CN106225679A - A kind of method demarcating PZT displacement based on white light interference - Google Patents
A kind of method demarcating PZT displacement based on white light interference Download PDFInfo
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- CN106225679A CN106225679A CN201610528812.2A CN201610528812A CN106225679A CN 106225679 A CN106225679 A CN 106225679A CN 201610528812 A CN201610528812 A CN 201610528812A CN 106225679 A CN106225679 A CN 106225679A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of method demarcating PZT displacement based on white light interference, relate to optical interferometry field, method step is: first, builds the experimental provision of the method demarcating PZT displacement based on white light interference: make the end face of PZT constitute step surface with the end face by body；Next tunes variable voltage source, changes the input voltage at PZT two ends, and the step measured at different magnitude of voltage by white light interferometer is high, step at this magnitude of voltage high with 0V voltage at the high difference of step, be i.e. displacement corresponding for PZT；And then obtain the dynamic displacement curve of PZT in voltage rising and backhaul, reach to demarcate the purpose of PZT displacement.The method precision is higher, easy to operate, simple in construction, real-time are good, and low cost.
Description
Technical field
The present invention relates to interference of light metrology and measurement field, be specifically related to a kind of based on white light interference demarcation PZT displacement
Method.
Background technology
Piezoelectric ceramics (PZT) be a kind of can be by the informational function ceramic material of mechanical energy Yu the mutual inversion of phases of electric energy.When
Applying electric field in the polarised direction of PZT, PZT can produce deformation on certain direction, and this deformation can be that pressure can also
It is thrust.When extra electric field removes, in the range of certain voltage, corresponding deformation also can recover.The application of PZT is the widest
General, including acoustic transducer, ultrasonic transducer, piezoelectric ignition device etc..
The micrometric displacement device that PZT is little as volume, displacement resolution is high, stretching optical fiber grating, change fiber grating anti-
Penetrate characteristic aspect to play an important role.Wherein, the dynamic displacement curve of PZT, i.e. self stroke with voltage variation relation particularly
Important.But, the structure of PZT and working mechanism are complicated so that its displacement is not on stricti jurise with the change of voltage
Linear relationship, there is certain creep, sluggishness and nonlinear characteristic.Therefore, before use, it is necessary to the displacement of PZT is entered
Row is strict to be demarcated.Existing method has Edge Following method, Fourier transformation standardizition, multiple iterative algorithm, overlapping four steps average
Method etc..These method amounts of calculation are relatively big, it is high to require, be difficult to real-time calibration, it is impossible to adapt to PZT in use because of external environment
And the situation of self placement property change caused.
Summary of the invention
It is an object of the invention to provide a kind of method demarcating PZT displacement based on white light interference, simple to operate, real-time
Good, the low cost of property.
The technical solution realizing the object of the invention is: a kind of method demarcating PZT displacement based on white light interference, step
Rapid as follows:
Step one: build the experimental provision of method demarcating PZT displacement based on white light interference:
Being each attached on rigidity table top by PZT with by body, rigidity table top is arranged on the object stage of white light interferometer, PZT
It is arranged on the side by body, and both end faces constitute step surface；PZT power outlet connects the regulated power supply of 0-200V, and white light is done
The object lens of interferometer are arranged on the surface of step surface；Computer is connected with white light interferometer.
Step 2: slowly move down the object lens of white light interferometer, finds respectively and is total to by body end face and the optimal of PZT end face
Position of focal plane, carries out test parameter setting.
Step 3: the voltage of regulation regulated power supply, time between 0-150V, high every the step of 15V test desk terrace, described
PZT (2) displacement l1Bi=h1Bi-h0, i=1,2,3 ... 10, wherein, h0Represent that the step that voltage is corresponding when being 0V is high, h1BiRepresent
The step that voltage is corresponding when being 15V multiple is high, and i is measurement interval.
Step 4: in voltage backhaul, every 15V, the step of test desk terrace is high, described PZT displacement l '1Bi′=
h′1Bi′-h0, i '=9,8,7 ... 1,0, wherein, h '1Bi′Represent that the step that voltage is corresponding when being 15V multiple is high, between i ' is for measuring
Every.
Described including metal derby and plate glass by body, metal derby is arranged on plate glass, and plate glass is arranged on just
Property table top on, it is ensured that PZT and metal block contact, both end faces constitute step surfaces.
Described white light interferometer uses 10 times of enlarging objectives, and focal length is 7.5mm.
In above-mentioned steps two, at the object lens elder generation coarse adjustment of white light interferometer to distance step surface 7.5mm, adjust the bright of visual field
Degree；Being finely adjusted, find the optimal position of focal plane altogether by body end face and PZT end face respectively, now intetference-fit strengthening is
Good, and record the z-axis coordinate of now two positions；The setting of distance and backhaul distance it is scanned in parameter is arranged.
In above-mentioned steps three, step surface sets any three groups of sampling locations, slowly regulate the voltage of regulated power supply, from
0V starts, and the step recording above-mentioned three groups of sampling locations every 15V is high；First stop some seconds at each sampled voltage, it is ensured that
PZT deformation completes, and re-records step high.
Step Gao Qiujun in the voltage uphill process of step 3, to three groups of sampling locations corresponding at each magnitude of voltage
Value is high as the step at this magnitude of voltage.
In step 4, slowly regulate the voltage of regulated power supply, from the beginning of 150V, regulate toward 0V, step on 15V record
The step of three groups of sampling locations in three is high；First stop some seconds at each sampled voltage, it is ensured that PZT deformation completes, then remembers
Record step is high.
Above-mentioned any one group of position all includes two points, and a point is by body end face, and another point is at PZT end face.
During step 4 voltage is declined, the step Gao Qiujun to three groups of sampling locations corresponding at each magnitude of voltage
Value is high as the step at this magnitude of voltage.
The present invention compared with prior art, has an advantage in that:
(1) relative to overlapping four step averaging method, the present invention nominal time is short, simple to operate, and real-time is good.
(2) relative to existing scaling method, low cost of the present invention, amount of calculation is less.
Accompanying drawing explanation
Fig. 1 is the flow chart that the present invention demarcates the method for PZT displacement based on white light interference.
Fig. 2 is the structure drawing of device that the present invention realizes demarcating the method for PZT displacement based on white light interference.
The step high sample graph of the sampling location that Fig. 3 is corresponding when being 75V in the embodiment of the present invention 1.
Fig. 4 is the dynamic curve diagram of PZT elongation and the voltage recorded in the embodiment of the present invention 1.
The PZT elongation that Fig. 5 provides for producer and the dynamic curve diagram of voltage.
Detailed description of the invention
In conjunction with Fig. 1 and Fig. 2, a kind of method demarcating PZT displacement based on white light interference, step is as follows:
Step one: build the experimental provision of method demarcating PZT displacement based on white light interference:
Being each attached on rigidity table top 3 by PZT 2 with by body 4, rigidity table top 3 is arranged on the object stage 8 of white light interferometer 1
On, PZT 2 is arranged on the side by body 4, and both end faces constitute step surface 6；PZT 2 power outlet connects the adjustable of 0-200V
Power supply 7, the object lens of white light interferometer 1 are arranged on the surface of step surface 6；Computer 5 is connected with white light interferometer 1.
Step 2: slowly move down the object lens of white light interferometer 1, finds by body 4 end face and PZT 2 end face the most respectively
Good position of focal plane altogether, carries out test parameter setting, and concrete grammar is as follows:
By the object lens elder generation coarse adjustment of white light interferometer 1 to step surface 6 apart from for 7.5mm at, adjustment visual field brightness；Enter again
Row fine setting, finds the optimal position of focal plane altogether by body 4 end face and PZT 2 end face respectively, and now intetference-fit strengthening is best, and
The z-axis coordinate of record now two positions；The setting of distance and backhaul distance it is scanned in parameter is arranged.
Step 3: the voltage of regulation regulated power supply 7, time between 0-150V, high every the step of 15V test desk terrace 6, institute
State PZT 2 displacement l1Bi=h1Bi-h0, i=1,2,3 ... 10, wherein, h0Represent that the step that voltage is corresponding when being 0V is high, h1BiTable
Showing that the step that voltage is corresponding when being 15V multiple is high, i is measurement interval:
Step surface 6 sets any three groups of sampling locations, slowly regulates the voltage of regulated power supply 7, from the beginning of 0V, every
The step that 15V records above-mentioned three groups of sampling locations is high；First stop some seconds at each sampled voltage, it is ensured that PZT 2 deformation is complete
Become, re-record step high.The step height of three groups of sampling locations corresponding at each magnitude of voltage is averaged, at this magnitude of voltage
Step high.
Above-mentioned any one group of position all includes two points, and a point is by body 4 end face, and another point is at PZT 2 end face.
Step 4: in voltage backhaul, every 15V, the step of test desk terrace (6) is high, described PZT displacement l '1Bi′
=h '1Bi′-h0, i '=9,8,7 ... 1,0, wherein, h '1Bi′Represent that the step that voltage is corresponding when being 15V multiple is high, between i ' is for measuring
Every.
Slowly regulate the voltage of regulated power supply 7, from the beginning of 150V, regulate toward 0V, on 15V record in step 3 three
The step of group sampling location is high；First stop some seconds at each sampled voltage, it is ensured that PZT2 deformation completes, and re-records step
High.Under voltage during fall, the step height of three groups of sampling locations corresponding at each magnitude of voltage is averaged, as this voltage
Step at value is high.
Described including metal derby and plate glass by body 4, metal derby is arranged on plate glass, and plate glass is arranged on just
Property table top 3 on, it is ensured that PZT 2 and metal block contact, both end faces constitute step surfaces 6.
Described white light interferometer 1 uses 10 times of enlarging objectives, and focal length is 7.5mm.
Glue bonding with rigidity table top 3 bottom PZT 2 only plays fixation, conveniently take off；Described by gold in body 4
The end face belonging to block wants enough flat smooth with contact surface；PZT 2 keeps the laminating of certain stress with by the contact surface of metal derby in body 4
, PZT 2 to be ensured can freely stretch.
Embodiment 1
The step of the present invention is as follows:
Step one: build the experimental provision of method demarcating PZT displacement based on white light interference:
Being each attached on rigidity table top 3 by PZT 2 with by body 4, rigidity table top 3 is arranged on the object stage 8 of white light interferometer 1
On, PZT 2 is arranged on the side by body 4, and both end faces constitute step surface 6；PZT 2 power outlet connects the adjustable of 0-200V
Power supply 7, the object lens of white light interferometer 1 are arranged on the surface of step surface 6；Computer 5 is connected with white light interferometer 1.
Step 2: slowly move down the object lens of white light interferometer 1, finds by body 4 end face and PZT 2 end face the most respectively
Good position of focal plane altogether, carries out test parameter setting, and concrete grammar is as follows:
By the object lens elder generation coarse adjustment of white light interferometer 1 to step surface 6 apart from for 7.5mm at, adjustment visual field brightness；Enter again
Row fine setting, finds the optimal position of focal plane altogether by body 4 end face and PZT 2 end face respectively, and now intetference-fit strengthening is best, and
The z-axis coordinate of record now two positions；The setting of distance and backhaul distance it is scanned in parameter is arranged.
Step 3: the voltage of regulation regulated power supply 7, time between 0-150V, high every the step of 15V test desk terrace 6, institute
State PZT 2 displacement l1Bi=h1Bi-h0, i=1,2,3 ... 10, wherein, h0Represent that the step that voltage is corresponding when being 0V is high, h1BiTable
Showing that the step that voltage is corresponding when being 15V multiple is high, i is measurement interval:
Step surface 6 sets any three groups of sampling locations, slowly regulates the voltage of regulated power supply 7, from the beginning of 0V, every
The step that 15V records above-mentioned three groups of sampling locations is high；First stop some seconds at each sampled voltage, it is ensured that PZT 2 deformation is complete
Become, re-record step high.The step height of three groups of sampling locations corresponding at each magnitude of voltage is averaged, at this magnitude of voltage
Step high.
Above-mentioned any one group of position all includes two points, and a point is by body 4 end face, and another point is at PZT 2 end face.
Step 4: in voltage backhaul, every 15V, the step of test desk terrace (6) is high, described PZT displacement l '1Bi′
=h '1Bi′-h0, i '=9,8,7 ... 1,0, wherein, h '1Bi′Represent that the step that voltage is corresponding when being 15V multiple is high, between i ' is for measuring
Every:
Slowly regulate the voltage of regulated power supply 7, from the beginning of 150V, regulate toward 0V, on 15V record in step 3 three
The step of group sampling location is high；First stop at each sampled voltage 20 seconds, it is ensured that PZT 2 deformation completes, re-record step high.
Under voltage during fall, the step height of three groups of sampling locations corresponding at each magnitude of voltage is averaged, as this magnitude of voltage
The step at place is high.
Described including metal derby and plate glass by body 4, metal derby is arranged on plate glass, and plate glass is arranged on just
Property table top 3 on, it is ensured that PZT 2 and metal block contact, both end faces constitute step surfaces 6.
Described white light interferometer 1 uses 10 times of enlarging objectives, and focal length is 7.5mm.
Glue bonding with rigidity table top 3 bottom PZT 2 only plays fixation, conveniently take off；Described by gold in body 4
The end face belonging to block wants enough flat smooth with contact surface；PZT 2 keeps the laminating of certain stress with by the contact surface of metal derby in body 4
, PZT 2 to be ensured can freely stretch.
In conjunction with Fig. 3, the coordinate difference in z-axis direction is i.e. that one group of step at 75V magnitude of voltage is high.
Voltage according to the regulated power supply 7 obtained rises and the displacement of PZT 2 in backhaul, makes the dynamic bit of PZT 2
Move curve chart.
By the characteristic curve on comparison diagram 4 and Fig. 5, it will thus be seen that be applied in, at PZT 2, the voltage that forward constantly increases
Time, its displacement coincide well with the relation of voltage with producer's test curve.But voltage is gradually lowered when, PZT
2 curves tested out can not return to dead-center position.Analyze its reason to be: when measuring PZT 2 displacement, need to fix it
Position, by clamping, the mode of stickup makes the growth upwards of its holding shaft, the displacement on other directions does not occur.Due to PZT 2
Elongation and shortening carry out on two end faces simultaneously, so, when PZT 2 shortens, the shadow of frictional force produced due to clamping
Ringing, PZT 2 can regard unsettled on rigidity table top 3 as, therefore tests the data obtained and can not return zero point.It is appreciated that
, PZT 2 is when elongation, and owing to its thrust is very big, PZT 2 can keep and the fitting tightly of rigidity table top 3, therefore at voltage
The curve that the curve ratio voltage demarcated the when of being gradually increasing is demarcated when being gradually reduced is more accurate.
Claims (9)
1. the method demarcating PZT displacement based on white light interference, it is characterised in that step is as follows:
Step one: build the experimental provision of method demarcating PZT displacement based on white light interference:
Being each attached on rigidity table top (3) by PZT (2) with by body (4), rigidity table top (3) is arranged on the load of white light interferometer (1)
On thing platform (8), PZT (2) is arranged on the side by body (4), and both end faces constitute step surface (6)；PZT (2) power outlet
Connecing the regulated power supply (7) of 0-200V, the object lens of white light interferometer (1) are arranged on the surface of step surface (6)；Computer (5) with
White light interferometer (1) connects；
Step 2: slowly move down the object lens of white light interferometer (1), finds respectively by body (4) end face and PZT (2) end face
Optimal position of focal plane altogether, carries out test parameter setting；
Step 3: the voltage of regulation regulated power supply (7), time between 0-150V, high every the step of 15V test desk terrace (6), institute
State PZT (2) displacementI=1,2,3 ... 10, wherein, h0Represent that the step that voltage is corresponding when being 0V is high,
Representing that the step that voltage is corresponding when being 15V multiple is high, i is measurement interval；
Step 4: in voltage backhaul, every 15V, the step of test desk terrace (6) is high, described PZT displacementI '=9,8,7 ... 1,0, wherein,Representing that the step that voltage is corresponding when being 15V multiple is high, i ' is for measuring
Interval.
The method demarcating PZT displacement based on white light interference the most according to claim 1, it is characterised in that: described by body
(4) including metal derby and plate glass, metal derby is arranged on plate glass, and plate glass is arranged on rigidity table top (3), protects
Card PZT (2) and metal block contact, both end faces constitute step surface (6).
The method demarcating PZT displacement based on white light interference the most according to claim 1, it is characterised in that: described white light
Interferometer (1) uses 10 times of enlarging objectives, and focal length is 7.5mm.
The method demarcating PZT displacement based on white light interference the most according to claim 1, it is characterised in that: above-mentioned steps
In two, at the object lens elder generation coarse adjustment of white light interferometer (1) to distance step surface (6) 7.5mm, adjust the brightness of visual field；Carry out again
Fine setting, finds the optimal position of focal plane altogether by body (4) end face and PZT (2) end face respectively, and now intetference-fit strengthening is best,
And record the z-axis coordinate of now two positions；The setting of distance and backhaul distance it is scanned in parameter is arranged.
The method demarcating PZT displacement based on white light interference the most according to claim 1, it is characterised in that: above-mentioned steps
In three, in any three groups of sampling locations of the upper setting of step surface (6), slowly regulate the voltage of regulated power supply (7), from the beginning of 0V, often
The step recording above-mentioned three groups of sampling locations every 15V is high；First stop some seconds at each sampled voltage, it is ensured that PZT (2) deformation
Complete, re-record step high.
The method demarcating PZT displacement based on white light interference the most according to claim 5, it is characterised in that: in step 3
Voltage uphill process in, the step height of three groups of sampling locations corresponding at each magnitude of voltage is averaged, as this magnitude of voltage
The step at place is high.
The method demarcating PZT displacement based on white light interference the most according to claim 5, it is characterised in that: in step 4,
Slowly regulate the voltage of regulated power supply (7), from the beginning of 150V, regulate toward 0V, the sampling of three groups in step 3 on 15V record
The step of position is high；First stop some seconds at each sampled voltage, it is ensured that PZT (2) deformation completes, re-record step high.
The most according to claim 7 based on white light interference demarcate PZT displacement method, it is characterised in that: above-mentioned arbitrarily
One group of position all includes two points, and a point is by body (4) end face, and another point is at PZT (2) end face.
The method demarcating PZT displacement based on white light interference the most according to claim 7, it is characterised in that: by step 4
During voltage declines, the step height of three groups of sampling locations corresponding at each magnitude of voltage is averaged, at this magnitude of voltage
Step high.
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Application publication date: 20161214 |