CN106477567A - A kind of continuous growth apparatus of Graphene volume to volume - Google Patents
A kind of continuous growth apparatus of Graphene volume to volume Download PDFInfo
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- CN106477567A CN106477567A CN201610891593.4A CN201610891593A CN106477567A CN 106477567 A CN106477567 A CN 106477567A CN 201610891593 A CN201610891593 A CN 201610891593A CN 106477567 A CN106477567 A CN 106477567A
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Abstract
The invention discloses a kind of continuous growth apparatus of Graphene volume to volume, including workbench, workbench one end is fixed with the first vacuum cavity, the workbench other end is fixed with the second vacuum cavity, it is provided with vacuum tube between first vacuum cavity and the second vacuum cavity, the first vacuum cavity other end is provided with air inlet, the second vacuum cavity other end is provided with gas outlet, vacuum tube is provided with PE coil near first vacuum cavity one end, vacuum tube is provided with touch screen near second vacuum cavity one end, is provided with heating furnace between PE coil and touch screen;It is fixed with Copper Foil installation axle in first vacuum cavity, electric rotating machine is installed in the second vacuum cavity, between Copper Foil installation axle and electric rotating machine, Copper Foil is distributed with.Present configuration is simple, easy to operate, Graphene is gone out by the first vacuum cavity of being sequentially distributed on workbench, PE coil, heating furnace, the second vacuum cavity fast-growth, realize Graphene rapidly, continuously and large-scale industrialized production, meet the primary demand in market.
Description
Technical field
The invention belongs to graphene growth apparatus field, the continuous growth apparatus of more particularly, to a kind of Graphene volume to volume.
Background technology
Graphene be at present thin in the world be also nano material the hardest, it is almost fully transparent, in all band
Only absorb about 2.3% light;Heat conductivity is up to 5300W/m K, higher than CNT and diamond;Under room temperature, its electronics moves
Shifting rate, more than 15000cm2/V s, exceedes CNT and silicon crystal, and resistivity only about 10-6 Ω cm, than copper or silver
Lower, it is the minimum material of current world resistivity.Because Graphene is collection superelevation mechanical strength, thermal conductive resin, high optics
In the new material of one, it is not only suitable for basic physicses research, such as dosis refracta to the excellent properties such as transparency and superpower electric conductivity
Integer quantum Hall effect etc. under sub- Hall effect, room temperature, and have wide in fields such as display, the energy, detection, photoelectrons
Application prospect, such as molecular detector, thermal conductivity/thermal interfacial material, field emission source, ultracapacitor, solaode, Graphene
Lithium battery, field-effect transistor and integrated circuit, transparency conductive electrode etc..The applied research of Graphene has great market
Prospect, it will bring revolutionary transformation to numerous research fields, such as:The lithium battery made with Graphene super capacitor can achieve
Quick charge in 1 minute, and can achieve high-power, efficient electric discharge, this has not only broken, and traditional lithium electricity charging is slow to be limited,
Also by for the popularization of electric automobile industry and development, but also the protection to environment, the development of green energy resource provides new machine
Meet;The performance of graphene field effect transistor will exceed well over silicon transistor, because Graphene resistivity is extremely low, the speed that electronics runs
It is exceedingly fast, be therefore expected to for developing thinner, conductive speed electronic component of new generation or transistor faster, because Graphene
There is good compatibility with silicon, so being expected in the future substitute whole silicon substrate industry;Graphene transparency conductive electrode not only has good
Good conduction property and high light transmission, also show good pliability and mechanical strength, and performance is better than normal in the market
Indium tin oxide transparency electrode, and low cost, environmentally safe, additionally, flexible and transparent conductive electrode is also of future generation
The development trend of transparency electrode.
How quickly to prepare large area, high-quality Graphene on a large scale, be to face in numerous application industrialization
Crucial science and technology problem.Widely studied through in recent years, have been developed that some methods preparing Graphene at present,
As mechanical stripping method, epitaxial growth method, electronation graphite oxide method, chemical vapour deposition technique (CVD) etc., these Graphene systems
Preparation Method can obtain greatly the Graphene sample of use for laboratory under given conditions, but, quickly prepare large area, high-quality
The method of Graphene never makes a breakthrough, and significantly limit efficiency, yield and the cost of Graphene preparation, hinders it
Further industrialized development.
Content of the invention
It is an object of the invention to the problem above overcoming prior art to exist, a kind of Graphene volume to volume is provided continuously to give birth to
Long equipment, be capable of Graphene rapidly, continuously and large-scale industrialized production.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of continuous growth apparatus of Graphene volume to volume, including workbench, described workbench one end is fixed with the first vacuum
Cavity, the described workbench other end is fixed with the second vacuum cavity, sets between described first vacuum cavity and the second vacuum cavity
There is vacuum tube, described first vacuum cavity one end is provided with air inlet, described second vacuum cavity one end is provided with gas outlet, described true
Blank pipe is provided with PE coil near first vacuum cavity one end, and described vacuum tube is provided with touch screen near second vacuum cavity one end,
It is provided with heating furnace between described PE coil and touch screen;
Wherein, it is fixed with Copper Foil installation axle in described first vacuum cavity, in described second vacuum cavity, rotation is installed
Motor, is distributed with Copper Foil between described Copper Foil installation axle and electric rotating machine.
Further, it is mounted on sealing device between described vacuum tube and the first vacuum cavity, the second vacuum cavity, carry
The operating reliability of high whole equipment.
Further, it is fixed with methane generating means and hydrogen generating device in described workbench, more square using installing
Just.
Further, described first vacuum cavity, the second vacuum cavity are equipped with visualization window, operation more human nature
Change.
Further, described workbench bottom is distributed with universal wheel, is easy to the mobile operation of equipment.
The invention has the beneficial effects as follows:
Present configuration is simple, easy to operate, by the first vacuum cavity of being sequentially distributed on workbench, PE coil, plus
Hot stove, the second vacuum cavity fast-growth go out Graphene, realize Graphene rapidly, continuously and large-scale industrialized production, full
The primary demand in sufficient market.
Brief description
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this
Bright schematic description and description is used for explaining the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the structural representation of the present invention;
In figure label declaration:1- air inlet, 2- first vacuum cavity, 3- Copper Foil installation axle, 4-PE coil, 5- Copper Foil, 6-
Heating furnace, 7- electric rotating machine, 8- gas outlet, 9- workbench, 10- touch screen, 11- second vacuum cavity, 12- vacuum tube, 13- are close
Seal apparatus.
Specific embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, to describe the present invention in detail.
The continuous growth apparatus of a kind of Graphene volume to volume as shown in Figure 1, including workbench 9, are fixed with first in workbench 9
Alkane generating means and hydrogen generating device, using easier for installation, workbench 9 bottom is distributed with universal wheel, is easy to equipment
Mobile operation, workbench 9 one end is fixed with the first vacuum cavity 2, and workbench 9 other end is fixed with the second vacuum cavity 11, the
One vacuum cavity 2, the second vacuum cavity 11 are equipped with visualization window, operate more hommization, the first vacuum cavity 2 and second
It is provided with vacuum tube 12, the first vacuum cavity 2 one end is provided with air inlet 1, the second vacuum cavity 11 one end sets between vacuum cavity 11
There is gas outlet 8, vacuum tube 12 is provided with PE coil 4 near the first vacuum cavity 2 one end, vacuum tube 12 is near the second vacuum cavity 11
One end is provided with touch screen 10, is provided with heating furnace 6 between PE coil 4 and touch screen 10, vacuum tube 12 and the first vacuum cavity 2,
It is mounted on sealing device 13 between two vacuum cavities 11, improve the operating reliability of whole equipment;
Wherein, it is fixed with Copper Foil installation axle 3 in the first vacuum cavity 2, in the second vacuum cavity 11, electric rotating machine is installed
7, Copper Foil 5 is distributed between Copper Foil installation axle 3 and electric rotating machine 7.
Copper Foil is wound in the Copper Foil installation axle 3 of the first vacuum cavity 2, then with rotation on the axle of the second vacuum cavity 11
Copper Foil 5 is wound around by rotating motor 7, and Copper Foil 5, in the environment of methane and hydrogen, through PE coil 4 and heating furnace 6, can grow graphite
Alkene.
Present configuration is simple, easy to operate, by the first vacuum cavity of being sequentially distributed on workbench, PE coil, plus
Hot stove, the second vacuum cavity fast-growth go out Graphene, realize Graphene rapidly, continuously and large-scale industrialized production, full
The primary demand in sufficient market.
Ultimate principle, principal character and the advantages of the present invention of the present invention have been shown and described above.The technology of the industry
, it should be appreciated that the present invention is not restricted to the described embodiments, the simply explanation described in above-described embodiment and description is originally for personnel
The principle of invention, without departing from the spirit and scope of the present invention, the present invention also has various changes and modifications, these changes
Change and improvement both falls within scope of the claimed invention.
Claims (5)
1. the continuous growth apparatus of a kind of Graphene volume to volume, including workbench (9) it is characterised in that:Described workbench (9) one end
It is fixed with the first vacuum cavity (2), described workbench (9) other end is fixed with the second vacuum cavity (11), described first vacuum
It is provided with vacuum tube (12), described first vacuum cavity (2) one end is provided with air inlet between cavity (2) and the second vacuum cavity (11)
(1), described second vacuum cavity (11) one end is provided with gas outlet (8), and described vacuum tube (12) is near the first vacuum cavity (2)
End is provided with PE coil (4), and described vacuum tube (12) is provided with touch screen (10), described PE line near the second vacuum cavity (11) one end
It is provided with heating furnace (6) between circle (4) and touch screen (10);
Wherein, it is fixed with Copper Foil installation axle (3) in described first vacuum cavity (2), install in described second vacuum cavity (11)
There is electric rotating machine (7), between described Copper Foil installation axle (3) and electric rotating machine (7), Copper Foil (5) is distributed with.
2. a kind of continuous growth apparatus of Graphene volume to volume according to claim 1 it is characterised in that:Described vacuum tube
(12) it is mounted on sealing device (13) and the first vacuum cavity (2), the second vacuum cavity (11) between.
3. a kind of continuous growth apparatus of Graphene volume to volume according to claim 1 it is characterised in that:Described workbench
(9) it is fixed with methane generating means and hydrogen generating device in.
4. a kind of continuous growth apparatus of Graphene volume to volume according to claim 1 it is characterised in that:Described first vacuum
Cavity (2), the second vacuum cavity (11) are equipped with visualization window.
5. a kind of continuous growth apparatus of Graphene volume to volume according to claim 1 it is characterised in that:Described workbench
(9) bottom is distributed with universal wheel.
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CN201610891593.4A CN106477567A (en) | 2016-10-12 | 2016-10-12 | A kind of continuous growth apparatus of Graphene volume to volume |
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CN102828161A (en) * | 2012-08-21 | 2012-12-19 | 许子寒 | Graphene production method and continuous production device of graphene |
CN103080004A (en) * | 2010-08-11 | 2013-05-01 | 三星泰科威株式会社 | Method of post treating graphene and method of manufacturing graphene using the same |
US20140023783A1 (en) * | 2011-03-17 | 2014-01-23 | Samsung Techwin Co., Ltd. | Apparatus for manufacturing graphene film and method for manufacturing graphene film |
CN104988471A (en) * | 2015-07-10 | 2015-10-21 | 安徽贝意克设备技术有限公司 | Fast cooling reel-to-reel plasma enhanced CVD (chemical vapor deposition) continuous growth furnace |
CN105752968A (en) * | 2016-01-31 | 2016-07-13 | 安徽贝意克设备技术有限公司 | Reel-to-reel continuous graphene film growth equipment |
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- 2016-10-12 CN CN201610891593.4A patent/CN106477567A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103080004A (en) * | 2010-08-11 | 2013-05-01 | 三星泰科威株式会社 | Method of post treating graphene and method of manufacturing graphene using the same |
US20140023783A1 (en) * | 2011-03-17 | 2014-01-23 | Samsung Techwin Co., Ltd. | Apparatus for manufacturing graphene film and method for manufacturing graphene film |
CN102828161A (en) * | 2012-08-21 | 2012-12-19 | 许子寒 | Graphene production method and continuous production device of graphene |
CN104988471A (en) * | 2015-07-10 | 2015-10-21 | 安徽贝意克设备技术有限公司 | Fast cooling reel-to-reel plasma enhanced CVD (chemical vapor deposition) continuous growth furnace |
CN105752968A (en) * | 2016-01-31 | 2016-07-13 | 安徽贝意克设备技术有限公司 | Reel-to-reel continuous graphene film growth equipment |
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Application publication date: 20170308 |