CN106239371A - Dresser gas handling system and buffing machine - Google Patents
Dresser gas handling system and buffing machine Download PDFInfo
- Publication number
- CN106239371A CN106239371A CN201610855025.9A CN201610855025A CN106239371A CN 106239371 A CN106239371 A CN 106239371A CN 201610855025 A CN201610855025 A CN 201610855025A CN 106239371 A CN106239371 A CN 106239371A
- Authority
- CN
- China
- Prior art keywords
- control valve
- dresser
- main pipe
- pipe rail
- handling system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M35/00—Combustion-air cleaners, air intakes, intake silencers, or induction systems specially adapted for, or arranged on, internal-combustion engines
- F02M35/10—Air intakes; Induction systems
Abstract
The invention discloses a kind of dresser gas handling system and buffing machine, dresser gas handling system includes: vacuum source；Vacuum line, described vacuum line is connected with described vacuum source；Compressed air source；Compressed air line, described compressed air line is connected with described compressed air source；Dresser, described dresser is formed with loading chamber, and described loading chamber is optionally connected with described vacuum line, described compressed air line and air.By the on off operating mode between conservative control dresser and vacuum source, compressed air source and air source, the state loading chamber in dresser can be changed, and when original state, air source can be to LOADED CAVITY indoor infeed air, such that it is able to avoid loading chamber to shrink the breakage caused and life-span minimizing for a long time, and can avoid consuming the energy.
Description
Technical field
The present invention relates to polissoir technical field, particularly relate to a kind of dresser gas handling system and there is this dresser
The buffing machine of gas handling system.
Background technology
In chemically mechanical polishing, along with the carrying out of polishing process, the physics of polishing pad and chemical property can change,
Polishing speed and quality of finish is caused to reduce.Therefore, in polishing process, polishing pad must be carried out suitable finishing, dresser
Polishing pad can be repaired, so can improve polishing effect, improve the service life of polishing pad, reduce polishing cost.
But, dresser in an initial condition, utilizes negative pressure to be disengaged with polishing pad by finishing head, now loads chamber in dresser
It is in contraction state, dresser loads chamber flexible piece and is in stress for a long time and can reduce service life；And need
Negative pressure is provided constantly, therefore remains a need in an initial condition consuming the energy.And, dresser, under detection inspecting state, is carried out
Air-leakage test typically requires the artificial import trachea that cuts off and blocks ventilation, it is achieved pressure holding function, is not easy to operation.
Summary of the invention
It is contemplated that one of technical problem solved the most to a certain extent in correlation technique.To this end, the present invention carries
Going out a kind of dresser gas handling system, this dresser gas handling system feeds air when can be in original state loading chamber, from
And can avoid loading chamber and shrink the life-span minimizing caused for a long time, and can avoid consuming the energy.
The present invention proposes a kind of buffing machine further.
Dresser gas handling system according to the present invention, including: vacuum source；Vacuum line, described vacuum line with described very
Empty source is connected；Compressed air source；Compressed air line, described compressed air line is connected with described compressed air source；Dresser,
Described dresser is formed with loading chamber, described loading chamber optionally with described vacuum line, described compressed air line
It is connected with air.
Dresser gas handling system according to the present invention, by conservative control dresser and vacuum source, compressed air source and big
On off operating mode between source of the gas, thus it is possible to vary the state loading chamber in dresser, and when original state, air source can
With to LOADED CAVITY indoor infeed air, such that it is able to avoid loading the breakage of chamber and life-span minimizing, and can avoid consuming
The energy.
It addition, can also have a following additional technical feature according to the dresser gas handling system of the present invention:
In some examples of the present invention, described dresser gas handling system also includes: the first control valve, the second control valve,
3rd control valve and main pipe rail, described main pipe rail is connected between described first control valve and described dresser, described first control
Described main pipe rail is optionally connected by valve processed with described vacuum line and described compressed air line, and described second control valve sets
Put on described main pipe rail and connect with described first control valve and optionally by described main pipe rail and described first control valve
It is connected with described air, main pipe rail described in described 3rd control valve optionally break-make.
In some examples of the present invention, described first control valve and described second control valve are two-position three-way valve, described
3rd control valve is two-way valve.
In some examples of the present invention, described dresser gas handling system also includes: the first control valve, the second control valve,
3rd control valve and main pipe rail, described main pipe rail is connected between described first control valve and described dresser, described first control
Described main pipe rail is optionally connected by valve processed with described vacuum line and described compressed air line, described second control valve with
Described main pipe rail is connected and in parallel with described first control valve and optionally main pipe rail and described air described in break-make, and described
Main pipe rail described in three control valves optionally break-make.
In some examples of the present invention, described first control valve is two-position three-way valve and described second control valve and described
3rd control valve is respectively two-way valve.
In some examples of the present invention, described dresser gas handling system also includes: the first control valve, the second control valve,
3rd control valve and main pipe rail, described first control valve is arranged on described vacuum line and optionally vacuum tube described in break-make
Road, described second control valve is arranged on described compressed air line optionally compressed air line described in break-make, and described
Three control valves are connected with described main pipe rail and and optionally break-make in parallel with described first control valve and described second control valve
Described air and described main pipe rail.
In some examples of the present invention, described first control valve, described second control valve and described 3rd control valve are divided
Wei two-way valve.
In some examples of the present invention, described vacuum line being provided with air relief valve and filter, described air relief valve leans on
Nearly described vacuum source, described compressed air line is provided with air relief valve.
In some examples of the present invention, described dresser gas handling system also includes: pressure transducer, described pressure sensing
Device is for detecting the pressure of described loading chamber.
According to buffing machine of the present invention, including above-mentioned dresser gas handling system.
Described buffing machine is identical with the beneficial effect of described dresser gas handling system, is not described in detail in this.
Accompanying drawing explanation
Fig. 1 is the structural representation of dresser gas handling system according to a first embodiment of the present invention；
Fig. 2 is the structural representation of dresser gas handling system according to a second embodiment of the present invention；
Fig. 3 is the structural representation of dresser gas handling system according to a third embodiment of the present invention.
Reference:
Dresser gas handling system 100；
Vacuum line 10；The air relief valve 11 of vacuum line；Filter 12；
Compressed air line 20；The air relief valve 21 of compressed air line；
Dresser 30；Finishing 31；Load chamber 32；
First control valve 40；Second control valve 50；3rd control valve 60；Main pipe rail 70；Pressure transducer 80.
Detailed description of the invention
Embodiments of the invention are described below in detail, and the example of described embodiment is shown in the drawings.Below with reference to
The embodiment that accompanying drawing describes is exemplary, it is intended to is used for explaining the present invention, and is not considered as limiting the invention.
Below with reference to the accompanying drawings dresser gas handling system 100 according to embodiments of the present invention is described in detail, this dresser air inlet
System 100 can be applied on buffing machine.
Dresser gas handling system 100 according to embodiments of the present invention may include that vacuum source, vacuum line 10, compression sky
Source of the gas, compressed air line 20, dresser 30, pressure transducer 80, main pipe rail the 70, first control valve the 40, second control valve 50
With the 3rd control valve 60.
As shown in Figure 1-Figure 3, vacuum line 10 is connected with vacuum source, and compressed air line 20 is connected with compressed air source,
Wherein, vacuum source can be to accommodate the container of vacuum or produce the equipment of vacuum, and compressed air source can be to produce compression sky
The equipment of gas or accommodate compressed-air actuated container.Preferably, as shown in 1 figure-Fig. 3, vacuum line 10 is also provided with
Air relief valve 11 and filter 12, air relief valve 11 is arranged near vacuum source.It is to say, enter in vacuum line 10 from vacuum source
Flowing to filter 12 after the decompression that vacuum can first pass through air relief valve 11, filter 12 refilters the gas of suction.As 1 figure-
Shown in Fig. 3, compressed air line 20 can also be provided with air relief valve 21.
As shown in Figure 1-Figure 3, dresser 30 be formed loading chamber 32, load chamber 32 optionally with vacuum line 10
It is connected with air with compressed air line 20, say, that vacuum source can be fed to loading chamber 32 by vacuum line 10
Vacuum, compressed air source can feed compressed air by compressed air line 20 to loading chamber 32, and air source can be to adding
Carrying chamber 32 and feed air, air source can be directly ambient atmosphere environment, or, air source can be the output of corresponding air
Equipment.
For dresser 30 and vacuum line 10, attachment structure between compressed air line 20 and air source will later
Content in combine multiple embodiment describe in detail.
According to the first advantageous embodiment of the invention, as it is shown in figure 1, main pipe rail 70 is connected to the first control valve 40 and finishing
Between device 30, main pipe rail 70 is optionally connected by the first control valve 40 with vacuum line 10 and compressed air line 20, and second
Control valve 50 is arranged on main pipe rail 70, and the second control valve 50 is connected with the first control valve 40, and the second control valve 50
Optionally main pipe rail 70 is connected with the first control valve 40 and air, the 3rd control valve 60 optionally break-make main pipe rail 70.
It should be noted that above-mentioned main pipe rail 70 is connected with the first control valve 40 and refers to the first control valve 40 and be in
Connected state, vacuum or compressed gas enter main pipe rail 70, and the second control valve 50 is in connection main pipe rail 70 and first and controls
During valve 40 state, vacuum or compressed gas can pass through the second control valve 50, if the 3rd control valve 60 is in connected state,
In so vacuum or compressed gas can enter into loading chamber 32.It is to say, vacuum or compressed gas add in the flow direction
When carrying chamber 32, need through the first control valve the 40, second control valve 50 and control of the 3rd control valve 60, if one of them
Being off, vacuum or compressed gas all cannot flow to load chamber 32.
Air needs through the second control valve 50 and the 3rd control valve 60, when second during flowing to load chamber 32
Control valve 50 is in connection air and is in when connecting main pipe rail 70 state with main pipe rail 70 state and the 3rd control valve 60, and air can
To flow to load chamber 32.When in the second control valve 50 and the 3rd control valve 60 is off, the equal nothing of air
Method flows to load chamber 32.
3rd control valve 60 controls the break-make of main pipe rail 70 self, when the 3rd control valve 60 is off, loads
Chamber 32 can enter airtight packing state.
Wherein, as it is shown in figure 1, the first control valve 40 and the second control valve 50 can be respectively two-position three-way valve, the 3rd control
Valve 60 processed can be two-way valve.By rationally arranging the first control valve the 40, second control valve 50 and type of the 3rd control valve 60,
So that dresser gas handling system 100 simple in construction, control logic simple.
The second preferred embodiment according to the present invention, as in figure 2 it is shown, main pipe rail 70 is connected to the first control valve 40 and finishing
Between device 30, main pipe rail 70 is optionally connected by the first control valve 40 with vacuum line 10 and compressed air line 20, and second
Control valve 50 is connected with main pipe rail 70, and the second control valve 50 is in parallel with the first control valve 40, and the second control valve 50 is selected
Selecting property ground break-make main pipe rail 70 and air, the 3rd control valve 60 optionally break-make main pipe rail 70.Shown in Fig. 1 and Fig. 2, can
To find out that the dresser gas handling system 100 shown in Fig. 2 differs primarily in that second with the dresser gas handling system 100 shown in Fig. 1
The layout of control valve 50, in fig. 2, the second control valve 50 directly controls the break-make between air source and main pipe rail 70, does not join
And the break-make between the first control valve 40 and main pipe rail 70, but controlled the first control valve 40 and LOADED CAVITY by the 3rd control valve 60
Break-make between room 32, certainly, the 3rd control valve 60 also controls the second control valve 50 and the break-make loaded between chamber 32.By
This, the first control valve 40 can be two-position three-way valve, and the second control valve 50 and the 3rd control valve 60 are respectively two-way valve.This
Sample, so that dresser gas handling system 100 simple in construction, controls logic simpler.
According to the third preferred embodiment of the present invention, as it is shown on figure 3, the first control valve 40 is arranged on vacuum line 10 also
Optionally break-make vacuum line 10, the second control valve 50 is arranged on compressed air line 20 optionally break-make compressed air
Pipeline 20, the 3rd control valve 60 is connected with main pipe rail 70, and the 3rd control valve 60 and the first control valve 40 and the second control valve
50 is in parallel, and the 3rd control valve 60 optionally break-make air and main pipe rail 70.It is to say, be provided with on vacuum line 10
The on-off valve of oneself, compressed air line 20 is provided with the on-off valve of oneself, is also equipped with between air source and main pipe rail 70
The on-off valve of oneself, so so that dresser gas handling system 100 structure is simpler, controls logic simpler.Wherein,
First control valve the 40, second control valve 50 and the 3rd control valve 60 can be respectively two-way valve.
As shown in Figure 1-Figure 3, pressure transducer 80 may be used for the pressure of detection loading chamber 32.Thus, it is possible to according to
The testing result of pressure transducer 80 may determine that the sealing effectiveness loading chamber 32, and may determine that added by loading chamber 32
Whether the force value carried is as the force value set.
As a example by the dresser gas handling system 100 shown in Fig. 1, the state loading chamber 32 is described in detail below.
As it is shown in figure 1, dresser 30 can include finishing 31, at finishing 31, it is formed with loading chamber 32.Finishing head
Loading chamber 32 in 31 can have three air inlets, and three air inlets enter for vacuum, compressed gas and air respectively, institute
To load at least corresponding three below state of chamber 32: with compressed air communicating state and vacuum communicating state and with big gas phase
Logical state.Certainly, by controlling the first control valve the 40, second control valve 50 and break-make of the 3rd control valve 60, load chamber 32
Can also have airtight packing state.
When loading chamber 32 and being in original state, loading chamber 32 and communicate with air, the second control valve 50 connects air
With main pipe rail 70, the 3rd control valve 60 is in connected state.So can avoid loading chamber 32 and be in the most contraction-like
State, such that it is able to avoid the breakage of finishing 31 and life-span to reduce, and can avoid consuming the energy.
Then, the 3rd control valve 60 disconnects, so so that load chamber 32 and can be switched to from original state airtight
Packing state, pressure transducer 80 can detect the force value loaded in chamber 32, to judge that the sealing loading chamber 32 is
No well.
First control valve 40 can control the break-make between vacuum line 10 and main pipe rail 70, and can control compression sky
Break-make between air pipe 20 and main pipe rail 70, when the first control valve 40 connects with vacuum line 10 and the second control valve 50 and
When 3rd control valve 60 does not affect the vacuum flow between vacuum line 10 and main pipe rail 70, vacuum enters into loading chamber 32
In.When the first control valve 40 connects with compressed air line 20 and the second control valve 50 and the 3rd control valve 60 do not affect compression
When compressed air between air pipe line 20 and main pipe rail 70 flows, compressed air enters in loading chamber 32.Above-mentioned
Two control valves 50 do not affect vacuum with the 3rd control valve 60 or compressed gas flow refers to the second control valve 50 and connects first
Control valve 40 and main pipe rail 70, the 3rd control valve 60 is in connected state.First control valve 40 can also be by vacuum line 10 He
Compressed air line 20 simultaneously switches off.
The state loading chamber 32 in dresser gas handling system 100 shown in Fig. 2 and Fig. 3 and the dresser shown in Fig. 1
The state loading chamber 32 of gas handling system 100 is identical, and difference essentially consists in the difference of the on off operating mode of multiple control valve, ability
The technical staff in territory can clearly be obtained by comparison Fig. 2 with Fig. 3 and load multiple control valves corresponding to chamber 32 different conditions
On off operating mode, is not described in detail in this.
Dresser gas handling system 100 according to embodiments of the present invention, by conservative control dresser 30 and vacuum source, compression
On off operating mode between air source and air source, thus it is possible to vary the state loading chamber 32 in dresser 30, and initially
During state, air source can feed air in loading chamber 32, such that it is able to avoid the breakage of loading chamber 32 and life-span to subtract
Few, and can avoid consuming the energy.
Buffing machine according to embodiments of the present invention, including the dresser gas handling system 100 of above-described embodiment.
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " specifically show
Example " or the description of " some examples " etc. means to combine this embodiment or example describes specific features, structure, material or spy
Point is contained at least one embodiment or the example of the present invention.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be in office
One or more embodiments or example combine in an appropriate manner.Additionally, in the case of the most conflicting, the skill of this area
The feature of the different embodiments described in this specification or example and different embodiment or example can be tied by art personnel
Close and combination.
Although above it has been shown and described that embodiments of the invention, it is to be understood that above-described embodiment is example
Property, it is impossible to being interpreted as limitation of the present invention, those of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, revises, replaces and modification.
Claims (10)
1. a dresser gas handling system, it is characterised in that including:
Vacuum source；
Vacuum line, described vacuum line is connected with described vacuum source；
Compressed air source；
Compressed air line, described compressed air line is connected with described compressed air source；
Dresser, described dresser is formed with loading chamber, described loading chamber optionally with described vacuum line, described pressure
Contracting air pipe line is connected with air.
Dresser gas handling system the most according to claim 1, it is characterised in that also include: the first control valve, the second control
Valve, the 3rd control valve and main pipe rail, described main pipe rail is connected between described first control valve and described dresser, and described first
Described main pipe rail is optionally connected by control valve with described vacuum line and described compressed air line, described second control valve
It is arranged on described main pipe rail and connects with described first control valve and optionally described main pipe rail controlled with described first
Valve is connected with described air, main pipe rail described in described 3rd control valve optionally break-make.
Dresser gas handling system the most according to claim 2, it is characterised in that described first control valve and described second control
Valve processed is two-position three-way valve, and described 3rd control valve is two-way valve.
Dresser gas handling system the most according to claim 1, it is characterised in that also include: the first control valve, the second control
Valve, the 3rd control valve and main pipe rail, described main pipe rail is connected between described first control valve and described dresser, and described first
Described main pipe rail is optionally connected by control valve with described vacuum line and described compressed air line, described second control valve
It is connected with described main pipe rail and and optionally break-make described in main pipe rail and described air in parallel with described first control valve, described
Main pipe rail described in 3rd control valve optionally break-make.
Dresser gas handling system the most according to claim 4, it is characterised in that described first control valve is two-position three-way valve
And described second control valve and described 3rd control valve are respectively two-way valve.
Dresser gas handling system the most according to claim 1, it is characterised in that also include: the first control valve, the second control
Valve, the 3rd control valve and main pipe rail, described first control valve is arranged on described vacuum line and optionally true described in break-make
Blank pipe road, described second control valve is arranged on described compressed air line optionally compressed air line described in break-make, institute
State the 3rd control valve to be connected with described main pipe rail and in parallel with described first control valve and described second control valve and optionally
Air described in break-make and described main pipe rail.
Dresser gas handling system the most according to claim 6, it is characterised in that described first control valve, described second control
Valve processed and described 3rd control valve are respectively two-way valve.
Dresser gas handling system the most according to claim 1, it is characterised in that be provided with air relief valve on described vacuum line
And filter, described air relief valve is provided with air relief valve on described vacuum source, described compressed air line.
Dresser gas handling system the most according to claim 1, it is characterised in that also include: pressure transducer, described pressure
Sensor is for detecting the pressure of described loading chamber.
10. a buffing machine, it is characterised in that include according to the dresser gas handling system according to any one of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610855025.9A CN106239371B (en) | 2016-09-26 | 2016-09-26 | Trimmer gas handling system and polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610855025.9A CN106239371B (en) | 2016-09-26 | 2016-09-26 | Trimmer gas handling system and polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106239371A true CN106239371A (en) | 2016-12-21 |
| CN106239371B CN106239371B (en) | 2018-10-16 |
Family
ID=57611574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610855025.9A Active CN106239371B (en) | 2016-09-26 | 2016-09-26 | Trimmer gas handling system and polishing machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN106239371B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114083426A (en) * | 2021-11-26 | 2022-02-25 | 北京烁科精微电子装备有限公司 | Pressure control device, polishing head device and chemical mechanical polishing equipment |
| WO2022248249A1 (en) * | 2021-05-24 | 2022-12-01 | Festo Se & Co. Kg | Pneumatic control system for providing compressed air and vacuum |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022248249A1 (en) * | 2021-05-24 | 2022-12-01 | Festo Se & Co. Kg | Pneumatic control system for providing compressed air and vacuum |
| CN114083426A (en) * | 2021-11-26 | 2022-02-25 | 北京烁科精微电子装备有限公司 | Pressure control device, polishing head device and chemical mechanical polishing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106239371B (en) | 2018-10-16 |
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Address after: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Co-patentee after: TSINGHUA University Patentee after: Huahaiqingke Co.,Ltd. Address before: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Co-patentee before: TSINGHUA University Patentee before: TSINGHUA University |
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