formula name separate out parameter objectives value, check actual setting
Whether whether value is consistent therewith, and check that formula name is unlisted but need the parameter that monitors correct：
If the formula is named for standard and names errorless and formula name unlisted but need the parameter that monitors all correct, with green
Colour code knows parameter and formula name to be checked；Otherwise, correct parameter is identified with green, with red mark wrong parameter and formula name.
10. automation formula management method as claimed in claim 6, it is characterised in that the step S3 includes：
Step S31, parameter name array to be collected and parameter array to be collected first are defined；
Step S32, the initial position of each formula is positioned according to the file format of the programming file to be checked；
Step S33, the programming file to be checked is traveled through according to the file format of the programming file to be checked line by line, and from institute
State in every a line of programming file to be checked and separate out parameter name, whether the parameter name for judging to separate out is located at parameter name array to be collected
In：
If the determination result is YES, the parameter value of current line is placed in the parameter array correspondence position to be collected；
If judging result is no, the next line of presently described formula is gone to.
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