CN106286695A - A kind of air spring vibration isolation platform control system - Google Patents
A kind of air spring vibration isolation platform control system Download PDFInfo
- Publication number
- CN106286695A CN106286695A CN201610825015.0A CN201610825015A CN106286695A CN 106286695 A CN106286695 A CN 106286695A CN 201610825015 A CN201610825015 A CN 201610825015A CN 106286695 A CN106286695 A CN 106286695A
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- CN
- China
- Prior art keywords
- valve
- air spring
- altitude
- control system
- processor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002955 isolation Methods 0.000 title claims abstract description 24
- 238000005273 aeration Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
- Fluid-Damping Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610825015.0A CN106286695B (en) | 2016-09-14 | 2016-09-14 | A kind of air spring vibration isolation platform control system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610825015.0A CN106286695B (en) | 2016-09-14 | 2016-09-14 | A kind of air spring vibration isolation platform control system |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106286695A true CN106286695A (en) | 2017-01-04 |
CN106286695B CN106286695B (en) | 2018-09-14 |
Family
ID=57712740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610825015.0A Active CN106286695B (en) | 2016-09-14 | 2016-09-14 | A kind of air spring vibration isolation platform control system |
Country Status (1)
Country | Link |
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CN (1) | CN106286695B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106763464A (en) * | 2017-03-02 | 2017-05-31 | 江苏大学 | A kind of active air vibration isolation unit for micro-vibration technology |
CN106774021A (en) * | 2017-02-16 | 2017-05-31 | 中国人民解放军海军工程大学 | Large-scale air bag vibration isolation device CAN network control system |
CN108036019A (en) * | 2017-11-27 | 2018-05-15 | 中国电子工程设计院 | The height levelling control system and method for a kind of air spring vibration isolation platform |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1658101A (en) * | 2004-02-20 | 2005-08-24 | 爱信精机株式会社 | Method of setting control data in an active vibration isolation control system and a control method thereof |
JP2009138775A (en) * | 2007-12-03 | 2009-06-25 | Tokkyokiki Corp | Air pressure type vibration isolation device |
CN102494243A (en) * | 2011-12-16 | 2012-06-13 | 常州科尔流体技术有限公司 | Intelligent inflating system of inflatable shock absorber |
CN203713465U (en) * | 2014-02-26 | 2014-07-16 | 陕西重型汽车有限公司 | Inflation and deflation control system for air springs |
CN105715735A (en) * | 2016-03-02 | 2016-06-29 | 江苏大学 | Vibration isolation system with controllable rigid damping and inertia force and control method of vibration isolation system |
CN206545668U (en) * | 2016-09-14 | 2017-10-10 | 中国电子工程设计院 | A kind of air spring vibration isolation platform control system |
-
2016
- 2016-09-14 CN CN201610825015.0A patent/CN106286695B/en active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1658101A (en) * | 2004-02-20 | 2005-08-24 | 爱信精机株式会社 | Method of setting control data in an active vibration isolation control system and a control method thereof |
CN100380256C (en) * | 2004-02-20 | 2008-04-09 | 爱信精机株式会社 | Method of setting control data in an active vibration isolation control system and a control method thereof |
JP2009138775A (en) * | 2007-12-03 | 2009-06-25 | Tokkyokiki Corp | Air pressure type vibration isolation device |
CN102494243A (en) * | 2011-12-16 | 2012-06-13 | 常州科尔流体技术有限公司 | Intelligent inflating system of inflatable shock absorber |
CN203713465U (en) * | 2014-02-26 | 2014-07-16 | 陕西重型汽车有限公司 | Inflation and deflation control system for air springs |
CN105715735A (en) * | 2016-03-02 | 2016-06-29 | 江苏大学 | Vibration isolation system with controllable rigid damping and inertia force and control method of vibration isolation system |
CN206545668U (en) * | 2016-09-14 | 2017-10-10 | 中国电子工程设计院 | A kind of air spring vibration isolation platform control system |
Non-Patent Citations (1)
Title |
---|
雷鸣: "BG-102型分步投影光刻机减振台研制", 《电子工业专用设备》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106774021A (en) * | 2017-02-16 | 2017-05-31 | 中国人民解放军海军工程大学 | Large-scale air bag vibration isolation device CAN network control system |
CN106774021B (en) * | 2017-02-16 | 2023-10-27 | 中国人民解放军海军工程大学 | CAN bus network control system of large-scale air bag vibration isolation device |
CN106763464A (en) * | 2017-03-02 | 2017-05-31 | 江苏大学 | A kind of active air vibration isolation unit for micro-vibration technology |
CN108036019A (en) * | 2017-11-27 | 2018-05-15 | 中国电子工程设计院 | The height levelling control system and method for a kind of air spring vibration isolation platform |
Also Published As
Publication number | Publication date |
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CN106286695B (en) | 2018-09-14 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 100840 No. 27, Haidian District, Beijing, Wanshou Road Patentee after: CHINA ELECTRONICS ENGINEERING DESIGN INSTITUTE Co.,Ltd. Address before: 100840 No. 27, Haidian District, Beijing, Wanshou Road Patentee before: CHINA ELECTRONICS ENGINEERING DESIGN INSTITUE |
|
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Yan Feng Inventor after: Qin Jingwei Inventor after: Lou Yu Inventor after: Chen Liu Inventor after: Peng Chaobin Inventor after: Dou Shuo Inventor after: Zuo Hanwen Inventor after: Liu Haihong Inventor after: Hu Shuguang Inventor after: Xing Yunlin Inventor before: Yan Feng Inventor before: Qin Jingwei Inventor before: Lou Yu Inventor before: Chen Liu Inventor before: Peng Chaobin Inventor before: Dou Shuo Inventor before: Zuo Hanwen Inventor before: Liu Haihong Inventor before: Hu Shuguang Inventor before: Xing Yunlin |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 317, Zone 2, 3rd Floor, No. 160 West Fourth Ring North Road, Haidian District, Beijing, 100080 Patentee after: China Electronics Engineering Design Institute Co.,Ltd. Address before: 100840 No. 27, Haidian District, Beijing, Wanshou Road Patentee before: CHINA ELECTRONICS ENGINEERING DESIGN INSTITUTE Co.,Ltd. |