CN106271587A - A kind of micro element space angle assembling device - Google Patents

A kind of micro element space angle assembling device Download PDF

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Publication number
CN106271587A
CN106271587A CN201610924612.9A CN201610924612A CN106271587A CN 106271587 A CN106271587 A CN 106271587A CN 201610924612 A CN201610924612 A CN 201610924612A CN 106271587 A CN106271587 A CN 106271587A
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China
Prior art keywords
micro
cylindricality
filament
vision
micro element
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CN201610924612.9A
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Chinese (zh)
Inventor
毕列
吴文荣
张娟
杨宏刚
王红莲
温明
彭博
魏红
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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Priority to CN201610924612.9A priority Critical patent/CN106271587A/en
Publication of CN106271587A publication Critical patent/CN106271587A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P19/00Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
    • B23P19/10Aligning parts to be fitted together
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P21/00Machines for assembling a multiplicity of different parts to compose units, with or without preceding or subsequent working of such parts, e.g. with programme control

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention discloses a kind of micro element space angle assembling device, for the space angle assembling of micron order filament with cylindricality micro element.This device includes: control main frame, two-dimensional quadrature micro-vision observation device, cylindricality micro element device for adjusting posture, filament pose adjusting apparatus, wherein, cylindricality micro element device for adjusting posture includes 3 rotary freedoms, and make three rotary shafts meet at a bit by structure design, cylindricality micro element geometric center is in three rotary shaft intersection points, when ensureing to adjust cylindricality micro element attitude, micro element is in micro-vision within sweep of the eye all the time, realize cylindricality micro element any attitude in three dimensions to adjust, meet various space angle matching requirements;Filament pose guiding mechanism includes 5 degree of freedom, for realizing the spatial pose location of micron order filament, coordinates assembling.The present invention can realize the high-precision spatial angle assembling of micron order filament and cylindricality micro element, and assembly precision is up to 0.3 °.

Description

A kind of micro element space angle assembling device
Technical field
The invention belongs to micro assemby technical field, be specifically related to a kind of micro element space angle assembling device, for micro- Meter level filament assembles with the space angle of cylindricality micro element.
Background technology
Along with the development of MEMS, micro parts assembling is had higher requirement.Guide based on micro-vision The Space configuration that micro assemby robot system is micro parts provide effective solution.
What Wuhan University of Technology and University Of Science and Technology Of Hunan developed assembles device online towards what the micro-part of submillimeter level assembled (Hu little Ping, Chen Guoliang, sun little Yan, Li Jun. micro-manipulating robot micro-vision system research, instrument and meter for automation, 2007,28 (2): 5-9.), use the stereomicroscopy vision prescription that orthogonal manner is formed, form the three-dimensional supervision to three-dimensional micro assemby space, Complete the Butt Assembling task of the micro-part of submillimeter level.But it is mainly used in the Butt Assembling of two same size cylindrical parts, no It is applicable to the space angle assembling compared with big and that angle of assembling is various micron order filament with cylindricality micro element of the two size difference.
The Central China University of Science and Technology develop micro assemby robot (the gold zone Chinese. micro assemby robot system research with realization, Central China University of Science and Technology's journal, 2011,39(supplementary issues II): 418-422), by microoperation mechanical hand, micro-vision and micro clamping device 3 part Constitute, use three mechanical hands to work in coordination with operation, it is possible to realize the fine registration to submillimeter part and assemble, there is certain applicable model Enclose.But this system is less to part angle pose adjustment degree of freedom, it is impossible to realize micro-multivariant attitude of part wide-angle and adjust Whole, it is impossible to meet micro element space angle matching requirements.
Micro element assembling designed by the patent of Institute of Automation Research of CAS's Application No. 201210340154.6 On-line measuring device, by controlling main frame, the three orthogonal micro-vision system in road, visual system attitude-adjusting system, micro element clamping Device, micro element Attitude control mechanism, light-source system sum printed words machine composition, can realize the high-precision flat of two micro elements Face Butt Assembling, precision is up to 3-5um.But it cannot carry out clamping and pick and place and wide-angle adjustment micron order filament, can not Cylindricality micro element is carried out multiple degrees of freedom any attitude adjustment, it is impossible to meet the requirement to spacial multi-angle assembling.
Although it can be seen that have made some progress in terms of micro parts assembling at present, but the system developed is most Assembling for planar alignment, angle assembling is less;Additionally assembling device degree of freedom is less, to angle pose adjustment degree of freedom not Enough;In microassembly system, the research for the assembling of three dimensions angle is less.
Summary of the invention
The technical problem to be solved is to provide a kind of micro element space angle assembling device.
The micro element space angle assembling device of the present invention, is characterized in, described assembling device includes: control main frame, Two-dimensional quadrature micro-vision observation device, cylindricality micro element device for adjusting posture, filament pose adjusting apparatus;Micron order filament is solid Being scheduled in filament pose adjusting apparatus, cylindricality micro element is fixed on cylindricality micro element device for adjusting posture, around arranges described Two-dimensional quadrature micro-vision observation device;Two-dimensional quadrature micro-vision observation device observation micron order filament and cylindricality micro element The picture signal of collection also is fed back to control on main frame by spatial pose, controls main frame and carries out angle detection coupling and send control Signal is to cylindricality micro element device for adjusting posture and filament pose adjusting apparatus, cylindricality micro element device for adjusting posture and filament position Appearance adjusting apparatus adjusts the pose of cylindricality micro element and micron order filament respectively, until micron order filament and the sky of cylindricality micro element Between angle meet assembly precision requirement, and use the fixing micron order filament of splicing and cylindricality micro element;
Described two-dimensional quadrature micro-vision observation device includes visual observation assembly, and visual observation assembly is by micro-vision assembly I, micro-vision assembly II is constituted, and described micro-vision assembly I is positioned on horizontal plane, and micro-vision assembly II is positioned at vertically In plane, micro-vision assembly I is 90 ° with the optical axis included angle of micro-vision assembly II;
Described two-dimensional quadrature micro-vision observation device also includes that observation controls device, and observation controls device by micro-vision position Putting adjusting apparatus I, micro-vision position regulator II composition, described micro-vision assembly I is fixed on micro-vision position In adjusting apparatus I, micro-vision assembly II is fixed on micro-vision position regulator II;Described micro-vision position is adjusted Engagement positions I and micro-vision position regulator II all have three degree of freedom, it is achieved micro-vision in the X, Y, Z direction accurate Location;
Described filament pose adjusting apparatus includes filament clamper and filament pose guiding mechanism, and micron order filament passes through filament Clamper is fixed on filament pose guiding mechanism, and described filament clamper clamps micron order filament by the mode of sticking, real Freely adjusting and coarse positioning of existing micron order filament attitude;Described filament pose guiding mechanism comprises 5 degree of freedom, it is achieved micro- Meter level filament X, Y, Z-direction be accurately positioned with in θ x, the angle adjustment in θ y direction;
Described cylindricality micro element device for adjusting posture includes cylindricality micro element clamper and cylindricality micro element attitude-adjusting system, Cylindricality micro element is fixed on cylindricality micro element attitude-adjusting system by cylindricality micro element clamper;Described cylindricality micro element Attitude-adjusting system includes 3 rotary freedoms, and three rotary shafts meet at a bit, it is achieved any tune of cylindricality micro element attitude Whole, meet any space angle matching requirements;Described cylindricality micro element clamper uses mechanical grip mode, facilitates part Freely pick and place, and can ensure that cylindricality micro element geometric center overlaps with the rotary shaft intersection point of cylindricality micro element attitude-adjusting system, Position deviation controls at-20um ~+20um, it is ensured that during pose adjustment, cylindricality micro element is all the time at micro-vision within sweep of the eye.
Built-in optical element respectively in described micro-vision assembly I, micro-vision assembly II, after external point source, interior Put optical element in lens barrel, produce axis light, be respectively used to micro-vision assembly I, micro-vision assembly II in observation process Illumination.
The end of described micron order filament and the angle rigging error of cylindricality micro element are less than or equal to 0.3 °.
The workflow of the micro element space angle assembling device of the present invention is as follows:
First, micron order filament and cylindricality micro element are separately mounted to described filament clamper and cylindricality micro element clamper On, now, micron order filament is apart from each other with cylindricality micro element.
Then, the micro-vision assembly I described in adjustment and the amplification of micro-vision assembly II.And pass through micro-vision Position regulator I and micro-vision position regulator II adjust micro-vision assembly I and micro-vision assembly II respectively Locus, makes cylindricality micro element be presented within sweep of the eye.By controlling the picture signal that main frame receives, detection cylindricality is micro- Device angles attitude, afterwards by controlling main frame transmission cylindricality micro element pose adjustment signal, adjusts cylindricality micro element attitude, directly Matching requirements station is reached to cylindricality micro element angle.
Again, adjust described filament pose adjusting apparatus, make micron order filament ends be presented within sweep of the eye, by control The picture signal that main frame processed receives, detects micron order filament axial angle, afterwards by controlling main frame transmission filament pose tune Entire signal, adjusts micron order filament pose, until micron order filament and cylindricality micro element angle meet assembly precision, completes micron Level filament and the assembling of cylindricality micro element, carry out a glue, fixing micron order filament and cylindricality micro element.
The present invention micro element space angle assembling device disclosure satisfy that micro element space angle assembling during to micron Level filament pose is monitored with the real-time of cylindricality micro element attitude, and can realize the registration of both angles, assemble and glued joint, and has The advantage of convenience and high-efficiency.
Accompanying drawing explanation
Fig. 1 is the micro element space angle assembling apparatus structure schematic diagram of the present invention;
Fig. 2 is the pose adjustment position angle schematic diagram of the micron order filament in the present invention and cylindricality micro element;
Fig. 3 is the workflow diagram of the micro element space angle assembling device of the present invention.
In figure, 1. micro-vision assembly I 2. micro-vision assembly II 3. micro-vision position regulator I 4. is micro- Visual position adjusting apparatus II 5. filament clamper 6. filament pose guiding mechanism 7. cylindricality micro element clamper 8. cylindricality Micro element attitude-adjusting system.
Detailed description of the invention
The present invention is described in detail below in conjunction with the accompanying drawings with embodiment.
As it is shown in figure 1, the micro element space angle assembling device of the present invention includes: control main frame, two-dimensional quadrature is micro-regards Feel observation device, cylindricality micro element device for adjusting posture, filament pose adjusting apparatus;Micron order filament is fixed on filament pose and adjusts In engagement positions, cylindricality micro element is fixed on cylindricality micro element device for adjusting posture, and around the two-dimensional quadrature described in layout is micro- Visual observation device, for the observation to micron order filament Yu cylindricality micro element spatial pose, sees two-dimensional quadrature micro-vision The picture signal surveying device collection feeds back on described control main frame, carries out angle detection coupling, controls main frame transmission and controls Signal, to cylindricality micro element device for adjusting posture and filament pose adjusting apparatus, adjusts micron order filament and cylindricality micro element position Appearance, until the space angle of micron order filament and cylindricality micro element meets assembly precision requirement, and uses splicing fixing;
Described two-dimensional quadrature micro-vision observation device includes visual observation assembly, and visual observation assembly is by micro-vision assembly I 1, micro-vision assembly II 2 is constituted, and described micro-vision assembly I 1 is positioned on horizontal plane, and micro-vision assembly II 2 is positioned at On perpendicular, micro-vision assembly I 1 is 90 ° with the optical axis included angle of micro-vision assembly II 2;
Described two-dimensional quadrature micro-vision observation device also includes that observation controls device, and observation controls device by micro-vision position Put adjusting apparatus I 3, micro-vision position regulator II 4 is constituted, and described micro-vision assembly I 1 is fixed on micro-vision position Putting in adjusting apparatus I 3, micro-vision assembly II 2 is fixed on micro-vision position regulator II 4;Described micro-vision Position regulator I 3 and micro-vision position regulator II 4 all have three degree of freedom, it is achieved micro-vision is in X, Y, Z-direction On be accurately positioned;
Described filament pose adjusting apparatus includes filament clamper 5 and filament pose guiding mechanism 6, and micron order filament is by thin Silk clamper 5 is fixed on filament pose guiding mechanism 6, and it is thin that described filament clamper 5 clamps micron order by the mode of sticking Silk, it is achieved freely adjusting and coarse positioning of micron order filament attitude;Described filament pose guiding mechanism 6 comprises 5 degree of freedom, Realize micron order filament X, Y, Z-direction be accurately positioned with in θ x, the angle adjustment in θ y direction;
Described cylindricality micro element device for adjusting posture includes cylindricality micro element clamper 7 and cylindricality micro element attitude-adjusting system 8, cylindricality micro element is fixed on cylindricality micro element attitude-adjusting system 8 by cylindricality micro element clamper 7;Described cylindricality is micro- Device attitude-adjusting system 8 includes 3 rotary freedoms, and three rotary shafts meet at a bit, it is achieved cylindricality micro element attitude Arbitrarily adjust, meet any space angle matching requirements;Described cylindricality micro element clamper 7 uses mechanical grip mode, side Just freely the picking and placeing of part, and can ensure that the rotary shaft of cylindricality micro element geometric center and cylindricality micro element attitude-adjusting system 8 Intersection point overlaps, and position deviation controls at-20um ~+20um, it is ensured that during pose adjustment, cylindricality micro element is all the time in the micro-vision visual field In the range of.
Built-in optical element respectively in described micro-vision assembly I 1, micro-vision assembly II 2, after external point source, Built-in optical element produces axis light in lens barrel, is respectively used to micro-vision assembly I 1, micro-vision assembly II 2 was being observed Illumination in journey.
The end of described micron order filament and the angle rigging error of cylindricality micro element are less than or equal to 0.3 °.
Embodiment 1
In embodiment 1, described micro-vision assembly I 1, micro-vision assembly II 2 are by the TXG50C of Baumer company of Switzerland The zoom microlens of CCD and Navitar company of the U.S. is constituted.Described micro-vision position adjusting mechanism I and micro-vision Position adjusting mechanism II all has the electrical position adjustor along tri-directions of X, Y, Z, is respectively used to micro-vision assembly I 1 with aobvious Micro-visual component II 2 along optical axis direction focal position adjust and along X, Y, Z axis to position adjustment.As in figure 2 it is shown, it is described Filament pose guiding mechanism 6 has 5 degree of freedom, is respectively along the three-D electric position regulator in X, Y, Z axis direction and around X, Y-axis Two-dimentional electronic rotation adjustor.The three-D electric that described cylindricality micro element attitude-adjusting system 8 comprises around X, Y, Z axis rotates Adjustor.Described micro-vision position adjusting mechanism I 3, micro-vision position adjusting mechanism II 4, filament pose guiding mechanism 6, cylindricality micro element attitude-adjusting system 8 all uses the electric precise platform of SURGUA company of Japan, and resolution is 1 μm.
In the present embodiment, micron order filament is cylindrical thread part, length about 5mm, and external diameter is about 50 μm, the micro-device of cylindricality Part external diameter is about 2mm, and assembling index is that micron order filament axes is at 45 ° with cylindricality micro element axis, angular error 0.3 ° with In, and micron order filament axes, cylindricality micro element axis are with support bar axis the most at grade.
Workflow is as shown in Figure 3:
Step 1: system initialization, controls each electrical position adjustor and returns to initial position;
Step 2:
2a. cylindricality micro element clamping, is arranged on cylindricality micro element on cylindricality micro element clamper 7;
2b. adjusts micro-vision position adjusting mechanism I 3 and micro-vision position adjusting mechanism II 4 by controlling main frame, makes cylindricality Micro element moves within sweep of the eye and focuses on, and gathers image;
2c. by control main frame receive micro-vision assembly I 1, the picture signal of micro-vision assembly II 2, micro-to cylindricality Device space angle detects;
2d., according to testing result, sends cylindricality micro element pose adjustment signal by controlling main frame, controls cylindricality micro element attitude Guiding mechanism 8, adjusts cylindricality micro element attitude.
2e. repeats step 2c, 2d, until cylindricality micro element space angle arrives matching requirements station;
Step 3:
3a. micron order filament clamping, is arranged on micron order filament on filament clamper 5;
3b. adjusts filament pose guiding mechanism 6 by controlling main frame, makes micron order filament move within sweep of the eye, gathers figure Picture;
3c. by control main frame receive micro-vision assembly I 1, the picture signal of micro-vision assembly II 2, to micron order Filaments space angle and position are detected;
3d. information according to the observation, sends filament pose adjustment signal by controlling main frame, controls filament pose guiding mechanism 6, adjust Whole micron order filament pose.
3e. repeats step 3c, 3d, until micron order filament and cylindricality micro element space angle meet assembly precision requirement;
Step 4:
Micron order filament has registrated with cylindricality micro element space angle, carries out micron order filament with cylindricality micro element contact point Point glue, fixing micron order filament ends and cylindricality micro element.
Particular embodiments described above, has been carried out the purpose of the present invention, technical scheme and beneficial effect the most in detail Describe in detail bright, be it should be understood that the specific embodiment that the foregoing is only the present invention, be not limited to the present invention, all Within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. done, should be included in the guarantor of the present invention Within the scope of protecting.

Claims (2)

1. a micro element space angle assembling device, it is characterised in that: described assembling device includes: control main frame, two dimension Orthogonal micro-vision observation device, cylindricality micro element device for adjusting posture, filament pose adjusting apparatus;Micron order filament is fixed on In filament pose adjusting apparatus, cylindricality micro element is fixed on cylindricality micro element device for adjusting posture, around two described in layout Orthogonal dimension micro-vision observation device;Two-dimensional quadrature micro-vision observation device observation micron order filament and cylindricality micro element space The picture signal of collection also is fed back to control on main frame by pose, controls main frame and carries out angle detection coupling and send control signal To cylindricality micro element device for adjusting posture and filament pose adjusting apparatus, cylindricality micro element device for adjusting posture is adjusted with filament pose Engagement positions adjusts the pose of cylindricality micro element and micron order filament respectively, until micron order filament and the Space Angle of cylindricality micro element Degree meets assembly precision requirement, and uses the fixing micron order filament of splicing and cylindricality micro element;
Described two-dimensional quadrature micro-vision observation device includes visual observation assembly, and visual observation assembly is by micro-vision assembly I (1), micro-vision assembly II (2) is constituted, and described micro-vision assembly I (1) is positioned on horizontal plane, micro-vision assembly II (2) is positioned on perpendicular, and micro-vision assembly I (1) is 90 ° with the optical axis included angle of micro-vision assembly II (2);
Described two-dimensional quadrature micro-vision observation device also includes that observation controls device, and observation controls device by micro-vision position Put adjusting apparatus I (3), micro-vision position regulator II (4) is constituted, and described micro-vision assembly I (1) is fixed on micro- In visual position adjusting apparatus I (3), micro-vision assembly II (2) is fixed on micro-vision position regulator II (4);Institute Micro-vision position regulator I (3) and the micro-vision position regulator II (4) stated all has oneself of tri-directions of X, Y, Z By spending;
Described filament pose adjusting apparatus includes filament clamper (5) and filament pose guiding mechanism (6), and micron order filament leads to Cross filament clamper (5) to be fixed on filament pose guiding mechanism (6);Described filament clamper (5) is pressed from both sides by the mode of sticking Hold micron order filament;Described filament pose guiding mechanism (6) comprises five direction degree of freedom of X, Y, Z, θ x, θ y;
Described cylindricality micro element device for adjusting posture includes cylindricality micro element clamper (7) and cylindricality micro element pose adjustment machine Structure (8), cylindricality micro element is fixed in cylindricality micro element attitude-adjusting system (8) by cylindricality micro element clamper (7);Described Cylindricality micro element attitude-adjusting system (8) include 3 rotary freedoms, and three rotary shafts meet at a bit;Described cylindricality Micro element clamper (7) uses mechanical grip mode, cylindricality micro element geometric center and cylindricality micro element attitude-adjusting system (8) Rotary shaft intersection point overlap, position deviation scope is-20um ~+20um.
A kind of micro element space angle assembling device the most according to claim 1, it is characterised in that: described micro-vision Difference built-in optical element in assembly I (1), micro-vision assembly II (2), after external point source, built-in optical element is at lens barrel Interior generation axis light, is respectively used to micro-vision assembly I (1), the micro-vision assembly II (2) illumination in observation process.
CN201610924612.9A 2016-10-24 2016-10-24 A kind of micro element space angle assembling device Pending CN106271587A (en)

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Cited By (11)

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CN108972557A (en) * 2018-08-16 2018-12-11 中国科学院自动化研究所 Micro- part pose automatic alignment apparatus and its method
CN109108613A (en) * 2018-11-12 2019-01-01 中国工程物理研究院激光聚变研究中心 Device is matched in a kind of makeup of axis hole parts batch
CN109514537A (en) * 2019-01-17 2019-03-26 中国工程物理研究院激光聚变研究中心 The complicated automatic microoperation arm-and-hand system of the micro- part of multi-configuration
CN109539989A (en) * 2019-01-17 2019-03-29 中国工程物理研究院激光聚变研究中心 A kind of on-line detecting system applied to the micro- part automatic assembling of complicated multi-configuration
CN109538591A (en) * 2019-01-17 2019-03-29 中国工程物理研究院激光聚变研究中心 The High Precision Automatic micro assemby equipment of micro-sized metal silk based on the monitoring of micro- pretightning force
CN110238649A (en) * 2019-06-19 2019-09-17 北京理工大学 A kind of reconfigurable man-machine coordination assembly system for aero-engine
CN110280989A (en) * 2019-06-24 2019-09-27 大连理工大学 A kind of filament automatic takeup that tensile force is controllable and method
CN110450072A (en) * 2019-08-26 2019-11-15 上海大学 A kind of mutual positioning and clamping method in micro-nano end based on three-dimensional imaging feedback
CN112676889A (en) * 2020-12-31 2021-04-20 苏州大学 Operating system for microassembly
CN115673707A (en) * 2022-10-26 2023-02-03 中国工程物理研究院激光聚变研究中心 Automatic micro-part feeding device and method
WO2024027826A1 (en) * 2022-08-04 2024-02-08 Lin Ta Chin Microscopic operating device

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CN102873523A (en) * 2012-09-13 2013-01-16 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
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CN102873523A (en) * 2012-09-13 2013-01-16 中国科学院自动化研究所 Device for detecting micro-devices on line during assembly based on micro-vision
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Cited By (18)

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CN108972557A (en) * 2018-08-16 2018-12-11 中国科学院自动化研究所 Micro- part pose automatic alignment apparatus and its method
CN109108613B (en) * 2018-11-12 2023-08-15 中国工程物理研究院激光聚变研究中心 Shaft hole part batch assembly device
CN109108613A (en) * 2018-11-12 2019-01-01 中国工程物理研究院激光聚变研究中心 Device is matched in a kind of makeup of axis hole parts batch
CN109514537A (en) * 2019-01-17 2019-03-26 中国工程物理研究院激光聚变研究中心 The complicated automatic microoperation arm-and-hand system of the micro- part of multi-configuration
CN109539989A (en) * 2019-01-17 2019-03-29 中国工程物理研究院激光聚变研究中心 A kind of on-line detecting system applied to the micro- part automatic assembling of complicated multi-configuration
CN109538591A (en) * 2019-01-17 2019-03-29 中国工程物理研究院激光聚变研究中心 The High Precision Automatic micro assemby equipment of micro-sized metal silk based on the monitoring of micro- pretightning force
CN109538591B (en) * 2019-01-17 2024-04-16 中国工程物理研究院激光聚变研究中心 Micron-sized metal wire high-precision automatic micro-assembly equipment based on micro-pretightening force monitoring
CN109539989B (en) * 2019-01-17 2024-04-16 中国工程物理研究院激光聚变研究中心 Online detection system applied to automatic assembly of complex multi-configuration micro parts
CN109514537B (en) * 2019-01-17 2024-04-05 中国工程物理研究院激光聚变研究中心 Automatic micromanipulation manipulator system for complex multi-configuration micro-parts
CN110238649B (en) * 2019-06-19 2020-09-25 北京理工大学 Reconfigurable man-machine cooperative assembly system for aircraft engine
CN110238649A (en) * 2019-06-19 2019-09-17 北京理工大学 A kind of reconfigurable man-machine coordination assembly system for aero-engine
CN110280989B (en) * 2019-06-24 2021-02-19 大连理工大学 Automatic tensioning device and method for tension-controllable filaments
CN110280989A (en) * 2019-06-24 2019-09-27 大连理工大学 A kind of filament automatic takeup that tensile force is controllable and method
CN110450072A (en) * 2019-08-26 2019-11-15 上海大学 A kind of mutual positioning and clamping method in micro-nano end based on three-dimensional imaging feedback
CN112676889A (en) * 2020-12-31 2021-04-20 苏州大学 Operating system for microassembly
CN112676889B (en) * 2020-12-31 2022-02-01 苏州大学 Operating system for microassembly
WO2024027826A1 (en) * 2022-08-04 2024-02-08 Lin Ta Chin Microscopic operating device
CN115673707A (en) * 2022-10-26 2023-02-03 中国工程物理研究院激光聚变研究中心 Automatic micro-part feeding device and method

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