CN105571612B - A kind of MEMS gyro structural key automatically testing parameters method - Google Patents
A kind of MEMS gyro structural key automatically testing parameters method Download PDFInfo
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Abstract
The present invention is a kind of for MEMS gyro structural key automatically testing parameters method.Described method includes following steps：Step 1) applies white noise voltage drive on the driving structure electrode of MEMS gyro driven-mode and generates driving force；The vibration pickup structure electrode of MEMS gyro driven-mode is connected preposition reading circuit by step 2)；FFT processing is carried out in the Response Waveform Acquisition to digital signal processor, obtains the resonant frequency f of driven-moded；The resonant frequency f that step 3) is obtained with step 2)dSine wave is constructed, is applied on the driving structure electrode of driven-mode, after determining gyro starting of oscillation, the output voltage of driven-mode and the preposition reading circuit of sensed-mode is acquired, obtains coupling ratio；Step 4) removes sine-wave excitation, and the quality factor q of driven-mode is calculated by attenuation curved.The structural keys parameters such as resonant frequency, quality factor and coupled voltages ratio, Displacement Ratio can be tested automatically.
Description
Technical field
The present invention relates to a kind of automatic test approach, especially with regard to a kind of automatic survey of MEMS gyro structural key parameter
Method for testing.
Technical background
MEMS gyro is the device of the characteristic size processed with microelectronic technique in micron dimension, has small, cost
It is low, suitable for batch machining and be easy to ASIC integrate advantage.MEMS gyro contains vibrational structure, resonant frequency, quality because
The number structural keys such as Q and coupling amount parameter can all influence the overall performance of device.Before instrument assembly, need to MEMS gyro
Gauge outfit is screened, and is carried out key parameter test to structure, is determined the basic performance of gyro gauge outfit.In addition to room temperature is tested, also need
In alternating temperature and to become temperature change and the pressure tested these structural key parameters under conditions of encapsulation air pressure to investigate gauge outfit
Become characteristic.MEMS gyro includes two operation modes, i.e. driven-mode and sensed-mode, and each mode is required to test resonance frequency
Rate and quality factor q.
Common test method is manually to be swept respectively to each mode of gyro gauge outfit using dynamic signal analyzer
Frequently, its amplitude-frequency and phase-frequency response curve are obtained, the resonant frequency and quality of each mode of gyro gauge outfit are calculated by response curve
Factor Q.This method, to reach measuring accuracy, needs to increase suitable for the lower gyro of quality factor if gyro quality factor are higher
Add frequency sweep points to ensure that frequency resolution is sufficiently high, and the sweep check time can be greatly prolonged by increasing frequency sweep points, and to being
System hardware proposes requirements at the higher level.Simultaneously this method also need to be debugged during the test, the operations such as thread-changing, the testing time
It grows and needs manpower intervention.
Under temperature match curing conditions, such as from -40 DEG C to+85 DEG C, Cooling rate is 1 DEG C/min, and each temperature spot is required for knot
Structure key parameter is tested, and is needed frequently to carry out data debugging, is replaced test connection line, will expend huge work
Amount needs tester midway to be monitored, and otherwise can omit a certain temperature spot test, and testing efficiency is not high.It can not achieve certainly
Dynamic efficient measurement.
Invention content
Goal of the invention
In view of the above-mentioned problems, the present invention provides a kind of automatic test approach for MEMS gyro structural key parameter,
On the basis of ensureing measuring accuracy, artificial real time monitoring can be broken away from, improves testing efficiency.
Technical solution
The present invention is a kind of MEMS gyro structural key automatically testing parameters method, is suitable for inclusion in two operation mode knots
The test of the structural key parameter of structure MEMS gyro, described two operation mode structures are driven-mode structure and sensed-mode knot
Structure；The driven-mode structure includes driven-mode driving structure, driven-mode vibrational structure and driven-mode vibration pickup knot
Structure；The sensed-mode structure includes sensed-mode driving structure, sensed-mode vibrational structure and sensed-mode vibration pickup knot
Structure；The structural key parameter includes：The resonant frequency f of driven-moded, driven-mode quality factor qd, driven-mode and inspection
Survey the coupled voltages ratio of mode；
Wherein, described method includes following steps：
Step 1) applies white noise voltage drive on the driving structure electrode of MEMS gyro driven-mode and generates driving force；
The vibration pickup structure electrode of MEMS gyro driven-mode is connected preposition reading circuit by step 2)；Reading circuit is read
The voltage variety for taking gyro to export obtains the response curve of gyro driven-mode；The Response Waveform Acquisition is to digital signal
FFT processing is carried out in processor, obtains the resonant frequency f of driven-moded；
The resonant frequency f that step 3) is obtained with step 2)dSine wave is constructed, the driving structure electrode of driven-mode is applied to
On, after determining gyro starting of oscillation, the output voltage of driven-mode and the preposition reading circuit of sensed-mode is acquired, obtains coupling ratio；
Step 4) removes sine-wave excitation, and the quality factor q of driven-mode is calculated by attenuation curved；
After completing step 3), sine-wave excitation, the preposition reading circuit output gyroscopic vibration decaying of driven-mode are removed
Curve is calculated the quality factor q of driven-mode by attenuation curved。
A kind of MEMS gyro structural key automatically testing parameters method as described above, wherein：The structural key parameter
Further include：The resonant frequency f of sensed-modes, sensed-mode quality factor qs；The method further includes following steps：
Step 5) applies white noise voltage drive on the driving structure electrode of MEMS gyro sensed-mode and generates driving force；
The vibration pickup structure electrode of MEMS gyro sensed-mode is connected preposition reading circuit by step 6)；Reading circuit is read
The voltage variety for taking gyro to export, obtains the response curve of gyroscope；The Response Waveform Acquisition is to digital signal
FFT processing is carried out in processor, obtains the resonant frequency f of sensed-modes；
The resonant frequency f that step 7) is obtained with step 6)sSine wave is constructed, the driving structure of gyroscope is applied to
On electrode, after determining gyro starting of oscillation, sine-wave excitation, the preposition reading circuit output gyroscopic vibration decaying of sensed-mode are removed
Curve is calculated the quality factor q of sensed-mode by attenuation curves。
A kind of automatic test approach for MEMS gyro structural key parameter as described above, wherein：
In the quality factor q of Test driver modedAnd the quality factor q of sensed-modesWhen, with the following method：
After if y1 is gyro starting of oscillation and then removes sine-wave excitation, the gyro oscillatory extinction of preposition reading circuit output
Curve then has：
F is resonant frequency in formula, carries out exponential fitting, obtains the quality factor q of gyro.
Advantageous effect
The invention adopts the above technical scheme, which has the following advantages：It, can be certainly due to using automatic test approach
The structural keys parameter such as dynamic test resonant frequency, quality factor and coupled voltages ratio, Displacement Ratio, and collecting test environment temperature or
Air pressure is automatically stored in digital signal processor, and test process is not necessarily to the operations such as frequent debugging, thread-changing, is especially surveyed in alternating temperature
Artificial real time monitoring has been broken away from when examination, has significantly shortened original manual testing's method testing time, improves efficiency, it is convenient easy
Row.It is humorous that the present invention is suitable for the micromechanics such as resonant-type tiny cantilever beam, micro-resonator, micromechanical gyro and resonance type micro accelerometer
Formula of shaking device architecture crucial parameter measurement.
Description of the drawings
Fig. 1 is the device block diagram for MEMS gyro structural key automatically testing parameters method；
Fig. 2 is the MEMS gyro gauge head structure schematic diagram that the present invention is applicable in；
Fig. 3 is the Q value test curves of the present invention；
Fig. 4 is the flow chart for MEMS gyro driven-mode structural key automatically testing parameters method.
Specific implementation mode
Hereinafter, in conjunction with the drawings and specific embodiments, the present invention is described further.
Fig. 1 is for realizing the device block diagram of MEMS gyro structural key automatically testing parameters method of the present invention：
Include mainly gyro gauge outfit 1, test circuit 2, high-speed data acquisition card 3 and digital signal processor 4.Gyro gauge outfit
1 is connected to high-speed data acquisition card 3 by test circuit 2, and the vibration detection signal of gyro driven-mode and sensed-mode passes through
High-speed data acquisition card 3 carries out processing into digital signal processor 4 and obtains required parameter, while digital signal processor 4 can
Gyro gauge outfit 1 is driven to generate pumping signal by capture card 3.
The MEMS gyro that the present invention is directed to is to include the MEMS gyro of two operation mode structures, i.e., driven-mode structure and
Sensed-mode structure；The driven-mode structure includes driven-mode driving structure, driven-mode vibrational structure and driven-mode
Vibration pickup structure；The sensed-mode structure includes sensed-mode driving structure, sensed-mode vibrational structure and sensed-mode
Vibration pickup structure；
It is illustrated in figure 2 the MEMS gyro gauge head structure 1 that the present invention is applicable in, including driven-mode structure 5 and detection mould
State structure 6.Driven-mode structure 5 includes a driven-mode driving structure 7, a driven-mode vibrational structure 8 and a driven-mode
Vibration pickup structure 9, sensed-mode structure 6 include a sensed-mode driving structure 13, a sensed-mode vibrational structure 14 and one
Sensed-mode vibration pickup structure 15.
Wherein, condenser type electrostatic drive or Piezoelectric Driving can be used in driving structure 7,13.Vibrational structure 8,14 passes through elasticity
Beam is connected at fixed pivot, can vibrational structure to constitute.Capacitance type structure or piezoelectricity can be used in vibration pickup structure 9,15
Formula structure.There are driving structure 7,13 driving electrodes 11,17, vibration pickup structure 9,15 to have detecting electrode 10,16.It is driving
Apply driving voltage on electrode 11,17, since driving structure 7,13 uses electrostatic drive or Piezoelectric Driving, driving structure 7,13 is just
One driving force 12,18 is generated to movable vibrational structure 8,14.Under the driving of driving force 12,18, vibrational structure 8,14 generates vibration,
Its displacement variable is obtained by vibration pickup structure 9,15.The displacement variable got is changed by vibration pickup structure 9,15
Charge variation amount, and exported by vibration pickup structure electrode 10,16, vibration pickup structure electrode 10,16 is connected in a Fig. 1
Test circuit 2.Charge variation amount is converted to voltage variety by test circuit 2, and the vibration to obtain vibrational structure 8,14 is believed
Breath.
When gyro reaches resonant condition, mechanical gain is maximum, so after applying white-noise excitation, the vibration of gyro
Curve of output amplitude maximum at resonant frequency carries out FFT processing by the vibration curve of output after acquisition white-noise excitation,
By being detected to peak point, the resonant frequency f of gyro can be obtained.
Fig. 3 is the Q value test curves of the present invention, and y1 is after gyro starting of oscillation, removes sine-wave excitation, preposition reading circuit is defeated
The gyro oscillatory extinction curve gone out, y2 are vibration amplitude attenuation curve, and the resonant frequency f and quality factor q of curve and gyro have
It closes, i.e.,
By above-mentioned curve and calculated resonant frequency f, exponential fitting is carried out, the quality factor q of gyro can be obtained.
Fig. 4 is program of the present invention for the automatic test approach embodiment of MEMS gyro driven-mode structural key parameter
The auto test flow of flow chart, sensed-mode structural key parameter is similar with its：
After program starts, first parameters in algorithm are initialized.White noise is generated in digital signal processor 4
Pumping signal encourages gyro gauge outfit driven-mode structure, high-speed data acquisition card 3 to acquire gyro by high-speed data acquisition card 3
The output signal of driven-mode test circuit 2 handles in digital signal processor 4 and obtains the resonant frequency f of driven-moded；
Then it is constructed with f in digital signal processor 4dFor the sine wave signal of frequency, gyro is encouraged by high-speed data acquisition card 3
Gauge outfit driven-mode structure, high-speed data acquisition card 3 acquire the output signal of gyro driven-mode test circuit 2, believe in number
Judge in number processor 4 gyro driven-mode whether starting of oscillation, after driven-mode starting of oscillation, while acquiring gyroscope test
The output signal of circuit 2 handles in digital signal processor 4 and obtains coupled voltages ratio, Displacement Ratio；By digital signal processor
3 remove sine-wave excitation, collect the attenuation curve of driven-mode, and the Fitting Calculation is driven in digital signal processor 3
The quality factor q of dynamic model stated；Terminate program after reaching testing time requirement.
The method of the invention is a kind of automatic test approach for MEMS gyro structural key parameter, including is walked as follows
Suddenly：
1) apply white-noise excitation on the driving structure electrode of MEMS gyro driven-mode；
Apply white noise voltage drive on the driving structure electrode of MEMS gyro driven-mode and generate driving force, passes through institute
It states driving structure driving force is applied on the driven-mode vibrational structure, obtains displacement variable；The driving force is to drive
The product of dynamic voltage signal and conversion coefficient；When the conversion coefficient is that the drive voltage signal is applied to the driving structure,
Convert voltages into the proportionality coefficient corresponding to power；The white noise psophometric voltage is generated by digital signal processor, amplitude and noise
Power adjustable section.
2) the vibration pickup structure electrode of MEMS gyro driven-mode is connected into preposition reading circuit, obtains driven-mode
Resonant frequency fd；
The vibration pickup structure electrode of MEMS gyro driven-mode is connected into preposition reading circuit；By the displacement variable
It is changed into charge variation amount by the vibration pickup structure；Then, the charge variation amount is converted to by preposition reading circuit
Voltage variety obtains the response curve of gyro driven-mode；It is carried out in the Response Waveform Acquisition to digital signal processor
FFT processing obtains frequency-amplitude curve, finds out the corresponding frequency of maximum amplitude, you can obtain the resonant frequency of driven-mode
fd。
3) the resonant frequency f obtained with step 2)dSine wave is constructed, is applied on the driving structure electrode of driven-mode,
After determining gyro starting of oscillation, the output voltage of driven-mode and the preposition reading circuit of sensed-mode is acquired, obtains coupling ratio；
While sine-wave excitation gyro driven-mode resonant operational, driven-mode and the preposition reading of sensed-mode are acquired
The output voltage of circuit obtains coupled voltages ratio, and then can calculate coupling Displacement Ratio by conversion coefficient；
The coupled voltages are than the output voltage ratio for gyroscope and driven-mode front end circuit；
The conversion coefficient is constant, with the displacement variable of driven-mode and sensed-mode to charge variation amount, charge
The conversion coefficient of variable quantity to voltage variety is related, is constant value for specified gyro.
4) sine-wave excitation is removed, the quality factor q of driven-mode is calculated by attenuation curved；
The resonant frequency f obtained with step 2)dSine wave is constructed, the driving structure electrode of gyro driven-mode is applied to
On, after determining gyro starting of oscillation, sine-wave excitation is removed, the preposition reading circuit output gyroscopic vibration decaying of driven-mode is bent
Line is calculated the quality factor q of driven-mode by attenuation curved；The sine wave is generated by digital signal processor；It is described to sentence
The method of disconnected gyro starting of oscillation is the response curve of the preposition reading circuit output of acquisition, detects whether its amplitude reaches requirement；It is described
Attenuation curve is collected in digital signal processor and is handled.
Carry out complete driven-mode test after, MEMS gyro sensed-mode carry out as step 1), 2), 3) shown in
Operation, obtain the resonant frequency f of sensed-modesAnd quality factor qs, it is as follows shown：
5) apply white noise voltage drive on the driving structure electrode of MEMS gyro sensed-mode and generate driving force, pass through
Driving force is applied on the sensed-mode vibrational structure by the driving structure, obtains displacement variable；The driving force is
The product of drive voltage signal and conversion coefficient；The conversion coefficient is that the drive voltage signal is applied to the driving structure
When, convert voltages into the proportionality coefficient corresponding to power；The white noise is generated by digital signal processor, amplitude and noise work(
Rate is adjustable.
6) the vibration pickup structure electrode of MEMS gyro sensed-mode is connected into preposition reading circuit；By the change in displacement
Amount is changed into charge variation amount by the vibration pickup structure；Then, the charge variation amount is converted by preposition reading circuit
For voltage variety, the response curve of gyroscope is obtained；In the Response Waveform Acquisition to digital signal processor into
Row FFT processing, obtains frequency-amplitude curve, finds out the corresponding frequency of maximum amplitude, you can obtain the resonant frequency of sensed-mode
fs。
7) the resonant frequency f obtained with step 6)sSine wave is constructed, the driving structure electrode of gyroscope is applied to
On, after determining gyro starting of oscillation, sine-wave excitation is removed, the preposition reading circuit output gyroscopic vibration decaying of sensed-mode is bent
Line is calculated the quality factor q of sensed-mode by attenuation curves；The sine wave is generated by digital signal processor；
Whether the method for judging gyro starting of oscillation detects its amplitude to acquire the response curve of preposition reading circuit output
Reach designated value；
The attenuation curve, which collects in digital signal processor, to be handled.
8) temperature and the air pressure of temperature sensor and vacuum meter collecting test environment can as needed, be used.
9) by the resonant frequency of two mode of MEMS gyro measured, quality factor and coupled voltages ratio/Displacement Ratio, temperature
The information such as degree, air pressure are automatically stored in digital signal processor.
In above-mentioned test method, the attenuation curve in the step 3,7 is related with the resonant frequency of gyro and quality factor,
And the quality factor of driven-mode and sensed-mode can be obtained by exponential fitting for exponential damping.
In above-mentioned test method, the time interval between being tested to testing time and every time is set.
In addition, as needed, it can be with the temperature of collecting test environment and air pressure, and two mode of MEMS gyro that will be measured
Resonant frequency, quality factor and coupling ratio, temperature, the information such as air pressure are automatically stored in digital signal processor.
The present invention due to using automatic test approach, can test automatically resonant frequency, quality factor and coupled voltages ratio,
The structural keys parameter such as Displacement Ratio, and collecting test environment temperature or air pressure, are automatically stored in digital signal processor, test
Process is not necessarily to the operations such as frequent debugging, thread-changing, artificial real time monitoring has especially been broken away from temperature variation testing, with original manual testing
Method is compared, the testing time significantly shortened, convenient and easy, improves testing efficiency.The present invention declines outstanding suitable for resonance
The micromachine resonants device architecture crucial parameter measurement such as arm beam, micro-resonator, micromechanical gyro and resonance type micro accelerometer.
Although by above-described embodiment to a kind of MEMS gyro structural key automatically testing parameters method of the present invention
It is described in detail, but above description is not limitation of the invention, in the range for the purport for not departing from the present invention
It is interior, various modifications and change can be carried out, for example, the method optimized can select in the various methods of the prior art.
Claims (3)
1. a kind of MEMS gyro structural key automatically testing parameters method is suitable for inclusion in two operation mode structure MEMS gyros
Structural key parameter test, described two operation mode structures be driven-mode structure and sensed-mode structure；The drive
Dynamic modal structure includes driven-mode driving structure, driven-mode vibrational structure and driven-mode vibration pickup structure；The inspection
It includes sensed-mode driving structure, sensed-mode vibrational structure and sensed-mode vibration pickup structure to survey modal structure；The knot
Structure key parameter includes：The resonant frequency f of driven-moded, driven-mode quality factor qd, driven-mode and sensed-mode
Coupled voltages ratio；
It is characterized in that, described method includes following steps：
Step 1) applies white noise voltage drive on the driving structure electrode of MEMS gyro driven-mode and generates driving force；
The vibration pickup structure electrode of MEMS gyro driven-mode is connected preposition reading circuit by step 2)；Preposition reading circuit is read
The voltage variety for taking gyro to export obtains the response curve of gyro driven-mode；The Response Waveform Acquisition is to digital signal
FFT processing is carried out in processor, obtains the resonant frequency f of driven-moded；
The resonant frequency f that step 3) is obtained with step 2)dSine wave is constructed, is applied on the driving structure electrode of driven-mode,
After determining gyro starting of oscillation, the output voltage of driven-mode and the preposition reading circuit of sensed-mode is acquired, obtains coupling ratio；
Step 4) removes sine-wave excitation, and the quality factor q of driven-mode is calculated by attenuation curved；
After completing step 3), sine-wave excitation is removed, the preposition reading circuit of driven-mode exports gyroscopic vibration attenuation curve,
The quality factor q of driven-mode is calculated by attenuation curved。
2. a kind of MEMS gyro structural key automatically testing parameters method as described in claim 1, it is characterised in that：The knot
Structure key parameter further includes：The resonant frequency f of sensed-modes, sensed-mode quality factor qs；The method further includes as follows
Step：
Step 5) applies white noise voltage drive on the driving structure electrode of MEMS gyro sensed-mode and generates driving force；
The vibration pickup structure electrode of MEMS gyro sensed-mode is connected preposition reading circuit by step 6)；Preposition reading circuit is read
The voltage variety for taking gyro to export, obtains the response curve of gyroscope；The Response Waveform Acquisition is to digital signal
FFT processing is carried out in processor, obtains the resonant frequency f of sensed-modes；
The resonant frequency f that step 7) is obtained with step 6)sSine wave is constructed, the driving structure electrode of gyroscope is applied to
On, after determining gyro starting of oscillation, sine-wave excitation is removed, the preposition reading circuit output gyroscopic vibration decaying of sensed-mode is bent
Line is calculated the quality factor q of sensed-mode by attenuation curves。
3. a kind of MEMS gyro structural key automatically testing parameters method as claimed in claim 2, it is characterised in that：
In the quality factor q of Test driver modedAnd the quality factor q of sensed-modesWhen, with the following method：
After if y1 is gyro starting of oscillation and then removes sine-wave excitation, the gyro oscillatory extinction curve of preposition reading circuit output,
Then have：
F is resonant frequency in formula, carries out exponential fitting, obtains the quality factor q of gyro.
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| CN107607130B (en) * | 2017-09-14 | 2019-07-26 | 中国电子科技集团公司第二十六研究所 | A kind of no plated film quartz hemispherical resonator detection device and method |
| CN109141473B (en) * | 2018-08-17 | 2022-09-13 | 北方电子研究院安徽有限公司 | Variable damping MEMS gyro sensitive structure testing device |
| CN109238308B (en) * | 2018-10-31 | 2022-04-12 | 中国船舶重工集团公司第七0七研究所 | High-precision modal testing system and method for metal cylindrical resonant gyroscope |
| CN110440777B (en) * | 2019-07-15 | 2021-04-02 | 北京自动化控制设备研究所 | Tuning fork sensitive structure trimming online test method and angular rate sensor |
| CN110567450B (en) * | 2019-08-26 | 2021-02-05 | 北京自动化控制设备研究所 | Parameter matching method of MEMS Coriolis vibration gyroscope and ASIC circuit |
| CN110553666B (en) * | 2019-09-02 | 2020-12-18 | 北京博达微科技有限公司 | Method for acquiring quality factor Q value of sensitive structure of MEMS capacitive gyroscope |
| CN111536994B (en) * | 2020-04-29 | 2021-09-24 | 中国人民解放军国防科技大学 | Resonant micro gyroscope multi-mode cooperative control method and system and resonant micro gyroscope |
| CN111964690B (en) * | 2020-07-15 | 2022-09-20 | 北京自动化控制设备研究所 | Quartz tuning fork gyroscope gauge outfit screening test device |
| CN112964242B (en) * | 2021-02-22 | 2022-11-11 | 北京自动化控制设备研究所 | System and method for testing mechanical coupling error of quartz tuning fork gyroscope gauge head |
| CN115047214B (en) * | 2022-03-17 | 2023-04-25 | 中国科学院地质与地球物理研究所 | Detection method and device for MEMS acceleration sensor chip |
| CN115628758B (en) * | 2022-12-21 | 2023-03-31 | 四川图林科技有限责任公司 | Method for detecting and correcting key process parameters under multi-physical-field coupling condition |
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