CN106199860A - Optical coupling integrated morphology for multimode parallel optical interconnecting - Google Patents
Optical coupling integrated morphology for multimode parallel optical interconnecting Download PDFInfo
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- CN106199860A CN106199860A CN201610882232.3A CN201610882232A CN106199860A CN 106199860 A CN106199860 A CN 106199860A CN 201610882232 A CN201610882232 A CN 201610882232A CN 106199860 A CN106199860 A CN 106199860A
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- optics
- slide glass
- optical
- light
- slim
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
Abstract
The present invention relates to a kind of optical coupling integrated morphology for multimode parallel optical interconnecting, it includes that light is slim and slide glass；Also include lenticular body in coaxial distribution slim with light and the optics of described lenticular body positive alignment and the optical drive amplifying circuit adaptive with described optics, the end of described lenticular body adjacent fiber body, and lenticular body is positioned at that light is slim and between optics；Arranging orthogonal horizontal interconnection metallization lines and perpendicular interconnection metal wire on slide glass, described perpendicular interconnection metal wire electrically connects with horizontal interconnection metallization lines；Optics is installed on the perpendicular interconnection metal wire side of slide glass, and electrically connect with described perpendicular interconnection metal wire, optical drive amplifying circuit is electrically connected with horizontal interconnection metallization lines by circuit interconnection metal line, so that optics electrically connects with adaptive optical drive amplifying circuit.The present invention can effectively realize turning to of optics, improves interconnection speed, strengthens the coupling efficiency of optics and optical fiber, integration packaging low cost.
Description
Technical field
The present invention relates to a kind of integrated morphology, a kind of optical coupling integrated morphology for multimode parallel optical interconnecting,
Belong to the technical field that optical coupling is integrated.
Background technology
INDIRECT COUPLING and direct-coupling is included currently for optical coupling is integrated；Wherein, for INDIRECT COUPLING: article
《First Light: Pluggable Optical Interconnect Technologies for polymeric
Electro-Optical Printed Circuit Boards in Data Centers " describe employing lens couple
Light delivery module.Due to VCSEL(Vertical Cavity Surface Emitting Laser, vertical-cavity surface-emitting swashs
Light device) and PIN array use spun gold pressure welding be connected with circuit, employing lens improve VCSEL, PIN array and optical fiber or ripple
The coupling led, but do not solve 90 ° of problems turned to of light path, add packaging cost simultaneously.Additionally, companies such as avago, employing changes
Entering the lenticule of type, lens, with 45 ° of angles of reflection, can realize 90 ° of light paths and turn to, but lens need accurate optical design and essence
Thin processing casting technique, can be significantly increased packaging cost.
For direct-coupling, it is that fiber array grinds angle of reflection at 45 °, VCSEL, PIN array and fiber array coupling
Close, it is achieved the light path of 90 ° turns to output.The file of Publication No. CN103383482A proposes fiber array and grinds 45 °, it is achieved
Direct-coupling, but during optical fiber lapping, the Angle ambiguity between optical fiber and optical fiber, determine quality and the optocoupler of optical fiber lapping
The efficiency closed, simultaneous grinding method is difficult to improve the efficiency of large-scale production.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, it is provided that a kind of light for multimode parallel optical interconnecting
Coupling integration structure, its compact conformation, can effectively realize turning to of optics, improve interconnection speed, strengthen optics and optical fiber
Coupling efficiency, integration packaging low cost, safe and reliable.
The technical scheme provided according to the present invention, the described optical coupling integrated morphology for multimode parallel optical interconnecting, including
Light is slim and slide glass；Also include lenticular body in coaxial distribution slim with light and the optics of described lenticular body positive alignment
And the optical drive amplifying circuit adaptive with described optics, the end of described lenticular body adjacent fiber body, and lenticular body
It is positioned at that light is slim and between optics；Orthogonal horizontal interconnection metallization lines and perpendicular interconnection metal wire, institute are set on slide glass
State perpendicular interconnection metal wire to electrically connect with horizontal interconnection metallization lines；Optics is installed on the perpendicular interconnection metal wire one of slide glass
Side, and electrically connect with described perpendicular interconnection metal wire, optical drive amplifying circuit is interconnected with level by circuit interconnection metal line
Metal wire electrically connects, so that optics electrically connects with adaptive optical drive amplifying circuit.
Described light is slim for multimode fibre or fiber array, and light is slim to be installed on the slim mounting-fixing base of light.
Described horizontal interconnection metallization lines and perpendicular interconnection metal wire are same process layer, are provided with the right of through slide glass in slide glass
Quasi-hole, optics and lenticular body lay respectively at the both sides of slide glass, and optics is by alignment hole lenticular body positive alignment.
Described circuit interconnection metal line is spun gold pressure welding, one end of circuit interconnection metal line and optical drive amplifying circuit
Circuit electrically connects after connecting contact pads, and the other end of circuit interconnection metal line electrically connects after contacting with horizontal interconnection metallization lines.
Described optics and lenticular body are positioned at the same side of slide glass, and lenticular body is installed on the optics device of surface optical device
On part articulamentum, and optics is electrically connected with perpendicular interconnection metal wire by optics articulamentum and optics connecting line
Connect.
Described lenticular body is lens or lens arra, and optics is VCSEL, VCSEL array, PIN detector or PIN visit
Survey device array.
The slim optical fiber head of described light is flush or inclined-plane, and the slim mounting-fixing base of light, slide glass all support and be fixed on support
On base, optical drive amplifying circuit supports to be fixed on support plate or directly support and is fixed on support base.
The material of described slide glass includes silicon.
Advantages of the present invention: have horizontal interconnection metallization lines and perpendicular interconnection metal wire on slide glass, optics is installed
Having the side of perpendicular interconnection metal wire in slide glass, and electrically connect with perpendicular interconnection metal wire, horizontal interconnection metallization lines is by electricity
Road interconnection metallization lines electrically connects with optical drive amplifying circuit, thus realizes being electrically connected of optics and optical drive amplifying circuit
Connect, optics and lenticular body positive alignment, and realize the efficient coupling slim with light, mutual with vertical by horizontal interconnection metallization lines
Even the connection of metal wire coordinates, it is thus possible to effectively realize turning to of optics, improves interconnection speed, strengthens optics slim with light
Coupling efficiency, integration packaging low cost, safe and reliable.
Accompanying drawing explanation
Fig. 1 is present invention structural representation when using flip-chip packaged.
Fig. 2 is present invention structural representation when using wire-bonding package.
Fig. 3 is that the present invention is co-located at the schematic diagram supported on base.
It is embodied as processing step sectional view when Fig. 4 ~ Figure 13 is to use flip-chip packaged, wherein,
Fig. 4 is the sectional view after the present invention obtains groove on slide glass.
Fig. 5 is the sectional view after the present invention obtains passivation layer.
Fig. 6 is the sectional view after the present invention obtains slide glass metal interconnecting layer.
Fig. 7 is the sectional view that the present invention obtains after being directed at hole.
Fig. 8 is the sectional view after the present invention cuts into slices.
Fig. 9 is the schematic diagram after optics is attached on slide glass by the present invention.
Figure 10 is the schematic diagram after lenticular body is attached on slide glass by the present invention.
Figure 11 is the schematic diagram that slide glass is installed on after supporting on base by the present invention.
Figure 12 is the schematic diagram that slim for light mounting-fixing base is placed in after supporting on base by the present invention.
Figure 13 is after the present invention utilizes circuit interconnection metal line to be electrically connected with optical drive amplifying circuit by optics
Schematic diagram.
Description of reference numerals: the horizontal interconnection metallization lines of 1-slide glass, 2-, 3-alignment hole, 4-light is slim, 5-circuit interconnection metal
Line, 6-optical drive amplifying circuit, 7-circuit connect pad, the slim mounting-fixing base of 8-light, 9-support base, 10-support plate,
11-optics, 12-optics pad, 13-perpendicular interconnection metal wire, 14-lenticular body, 15-optics connecting line, 16-
Groove, 17-passivation layer, 18-slide glass metal interconnecting layer, 19-alignment anchor window and 20-optics articulamentum.
Detailed description of the invention
Below in conjunction with concrete drawings and Examples, the invention will be further described.
As shown in Figure 1, Figure 2 and Figure 3: in order to enable effectively to realize turning to of optics, strengthen the coupling efficiency of optics device 11 fibre,
Reducing integration packaging cost, the present invention includes light slim 4 and slide glass 1；Also include slim with light 4 lenticular bodies in coaxial distribution
14 and the optics 11 of described lenticular body 14 positive alignment and the optical drive amplifying circuit with described optics 11 adaptation
6, the end of described lenticular body 14 adjacent fiber body 4, and lenticular body 14 is positioned between light slim 4 and optics 11；Set on slide glass 1
Putting orthogonal horizontal interconnection metallization lines 2 and perpendicular interconnection metal wire 13, described perpendicular interconnection metal wire 13 interconnects with level
Metal wire 2 electrically connects；Optics 11 is installed on perpendicular interconnection metal wire 13 side of slide glass 1, and golden with described perpendicular interconnection
Belonging to line 13 to electrically connect, optical drive amplifying circuit 6 is electrically connected with horizontal interconnection metallization lines 2 by circuit interconnection metal line 5, so that
Obtain optics 11 to electrically connect with adaptive optical drive amplifying circuit 6.
Specifically, the material of described slide glass 1 includes silicon, and certainly, slide glass 1 can also use the quasiconductor material that other are conventional
Material, the selection of the concrete material of slide glass 1 can determine as required, specially known to those skilled in the art, the most superfluous
State.Described light slim 4 is multimode fibre or fiber array, and light slim 4 is installed on the slim mounting-fixing base of light 8, light slim 4
It is embodied as structure can select as required, or concrete cooperation with optics 11 etc. determines, is specially this technology
Known to the personnel of field, here is omitted.Described lenticular body 14 is lens or lens arra, optics 11 be VCSEL,
VCSEL array, PIN detector or PIN detector array, lenticular body 14 be embodied as structure, the concrete shape of optics 11
Formula all can select as required, and specially known to those skilled in the art, here is omitted.
Light slim 4 is installed on the slim mounting-fixing base of light 8, and lenticular body 14 slim with light 4 is in coaxial distribution, optics
11 in being coaxially distributed, work as optics in the most corresponding distribution, optics 11, lenticular body 14 and light slim 4 with lenticular body 14
11 when being VCSEL, and the laser that optics 11 is launched is by being received by light slim 4 after lenticular body 14, and optics 11 is PIN
When detector or PIN detector array, after the rays pass through lens body 14 that light slim 4 is launched, received detection by optics 11,
Light is slim 4, the concrete engagement process of lenticular body 14 and optics 11 is known to those skilled in the art, the most superfluous
State.Additionally, when optics 11 is VCSEL, optical drive amplifying circuit 6 is the drive circuit mated with optics 11,
I.e. can realize the driving to optics 11 by optical driver circuit 6, and when optics 11 is PIN detector or PIN spy
When surveying device array, optical drive amplifying circuit 6 is to be amplified by the signal that optics detects, optical drive amplifying circuit 6
And the concrete engagement process between optics 11 is also known to those skilled in the art, and here is omitted.
In order to be able to the optical inversion needed for realizing, slide glass 1 has horizontal interconnection metallization lines 2 and perpendicular interconnection metal wire
13, it is mutually perpendicular between perpendicular interconnection metal wire 13 and horizontal interconnection metallization lines 2, and horizontal interconnection metallization lines 2 is golden with perpendicular interconnection
The one end belonged between line 13 is connected with each other, and when being embodied as, horizontal interconnection metallization lines 2 is in horizontal distribution state, and perpendicular interconnection
Metal wire 13 is in vertical distribution, and horizontal interconnection metallization lines 2 is with to lay respectively at slide glass 1 between perpendicular interconnection metal wire 13 corresponding
Surface, horizontal interconnection metallization lines 2, perpendicular interconnection metal wire 13 and slide glass 1 are in mutually insulated state.
Optics 11 is installed on slide glass 1 and is correspondingly arranged the side of perpendicular interconnection metal wire 13, and optics 11 is with vertical
Straight interconnection metallization lines 13 electrically connects, owing to perpendicular interconnection metal wire 13 contacts with each other with horizontal interconnection metallization lines 2 and electrically connects, because of
This, optics 11 realizes the electrical connection with horizontal interconnection metallization lines 2 by perpendicular interconnection metal wire 13.Usually, light slim 4
In horizontal positioned, optics 11, lenticular body 14 have the side of perpendicular interconnection metal wire 13 in the shape that is parallel to each other with slide glass 1
State, after i.e. being coordinated with horizontal interconnection metallization lines 2 by perpendicular interconnection metal wire 13, can realize 90 ° of conversions of optical signal, with existing
The encapsulation realizing turning to is compared, and packaging cost is low.
Further, described circuit interconnection metal line 5 is spun gold pressure welding, and one end of circuit interconnection metal line 5 is driven with optics
The circuit of dynamic amplifying circuit 6 electrically connects after connecting pad 7 contact, and the other end of circuit interconnection metal line 5 interconnects metal with level
Electrically connect after line 2 contact, in the embodiment of the present invention, utilize the circuit interconnection metal line 5 of spun gold pressure welding to realize optical drive and amplify
Circuit 6 is known to those skilled in the art with the specific implementation process of the connection of horizontal interconnection metallization lines 2, the most superfluous
State.After above-mentioned connection, light electrical connection but between drive amplification circuit 6 and optics 11 can be realized.
As it is shown in figure 1, described horizontal interconnection metallization lines 2 is same process layer with perpendicular interconnection metal wire 13, set in slide glass 1
Having the alignment hole 3 of through slide glass 1, optics 11 and lenticular body 14 to lay respectively at the both sides of slide glass 1, optics 11 is by right
Lenticular body 14 positive alignment of quasi-hole 3.
In the embodiment of the present invention, optics 11 lays respectively at the two ends being directed at hole 3 with lenticular body 14, and optics 11 is adopted
The form encapsulated with upside-down mounting (flip-chip) electrically connects with the perpendicular interconnection metal wire 13 of slide glass 1, and wherein, optics 11 leads to
Crossing optics pad 12 to electrically connect with perpendicular interconnection metal wire 13, optics pad 12 is positioned at the outer ring in alignment hole 3, lens
The end of body 14 adjacent fiber body 4, it is thus possible to improve the coupling efficiency of optics 11 and light slim 4.
As shown in Fig. 4 ~ Figure 13, in Fig. 1 structure be embodied as processing step sectional view, i.e. cross corresponding processing step
Can obtain the structure of Fig. 1, concrete technology comprises the steps:
Step 1, offer slide glass 1, the material of described slide glass 1 is silicon, and the front of described slide glass 1 is optionally sheltered and carved
Erosion, to obtain groove 16 in slide glass 1, described groove 16 extends vertically downward from the surface of slide glass 1, and the degree of depth of groove 16 is less than
The thickness of slide glass 1, as shown in Figure 4, the process specifically preparing groove 16 is known to those skilled in the art, the most no longer
Repeat.
Step 2, be passivated in the front of above-mentioned slide glass 1 material deposit, obtain passivation layer 17 with the front at slide glass 1,
Described passivation layer 17 covers in the front of slide glass 1, simultaneously in covering groove 16, as it is shown in figure 5, the thickness of passivation layer 17 is less than ditch
The degree of depth of groove 16, passivation layer 17 can be silicon dioxide layer or silicon nitride layer, and it is this that concrete deposit obtains the process of passivation layer 17
Known to technical field personnel, here is omitted.
Step 3, carry out depositing metal material in the front of above-mentioned slide glass 1, and the material after deposit is carried out optionally
Sheltering and etch, to obtain slide glass metal interconnecting layer 18, described slide glass metal interconnecting layer 18 covers at above-mentioned passivation layer 17, fills
In groove 16, and obtain being directed at anchor window 19, described alignment anchor window 19 through slide glass metal interconnecting layer 18, i.e. pass through
Alignment anchor window 19 makes the passivation layer 17 of corresponding region exposed, and in the embodiment of the present invention, alignment anchor window 19 refers to neighbour
The region of nearly groove 16, be relatively distant from the region of groove 16 exposed after, be used for being formed other functional areas of slide glass 1, as shown in Figure 6,
Being specially known to those skilled in the art, here is omitted.
Slide glass 1 is punched by step 4, utilization alignment anchor window 19, and to obtain being directed at hole 3, described alignment hole 3 is through
Slide glass 1, and alignment hole 3 is connected with alignment anchor window 19, as it is shown in fig. 7, concrete punching obtains the process being directed at hole 3 for originally
Known to technical field personnel, here is omitted.
Step 5, cutting into slices above-mentioned slide glass 1, during section, the sidewall along groove 16 adjacent alignment hole 3 cuts,
After dicing, slide glass metal interconnecting layer 18 forms horizontal interconnection metallization lines 2 and perpendicular interconnection metal wire 13, wherein, covers ditch
The slide glass metal interconnecting layer 18 of groove 16 sidewall forms horizontal interconnection metallization lines 2, is positioned at the slide glass metal interconnecting layer 18 in slide glass 1 front
Forming perpendicular interconnection metal wire 13, as shown in Figure 8, the process of concrete section is known to those skilled in the art, the most no longer
Repeat.
Optics 11 needed for step 6, offer, and described optics 11 is attached to the front of above-mentioned slide glass 1, alignment
The axis in hole 3 crosses the center of optics 11, and optics 11 is by optics pad 12 and the perpendicular interconnection gold on slide glass 1
Belong to line 13 to electrically connect, as it is shown in figure 9, concrete attachment process is that known to those skilled in the art, here is omitted.
Lenticular body 14 is attached on slide glass 1 by step 7, utilization alignment hole 3, and lenticular body 14 and optics 11 lay respectively at load
The both sides of sheet 1, after lenticular body 14 is attached on slide glass 1, lenticular body 14 and optics 11 are in positive alignment state, as it is shown in figure 9, thoroughly
It is that known to those skilled in the art, here is omitted that mirror body 14 mounts process.
Step 8, the above-mentioned slide glass 1 being pasted with lenticular body 14 and optics 11 is fixedly installed in support base 9 on,
Slide glass 1 with support base 9 in orthogonal state, and slide glass 1 with support base 9 mutually insulated, the length of optics 11
Direction, the length direction of lenticular body 14 and slide glass 1 are in parastate, as shown in Figure 10.
Step 9, setting slim with the light that optics 11 couples 4 on above-mentioned support base 9, described light slim 4 passes through
The slim mounting-fixing base of light 8 is installed on support base 9, the slim mounting-fixing base of light 8 and slide glass 1 in the distribution that is parallel to each other, and
Light slim 4 adjacent to lenticular body 14, and light slim 4 with lenticular body 14 in coaxial distribution, as shown in figure 11, light is slim 4, the slim peace of light
The concrete installation process of fixing seat 8 correspondence of dress is that known to those skilled in the art, here is omitted.
Step 10, offer and the optical drive amplifying circuit 6 of optics 11 adaptation, optical drive amplifying circuit 6 supports
On support plate 10, the circuit on optical drive amplifying circuit 6 connects pad 7 and utilizes circuit interconnection metal line 5 and level interconnection gold
Belonging to line 2 to electrically connect, circuit interconnection metal line 5 is spun gold pressure welding, as shown in figure 13, specially known to those skilled in the art,
Here is omitted.
As in figure 2 it is shown, described optics 11 and lenticular body 14 are positioned at the same side of slide glass 1, lenticular body 14 is installed on light
Learn on the optics articulamentum 20 on device 11 surface, and optics 11 is by optics articulamentum 20 and optics
Connecting line 15 electrically connects with perpendicular interconnection metal wire 13.
In the embodiment of the present invention, when optics 11 and lenticular body 14 are positioned at the same side of slide glass 1, optics 11 is installed
On slide glass 1, and being dielectrically separated from slide glass 1, arrange optics articulamentum 10 on optics 11, described optics is even
Connecing layer 20 on the optics 11 surface away from slide glass 1, lenticular body 14 is supported on optics articulamentum 20, passes through optics
Device connecting line 15 makes optics articulamentum 20 electrically connect with perpendicular interconnection metal wire 13, and optics connecting line 15 uses
The technique of routing prepares, and lenticular body 14 and optics 11 are still for the distribution of positive alignment.
The optical fiber head of described light slim 4 is flush or inclined-plane, and the slim mounting-fixing base of light 8, slide glass 1 all support to be fixed on and prop up
On support base 9, optical drive amplifying circuit 6 supports to be fixed on support plate 7 or directly support and is fixed on support base 9.
In the embodiment of the present invention, optical amplifier circuit 6 supports and is fixed on support plate 7, and support plate 7 and support base 9 are in mutually
The state separated, as depicted in figs. 1 and 2；Certainly, optical drive amplifying circuit 6 also can be supported directly on support base 9, light
Learn drive amplification circuit 6 and be dielectrically separated from, as shown in Figure 3 with supporting base 9；Except optical drive amplifying circuit 6 Support Position not
With, remaining is all referred to above-mentioned explanation, the most no longer meaning and repeats.
Having horizontal interconnection metallization lines 2 and perpendicular interconnection metal wire 13 on slide glass 1 of the present invention, optics 11 is installed on
Slide glass 1 has the side of perpendicular interconnection metal wire 13, and electrically connects with perpendicular interconnection metal wire 13, and horizontal interconnection metallization lines 2 is led to
Oversampling circuit interconnection metallization lines 5 electrically connects with optical drive amplifying circuit 6, thus realizes optics 11 and amplify electricity with optical drive
The electrical connection on road 6, optics 11 and lenticular body 14 positive alignment, and realize the efficient coupling with light slim 14, mutual by level
Even metal wire 2 coordinates with the connection of perpendicular interconnection metal wire 13, it is thus possible to effectively realize turning to of optics, improves interconnection speed,
Enhancing optics 11 and the coupling efficiency of light slim 4, integration packaging low cost, safe and reliable.
Claims (8)
1. for an optical coupling integrated morphology for multimode parallel optical interconnecting, including light slim (4) and slide glass (1)；Its feature
It is: also include slim with light (4) lenticular body (14) in coaxial distribution and the optics of described lenticular body (14) positive alignment
And the optical drive amplifying circuit (6) adaptive with described optics (11), described lenticular body (14) adjacent fiber body (11)
(4) end, and lenticular body (14) is positioned between light slim (4) and optics (11)；Slide glass arranges orthogonal water on (1)
Flat interconnection metallization lines (2) and perpendicular interconnection metal wire (13), described perpendicular interconnection metal wire (13) and horizontal interconnection metallization lines (2)
Electrical connection；Optics (11) is installed on perpendicular interconnection metal wire (13) side of slide glass (1), and with described perpendicular interconnection metal
Line (13) electrically connects, and optical drive amplifying circuit (6) is electrically connected with horizontal interconnection metallization lines (2) by circuit interconnection metal line (5)
Connect, so that optics (11) electrically connects with adaptive optical drive amplifying circuit (6).
Optical coupling integrated morphology for multimode parallel optical interconnecting the most according to claim 1, is characterized in that: described optical fiber
Body (4) is multimode fibre or fiber array, and light slim (4) is installed on the slim mounting-fixing base of light (8).
Optical coupling integrated morphology for multimode parallel optical interconnecting the most according to claim 1, is characterized in that: described level
Interconnection metallization lines (2) and perpendicular interconnection metal wire (13) are same process layer, are provided with the alignment of through slide glass (1) in slide glass (1)
Hole (3), optics (11) and lenticular body (14) lay respectively at the both sides of slide glass (1), and optics (11) is by alignment hole (3)
Lenticular body (14) positive alignment.
Optical coupling integrated morphology for multimode parallel optical interconnecting the most according to claim 1, is characterized in that: described circuit
Interconnection metallization lines (5) is spun gold pressure welding, and one end of circuit interconnection metal line (5) connects with the circuit of optical drive amplifying circuit (6)
Electrically connecting after connecing pad (7) contact, the other end of circuit interconnection metal line (5) is electrically connected after contacting with horizontal interconnection metallization lines (2)
Connect.
Optical coupling integrated morphology for multimode parallel optical interconnecting the most according to claim 1, is characterized in that: described optics
Device (11) and lenticular body (14) are positioned at the same side of slide glass (1), and lenticular body (14) is installed on the light on optics (11) surface
Learn on device articulamentum (20), and optics (11) is by optics articulamentum (20) and optics connecting line (15)
Electrically connect with perpendicular interconnection metal wire (13).
Optical coupling integrated morphology for multimode parallel optical interconnecting the most according to claim 1, is characterized in that: described lens
Body (14) is lens or lens arra, and optics (11) is VCSEL, VCSEL array, PIN detector or PIN detector battle array
Row.
Optical coupling integrated morphology for multimode parallel optical interconnecting the most according to claim 2, is characterized in that: described optical fiber
The optical fiber head of body (4) is flush or inclined-plane, and the slim mounting-fixing base of light (8), slide glass (1) all support and be fixed on support base (9)
On, optical drive amplifying circuit (6) supports to be fixed on support plate (7) or directly support and is fixed in support base (9).
Optical coupling integrated morphology for multimode parallel optical interconnecting the most according to claim 1, is characterized in that: described slide glass
(1) material includes silicon.
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| CN105549163A (en) * | 2016-02-02 | 2016-05-04 | 武汉电信器件有限公司 | Optical interconnection assembly |
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| US20090103856A1 (en) * | 2007-10-23 | 2009-04-23 | Fuji Xerox Co., Ltd. | Optical reception and transmission module |
| CN101872760A (en) * | 2009-04-23 | 2010-10-27 | 电子部品研究院 | Photoelectric conversion module |
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| CN105116499A (en) * | 2015-08-26 | 2015-12-02 | 中国科学院微电子研究所 | Parallel optical module based on multi-mode planar optical waveguide coupling |
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| CN106199860B (en) | 2017-12-22 |
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