CN106226599A - A kind of piezoelectric constants method of testing based on dynamic method and test device - Google Patents

A kind of piezoelectric constants method of testing based on dynamic method and test device Download PDF

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Publication number
CN106226599A
CN106226599A CN201610655848.7A CN201610655848A CN106226599A CN 106226599 A CN106226599 A CN 106226599A CN 201610655848 A CN201610655848 A CN 201610655848A CN 106226599 A CN106226599 A CN 106226599A
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piezoelectric
frequency
pin
resistance
chip microcomputer
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田盛楠
宋俊磊
杨雪
董凯锋
莫文琴
晋芳
刘阳
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China University of Geosciences
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China University of Geosciences
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2688—Measuring quality factor or dielectric loss, e.g. loss angle, or power factor

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The present invention relates to a kind of piezoelectric constants method of testing based on dynamic method and test device, by piezoelectric to be measured and a measuring resistance series connection, obtain the impedance frequency spectrum of piezoelectric to be measured through frequency sweep, the change of counterpart impedance amplitude can obtain series resonance frequency f of piezoelectricsWith parallel resonance frequency fp, the differential resistance values R that resistance value is piezoelectric to be measured that series resonance frequency is correspondinges.555 timer circuits are used the free capacitance value of piezoelectric to be measured to be converted to the frequency values with functional relationship, by being calculated corresponding direct capacitance Cap, mechanical quality factor Q can be calculated in conjunction with above four parametersm。

Description

A kind of piezoelectric constants method of testing based on dynamic method and test device
Technical field
The present invention relates to a kind of piezoelectric constants method of testing based on dynamic method and test device, belong to piezoelectric Parameter measurement field.
Background technology
Piezoelectric has important effect in modern industry, piezoelectric application constantly expand inevitable requirement Conventional piezoelectric parameter can obtain measuring the most accurately.But owing to the parameter of piezoelectric not only has with its constituent Close, go back and manufacturing process has close contact.Various factors all can cause its performance parameter to be affected in the fabrication process. Therefore, the performance parameter of piezoelectric is measured just to have and is of great significance.
Piezoelectric constants test device often test function is single at present, and the parameter of test is limited, as measured piezoresistive material The most all by means of impedance parameter tester during the resonant frequency expected, obtain other piezoelectric parameters by manual calculation the most again. Although current impedance instrument has reached test result accurately and the stage of technology maturation, but the fraud that this method exists End is that test process is loaded down with trivial details, and automaticity is low, testing of materials excessive cycle, and inefficiency.
Summary of the invention
In order to solve the deficiencies in the prior art, the invention provides a kind of piezoelectric constants test side based on dynamic method Method and test device, it is possible to quickly measure five basic piezoelectric parameter (series resonance frequencys fs, parallel resonance frequency fp, dynamically Resistance Res, direct capacitance Cap, mechanical quality factor Qm), measure process full automation, it is not necessary to manual intervention, test result is certainly Dynamic display.
The present invention solves that its technical problem be the technical scheme is that and provide a kind of piezoresistive material based on dynamic method Material parameter test method, including procedure below:
(1) current output terminal of DDS module is connect one be not more than 100 Ω small resistor, then with the measuring resistance connected and Piezoelectric to be measured connects；The initial frequency of DDS module frequency sweep, step frequency and cut-off frequency are arbitrarily set；
(2) the parallel resonance frequency point f of piezoelectric is measuredpWith series resonance frequency point fs:
Start frequency sweep with initial frequency, often swept and once added step frequency frequency sweep again with swept frequency last time, when frequency When rate reaches cut-off frequency, frequency sweep terminates；During frequency sweep, sinusoidal signal AD0 of output direct to DDS module with through piezoresistive material Sinusoidal signal AD1 obtained by material dividing potential drop, respectively carries out detection by a detecting circuit, and the direct current signal respectively obtained all passes through AD sampling module is transferred to single-chip microcomputer；In detection process, single-chip microcomputer utilizes normalization algorithm, using AD0 as reference signal, draws For judging the AD1/AD0 curve of series resonance point and parallel resonant point；During whole frequency sweep, the sine of DDS module output Signal sequentially passes through measuring resistance and the piezoelectric of series connection, and the frequency when piezoelectric both end voltage maximum is parallel resonance Frequency point fp, the frequency when piezoelectric both end voltage minimum is series resonance frequency point fs；
(3), after frequency sweep terminates, following parameter is measured:
A () measures differential resistance values Res:
The single-chip microcomputer being connected with AD sampling module calculates the differential resistance values R of piezoelectric by voltage formulaes:
V0=ResR5+ResV
Res=R5×V0V-V0
Wherein, V0For the voltage of voltage material, V is the output voltage of DDS module, R5For canonical reference resistance, ResFor treating The differential resistance values of the piezoelectric measured；
B () measures direct capacitance Cap:
The output of DDS module is set to low frequency signal, and this low frequency signal sequentially passes through measuring resistance, piezoelectric, electricity Hold detection module and AD sampling module；Described capacitive detection module includes 555 timers being connected with piezoelectric, described 555 Pin 1 ground connection of timer, pin 3 is connected with AD sampling module, and pin 4 and pin 5 meet-5V, and pin 6 passes through resistance R3 and draws Foot 5 is connected, is connected with piezoelectric by resistance R4 simultaneously, and pin 7 is by electric capacity C7 ground connection；
The single-chip microcomputer being connected with AD sampling module calculates direct capacitance C of piezoelectric by below equationap:
Cap=1.44/ (R3+2R4)f
F=1/ (tPL+tPH)
tPL=R4Cap ln2
tPH=(R3+R4)Cap ln2
Wherein, R3And R4Being respectively the resistance R3 and the resistance of resistance R4 being connected with 555 intervalometers, f is for when 555 timers Trigger upset time obtain the frequency of a periodic square wave, t at outfanPLBe 555 timers low level continue time Between, tPHIt it is the high level lasting time of 555 timers；
E () measures machinery quality factor qm:
Q m = 2 πf s L 1 R e s = f p 2 2 πf s | Z m | ( C 0 + C 1 ) ( f p 2 + f s 2 )
F in formulasFor series resonance frequency point, fpFor parallel resonance frequency point, L1Attached for dynamic inductance piezoelectric resonance point Near equivalent motional inductance, | Zm| for minimum resonance impedance, C0For piezoelectric equivalent parallel electric capacity near resonance point, C1 For piezoelectric equivalent motional capacitance near resonance point, | Zm|、C0And C1It is the known quantity that piezoelectric self determines；
(f) measurement Poisson ratioσ:
σ = 5.332 f m 0 - 1.867 f m 1 0.6054 f m 1 - 0.1910 f m 0
fm0For the fundamental frequency of piezoelectric, it is approximately a series resonance frequency, and unit is Hz；fm1For piezoresistive material The first overtone frequency of material, it is approximately secondary series resonance frequency, and unit is Hz, fm0And fm1It is piezoelectric self certainly Fixed known quantity.
During step (2) frequency sweep, direct current signal is through AD sampling module, single-chip microcomputer to AD sampling module through modulus The digital signal being converted to gives up afterbody 3 bit data, or execution Mean Filtering Algorithm processes.
After all parameter measurements complete, single-chip microcomputer sends data to computer by serial ports.
Invention also provides the test device for above-mentioned method of testing, including DDS module, DDS module successively with The measuring resistance of series connection and piezoelectric to be measured connect, and are respectively sampled with AD by a detecting circuit in the two ends of measuring resistance Module connects, and AD sampling module is connected with single-chip microcomputer；Piezoelectric is connected with single-chip microcomputer by capacitive detection module.
Described single-chip microcomputer uses STM32F429ZIT6.
Described capacitive detection module uses the RC oscillating circuit utilizing 555 intervalometers to constitute, 555 timers in this circuit Pin 1 ground connection, pin 3 is connected with AD sampling module, and pin 4 and pin 5 meet-5V, pin 6 is connected with pin 5 by resistance R3, Being connected with piezoelectric by resistance R4, pin 7 is by electric capacity C7 ground connection simultaneously.
Described single-chip microcomputer is connected with computer by serial ports.
Described single-chip microcomputer is connected with the button display screen being used for regulating initial frequency, step frequency and cut-off frequency.
The present invention is had advantageous effect in that based on its technical scheme:
(1) present invention uses dynamic resonance method to realize the measurement of piezoelectric constants, and its ultimate principle is with powering up outward Field excitation piezoelectric, carries out mechanical-electric coupling by inverse piezoelectric effect, produces mechanical resonant, attached at resonance point by piezoelectric Near impedance and the direct functional relationship of frequency, can calculate elastic Changshu of piezoelectric, dielectric constant, piezoelectric constant Deng coefficient；
(2) present invention employs normalization algorithm and automatically measure piezoelectric parameter, improve certainty of measurement, improve simultaneously and be The whole work efficiency of system；
(3) present invention can measure (series resonance frequency fs, parallel resonance frequency fp, dynamic electric resistor Res, direct capacitance Cap, mechanical quality factor Qm), it is possible to parameter is measured in extension Poisson ratioσ, mechanical coupling coefficient Kp；
(4) in the single-chip microcomputer of the present invention, the development platform of MCU is FPU floating point processor, has given full play to FPU floating-point and has processed Data processing function that device is powerful and computing capability, the piezoelectric parameter worked out test system is that the work of tester provides Strong support；
(5) present invention is compared with existing Measurement of piezoelectric material parameters method, and this system cost is low, simple to operate, practical, complete Entirely disclosure satisfy that general test demand.
Accompanying drawing explanation
Fig. 1 is the block diagram of the piezoelectric constants automatic testing equipment of the embodiment of the present invention.
Fig. 2 is the FB(flow block) of the piezoelectric constants automatic testing equipment of the embodiment of the present invention.
Fig. 3 be the piezoelectric constants automatic testing equipment of the embodiment of the present invention realize schematic diagram.
Detailed description of the invention
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
The invention provides a kind of piezoelectric constants method of testing based on dynamic method, with reference to Fig. 2 and Fig. 3, including with Lower process:
(1) current output terminal of DDS module is connect one be not more than 100 Ω small resistor, then with the measuring resistance connected and Piezoelectric to be measured connects；Utilize button display screen arbitrarily arrange the initial frequency of DDS module frequency sweep, step frequency and Cut-off frequency；When arranging, operation can be judged by Key value, when Key=0,1 and 2, represent setting initial frequency, setting respectively Step frequency and setting cut-off frequency, start output frequency when pressing ENTER key, carry out frequency sweep.
Owing to DDS module uses the output of AD9850, AD9850 delivery outlet to be current signal, therefore need first to convert thereof into electricity Pressure signal, it is common practice that connect a little value resistance at electric current delivery outlet, this utility model selects resistance to be 68 Ω, although detected sample The impedance variation of product and measuring resistance branch road is very big, but compared with little value resistance or suitable big, therefore branch road both end voltage base Originally peak value can be regarded as constant.This sinusoidal signal is sequentially passed through measuring resistance and the piezoelectric of series connection, by examination criteria electricity The voltage signal at resistance two ends, when sample impedance variation, due to voltage constant, sample both end voltage signal intensity and Sample impedance variation is closely related, and when impedance minimum, sample both end voltage peak value is the most minimum, and vice versa, therefore leads to Cross detection sample both end voltage signal and just can determine whether the impedance variation of sample, when piezoelectric both end voltage maximum Frequency be parallel resonance frequency point, the frequency when piezoelectric both end voltage minimum is series resonance frequency point.
(2) the parallel resonance frequency point f of piezoelectric is measuredpWith series resonance frequency point fs:
Start frequency sweep with initial frequency, often swept and once added step frequency frequency sweep again with swept frequency last time, when frequency When rate reaches cut-off frequency, frequency sweep terminates；During frequency sweep, sinusoidal signal AD0 of output direct to DDS module with through piezoresistive material Sinusoidal signal AD1 obtained by material dividing potential drop, respectively carries out detection by a detecting circuit, and the direct current signal respectively obtained all passes through AD sampling module is transferred to single-chip microcomputer；
Two detecting circuits are identical, all use LTC5507, and the two ends of measuring resistance R5 connect two LTC5507's respectively Foot 1, the foot 2 of LTC5507 is connected with foot 3 by electric capacity C3, and foot 3 is by electric capacity C4 ground connection, and foot 3 passes sequentially through electric capacity C4 and C2 Meeting-5V, foot 5 meets-5V, foot 6 ground connection, and foot 7 is connected by resistance R1 and resistance R2 and the AD sampling module of series connection, the two of resistance R2 End is respectively by electric capacity C5 and electric capacity C6 ground connection；
In detection process, single-chip microcomputer utilizes normalization algorithm, using AD0 as reference signal, draw be used for judging connecting humorous Shake a little and the AD1/AD0 curve of parallel resonant point；Owing to this algorithm can effectively optimize the wavy curve drawn out, improve To series resonance point, the judgement of parallel resonant point, the decay occurred because of DDS therefore can be effectively reduced when high frequency output The impact that phenomenon is brought；
During whole frequency sweep, the sinusoidal signal of DDS module output sequentially passes through measuring resistance and the piezoelectric of series connection, Frequency when piezoelectric both end voltage maximum is parallel resonance frequency point fp, frequency when piezoelectric both end voltage minimum Rate is series resonance frequency point fs；
(3), after frequency sweep terminates, following parameter is measured:
A () measures differential resistance values Res:
The single-chip microcomputer being connected with AD sampling module calculates the differential resistance values R of piezoelectric by voltage formulaes:
V0=ResR5+ResV
Res=R5×V0V-V0
Wherein, V0For the voltage of voltage material, V is the output voltage of DDS module, R5For canonical reference resistance, ResFor treating The differential resistance values of the piezoelectric measured；
B () measures direct capacitance Cap:
The output of DDS module is set to low frequency signal, and this low frequency signal sequentially passes through measuring resistance, piezoelectric, electricity Hold detection module and AD sampling module；Described capacitive detection module includes 555 timers being connected with piezoelectric, described 555 Pin 1 ground connection of timer, pin 3 is connected with AD sampling module, and pin 4 and pin 5 meet-5V, and pin 6 passes through resistance R3 and draws Foot 5 is connected, is connected with piezoelectric by resistance R4 simultaneously, and pin 7 is by electric capacity C7 ground connection；
The single-chip microcomputer being connected with AD sampling module calculates direct capacitance C of piezoelectric by below equationap:
Cap=1.44/ (R3+2R4)f
F=1/ (tPL+tPH)
tPL=R4Cap ln2
tPH=(R3+R4)Cap ln2
Wherein, R3And R4Being respectively the resistance R3 and the resistance of resistance R4 being connected with 555 intervalometers, f is for when 555 timers Trigger upset time obtain the frequency of a periodic square wave, t at outfanPLBe 555 timers low level continue time Between, tPHIt it is the high level lasting time of 555 timers；
E () measures machinery quality factor qm:
Q m = 2 πf s L 1 R e s = f p 2 2 πf s | Z m | ( C 0 + C 1 ) ( f p 2 + f s 2 )
F in formulasFor series resonance frequency point, fpFor parallel resonance frequency point, L1Attached for dynamic inductance piezoelectric resonance point Near equivalent motional inductance, ResFor dynamic electric resistor (series resonance resistance), | Zm| for minimum resonance impedance, C0Exist for piezoelectric Equivalent parallel electric capacity near resonance point, C1For piezoelectric equivalent motional capacitance near resonance point, | Zm|、C0And C1All The known quantity determined for piezoelectric self；
(f) measurement Poisson ratioσ:
σ = 5.332 f m 0 - 1.867 f m 1 0.6054 f m 1 - 0.1910 f m 0
On conductance-susceptance coordinate plane, changing with frequency, series arm admittance loci is a circle, according to admittance circle Figure, can read maximum admittance frequency (i.e. minimum impedance frequency) fm.Here, fm0For the fundamental frequency of piezoelectric, its approximation Being a series resonance frequency, unit is Hz；fm1For the first overtone frequency of piezoelectric, it is approximately secondary series resonance frequency Rate, unit is Hz, fm0And fm1It is the known quantity that piezoelectric self determines.
During step (2) frequency sweep, direct current signal is through AD sampling module, single-chip microcomputer to AD sampling module through modulus The digital signal being converted to gives up afterbody 3 bit data, or execution Mean Filtering Algorithm processes.
After all parameter measurements complete, single-chip microcomputer sends data to computer by serial ports.
Invention also provides the test device for above-mentioned method of testing, with reference to Fig. 1 and Fig. 3, including DDS module, DDS module is connected with measuring resistance and the piezoelectric to be measured of series connection successively, and the two ends of measuring resistance are respectively by an inspection Wave circuit is connected with AD sampling module, and AD sampling module is connected with single-chip microcomputer；Piezoelectric passes through capacitive detection module and monolithic Machine connects.
Described single-chip microcomputer uses STM32F429ZIT6.
Described capacitive detection module uses the RC oscillating circuit utilizing 555 intervalometers to constitute, 555 timers in this circuit Pin 1 ground connection, pin 3 is connected with AD sampling module, and pin 4 and pin 5 meet-5V, pin 6 is connected with pin 5 by resistance R3, Being connected with piezoelectric by resistance R4, pin 7 is by electric capacity C7 ground connection simultaneously.
Described single-chip microcomputer is connected with computer by serial ports.
Described single-chip microcomputer is connected with the button display screen being used for regulating initial frequency, step frequency and cut-off frequency.
The principle of the present invention is as follows: encourage piezoelectric with extra electric field, carries out mechanical-electric coupling by inverse piezoelectric effect, produces Raw mechanical resonant, by piezoelectric impedance near resonance point and the direct functional relationship of frequency, can calculate pressure The coefficients such as elastic Changshu of electric material, dielectric constant, piezoelectric constant.
Swept frequency excitation module utilizes DDS module to make, and for producing the sinusoidal signal of 100Hz 10MHz, exports with it 1V, adjustable step frequency are the sinusoidal signal of 100Hz, and output it signal and put on piezoelectric, are used for detecting its resonance Dot frequency.The present invention is the voltage signal by examination criteria resistance two ends, is electric current letter owing to exporting from AD9850 delivery outlet Number, therefore need first to convert thereof into voltage signal, it is common practice that connect a little value resistance at electric current delivery outlet, the present embodiment selects Resistance be 68 Ω, although the impedance variation of tested piezoelectric and measuring resistance branch road is very big, but compared with little value resistance also Being suitable big, therefore substantially can to regard peak value as constant for branch road both end voltage.When tested piezoelectric impedance variation, due to electricity Pressing constant, tested piezoelectric both end voltage signal intensity and tested piezoelectric impedance variation are closely related, when impedance is minimum Time, piezoelectric both end voltage peak value is the most minimum, and vice versa, therefore by just detecting tested piezoelectric both end voltage signal Can determine whether the impedance variation of tested piezoelectric, the i.e. impedance maximum of points when tested piezoelectric both end voltage maximum, now Frequency i.e. parallel resonance frequency point, i.e. impedance minimum point, frequency now when tested piezoelectric both end voltage minimum I.e. series resonance frequency.Owing to follow-up AD signals collecting port input resistance is high, front-end circuit tested piezoelectric impedance Drastically change signals collecting can't be caused the impact of bigger error.
Utilizing normalization algorithm, the signal gathered by AD0, as reference signal, draws curve with AD1/AD0, can be effective Reduce because of DDS problem of influence of fading precision when high frequency output.
During using internal ADC, there is following process to gathering signal: give up afterbody 3 bit data, carry out average filter Ripple algorithm can avoid the interference of noise.
After all parameter measurements have calculated, send data to computer by serial ports, can carry out showing and storing Deng.

Claims (9)

1. a piezoelectric constants method of testing based on dynamic method, it is characterised in that include procedure below:
(1) current output terminal of DDS module is connect a small resistor being not more than 100 Ω, then with the measuring resistance connected and to be measured The piezoelectric of amount connects；The initial frequency of DDS module frequency sweep, step frequency and cut-off frequency are arbitrarily set；
(2) the parallel resonance frequency point f of piezoelectric is measuredpWith series resonance frequency point fs:
Start frequency sweep with initial frequency, often swept and once added step frequency frequency sweep again, when frequency reaches with swept frequency last time Terminate to frequency sweep during cut-off frequency；During frequency sweep, sinusoidal signal AD0 of output direct to DDS module is divided with through piezoelectric Sinusoidal signal AD1 obtained by pressure, respectively carries out detection by a detecting circuit, and the direct current signal respectively obtained all is adopted through AD Original mold block is transferred to single-chip microcomputer；In detection process, single-chip microcomputer utilizes normalization algorithm, is used for as reference signal, drafting by AD0 Judge the AD1/AD0 curve of series resonance point and parallel resonant point；During whole frequency sweep, the sinusoidal signal of DDS module output Sequentially passing through measuring resistance and the piezoelectric of series connection, the frequency when piezoelectric both end voltage maximum is parallel resonance frequency Point fp, the frequency when piezoelectric both end voltage minimum is series resonance frequency point fs；
(3), after frequency sweep terminates, following parameter is measured:
A () measures differential resistance values Res:
The single-chip microcomputer being connected with AD sampling module calculates the differential resistance values R of piezoelectric by voltage formulaes:
V0=ResR5+ResV
Res=R5×V0V-V0
Wherein, V0For the voltage of voltage material, V is the output voltage of DDS module, R5For canonical reference resistance, ResFor to be measured The differential resistance values of piezoelectric；
B () measures direct capacitance Cap:
The output of DDS module is set to low frequency signal, and this low frequency signal sequentially passes through measuring resistance, piezoelectric, electric capacity inspection Survey module and AD sampling module；Described capacitive detection module includes 555 timers being connected with piezoelectric, described 555 timing Pin 1 ground connection of device, pin 3 is connected with AD sampling module, and pin 4 and pin 5 meet-5V, and pin 6 is by resistance R3 and pin 5 Connecting, be connected with piezoelectric by resistance R4 simultaneously, pin 7 is by electric capacity C7 ground connection；
The single-chip microcomputer being connected with AD sampling module calculates direct capacitance C of piezoelectric by below equationap:
Cap=1.44/ (R3+2R4)f
F=1/ (tPL+tPH)
tPL=R4Capln2
tPH=(R3+R4)Capln2
Wherein, R3And R4Being respectively the resistance R3 and the resistance of resistance R4 being connected with 555 intervalometers, f is touching when 555 timers Obtain the frequency of a periodic square wave, t at outfan when sending out device upsetPLIt is the low duration of 555 timers, tPHIt it is the high level lasting time of 555 timers；
E () measures machinery quality factor qm:
Q m = 2 πf s L 1 R e s = f p 2 2 πf s | Z m | ( C 0 + C 1 ) ( f p 2 + f s 2 )
F in formulasFor series resonance frequency point, fpFor parallel resonance frequency point, L1Near dynamic inductance piezoelectric resonance point Equivalent motional inductance, | Zm| for minimum resonance impedance, C0For piezoelectric equivalent parallel electric capacity near resonance point, C1For pressure Electric material equivalent motional capacitance near resonance point, | Zm|、C0And C1It is the known quantity that piezoelectric self determines；
(f) measurement Poisson ratioσ:
σ = 5.332 f m 0 - 1.867 f m 1 0.6054 f m 1 - 0.1910 f m 0
fm0For the fundamental frequency of piezoelectric, it is approximately a series resonance frequency, and unit is Hz；fm1For piezoelectric one Secondary overtone frequency, it is approximately secondary series resonance frequency, and unit is Hz, fm0And fm1It is piezoelectric self to have determined The amount of knowing.
Piezoelectric constants method of testing based on dynamic method the most according to claim 1, it is characterised in that: step (2) During frequency sweep, direct current signal is through AD sampling module, the numeral letter that AD sampling module is obtained by single-chip microcomputer through analog digital conversion Number give up afterbody 3 bit data, or perform Mean Filtering Algorithm and process.
Piezoelectric constants method of testing based on dynamic method the most according to claim 1, it is characterised in that: all parameters After being measured, single-chip microcomputer sends data to computer by serial ports.
4. the test device for method of testing described in claim 1, it is characterised in that: include DDS module, DDS module Is connected with measuring resistance and the piezoelectric to be measured of series connection successively, the two ends of measuring resistance respectively by detecting circuit and AD sampling module connects, and AD sampling module is connected with single-chip microcomputer；Piezoelectric is connected with single-chip microcomputer by capacitive detection module.
Test device the most according to claim 4, it is characterised in that: described DDS module uses AD9850.
Test device the most according to claim 4, it is characterised in that: described single-chip microcomputer uses STM32F429ZIT6.
Test device the most according to claim 4, it is characterised in that: described capacitive detection module uses and utilizes 555 timings The RC oscillating circuit that device is constituted, pin 1 ground connection of 555 timers in this circuit, pin 3 is connected with AD sampling module, pin 4 He Pin 5 meets-5V, and pin 6 is connected with pin 5 by resistance R3, is connected with piezoelectric by resistance R4 simultaneously, and pin 7 passes through Electric capacity C7 ground connection.
Test device the most according to claim 4, it is characterised in that: described single-chip microcomputer is connected with computer by serial ports.
Test device the most according to claim 4, it is characterised in that: described single-chip microcomputer be used for regulating initial frequency, step The button display screen entering frequency and cut-off frequency connects.
CN201610655848.7A 2016-08-11 2016-08-11 A kind of piezoelectric constants method of testing based on dynamic method and test device Pending CN106226599A (en)

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CN114295684A (en) * 2021-12-24 2022-04-08 北京大学 Measuring device and measuring method for nonlinear electromechanical impedance spectrum of piezoelectric device
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