CN106205739A - A kind of rotary apparatus rotary part running accuracy correcting device - Google Patents

A kind of rotary apparatus rotary part running accuracy correcting device Download PDF

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Publication number
CN106205739A
CN106205739A CN201610513065.5A CN201610513065A CN106205739A CN 106205739 A CN106205739 A CN 106205739A CN 201610513065 A CN201610513065 A CN 201610513065A CN 106205739 A CN106205739 A CN 106205739A
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CN
China
Prior art keywords
rotary part
detecting element
rotary
correcting device
position detecting
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Granted
Application number
CN201610513065.5A
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Chinese (zh)
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CN106205739B (en
Inventor
佘世云
邱全山
朱乐群
陈松清
汪强
朱刚
李强
白启龙
方亮青
郑庭
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Maanshan Iron and Steel Co Ltd
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Maanshan Iron and Steel Co Ltd
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Priority to CN201610513065.5A priority Critical patent/CN106205739B/en
Publication of CN106205739A publication Critical patent/CN106205739A/en
Application granted granted Critical
Publication of CN106205739B publication Critical patent/CN106205739B/en
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    • GPHYSICS
    • G12INSTRUMENT DETAILS
    • G12BCONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/04Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/05Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

The present invention provides the rotary apparatus rotary part running accuracy correcting device of a kind of anglec of rotation stopping accuracy equipment technical field being applied to dish class rotary apparatus rotary part, the guide wheel component (3) of described rotary part running accuracy correcting device is arranged on rotary part (1), on the parts plate (5) of guide wheel component (3), guide wheel (6) is installed, the adjustment cylinder (7) of correcting device body (4) is connected with motor (9), between guide plate I (10) and the guide plate II (11) of guide plate (8), clearance portion (12) is set;Correcting device body (4) is arranged on rotary apparatus body, position detecting element I (13) is connected with controlling parts (14), motor (9) is connected with controlling parts (14), the rotary apparatus rotary part running accuracy correcting device of the present invention, simple in construction, it is possible to be effectively improved the positioning precision of the stop position of rotary apparatus rotary part.

Description

A kind of rotary apparatus rotary part running accuracy correcting device
Technical field
The invention belongs to the anglec of rotation stopping accuracy equipment technical field of dish class rotary apparatus rotary part, more specifically Say, relate to a kind of rotary apparatus rotary part running accuracy correcting device.
Background technology
At present, the anglec of rotation stop position precision of dish class rotary apparatus rotary part is commonly used frequency converter timing and is realized, Position detecting element detection position, the stopping being realized rotary part by the position of PLC program control position detecting element is fixed Position.Owing to the motion of rotary part is affected by factors such as the frictional force of kinematic pair and motional inertias, often result in rotation There is certain deviation in the stop angle precision of parts and design value, causes the precision of rotary apparatus, reliability and safety to reach Less than design requirement, affect device using effect.
Summary of the invention
The technical problem to be solved is: for the deficiencies in the prior art, it is provided that a kind of simple in construction, it is possible to right The anglec of rotation stop position of rotary apparatus rotary part is modified, it is possible to be effectively improved the stopping of rotary apparatus rotary part The rotary apparatus rotary part running accuracy correcting device of the positioning precision of position.
Techniques discussed above problem to be solved, the technical scheme that the present invention takes is:
The present invention is a kind of rotary apparatus rotary part running accuracy correcting device, the rotary part of rotary apparatus and rotation Device body connects, and described rotary part running accuracy correcting device includes guide wheel component, correcting device body, and described leads Wheel component is arranged on rotary part, and guide wheel component includes parts plate and guide wheel, and parts plate is installed guide wheel, correcting device Body includes adjusting cylinder, guide plate, adjusts cylinder and is connected with the motor that adjustment cylinder Direct/Reverse can be driven to rotate, guide plate Including guide plate I and guide plate II, between guide plate I and guide plate II, clearance portion is set.
Described correcting device body is arranged on rotary apparatus body, and rotary part arranges position detecting element I, position Putting detecting element I and be connected with controlling parts, motor is connected with controlling parts, and position detecting element I detects that rotary part revolves When forwarding Primary Location position to, position detecting element I is configured to, to controlling component feedback signal, control component controls electronic Machine drives the structure adjusting barrel body rotation;Correcting device body also includes position detecting element II and position detecting element III, adjusts Whole cylinder is arranged on drum housing.
Described position detecting element II and position detecting element III are arranged on drum housing, adjust and arrange position on cylinder Putting sensor block II, when controlling component controls motor drive adjustment barrel body rotation, location sensitive block II is set to detect from position Element II position turns to the structure of position detecting element III position.
The parts plate of described guide wheel component is set in inverted "L" shaped structure, and parts plate is installed guide wheel, position When sensor block II turns to position detecting element III position from position detecting element II position, guide plate II is configured to applying and pushes away Power, on the introduction being positioned at clearance portion, promotes the structure that rotary part rotates forward.
Location sensitive block I is also set up, the position detection that described rotary part is arranged on described rotary apparatus body Element I detects that, when rotary part rotates to Primary Location position, the position of position detecting element I is set to just to location sensitive The structure of block I.
Described guide wheel component also includes connecting shaft, bearing, and the parts plate of guide wheel component includes component upper ends portion and portion Part bottom, component upper ends portion and lower portion form the structure of " L " shape, and component upper ends portion is fixing with rotary part to be connected, Connecting shaft one end is movably arranged in the connecting hole on parts plate, and bearing, guide wheel movable sleeve are installed in connecting shaft other end activity It is contained on bearing.
Described correcting device body also includes decelerator, shaft coupling, left support bearing, right support bearing, described electricity Motivation is connected with decelerator one end, and the decelerator other end is connected with shaft coupling one end, and the shaft coupling other end passes through drive shaft and tune Whole cylinder connects, and left support bearing is flexibly connected with the drive shaft adjusted on the left of cylinder, on the right side of right support bearing and adjustment cylinder Drive shaft be flexibly connected.
Use technical scheme, can obtain following beneficial effect:
The described rotary apparatus rotary part running accuracy correcting device of the present invention, when needing the rotation to rotary apparatus When the stop position of the rotational angle of parts is modified, when rotary part rotates, detect rotating part by position detecting element I After part needs stop position, position detecting element I the Primary Location position of the rotary part of rotary apparatus to be detected, position is detected Element I, to controlling component feedback signal, controls component controls motor rotation, and motor starts to drive adjustment cylinder to rotate, and adjusts When whole cylinder rotates, it is arranged on the guide plate I and guide plate II rotation, the gap between guide plate I and guide plate II adjusted on cylinder Guide wheel in portion is driven rotation, thus starts to be modified the anglec of rotation of rotary part, revises after terminating, and guide wheel is locked It is scheduled in clearance portion, it is achieved thereby that the final of stop position of the rotational angle of rotary part is revised.And at rotary apparatus Rotary part start next cycle rotate before, control component controls adjust cylinder rotate backward, guide plate I and guide plate II are the most reverse Rotating, guide plate I and guide plate II unlock guide wheel, it is achieved rotary part and the disengagement of guide wheel component, complete a makeover process.This When bright described rotary apparatus rotary part running accuracy correcting device works, said process loop cycle.The rotation of the present invention Device rotary part running accuracy correcting device, simple in construction, only need to carry out local and change, just can be to rotary apparatus rotary part Anglec of rotation stop position be modified, it is possible to be effectively improved the positioning precision of the stop position of rotary apparatus rotary part.
Accompanying drawing explanation
Content expressed by accompanying drawing each to this specification and the labelling in figure make brief description below:
Fig. 1 is rotary part and the correcting device basis of rotary apparatus rotary part running accuracy correction of the present invention dress The structural representation of body position;
Fig. 2 is the adjustment rolling of the correcting device body of rotary apparatus rotary part running accuracy correction of the present invention dress Cylinder is positioned at structural representation during position detecting element II position;
Fig. 3 is the adjustment rolling of the correcting device body of rotary apparatus rotary part running accuracy correction of the present invention dress Cylinder is positioned at structural representation during position detecting element III position;
Fig. 4 is that the structure of the correcting device body of rotary apparatus rotary part running accuracy correction of the present invention dress is shown It is intended to;
Fig. 5 is the structural representation of the guide wheel component of rotary apparatus rotary part running accuracy correction of the present invention dress Figure;
Reference is: 1, rotary part;3, guide wheel component;4, correcting device body;5, parts plate;6, guide wheel;7、 Adjust cylinder;8, guide plate;9, motor;10, guide plate I;11, guide plate II;12, clearance portion;13, position detecting element I;14, control Parts processed;15, position detecting element II;16, position detecting element III;17, drum housing;18, location sensitive block II;19, position Put sensor block I;20, connecting shaft;21, bearing;22, component upper ends portion;23, lower portion;24, connecting hole;25, decelerator; 26, shaft coupling;27, left support bearing;28, right support bearing;29, drive shaft.
Detailed description of the invention
Below against accompanying drawing, by the description to embodiment, each structure the most involved to the detailed description of the invention of the present invention Mutual alignment and annexation, the effect of each several part and operation principle etc. between the shape of part, structure, each several part are made further Detailed description:
As shown in accompanying drawing 1-accompanying drawing 5, the present invention is a kind of rotary apparatus rotary part running accuracy correcting device, rotates dress The rotary part 1 put is connected with rotary apparatus body, described rotary part running accuracy correcting device include guide wheel component 3, Correcting device body 4, described guide wheel component 3 is arranged on rotary part 1, and guide wheel component 3 includes parts plate 5 and guide wheel 6, Installing guide wheel 6 on parts plate 5, correcting device body 4 includes adjusting cylinder 7, guide plate 8, adjusts cylinder 7 and can drive adjustment Cylinder 7 Direct/Reverse rotate motor 9 connect, guide plate 8 include guide plate I 10 and guide plate II 11, guide plate I 10 and guide plate II 11 it Between clearance portion 12 is set;Correcting device body 4 is arranged on rotary apparatus body, and rotary part 1 arranges position detecting element I 13, position detecting element I 13 is connected with controlling parts 14, and motor 9 is connected with controlling parts 14.Said structure is arranged, when needing When the stop position of the rotational angle of the rotary part of rotary apparatus being modified, when rotary part rotates, pass through position Detecting element I 13 detection rotary part needs stop position, position detecting element I 13 rotary part of rotary apparatus to be detected Behind Primary Location position, position detecting element I 13, to controlling component feedback signal, controls component controls motor rotation, electronic Machine starts to drive adjustment cylinder to rotate, and when adjusting cylinder rotation, is arranged on the guide plate I 10 and II 11 turns of guide plate adjusted on cylinder Dynamic, the guide wheel 6 in clearance portion 12 between guide plate I 10 and guide plate II 11 is driven rotation, thus starts rotary part The anglec of rotation be modified, revise terminate after, guide wheel 6 is locked in clearance portion, it is achieved thereby that turn rotary part The final correction of the stop position of dynamic angle.And before the rotary part of rotary apparatus starts the rotation of next cycle, control parts Controlling to adjust cylinder to rotate backward, guide plate I 10 and guide plate II 11 also rotate backward, and guide plate I 10 and guide plate II 11 unlock guide wheel, real Existing rotary part and the disengagement of guide wheel component, complete a makeover process.Rotary apparatus rotary part of the present invention rotates During the work of adjustment in accuracy device, said process loop cycle.The rotary apparatus rotary part running accuracy correcting device of the present invention, Simple in construction, only need to carry out local and change, just can be modified the anglec of rotation stop position of rotary apparatus rotary part, energy Enough it is effectively improved the positioning precision of the stop position of rotary apparatus rotary part.
Described position detecting element I 13 detects when rotary part 1 rotates to Primary Location position, position detecting element I 13 are configured to controlling parts 14 feedback signal, control parts 14 and control the knot that motor 9 drives adjustment cylinder 7 to rotate Structure.Said structure is arranged, and by controlling associating of parts and position detecting element I 13, control parts are according to position detecting element I The position signalling of the rotary part of 13 feedbacks, controls motor and drives adjustment barrel body rotation, thus drive guide plate I 10 and guide plate II 11 rotate, and the guide wheel 6 of the guide wheel component 3 in the clearance portion between guide plate I 10 and guide plate II 11 can be driven to rotate, and revise Device rotates and drives rotary part to rotate, and starts to be modified the anglec of rotation of rotary part, revises after terminating, guide wheel 6 quilt It is locked in clearance portion, it is achieved that the final of stop position of the rotational angle of rotary part is revised.
Described correcting device body 4 also includes position detecting element II 15 and position detecting element III 16, adjusts cylinder 7 Being arranged on drum housing, position detecting element II 15 and position detecting element III 16 are arranged on drum housing 17, adjust rolling On cylinder 7 location sensitive block II 18 is set, controls parts 14 and control motor 9 and drive and adjust cylinder 7 when rotating, location sensitive block II 18 are set to turn to the structure of position detecting element III 16 position from position detecting element II 15 position.Said structure is arranged, When motor starts to rotate and drives adjustment cylinder to rotate, adjust cylinder and turn to position inspection from position detecting element II 15 position Survey element III 16 position, in this rotation process, drive the guide wheel in the clearance portion between guide plate I 10 and guide plate II 11 The guide wheel 6 of parts 3 rotates, and starts to be modified the position of rotary part, revises after terminating, and guide wheel 6 is locked in clearance portion In, it is achieved thereby that the final of stop position of the rotational angle of rotary part is revised.And at the rotary part of rotary apparatus Before starting the rotation of next cycle, controlling component controls adjustment cylinder and rotate backward, guide plate I 10 and guide plate II 11 also rotate backward, Adjust cylinder and turn to position detecting element II 15 position, guide plate I 10 and guide plate II 11 solution from position detecting element III 16 position Lock guide wheel 6, it is achieved rotary part and the disengagement of guide wheel component, completes a makeover process.In assembly of the invention, said process Loop cycle.In the structure of assembly of the invention, position detecting element I 13 controls the time that correcting device is started working, position Put detecting element II 15 and the direction of rotation of the position detecting element III 16 control positive cylinder of convex-concave and angle.
The parts plate 5 of described guide wheel component 3 is set in inverted "L" shaped structure, and parts plate 5 is installed guide wheel 6, When described location sensitive block II 18 turns to position detecting element III 16 position from position detecting element II 15 position, guide plate II 11 are configured to apply thrust on the introduction 6 being positioned at clearance portion 12, promote the structure that rotates forward of rotary part 1.
Location sensitive block I 19 is also set up, the position inspection that described rotary part 1 is arranged on described rotary apparatus body Survey element I 13 and detect that, when rotary part 1 rotates to Primary Location position, it is the most right that the position of position detecting element I 13 is set to The structure of location sensitive block I 19.According to position detecting element I 13 and the association of location sensitive block I 19, determine at the beginning of rotary part Step position location, and feed back signal to control parts, control the parts signal according to feedback, control the electricity of correcting device body 4 The positive and negative rotation of motivation.
Described guide wheel component 3 also includes connecting shaft 20, bearing 21, and the parts plate 5 of guide wheel component 3 includes component upper ends Portion 22 and lower portion 23, component upper ends portion 22 and lower portion 23 form the structure of " L " shape, component upper ends portion 22 and rotation Rotation member 1 is fixing to be connected, and connecting shaft 20 one end is movably arranged in the connecting hole 24 on parts plate 5, connecting shaft 20 other end Movable installation bearing 21, guide wheel 6 movable set is on bearing 21.
Described correcting device body 4 also includes decelerator 25, shaft coupling 26, left support bearing 27, right support bearing 28, Described motor 9 is connected with decelerator 25 one end, and decelerator 25 other end is connected with shaft coupling 26 one end, shaft coupling 26 another Holding and be connected with adjusting cylinder 7 by drive shaft 29, left support bearing 27 is flexibly connected with the drive shaft 29 adjusted on the left of cylinder 28, Right support bearing 28 is flexibly connected with the drive shaft 29 adjusted on the right side of cylinder 7.
The described rotary apparatus rotary part running accuracy correcting device of the present invention, when needing the rotation to rotary apparatus When the stop position of the rotational angle of parts is modified, when rotary part rotates, detect rotating part by position detecting element I After part needs stop position, position detecting element I the Primary Location position of the rotary part of rotary apparatus to be detected, position is detected Element I, to controlling component feedback signal, controls component controls motor rotation, and motor starts to drive adjustment cylinder to rotate, and adjusts When whole cylinder rotates, it is arranged on the guide plate I and guide plate II rotation, the gap between guide plate I and guide plate II adjusted on cylinder Guide wheel in portion is driven rotation, thus starts to be modified the anglec of rotation of rotary part, revises after terminating, and guide wheel is locked It is scheduled in clearance portion, it is achieved thereby that the final of stop position of the rotational angle of rotary part is revised.And at rotary apparatus Rotary part start next cycle rotate before, control component controls adjust cylinder rotate backward, guide plate I and guide plate II are the most reverse Rotating, guide plate I and guide plate II unlock guide wheel, it is achieved rotary part and the disengagement of guide wheel component, complete a makeover process.This When bright described rotary apparatus rotary part running accuracy correcting device works, said process loop cycle.The rotation of the present invention Device rotary part running accuracy correcting device, simple in construction, only need to carry out local and change, just can be to rotary apparatus rotary part Anglec of rotation stop position be modified, it is possible to be effectively improved the positioning precision of the stop position of rotary apparatus rotary part.
Above in conjunction with accompanying drawing, the present invention is carried out exemplary description, it is clear that concrete implementation of the present invention is not by above-mentioned The restriction of mode, if the various improvement that the method design that have employed the present invention is carried out with technical scheme, or the most improved by this Design and the technical scheme of invention directly apply to other occasions, the most within the scope of the present invention.

Claims (7)

1. a rotary apparatus rotary part running accuracy correcting device, the rotary part (1) of rotary apparatus is with rotary apparatus originally Body connects, it is characterised in that: described rotary part running accuracy correcting device includes guide wheel component (3), correcting device body (4), described guide wheel component (3) is arranged on rotary part (1), and guide wheel component (3) includes parts plate (5) and guide wheel (6), Guide wheel (6) is installed on parts plate (5), correcting device body (4) include adjust cylinder (7), guide plate (8), adjust cylinder (7) with Can drive and adjust motor (9) connection that cylinder (7) Direct/Reverse rotates, guide plate (8) includes guide plate I (10) and guide plate II (11), clearance portion (12) is set between guide plate I (10) and guide plate II (11);Correcting device body (4) is arranged on rotary apparatus originally On body, rotary part (1) arranging position detecting element I (13), position detecting element I (13) is connected with controlling parts (14), Motor (9) is connected with controlling parts (14).
Rotary apparatus rotary part running accuracy correcting device the most according to claim 1, it is characterised in that: described position Put detecting element I (13) and detect that, when rotary part (1) rotates to Primary Location position, position detecting element I (13) is set to Parts (14) can be controlled and control, to controlling parts (14) feedback signal, the knot that motor (9) drives adjustment cylinder (7) to rotate Structure.
Rotary apparatus rotary part running accuracy correcting device the most according to claim 2, it is characterised in that: described repaiies Equipment body (4) also includes position detecting element II (15) and position detecting element III (16), adjusts cylinder (7) and is arranged on rolling On cylinder shell, position detecting element II (15) and position detecting element III (16) are arranged on drum housing (17), adjust cylinder (7) location sensitive block II (18) is set on, when controlling parts (14) control motor (9) drive adjustment cylinder (7) rotation, position Sensor block II (18) is set to turn to the structure of position detecting element III (16) position from position detecting element II (15) position.
Rotary apparatus rotary part running accuracy correcting device the most according to claim 3, it is characterised in that: described leads The parts plate (5) of wheel component (3) is set to, in inverted "L" shaped structure, parts plate (5) be installed guide wheel (6), described position Put sensor block II (18) when turning to position detecting element III (16) position from position detecting element II (15) position, guide plate II (11) it is configured to apply thrust on the introduction (6) being positioned at clearance portion (12), promotes rotary part (1) knot that rotates forward Structure.
Rotary apparatus rotary part running accuracy correcting device the most according to claim 4, it is characterised in that: described rotation Location sensitive block I (19) is also set up, the upper position detecting element I (13) arranged of described rotary part (1) on rotary device body Detecting when rotary part (1) rotates to Primary Location position, the position of position detecting element I (13) is set to just feel position Answer the structure of block I (19).
Rotary apparatus rotary part running accuracy correcting device the most according to claim 1, it is characterised in that: described leads Wheel component (3) also includes connecting shaft (20), bearing (21), and the parts plate (5) of guide wheel component (3) includes component upper ends portion (22) With lower portion (23), component upper ends portion (22) and lower portion (23) form the structure of " L " shape, component upper ends portion (22) Fixing with rotary part (1) and be connected, connecting shaft (20) one end is movably arranged on the connecting hole (24) on parts plate (5) Nei, even Bearing (21) is installed in spindle (20) other end activity, and guide wheel (6) movable set is on bearing (21).
Rotary apparatus rotary part running accuracy correcting device the most according to claim 1, it is characterised in that: described repaiies Equipment body (4) also includes decelerator (25), shaft coupling (26), left support bearing (27), right support bearing (28), described Motor (9) is connected with decelerator (25) one end, and decelerator (25) other end is connected with shaft coupling (26) one end, shaft coupling (26) The other end is connected with adjusting cylinder (7) by drive shaft (29), left support bearing (27) and the driving adjusting cylinder (28) left side Axle (29) is flexibly connected, and right support bearing (28) is flexibly connected with the drive shaft (29) adjusting cylinder (7) right side.
CN201610513065.5A 2016-06-30 2016-06-30 A kind of rotating device rotary part running accuracy correcting device Active CN106205739B (en)

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CN106205739B CN106205739B (en) 2018-09-14

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107881305A (en) * 2017-11-21 2018-04-06 宁波旺潮轴业有限公司 Guide wheel correcting device
CN109719618A (en) * 2018-12-24 2019-05-07 东旭科技集团有限公司 Glass substrate rotating device

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US20100303521A1 (en) * 2009-05-27 2010-12-02 Ricoh Company, Ltd. Fixing device and image forming apparatus incorporating same
CN102909728A (en) * 2011-08-05 2013-02-06 鸿富锦精密工业(深圳)有限公司 Vision correcting method of robot tool center point
CN103294007A (en) * 2013-05-15 2013-09-11 合肥工业大学 High-speed high-precision flexible electronic gear box control method
CN103386674A (en) * 2013-07-29 2013-11-13 吴江迈为技术有限公司 High-precision rotating platform
CN203331452U (en) * 2013-05-22 2013-12-11 天津市天锻压力机有限公司 Control system of press machine rotating mechanism

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100303521A1 (en) * 2009-05-27 2010-12-02 Ricoh Company, Ltd. Fixing device and image forming apparatus incorporating same
CN102909728A (en) * 2011-08-05 2013-02-06 鸿富锦精密工业(深圳)有限公司 Vision correcting method of robot tool center point
CN103294007A (en) * 2013-05-15 2013-09-11 合肥工业大学 High-speed high-precision flexible electronic gear box control method
CN203331452U (en) * 2013-05-22 2013-12-11 天津市天锻压力机有限公司 Control system of press machine rotating mechanism
CN103386674A (en) * 2013-07-29 2013-11-13 吴江迈为技术有限公司 High-precision rotating platform

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107881305A (en) * 2017-11-21 2018-04-06 宁波旺潮轴业有限公司 Guide wheel correcting device
CN109719618A (en) * 2018-12-24 2019-05-07 东旭科技集团有限公司 Glass substrate rotating device
CN109719618B (en) * 2018-12-24 2021-01-01 东旭光电科技股份有限公司 Glass substrate rotating device

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