CN106290106A - The steam of encapsulation coating and structure/measuring gas permebility System and method for - Google Patents
The steam of encapsulation coating and structure/measuring gas permebility System and method for Download PDFInfo
- Publication number
- CN106290106A CN106290106A CN201610612736.3A CN201610612736A CN106290106A CN 106290106 A CN106290106 A CN 106290106A CN 201610612736 A CN201610612736 A CN 201610612736A CN 106290106 A CN106290106 A CN 106290106A
- Authority
- CN
- China
- Prior art keywords
- steam
- coating
- gas
- encapsulation coating
- permebility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
- G01N2015/0813—Measuring intrusion, e.g. of mercury
Abstract
The invention discloses a kind of steam/measuring gas permebility method of encapsulation coating and structure, can be used for the water oxygen permeability detection of various original position organic/inorganic encapsulation coating and structure, referring more particularly to the direct encapsulation coating of flexible device and the technology of the superelevation steam/oxygen barrier rate of organic electronic device, this is a kind of foundation metering method at molecular chemical reaction.Active metal detecting layer is utilized to touch, after steam/gas that testing sample passes through, produced reaction and the change curve of caused metal detection layer resistance value, then by quantitative analysis resistivity and the change of atomic layer level thickness and calibration, the steam/gas permeability of sample can be calculated.
Description
Technical field
The present invention relates to the method for testing of the steam/oxygen permeability of high impedance encapsulation coating and structure, refer more particularly to
The performance test of the flexible package of the superelevation steam/oxygen barrier rate of organic electronic device the most directly encapsulating structure.
Background technology
Novel organic electronic device, organic light emission, organic electro-optic device and organic field-effect tube owing to himself is frivolous,
The advantages such as energy-conservation and self-luminous, have broad application prospects in display and solid-state illumination field.Its outstanding characteristic is by shadow
Ring the exploitation of next generation's display electronic product, be future of showing of flexible electronic.
But show according to the research of long-term organic electronics, the composition such as steam in air and oxygen is to organic electronic device
Part has fatal impact, and its reason mainly has steam and oxygen that organic each thin layer is had various different reaction and impact,
Thus there is the biggest harm in the integral device life-span.If organic electro-optic device can effectively can be sealed, stop steam/
Oxygen touches each organic function layer, it is possible to be greatly improved device lifetime.
A lot of novel encapsulation coating materials and direct combination encapsulating structure are invented and are used, but for efficient envelope
Package material and encapsulation technology are it is also proposed that the harshest requirement, and existing means of testing and equipment are also a lack of and imperfection
's.Such as the coating the most directly encapsulated on the dependent coating material encapsulated and device and technology, existing equipment
Just cannot accomplish with method directly to measure.Indirectly coating and direct encapsulating structure can only be prepared on different substrates, then
Measure.But the method for this indirect measurement is equipment and method is difficulty with the high accuracy of steam and gas and accurately and has
The measurement of effect, and measurement to transparent/non-transparent thin film simultaneously.Actual demand has claimed below to measuring system:
A. the detector layer being must have the sensitivity of superelevation；
B. detector will be in close proximity to coating to be measured and structure；
C. when detector runs, outside steam and gases affect measuring accuracy to be less than；
D. it is the change of detector layer can be observed effectively and measure；
E. the saturating rate of water oxygen of sample can be done qualitative and determined quantitative analysis.
Summary of the invention
It is an object of the invention to provide the steam/gas infiltration of a kind of effective high-acruracy survey encapsulation coating and structure
Rate method, solves the problem that the steam/gas permeability of current most of dependent encapsulation coating and structure is difficult to measure.This
Bright ultimate principle is based on some the water/gas body sensitive materials being inserted in coating and encapsulating structure, observes it gentle with water
The increase of the resistance value that body causes after producing chemical reaction and change, I can be by the resistance of the whole detecting layer of quantitative analysis
The relation of rate and atomic thickness calculates for stopping envelope coating that detector layer and water/gas body react and structure
Steam/oxygen permeability.
Whole detector and encapsulation process are all in an inert atmosphere, and the glove box such as nitrogen, argon etc. completes.Glove
Case water oxygen content is less than 1 Ppm.Glass/silicon substrate both can stop that he surveyed device to the compositions such as water/gas body from top to encapsulation
Layer saturating, whole encapsulation coating and encapsulating structure can be fixed again, and directly prepare coating and encapsulating structure at substrate
Design will not affect one another and be damaged to test layer.In order to ensure detector layer main measuring samples side infiltration in testing
Steam/gas reaction also reduces external moisture/gas interference, then device structure design and encapsulation step such as figure are the heaviest
Want: coating and encapsulating structure the most even to be completely covered detector layer, and the second coating and encapsulating structure must be insulant.I
Pass through:
1. detector layer is directly prepared in the substrate at waterproof oxygen, covers coating material to be measured and encapsulation knot in pure glove box
Structure.
2. survey coating material and encapsulating structure is completely covered detector layer, it is ensured that edge's steam infiltration probability is minimum.
3. can be by vacuum and the steam adding absorption in heat abstraction material and oxygen.
Accompanying drawing explanation
The test design structural representation of Fig. 1 high accuracy barrier film.
1. test substrate (silicon chip, glass)；
2. leadout electrode；
3. encapsulation coating and multilayer encapsulation structure；
4. thin film active metal sensor layer；
5. resistance detecting circuit.
Fig. 2 example test result.
Detailed description of the invention
According to the design and processes of invention, one of them implementations is to use following steps:
The first step, be ready to treat can packaged glass or silicon chip substrate, surface can be carried out.And put into vacuum drying oven removal
Steam and oxygen more than absorption.By incoming to glass or silicon chip fine vacuum cavity, utilize evaporating deposition technique (thermal evaporation, gas phase
Deposition, sputtering, epitaxial growth, etc.) deposition one layer derivation silver electrode (low-resistance value).Again test zone grow one layer of steam/
Detection of gas layer (proper test area is 1X1 centimetre, the calcium film of 100 to 200 nanometers).
Second step, deposits one layer of encapsulated layer to be recorded or composite layered structure on the detector of the first step.
3rd step, it is also possible to biography sample, to glove box, utilizes other preparation methoies to be coated with one layer or several layers of thin film to be measured, this
In use spin coating prepare the encapsulation oxidant layer of different-thickness on the detector.
4th step, is passed to packaged device in vacuum chamber, extracts unnecessary gas and cavity.
5th step, at glove box, utilizes UV lamp or vacuum oven cure package coating, detector layer and the external world is passed through
Coating to be measured completely cuts off completely.
7th step, packaged after device, spread out of glove box.It is placed on external environment condition or the controlled test of humidity temperature
In case (or in cavity of single atmosphere).
8th step, by connection electrode to the test system of resistance Yu time, observes whole device resistance value and time
Change curve.
Wherein test result input system, according to qualitative and quantitative data base and parameter, calculates steam/gas
Permeability through thin film.Result shows, at 40 degree, in 90% humidity measurement cavity, by the mensuration of resistivity, in sample 200
The nanometer calcium detector complete oxidation time is 56 hours, be converted into every square meter penetrate the hydrone of film have altogether 0.277 gram/flat
Rice.Final steam permeability WVTR=0.277g/m2 × (24 ÷ 56)=1.2 × 10-1 gram/day. square meter.Thin film at 40 degree,
In the environment of 90%, steam permeability is more than 1.2 × 10-1 gram/day. square meter.
Claims (7)
1. the steam of an encapsulation coating and structure/measuring gas permebility system, it is characterised in that including: deposition compact serves as a contrast
Electrode layer at the end, and the conduction detector layer relying on steam/gas sensitive material to prepare being deposited on testing sample, its
The change of resistivity of material can be caused when touching the gas such as steam or oxygen；Preparation coating to be measured on electrode is tied with thin film
Structure and can monitored resistance value change detector.
The steam of encapsulation coating the most according to claim 1 and structure/measuring gas permebility system, it is characterised in that
Described dense substrate is selected from metal-oxide, silicon oxide, glass, silicon chip.
The steam of encapsulation coating the most according to claim 1 and structure/measuring gas permebility system, it is characterised in that
Described electrode layer, its material is selected from high connductivity thin-film material, gold, silver, copper, ITO, FTO, ZAO.
The steam of encapsulation coating the most according to claim 1 and structure/measuring gas permebility system, it is characterised in that
Described steam/gas sensitive material is selected from calcium metal or magnesium.
The steam of encapsulation coating the most according to claim 1 and structure/measuring gas permebility system, it is characterised in that
Described steam/gas sensitive material is selected from conducting polymer, metal alloy, metal-oxide and mixture.
The steam of encapsulation coating the most according to claim 1 and structure/measuring gas permebility system, it is characterised in that
The solution manufacturing methods such as described coating to be measured and the preparation of membrane structure can pass through spin coating, evaporation, chemical deposition.
7. the steam of encapsulation coating and structure/measuring gas permebility method, described method includes: make steam/gas only
Detector layer contact surface, observation detector layer resistivity and the change of time is permeated, according to survey from testing coating and structure side
Amount result calculates steam/gas permeability coefficient.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610612736.3A CN106290106A (en) | 2016-07-29 | 2016-07-29 | The steam of encapsulation coating and structure/measuring gas permebility System and method for |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610612736.3A CN106290106A (en) | 2016-07-29 | 2016-07-29 | The steam of encapsulation coating and structure/measuring gas permebility System and method for |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106290106A true CN106290106A (en) | 2017-01-04 |
Family
ID=57663705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610612736.3A Pending CN106290106A (en) | 2016-07-29 | 2016-07-29 | The steam of encapsulation coating and structure/measuring gas permebility System and method for |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106290106A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108074833A (en) * | 2017-12-18 | 2018-05-25 | 武汉华星光电半导体显示技术有限公司 | A kind of testing film and for assessing the gauge of thin-film package performance and test method |
| CN109142185A (en) * | 2018-08-30 | 2019-01-04 | 上海大学 | A kind of testing vapor transmission system and method |
| WO2021036043A1 (en) * | 2019-08-26 | 2021-03-04 | 武汉华星光电半导体显示技术有限公司 | Method for testing thin film encapsulation performance |
| US11569447B2 (en) | 2019-08-26 | 2023-01-31 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Method for testing performance of thin-film encapsulation |
-
2016
- 2016-07-29 CN CN201610612736.3A patent/CN106290106A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108074833A (en) * | 2017-12-18 | 2018-05-25 | 武汉华星光电半导体显示技术有限公司 | A kind of testing film and for assessing the gauge of thin-film package performance and test method |
| CN108074833B (en) * | 2017-12-18 | 2021-03-02 | 武汉华星光电半导体显示技术有限公司 | Test film, jig for evaluating film packaging performance and test method |
| CN109142185A (en) * | 2018-08-30 | 2019-01-04 | 上海大学 | A kind of testing vapor transmission system and method |
| CN109142185B (en) * | 2018-08-30 | 2020-05-05 | 上海大学 | Water vapor transmittance testing system and method |
| WO2021036043A1 (en) * | 2019-08-26 | 2021-03-04 | 武汉华星光电半导体显示技术有限公司 | Method for testing thin film encapsulation performance |
| US11569447B2 (en) | 2019-08-26 | 2023-01-31 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Method for testing performance of thin-film encapsulation |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106153519A (en) | The steam of a kind of film/measuring gas permebility System and method for | |
| CN106290106A (en) | The steam of encapsulation coating and structure/measuring gas permebility System and method for | |
| Graff et al. | Mechanisms of vapor permeation through multilayer barrier films: Lag time versus equilibrium permeation | |
| CN101632010A (en) | The packaging that has integrated gas permeation sensor | |
| JP4460000B2 (en) | Sensor for measuring gas permeability of test materials | |
| CN106018243A (en) | Method for testing and designing vapor/air permeability of transparent encapsulation coating and structure | |
| Schubert et al. | Electrical calcium test for moisture barrier evaluation for organic devices | |
| Sberveglieri et al. | Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensors | |
| CN104297320B (en) | A kind of organic monolayer thin film field-effect gas sensor and preparation method | |
| Hazra et al. | Hydrogen sensitivity of ZnO p–n homojunctions | |
| CN102175624A (en) | Method for testing water vapor transmittance | |
| Shao et al. | Crystallinity and grain boundary control of TIPS-pentacene in organic thin-film transistors for the ultra-high sensitive detection of NO 2 | |
| CN106124384A (en) | The steam of hyaline membrane/measuring gas permebility system and method for testing | |
| Oh et al. | Characteristics of Al2O3/ZrO2 laminated films deposited by ozone-based atomic layer deposition for organic device encapsulation | |
| CN102445438A (en) | Method for testing vapor transmission of packaging material | |
| CN107449704A (en) | The method of testing of film water vapor transmittance | |
| CN107144609A (en) | The manufacture method of moisture sensor and the moisture sensor manufactured using this method | |
| Jarvis et al. | Comparing three techniques to determine the water vapour transmission rates of polymers and barrier films | |
| Moiz et al. | Effects of temperature and humidity on electrical properties of organic semiconductor orange dye films deposited from solution | |
| CN104465622A (en) | Method and packaging structure for detecting water and oxygen penetration rate of back plate | |
| Fedtke et al. | Hydrogen sensor based on optical and electrical switching | |
| Zhang et al. | Enhanced gas sensing properties based on ZnO-decorated nickel oxide thin films for formaldehyde detection | |
| Bittencourt et al. | Effects of oxygen partial pressure and annealing temperature on the formation of sputtered tungsten oxide films | |
| Maindron et al. | Investigation of Al2O3 barrier film properties made by atomic layer deposition onto fluorescent tris-(8-hydroxyquinoline) aluminium molecular films | |
| Yoo et al. | Surface morphology and gas-sensing characteristics of SnO2− x thin films oxidized from Sn films |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170104 |