CN106227148A - A kind of Graphene volume to volume continuous growth apparatus electric control system - Google Patents

A kind of Graphene volume to volume continuous growth apparatus electric control system Download PDF

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Publication number
CN106227148A
CN106227148A CN201610891589.8A CN201610891589A CN106227148A CN 106227148 A CN106227148 A CN 106227148A CN 201610891589 A CN201610891589 A CN 201610891589A CN 106227148 A CN106227148 A CN 106227148A
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CN
China
Prior art keywords
control unit
central processing
unit
collecting chamber
plc central
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Pending
Application number
CN201610891589.8A
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Chinese (zh)
Inventor
孔令杰
张志琴
梁立国
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Anhui Bei Yike Equipment And Technology Co Ltd
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Anhui Bei Yike Equipment And Technology Co Ltd
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Priority to CN201610891589.8A priority Critical patent/CN106227148A/en
Publication of CN106227148A publication Critical patent/CN106227148A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/05Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
    • G05B19/054Input/output
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/10Plc systems
    • G05B2219/11Plc I-O input output
    • G05B2219/1103Special, intelligent I-O processor, also plc can only access via processor

Abstract

The invention discloses a kind of Graphene volume to volume continuous growth apparatus electric control system, including human-computer interaction interface, PLC central processing unit, control system, sealing cavity;Control system includes gas flow rate control unit, charging cabin control unit, heat control unit, collecting chamber control unit, vacuum detecting unit;Seal cavity and include gas mass flow controller, mixed gas tank, charging cabin, temperature controller, three sections of thermals treatment zone, collecting chamber, vacuum pump, flapper valves.The present invention passes through the cooperation each other of human-computer interaction interface, PLC central processing unit, control system, sealing cavity and controls to connect, the cavity that one seals is integrated with and includes heating, vacuum detecting, mixed gas supply, charging and collection device and tension force detection five big utility function, and all can complete on display screen touching, each control unit is separate, simple to operate, user can light left-hand seat, automaticity is high.

Description

A kind of Graphene volume to volume continuous growth apparatus electric control system
Technical field
The invention belongs to graphene growth apparatus field, particularly relate to a kind of continuous growth apparatus of Graphene volume to volume electric Control system.
Background technology
Graphene be at present the thinnest be also the hardest nano material, it is almost fully transparent, at all band Only absorb the light of about 2.3%;Heat conductivity is up to 5300W/m K, higher than CNT and diamond;Under room temperature, its electronics moves Shifting rate, more than 15000cm2/V s, exceedes CNT and silicon crystal, and resistivity only about 10-6 Ω cm, than copper or silver Lower, it is the material that resistivity is minimum in the world.Owing to Graphene is collection superelevation mechanical strength, thermal conductive resin, high optics The excellent properties such as transparency and superpower electric conductivity is in the new material of one, and it is not only suitable for basic physics research, such as dosis refracta Integer quantum Hall effect etc. under sub-Hall effect, room temperature, and have wide in fields such as display, the energy, detection, photoelectrons Application prospect, such as molecular detector, thermal conductance/thermal interfacial material, field emission source, ultracapacitor, solaode, Graphene Lithium battery, field-effect transistor and integrated circuit, transparency conductive electrode etc..The applied research of Graphene has great market Prospect, it will bring revolutionary transformation to numerous research fields, such as: the lithium battery made with Graphene super capacitor can realize Quick charge in 1 minute, and electric discharge high-power, high efficiency can be realized, this has not only broken the charging of traditional lithium electricity and has limited slowly, Also by for the popularization of electric automobile industry and development, but also the protection to environment, the development of green energy resource provides new machine Meet;The performance of graphene field effect transistor will exceed well over silicon transistor, owing to Graphene resistivity is extremely low, and the speed that electronics runs It is exceedingly fast, is therefore expected to for developing thinner, conduction speed a new generation's electronic component or transistor faster, because Graphene Good compatibility is had, so being expected to substitute whole silica-based industry in the future with silicon;Graphene transparency conductive electrode not only has good Good conduction property and high light transmission, also show good pliability and mechanical strength, and performance is better than the most normal Indium tin oxide transparency electrode, and low cost, environmentally safe, additionally, flexible and transparent conductive electrode is also of future generation The development trend of transparency electrode.
Widely studied through in recent years, has been developed that some methods preparing Graphene at present, as mechanical stripping method, Epitaxial growth method, electronation graphite oxide method, chemical vapour deposition technique (CVD) etc., these graphene preparation methods mostly may be used To obtain the Graphene sample of use for laboratory under given conditions.But the continuous growth apparatus of Graphene volume to volume lacks good Electric control system, owing to traditional electric control system structure is complicated, operation inconvenience, to staff and whole prepared Journey brings great inconvenience.
Summary of the invention
It is an object of the invention to the problem above overcoming prior art to exist, it is provided that a kind of Graphene volume to volume is given birth to continuously Long equipment electrical control system, simple in construction, easy to operate.
For realizing above-mentioned technical purpose, reaching above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of Graphene volume to volume continuous growth apparatus electric control system, processes including human-computer interaction interface, PLC central authorities Device, control system, sealing cavity;
Wherein, described control system includes gas flow rate control unit, charging cabin control unit, heat control unit, receipts Collection cabin control unit, vacuum detecting unit;
Described sealing cavity includes gas mass flow controller, mixed gas tank, charging cabin, temperature controller, three sections of thermals treatment zone, receipts Collection cabin, vacuum pump, flapper valve;
Described human-computer interaction interface interacts with PLC central processing unit and is connected, and the described PLC central processing unit other end divides Not with gas flow rate control unit, feed cabin control unit, heat control unit, collecting chamber control unit, vacuum detecting unit Carry out both-way communication connection.
Further, described gas flow rate control unit is connected with each other with gas mass flow controller, described charging cabin Control unit is connected with each other with charging cabin, and described heat control unit is connected with each other with temperature controller, described collecting chamber control unit Being connected with each other with collecting chamber, described vacuum detecting unit is connected with each other with vacuum pump;
Wherein, described gas flow rate control unit is for receiving the gas flow control signal from PLC central processing unit And gas flow size, opening time length are controlled;
Described charging cabin control unit is for receiving from the charging cabin control signal of PLC central processing unit and to feeding storehouse Feeding be controlled;
Described heat control unit is for receiving the temperature signal from PLC central processing unit the heating temperature to the thermal treatment zone Degree is controlled;
Described collecting chamber control unit is for receiving from the collecting chamber control signal of PLC central processing unit and to collecting chamber Collection be controlled;
Described vacuum detecting unit is for receiving from the vacuum detecting control signal of PLC central processing unit and to vacuum pump It is controlled;
Described PLC central processing unit for gas flow rate control unit, charging cabin control unit, heat control unit, Collecting chamber control unit, vacuum detecting unit are controlled and receive respectively controlling from gas flow rate control unit, charging cabin Unit, heat control unit, collecting chamber control unit, the feedback information of vacuum detecting unit;
Described human-computer interaction interface is used for sending operating control signal and to PLC central processing unit and receives from PLC central authorities The feedback signal of processor;
Described gas mass flow controller receives and controls mixed gas after the control information of gas flow rate control unit Tank carries out mixed gas supply, is controlled gas flow size, opening time length by the mixed gas tank of regulation, and exports extremely Charging cabin, material is exported to three sections of thermals treatment zone by described charging cabin, and described temperature controller is by receiving the control of heat control unit Information carries out computer heating control to the material in three sections of thermals treatment zone, is then carried out material collection, described vacuum detecting list by collecting chamber Unit receives control vacuum pump after the control signal of PLC central processing unit and operates, and manual unlocking flapper valve works as cut out During manual gear plate valve, vacuum pump shuts down.
Further, described charging cabin includes winding motor E and tension motor D, described collecting chamber include tension motor C, Row is around motor B, winding motor A.
Further, described human-computer interaction interface includes touching display screen and button.
The invention has the beneficial effects as follows:
The present invention passes through human-computer interaction interface, PLC central processing unit, control system, the cooperation each other of sealing cavity Control connect, by one seal cavity be integrated with include heating, vacuum detecting, mixed gas supply, feed and collection device, Detecting five big utility function with tension force, and all can complete on display screen touching, each control unit is separate, operation letter Single, Various types of data shows and equipment working state is directly perceived, accurate, and very clear, data can store, derive, and user can be light Left-hand seat, automaticity is high.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this Bright schematic description and description is used for explaining the present invention, is not intended that inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the system architecture diagram of the present invention.
Detailed description of the invention
Below with reference to the accompanying drawings and in conjunction with the embodiments, the present invention is described in detail.
A kind of Graphene volume to volume continuous growth apparatus electric control system as shown in Figure 1, including human-computer interaction interface, PLC central processing unit, control system, sealing cavity;
Wherein, control system includes gas flow rate control unit, charging cabin control unit, heat control unit, collecting chamber Control unit, vacuum detecting unit;
Seal cavity and include gas mass flow controller, mixed gas tank, charging cabin, temperature controller, three sections of thermals treatment zone, collections Cabin, vacuum pump, flapper valve;
Human-computer interaction interface interacts with PLC central processing unit and is connected, the PLC central processing unit other end respectively with gas Flow controlling unit, charging cabin control unit, heat control unit, collecting chamber control unit, vacuum detecting unit carry out two-way Communication connects.
Further, gas flow rate control unit is connected with each other with gas mass flow controller, charging cabin control unit Being connected with each other with charging cabin, heat control unit is connected with each other with temperature controller, and collecting chamber control unit is connected with each other with collecting chamber, Vacuum detecting unit is connected with each other with vacuum pump;
Wherein, gas flow rate control unit is for receiving from the gas flow control signal of PLC central processing unit right Gas flow size, opening time length are controlled;
Charging cabin control unit is for receiving feeding cabin control signal and sending feeding storehouse from PLC central processing unit Material is controlled;
Heat control unit enters for receiving the temperature signal from PLC central processing unit the heating-up temperature to the thermal treatment zone Row controls;
Collecting chamber control unit is for receiving from the collecting chamber control signal of PLC central processing unit the receipts to collecting chamber Collection is controlled;
Vacuum pump from the vacuum detecting control signal of PLC central processing unit and is carried out by vacuum detecting unit for receiving Control;
PLC central processing unit is for gas flow rate control unit, charging cabin control unit, heat control unit, collection Cabin control unit, vacuum detecting unit be controlled and receive respectively from gas flow rate control unit, charging cabin control unit, Heat control unit, collecting chamber control unit, the feedback information of vacuum detecting unit;
Human-computer interaction interface is used for sending operating control signal and to PLC central processing unit and receives from the process of PLC central authorities The feedback signal of device, human-computer interaction interface includes touching display screen and button;
Gas mass flow controller receives the mixed gas tank of control after the control information of gas flow rate control unit and enters Row mixed gas supplies, and is controlled gas flow size, opening time length by the mixed gas tank of regulation, and exports to charging Cabin, charging cabin includes that material is exported to three sections of thermals treatment zone by winding motor E and tension motor D, charging cabin, and temperature controller is by receiving The control information of heat control unit carries out computer heating control to the material in three sections of thermals treatment zone, is then carried out material receipts by collecting chamber Collection, collecting chamber includes tension motor C, arranges around motor B, winding motor A, and vacuum detecting unit receives and processes from PLC central authorities Controlling vacuum pump after the control signal of device to operate, manual unlocking flapper valve, when closing manual gear plate valve, vacuum pump stops Operating.
The present invention passes through human-computer interaction interface, PLC central processing unit, control system, the cooperation each other of sealing cavity Control connect, by one seal cavity be integrated with include heating, vacuum detecting, mixed gas supply, feed and collection device, Detecting five big utility function with tension force, and all can complete on display screen touching, each control unit is separate, operation letter Single, Various types of data shows and equipment working state is directly perceived, accurate, and very clear, data can store, derive, and user can be light Left-hand seat, automaticity is high.
The ultimate principle of the present invention, principal character and advantages of the present invention have more than been shown and described.The technology of the industry Personnel, it should be appreciated that the present invention is not restricted to the described embodiments, simply illustrating this described in above-described embodiment and description The principle of invention, without departing from the spirit and scope of the present invention, the present invention also has various changes and modifications, and these become Change and improvement both falls within scope of the claimed invention.

Claims (4)

1. a Graphene volume to volume continuous growth apparatus electric control system, it is characterised in that: include human-computer interaction interface, PLC central processing unit, control system, sealing cavity;
Wherein, described control system includes gas flow rate control unit, charging cabin control unit, heat control unit, collecting chamber Control unit, vacuum detecting unit;
Described sealing cavity includes gas mass flow controller, mixed gas tank, charging cabin, temperature controller, three sections of thermals treatment zone, collections Cabin, vacuum pump, flapper valve;
Described human-computer interaction interface interacts with PLC central processing unit and is connected, the described PLC central processing unit other end respectively with Gas flow rate control unit, charging cabin control unit, heat control unit, collecting chamber control unit, vacuum detecting unit are carried out Both-way communication connects.
A kind of Graphene volume to volume continuous growth apparatus electric control system the most according to claim 1, it is characterised in that: Described gas flow rate control unit is connected with each other with gas mass flow controller, described charging cabin control unit and charging cabin phase Connecting, described heat control unit is connected with each other with temperature controller, and described collecting chamber control unit is connected with each other with collecting chamber, institute State vacuum detecting unit to be connected with each other with vacuum pump;
Wherein, described gas flow rate control unit is for receiving from the gas flow control signal of PLC central processing unit right Gas flow size, opening time length are controlled;
Described charging cabin control unit is for receiving feeding cabin control signal and sending feeding storehouse from PLC central processing unit Material is controlled;
Described heat control unit enters for receiving the temperature signal from PLC central processing unit the heating-up temperature to the thermal treatment zone Row controls;
Described collecting chamber control unit is for receiving from the collecting chamber control signal of PLC central processing unit the receipts to collecting chamber Collection is controlled;
Vacuum pump from the vacuum detecting control signal of PLC central processing unit and is carried out by described vacuum detecting unit for receiving Control;
Described PLC central processing unit is for gas flow rate control unit, charging cabin control unit, heat control unit, collection Cabin control unit, vacuum detecting unit be controlled and receive respectively from gas flow rate control unit, charging cabin control unit, Heat control unit, collecting chamber control unit, the feedback information of vacuum detecting unit;
Described human-computer interaction interface is used for sending operating control signal and to PLC central processing unit and receives from the process of PLC central authorities The feedback signal of device;
Described gas mass flow controller receives the mixed gas tank of control after the control information of gas flow rate control unit and enters Row mixed gas supplies, and is controlled gas flow size, opening time length by the mixed gas tank of regulation, and exports to charging Cabin, material is exported to three sections of thermals treatment zone by described charging cabin, and described temperature controller is by receiving the control information of heat control unit Material in three sections of thermals treatment zone carrying out computer heating control, is then carried out material collection by collecting chamber, described vacuum detecting unit connects Receiving control vacuum pump after the control signal of PLC central processing unit to operate, manual unlocking flapper valve, when cutting out manually During flapper valve, vacuum pump shuts down.
A kind of Graphene volume to volume continuous growth apparatus electric control system the most according to claim 1, it is characterised in that: Described charging cabin includes winding motor E and tension motor D, and described collecting chamber includes that tension motor C, row are around motor B, winding motor A。
A kind of Graphene volume to volume continuous growth apparatus electric control system the most according to claim 1, it is characterised in that: Described human-computer interaction interface includes touching display screen and button.
CN201610891589.8A 2016-10-12 2016-10-12 A kind of Graphene volume to volume continuous growth apparatus electric control system Pending CN106227148A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106944727A (en) * 2017-05-11 2017-07-14 东莞市日熔焊接技术有限公司 Plasma (orifice) gas body controlling means and control system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103183335A (en) * 2013-03-12 2013-07-03 西安电子科技大学 Cu film annealing based method for preparing large-area graphene on SiC substrate
CN103420366A (en) * 2013-07-30 2013-12-04 泰州巨纳新能源有限公司 Continuous low-pressure graphene growth system
CN203894592U (en) * 2013-12-27 2014-10-22 无锡格菲电子薄膜科技有限公司 CVD monitoring system for preparation of grapheme film
WO2015112122A1 (en) * 2014-01-21 2015-07-30 Empire Technology Development Llc Graphene membranes and methods for making and using the same
CN205115057U (en) * 2015-05-19 2016-03-30 常州新墨能源科技有限公司 Preparation facilities of graphite alkene masking liquid

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103183335A (en) * 2013-03-12 2013-07-03 西安电子科技大学 Cu film annealing based method for preparing large-area graphene on SiC substrate
CN103420366A (en) * 2013-07-30 2013-12-04 泰州巨纳新能源有限公司 Continuous low-pressure graphene growth system
CN203894592U (en) * 2013-12-27 2014-10-22 无锡格菲电子薄膜科技有限公司 CVD monitoring system for preparation of grapheme film
WO2015112122A1 (en) * 2014-01-21 2015-07-30 Empire Technology Development Llc Graphene membranes and methods for making and using the same
CN205115057U (en) * 2015-05-19 2016-03-30 常州新墨能源科技有限公司 Preparation facilities of graphite alkene masking liquid

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106944727A (en) * 2017-05-11 2017-07-14 东莞市日熔焊接技术有限公司 Plasma (orifice) gas body controlling means and control system

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Application publication date: 20161214