CN106198387A - Vacuum suction leveling device and material sheet detection/transfer equipment comprising same - Google Patents
Vacuum suction leveling device and material sheet detection/transfer equipment comprising same Download PDFInfo
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- CN106198387A CN106198387A CN201510237823.0A CN201510237823A CN106198387A CN 106198387 A CN106198387 A CN 106198387A CN 201510237823 A CN201510237823 A CN 201510237823A CN 106198387 A CN106198387 A CN 106198387A
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- 238000001514 detection method Methods 0.000 title claims description 13
- 238000012546 transfer Methods 0.000 title claims description 13
- 230000007246 mechanism Effects 0.000 claims abstract description 56
- 238000010521 absorption reaction Methods 0.000 claims description 23
- 230000005540 biological transmission Effects 0.000 claims description 8
- 238000004804 winding Methods 0.000 claims description 3
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- 238000001179 sorption measurement Methods 0.000 abstract description 8
- 238000010586 diagram Methods 0.000 description 5
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- 230000003287 optical effect Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
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- 239000007779 soft material Substances 0.000 description 1
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Abstract
The invention discloses a vacuum absorbing and flattening device and a material sheet detecting/transferring device comprising the same. The vacuum suction leveling device comprises an adsorption carrying platform, a vacuum air chamber and an adjustable jig. The adsorption carrying platform comprises a vacuum adsorption plane and a plurality of adsorption holes arranged on the vacuum adsorption plane. The vacuum air chamber is provided with an air guide surface adjacent to one side of the suction hole of the adsorption carrying platform and a vacuum suction unit for providing negative pressure for the air guide surface. The adjustable jig is provided with a first shielding plate which can be adjusted by a first adjusting mechanism and moves along a first direction, and a second shielding plate which can be adjusted by a second adjusting mechanism and moves along a second direction, and the second shielding plate shields part of suction holes on the vacuum suction plane so as to define a material sheet suction area.
Description
Technical field
The present invention is related to a kind of vacuum and inhales leveling device, and inhales tablet detection equipment and the tablet of leveling device containing this vacuum
Transfer equipment.
Background technology
Automatic visual inspection (Automated Optical Inspection, AOI) refers to utilization machine vision as examination criteria
Technology, the advantage that there is high speed and super precision density compared with known human eye detection.Application can contain grinding to high-tech industry
Send out, manufacture QC, so that national defence, the people's livelihood, medical treatment, environmental protection, electric power or other association area.
In automatic optics inspection field, being intended to detect tablet, common mode is to be installed in microscope carrier by by tablet
On, provide negative pressure by the means of evacuation to this microscope carrier, by the pore on microscope carrier, tablet is adsorbed on microscope carrier.But,
After the tablet of part special substance is via pore sticking, the problem that often can produce warpage in the edge of tablet, when causing image detecting
Genuine situation often lost by captured tablet image.
Therefore, for solving the problems referred to above, TaiWan, China M449343 patent discloses a kind of vacuum for smooth tablet
Inhaling leveling device, this vacuum is inhaled leveling device and is mainly had air chamber, microscope carrier and cover tool.Described air chamber comprise gas flow guiding face and
Vacuum sucking unit, described microscope carrier has most first sucker.Wherein microscope carrier is arranged on air chamber adjacent to gas flow guiding
Face, and the first sucker is communicated in gas flow guiding face.The described tool that covers has supporting region.Wherein cover tool and be arranged at microscope carrier
On, the area of supporting region correspondence tablet is arranged, and in order to carry tablet.Cover tool and cover the first sucker of a part, carrying
District has most second sucker, and the second sucker is communicated in gas flow guiding face corresponding to first sucker of another part, vacuum attraction
Bled in gas flow guiding face by unit, and the tablet on sticking supporting region.By above-mentioned configuration, vacuum adsorption equipment leveling can be promoted
The effect of tablet, the problem being susceptible to Web edges warpage known in solution.
But, though above-mentioned vacuum is inhaled leveling device and can effectively be solved the problem of Web edges warpage, but, described covering is controlled
Tool is often required for the design that various sizes of tablet is customized individually, operates and often have inconvenience in practice.
Summary of the invention
Present invention aim at solving corresponding different tablets in known technology needs customized difference to cover tool and result in practice
The problem often having inconvenience in operation.
The present invention provides a kind of vacuum to inhale leveling device, and in order to adsorb and to flatten tablet, this vacuum is inhaled leveling device and had an absorption
Microscope carrier, a vacuum room, and an adjustable tool.This absorption microscope carrier has a vac sorb plane, and the most several setting
Sucker in this vac sorb plane.This vacuum room is arranged at this absorption microscope carrier opposite side relative to this vac sorb plane,
This vacuum room has one adjacent to the gas flow guiding face of the sucker side of this absorption microscope carrier, and this gas several is led by one or many
Stream interface provides the vacuum sucking unit of negative pressure.This adjustable tool has and is correspondingly arranged in this vac sorb plane or is arranged at this gas
First shield of body guide face side and the second shield, this first shield can adjust by the first guiding mechanism and move in the first direction
Dynamic, this second shield can adjust by the second guiding mechanism and move in a second direction, covers the suction in this vac sorb plane
Hole, to define a tablet binding domain.
Further, this first shield and this second shield be respectively oppositely arranged at this absorption microscope carrier this vac sorb put down
Face and the side in this gas flow guiding face.
Further, this first guiding mechanism has one or many several detent mechanisms fixing this first shield, and one is arranged at
This detent mechanism side is to limit the orbit portion that this detent mechanism moves along a path, and one is arranged at this orbit portion side with band
The driving means that this detent mechanism dynamic moves along this path.
Further, this orbit portion is arranged in pairs in the both sides of this first shield, and this detent mechanism has to be located on two tracks
Locating piece, and one be arranged between this paired locating piece and the fixed plate of this first shield that locks.
Further, this second guiding mechanism has one or many several detent mechanisms fixing this second shield, and one is arranged at this
Detent mechanism side is to limit the orbit portion that this detent mechanism moves along a path, and one is arranged at this orbit portion side to drive
The driving means that this detent mechanism moves along this path.
Further, this orbit portion is arranged in pairs in the both sides of this second shield, and this detent mechanism has to be located on two tracks
Locating piece, and one be arranged between this paired locating piece and the fixed plate of this second shield that locks.
Further, this driving means has the belt pulley of more than at least two, and one is set around on this belt pulley and fixed for this
The belt that position mechanism one end is fixing, and the motor that this belt pulley of drive pivots.
Further, this sucker is each other in arranging at equal intervals.
Further, this sucker by two sides extend and slightly in sleeve configuration.
Another object of the present invention, is to provide a kind of tablet detection equipment, and it is configured with vacuum as above and inhales paperback
Putting, this tablet detection equipment includes a conveying crawler belt, an image capture unit, and this vacuum and inhales leveling device.This conveying is carried out
Band transmits path for this tablet along one and moves.This conveying crawler belt has one and is arranged at this conveying crawler belt one or two side, drives this conveying
The rotation roller that crawler belt advances, and the most several air-guiding hole being laid in this conveying track surface.This image capture unit is arranged at
The side of this conveying crawler belt, in order to shoot this tablet on a capture region.Wherein, described vacuum is inhaled leveling device and is arranged at this
Conveying crawler belt is relative to the opposite side of this image capture unit, when this tablet moves to this capture region through this conveying crawler belt, and should
Vacuum is inhaled leveling device and is inhaled this tablet flat this image capture unit shooting for opposite side.
Further, this rotation roller has the roller of this conveying crawler belt winding of confession, and one is arranged in this roller to drive this
The pivot that roller rotates, and one be arranged at this pivot side with the driving means driving this to pivot.
Further, the area of this sucker is more than the area of this air-guiding hole.
Another object of the present invention, is to provide a kind of tablet transfer equipment, is configured with vacuum as above and inhales leveling device,
This tablet transfer equipment has a support, one or many several linking arms, a driving means, and this vacuum and inhales leveling device.This is even
Connect arm to move horizontally means be incorporated on this support by pivot means, a multiaxis mobile means or.This driving means connects
In these pivot means, this multiaxis mobile means, maybe this moves horizontally means and transmits path along at least one and move operating this linking arm.
Wherein, described vacuum is inhaled leveling device and is arranged on this linking arm, and in order to adsorb this tablet, this driving means drives this linking arm to incite somebody to action
This tablet transfers load to target location along this transmission path.
Therefore, the present invention has the advantage that effect compared with known technology:
1. the present invention is by adjustable tool, can the area of controller perturbation tablet binding domain, can carry out by corresponding various sizes of tablet
Adjust, save the customized inconvenience covering tool generation.
2. the sucker on the absorption microscope carrier of the present invention is more than air-guiding hole on this conveying crawler belt, and this sucker is setting of sleeve configuration
Meter, makes sucker be able to this air-guiding hole and overlaps.
Accompanying drawing explanation
Fig. 1, vacuum of the present invention inhales the upside schematic diagram of leveling device.
Fig. 2, vacuum of the present invention inhales the side schematic view of leveling device.
Fig. 3, vacuum of the present invention inhales the generalized section of leveling device.
Fig. 4, vacuum of the present invention inhales the close-up schematic view of leveling device.
Fig. 5-1, to Fig. 5-2, represents the regulative mode of tablet binding domain.
Fig. 6-1, to Fig. 6-2, represents the regulative mode of tablet binding domain.
Fig. 7, the present invention first implements the upside schematic diagram of aspect.
Fig. 8, the present invention first implements the side schematic view of aspect.
Fig. 9, represents the close-up schematic view of conveying crawler belt.
Figure 10, the present invention second implements the upside schematic diagram of aspect.
Figure 11, the present invention second implements the side schematic view of aspect.
Symbol description:
100 vacuum inhale leveling device；10 absorption microscope carriers；
20 vacuum room；21 vacuum sucking unit；
30 adjustable tools；31 first guiding mechanisms；
311 first shields；312 detent mechanisms；
3121 locating pieces；3122 fixed plates；
313 orbit portions；314 driving means；
3141 belt pulleys；3142 belts；
3143 motors；32 second guiding mechanisms；
321 second shields；322 detent mechanisms；
3221 locating pieces；3222 fixed plates；
323 orbit portions；324 driving means；
3241 belt pulleys；3242 belts；
3243 motors；R1 tablet binding domain；
R2 tablet binding domain；P tablet；
H sucker；T1 vac sorb plane；
T2 gas flow guiding face；D1 first direction；
D2 second direction；L1 is spaced；
O1 starting position coordinates；Lo1 length；
Wi1 width；O2 starting position coordinates；
Lo2 length；Wi2 width；
200 tablet detection equipment；40 conveying crawler belts；
41 rotate roller；411 rollers；
412 pivots；413 driving means；
42 air-guiding holes；50 image capture units；
A1 transmits path；B capture region；
300 tablet transfer equipment；60 supports；
61 linking arms；62 driving means；
63 vacuum extractors；64 gas channels；
65 pivots；A2 transmits path.
Detailed description of the invention
Hereby architectural feature and mode of operation with regard to this case are lifted one and are preferably implemented aspect, and cooperation illustrates, after being sincerely set forth in,
Examination is only provided to refer to.
For convenience of description, term as used herein, such as " top ", " lower section ", " left side ", " right side " refer to relatively
This horizontal plane in graphic defines.
Such as Fig. 1-Figure 11, the present invention provides a kind of vacuum to inhale leveling device 100, in order to adsorb and to flatten tablet P.Described is true
Suction leveling device 100 can be applicable to automatic optics inspection (Automated Optical Inspection, AOI) field, coordinates and passes
Send crawler belt and image capture unit to arrange, also or can be applicable on the shifting apparatus of tablet P, be used for adsorbing tablet P and expecting
Sheet P transfers load on different platforms, is not intended to limit described vacuum and inhales the mode of leveling device 100 application in the present invention.Described
Vacuum inhale leveling device 100 and preferably may be used to adsorb the soft materials and parts on general industry, such as: flexible printed wiring board
(Flexible Print Circuit, FPC), flexible display (Flexible Displays), polaroid (polarizer) or other
Soft industry tablet, is not intended to limit in the present invention.The structure inhaling leveling device below for vacuum of the present invention illustrates, please
Refering to Fig. 1 to Fig. 3, vacuum of the present invention inhales upside schematic diagram, side schematic view and the generalized section of leveling device, such as figure institute
Show:
The vacuum of the present invention inhale leveling device 100 can the size adjusting adsorption area of flexibly corresponding tablet P, thereby to absorption microscope carrier 10
The negative pressure providing suitable with absorption and flattens this tablet P.Described vacuum is inhaled leveling device 100 and is included an absorption microscope carrier 10, and one
It is correspondingly arranged in the vacuum room 20 of the opposite side of this absorption microscope carrier 10 this vac sorb plane T1 relative, and a correspondence sets
It is placed in this vac sorb plane T1 or is correspondingly arranged in the adjustable tool 30 of this T2 side, gas flow guiding face.
Seeing also Fig. 3, this absorption microscope carrier 10 includes vac sorb plane T1, and the most several to be arranged at this true
Sucker H on empty adsorbing plane T1.This vacuum room 20 includes one adjacent to the sucker side H of this absorption microscope carrier 10
Gas flow guiding face T2, and one or many several vacuum sucking unit 21 that this gas flow guiding face T2 is provided negative pressure.Described
Vac sorb plane T1, means this absorption microscope carrier 10 side corresponding to this tablet P position, in order to adsorb this tablet P and to supply
This tablet P rests against.Described gas flow guiding face T2, means the opposite side of this absorption microscope carrier 10 this tablet P position relative, its
The corresponding inner side to this vacuum room 20, provides negative pressure, mat by this vacuum sucking unit 21 to this gas flow guiding face T2
This, through the most several suckers H on this absorption microscope carrier 10, make this tablet P be adsorbed on this vac sorb plane T1
On.Seeing also Fig. 4, in a preferred embodiment, described sucker H, each other in arranging at equal intervals, makes this sucker H
It is distributed evenly in this vac sorb plane T1.In another preferred embodiment, described sucker H is extended by two sides
And in sleeve configuration.
This adjustable tool 30 include one can adjust by the first guiding mechanism 31 and in the first direction D1 move first
Shield 311, and one can adjust and D2 moves in a second direction the second shield 321 by the second guiding mechanism 32.This is years old
Position respectively at this first direction D1 of one shield 311 and this second shield 321 and the position shielding portion of this second direction D2
Divide sucker H, to define a tablet binding domain.In this enforcement aspect, for making this first shield 311, this second shield
321 combine closely with the surface of this sucker H, and described the first shield 311, this second shield 321 can be relatively arranged on respectively
This vac sorb plane T1 and the side of this gas flow guiding face T2.
The first described guiding mechanism 31 includes one or many several detent mechanisms 312 fixing this first shield 311, and one
Or the most several this detent mechanism 312 side that is arranged at is to limit the orbit portion that this detent mechanism 312 moves along this first direction D1
313, and one be arranged at the driving that this orbit portion 313 side is moved along this first direction D1 to drive this detent mechanism 312
Device 314.This orbit portion 313 is arranged in pairs two sides in this first shield 311, and this detent mechanism 312 has two and is divided into
Locating piece 3121 on two orbit portions 313, and one be arranged between this paired locating piece 3121 and lock this first shield
The fixed plate 3122 of 311.This driving means 314 has the belt pulley 3141 of more than at least two, and one is set around this belt pulley
The belt 3142 fixed on 3141 and for this detent mechanism 312 one end, and the motor that this belt pulley 3141 of drive pivots
3143.When this motor 3143 receives instruction, this motor 3143 drives this belt pulley 3141 to pivot, by this belt pulley
3141 drive this belt 3142 to move, and make this detent mechanism 312 being fixed on this belt 3142 along this orbit portion 313
The path (first direction D1) defined is upper mobile, thereby drives this first shield 311.
The second described guiding mechanism 32 is roughly the same with the structure of the first guiding mechanism 31, mainly has one or many several
Fixing the detent mechanism 322 of this second shield 321, one is arranged at this detent mechanism 322 side to limit this detent mechanism 322
Along the orbit portion 323 of a path (second direction D2) movement, and one is arranged at this orbit portion 323 side to drive this fixed
The driving means 324 that position mechanism 322 moves along this path.This orbit portion 323 is arranged in pairs two in this second shield 321
Side, this detent mechanism 322 has two locating pieces 3221 being divided on two orbit portions 323, and one is arranged at paired being somebody's turn to do
Between locating piece 3221 and the fixed plate 3222 of this second shield 321 that locks.This driving means 324 includes more than at least two
Belt pulley 3241, one is set around on this belt pulley 3241 and for the fixing belt 3242 in this detent mechanism 322 one end, and
One drives the motor 3243 that this belt pulley 3241 pivots.When this motor 3243 receives instruction, this motor 3243 drives should
Belt pulley 3241 pivots, and drives this belt 3242 to move by this belt pulley 3241, makes be fixed on this belt 3242 to be somebody's turn to do
Detent mechanism 322 is upper mobile along the path (second direction D2) that this orbit portion 323 is defined, and thereby drives this second screening
Plate 321.
Described adjustable tool 30 be connectable to can program logic controller (programmable logic controller,
PLC), by man-machine interface (Man-Machine Interface) input tablet P size, control this first shield 311 and
The stroke of the second shield 321 is to determine the area of this tablet binding domain.In another preferred embodiment, described tablet absorption
The area in region also can be adjusted by the corresponding various sizes of tablet P of manual mode.
Specifically, it is related to automatically adjust based on tablet P size the technology of tablet binding domain area, below lifts a tool
Body situation illustrates, and refers to Fig. 5-1 to Fig. 5-2, Fig. 6-1 to shown in Fig. 6-2.In this enforcement aspect, described
One shield 311 can control by the first guiding mechanism 31, moves along Y direction.The second described shield 321 can be by
Two guiding mechanisms 32 control, and move along X-direction.Its direction moved and distance can be controlled by driving means 314,324
System, described moving direction and distance can calculate by following calculation formula.Please referring initially to Fig. 5-1 to Fig. 5-2, set and inhale
The position in appendix platform 10 lower right corner is initial point Q (0,0), and described initial point Q (0,0) is the relative initial point relative to mechanical origin.
Obtain the first shield 311 in the position Y1 of Y direction with this relative initial point Q (0,0), and obtain the second shield 321 in X-axis
The position X1 in direction, thereby obtains starting position coordinates O1 (X1, Y1).Continue, to be arranged by man-machine interface input
Tablet P size, the most a length of Lo1, width are Wi1, by calculating, by starting position coordinates by program logic controller
O1 deducts tablet P dimensional parameters (length Lo1, width Wi1), is adjusted vector parameter M (X1-Lo1, Y1-Wi1).
As shown in fig. 5-1, acquired adjustment, when numerical quantity X1-Lo1 ＜ 0, controls this second shield 321 towards the right side in graphic
The distance of | X1-Lo1 | is moved in direction, during acquired adjustment vector parameter Y1-Wi1 ＞ 0, controls this first shield 311 towards figure
The distance of | Y1-Wi1 | is moved in direction, lower section in formula.In time adjusting to location, represented, not by the first shield in graphic
311 and second the plane domain that covered of shield 321 be described tablet binding domain R1 (as shown in Fig. 5-2).
Hereinafter lift another concrete condition again to illustrate, refer to Fig. 6-1 to Fig. 6-2.It is intended to set by man-machine interface input
The tablet P size put, the most a length of Lo2, width are Wi2, by calculating, by original position by program logic controller
Coordinate O2 (X2, Y2) deducts tablet P dimensional parameters (length Lo2, width Wi2), be adjusted vector parameter N (X2-Lo2,
Y2-Wi2).Acquired adjustment, when numerical quantity X2-Lo2 ＞ 0, controls this second shield 321 towards the left direction in graphic
The distance of mobile | X2-Lo2 |.This first shield 311 is controlled towards in graphic during acquired adjustment vector parameter Y2-Wi2 ＜ 0
The distance of | Y2-Wi2 | is moved in direction, top.In time adjusting to location, represented in graphic, not by the first shield 311 and the
The plane domain that two shields 321 are covered is described tablet binding domain R2.
Refer to Fig. 7 and Fig. 8, be the present invention first upside schematic diagram and the side schematic view of implementing aspect, as shown in the figure:
In this enforcement aspect, described vacuum is inhaled leveling device 100 and is configured on a tablet detection equipment 200, in order to adsorb and whole
Flat tablet P, uses the surface to this tablet P for image capture unit 50 to the P capture of this tablet and detects.Described
Tablet detection equipment 200 consists predominantly of a conveying crawler belt 40, an image capture unit 50, and aforesaid vacuum and inhales paperback
Put 100.
Described conveying crawler belt 40 moves for this tablet P ornaments and by this tablet P along a transmission path A1.This vacuum is inhaled
Leveling device 100 is arranged at the downside of this conveying crawler belt 40, and this image capture unit 50 is then arranged at the upper of this conveying crawler belt 40
Side (opposite side of this conveying crawler belt 40 this vacuum relative suction leveling device 100), inhales leveling device 100 by this vacuum and determines a pair
Should be in the capture region B on this conveying crawler belt 40 surface, described image capture unit 50 is correspondingly arranged in this capture region B's
Top or side, use the surface image of the upper tablet P after flattening of shooting this capture region B.
This conveying crawler belt 40 has one and is arranged at this conveying crawler belt 40 1 or rotation that both sides drive this conveying crawler belt 40 to advance
Roller 41, and on the surface of this conveying crawler belt 40, it is laid with the most several air-guiding hole 42.This rotation roller 41 has one for this conveying
The roller 411 of crawler belt 40 winding, one is arranged in this roller 411 with the pivot 412, Yi Jiyi driving this roller 411 to rotate
It is arranged at the driving means 413 that this pivot 412 side rotates to drive this pivot 412.Driving means 413 described herein can
For syncmotor (synchronous motor), induction motor (induction motor), reversible motor (reversible
Motor), stepper motor (stepping motor), servo motor (servo motor), linear motor (linear motor)
Deng, in the present invention, it is not intended to be limited the kind of described driving means.
Described vacuum is inhaled leveling device 100 and is arranged at the opposite side of this conveying crawler belt 40 this capture region relative B.In front side
Tablet P acquired by process equipment will transmit through transfer equipment or operator is delivered on this conveying crawler belt 40, and carries out by this conveying
Band 40 carries along this transmission path A1, uses and is moved by this tablet P to this capture region B.When this tablet P moves to this
During the B of capture region, this tablet P is flattened in this by described vacuum suction leveling device 100 by startup and by the most several suckers H
On the B of capture region, making the surface of this tablet P tend to smooth, this image capture unit 50 in order to opposite side shoots capture.
After detection completes, the other end in conveying crawler belt 40 can be provided with a shifting apparatus (not shown), will mistake after testing
After tablet P classify.Such as tablet P is transferred load to OK classification, classification, NG classification etc. can be repaired.
See also Fig. 9, represent the close-up schematic view of conveying crawler belt, as shown in the figure:
For avoiding conveying crawler belt 40 when mobile, because assembling, processing procedure or life-time service produce the problem of tolerance, cause air-guiding hole 42
Failing to overlap with sucker H, the area of sucker H described in this enforcement aspect is more than the area of this air-guiding hole 42.Preferable in another
In embodiment, for avoiding the gap between air-guiding hole 42 with air-guiding hole 42 overlapping with this sucker H, sucker H is caused to block, institute
Sucker H bis-side stated extends along the direction of this transmission path A1 and slightly in sleeve configuration, thereby shortens sucker H between sucker H
Gap.The spacing of the mutual center of described sucker H, equal to the spacing of this mutual center of air-guiding hole 42, makes
Each air-guiding hole 42 in the range of same area all can be corresponding to sucker H.
See also Figure 10 and Figure 11, be the present invention second upside and the side schematic view of implementing aspect, as shown in the figure:
In this enforcement aspect, described vacuum is inhaled leveling device 100 and is configured on a tablet transfer equipment 300.Described tablet moves
Load equipment 300 includes the several linking arms 61, of support 60, one or many and is arranged at the driving means on this support 60
62 and aforesaid vacuum inhale leveling device 100.This linking arm 61 pivots means, a multiaxis mobile means or a water by one
Flat mobile means is incorporated on this support 60.Described vacuum is inhaled leveling device 100 and is arranged on this linking arm 61, in order to adsorb
This tablet P, in time adsorbing this tablet P, via these pivot means, multiaxis mobile means or move horizontally means, this driving fills
Putting 62 can drive this linking arm 61 that along this transmission path A2, this tablet P is transferred load to target location.
Above-mentioned pivot means can be but be not limited to such as in order to fixing linking arm and by driving means drive pivot pivot
Axle.Above-mentioned multiaxis mobile means can be but be not limited to such as Multi-shaft mechanical arm.The above-mentioned means that move horizontally can be but not limit
It is set to belt pulley or the conveyer belt etc. such as with track.
In this enforcement aspect, described linking arm 61 is provided with gas channel 64.One it is provided with even on support 60
It is connected to the vacuum extractor 63 of this gas channel 64, inhales the vacuum sucking unit on leveling device 100 in order to be connected to this vacuum
21, use the absorption microscope carrier 10 this vacuum being inhaled leveling device 100 through this gas channel 64 and negative pressure is provided.The most real in another
Execute in aspect, can pass through external pipeline and connect the vacuum extractor 63 on this vacuum sucking unit 21 and support 60.Mat
This, can be moved tablet P to the second position by primary importance.
In this enforcement aspect, connect linking arm 61 and support 60 by pivot 65.Described driving means 62 is arranged at
The side of this pivot 65.When driving means 62 starts, this driving means 62 drives this linking arm 61 through this pivot 65
Overturning centered by this pivot 65, move along transmitting path A2 controlling this linking arm 61, wherein, described vacuum is inhaled flat
Device 100 is arranged on this linking arm 61, makes this tablet P be fixed on this vacuum suction leveling device 100 in order to adsorb this tablet P
On.When this tablet P transfers load to target location via this transmission path A2, this vacuum extractor 63 can close gas check valve to solve
Adsorbed state except this tablet P.
In sum, the present invention by adjustable tool, can the area of controller perturbation tablet binding domain, can be corresponding different
The tablet of size is adjusted, and saves the customized inconvenience covering tool generation.Sucker on the absorption microscope carrier of the present invention is more than being somebody's turn to do
Air-guiding hole on conveying crawler belt, and this sucker is the design of sleeve configuration, makes sucker be able to this air-guiding hole and overlaps.
The above-mentioned preferred embodiment of present invention mat is described in more detail, but the present invention is not limited to above-mentioned illustrated reality
Execute aspect, all in the range of disclosed technological thought, these structures are made various changes and modify, these change and
Modify and still belong to the scope of the present invention.
Claims (13)
1. vacuum inhales a leveling device, in order to adsorb and to flatten tablet, it is characterised in that
This vacuum is inhaled leveling device and is comprised:
One absorption microscope carrier, has a vac sorb plane, and the most several is arranged at this vacuum
Sucker on adsorbing plane；
One vacuum room, is arranged at this absorption microscope carrier relative to another of this vac sorb plane
Side, this vacuum room has one and leads adjacent to the gas of the sucker side of this absorption microscope carrier
Stream interface, and one or many several vacuum attraction lists that this gas flow guiding face is provided negative pressure
Unit；And
One adjustable tool, has to be arranged at this vac sorb plane or be arranged at this gas and leads
First shield of stream interface side and the second shield, this first shield adjusts machine by first
Structure adjusts and moves along the first direction, and this second shield adjusts by the second guiding mechanism
And move in a second direction, cover the part sucker in this vac sorb plane, with boundary
A fixed tablet binding domain.
2. vacuum as claimed in claim 1 inhales leveling device, it is characterised in that this is first years old
Shield and this second shield are respectively oppositely arranged at this vac sorb of this absorption microscope carrier and put down
Face and the side in this gas flow guiding face.
3. vacuum as claimed in claim 1 inhales leveling device, it is characterised in that this is first years old
Guiding mechanism has one or many several detent mechanisms fixing this first shield, and one is arranged at
This detent mechanism side to limit the orbit portion that this detent mechanism moves along a path, and
One is arranged at the driving dress that this orbit portion side is moved along this path to drive this detent mechanism
Put.
4. vacuum as claimed in claim 3 inhales leveling device, it is characterised in that this track
Portion is arranged in pairs in the both sides of this first shield, and this detent mechanism has and is divided into two tracks
On locating piece, and one be arranged between this paired locating piece and lock this first shield
Fixed plate.
5. vacuum as claimed in claim 1 inhales leveling device, it is characterised in that this is second years old
Guiding mechanism has one or many several detent mechanisms fixing this second shield, and one is arranged at
This detent mechanism side to limit the orbit portion that this detent mechanism moves along a path, and
One is arranged at the driving dress that this orbit portion side is moved along this path to drive this detent mechanism
Put.
6. vacuum as claimed in claim 5 inhales leveling device, it is characterised in that this track
Portion is arranged in pairs in the both sides of this second shield, and this detent mechanism has to be located on two tracks
Locating piece, and one be arranged between this paired locating piece and lock this second shield
Fixed plate.
7. the vacuum as according to any one of claim 1 to 6 inhales leveling device, its feature
Being, this driving means has the belt pulley of more than at least two, and one is set around this belt
The belt fixed on wheel and for this detent mechanism one end, and drive this belt pulley pivot
Motor.
8. vacuum as claimed in claim 1 inhales leveling device, it is characterised in that this sucker
Each other in arranging at equal intervals.
9. vacuum as claimed in claim 1 inhales leveling device, it is characterised in that this sucker
By two sides extensions slightly in sleeve configuration.
10. one kind is configured with vacuum suction leveling device according to any one of claim 1 to 9
Tablet detection equipment, it is characterised in that comprise:
One conveying crawler belt, transmits path for tablet along one and moves, and this conveying crawler belt has a setting
In this conveying crawler belt one or two side, drive the rotation roller that this conveying crawler belt advances, Yi Jiduo
Several air-guiding holes being laid in this conveying track surface；And
One image capture unit, is arranged at the side of this conveying crawler belt, in order to shoot a capture district
Tablet on territory；
Described vacuum is inhaled leveling device and is arranged at this conveying crawler belt relative to another of this image capture unit
Side, when tablet moves to this capture region through conveying crawler belt, this vacuum inhales leveling device
Inhale this tablet flat this image capture unit shooting for opposite side.
11. tablet as claimed in claim 10 detection equipment, it is characterised in that this turn
Action roller has a roller supplying this conveying crawler belt winding, and one is arranged in this roller to drive
The pivot that this roller rotates, and one be arranged at this pivot side to drive this to pivot
Driving means.
12. tablet as claimed in claim 10 detection equipment, it is characterised in that this suction
The area in hole is more than the area of this air-guiding hole.
13. 1 kinds are configured with vacuum according to any one of claim 1 to 9 and inhale leveling device
Tablet transfer equipment, it is characterised in that this tablet transfer equipment comprises:
One support；
One or many several linking arms, pivot means, a multiaxis mobile means or a water by one
Flat mobile means is incorporated on this support；And
One driving means, is connected to these pivot means, this multiaxis mobile means or this level and moves
The section of starting moves along at least one transmission path to operate this linking arm；
Described vacuum is inhaled leveling device and is arranged on this linking arm, in order to adsorb this tablet, and this driving
Device drives this linking arm that along this transmission path, this tablet is transferred load to target location.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104100048 | 2015-01-05 | ||
| TW104100048A TWI623738B (en) | 2015-01-05 | 2015-01-05 | A vacuum absorbing device, a material sheet detecting apparatus, and a material sheet transfer apparatus comprising the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106198387A true CN106198387A (en) | 2016-12-07 |
| CN106198387B CN106198387B (en) | 2019-09-20 |
Family
ID=56985085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510237823.0A Active CN106198387B (en) | 2015-01-05 | 2015-05-12 | Vacuum suction leveling device and material sheet detection/transfer equipment comprising same |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106198387B (en) |
| TW (1) | TWI623738B (en) |
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| CN108811327A (en) * | 2017-05-05 | 2018-11-13 | 苏州微影激光技术有限公司 | A kind of vacuum absorption device of PCB, method and PCB exposure machines |
| CN109696437A (en) * | 2017-10-23 | 2019-04-30 | 由田新技股份有限公司 | A kind of apparatus for leveling and its method of semiconductor tablet |
| CN114235813A (en) * | 2021-11-26 | 2022-03-25 | 江苏凡润电子有限公司 | Quality control system of display backboard based on visual detection |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI705743B (en) * | 2019-03-27 | 2020-09-21 | 捷惠自動機械有限公司 | Positioning method in X-RAY direction for circuit board after pressing |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201625930A (en) | 2016-07-16 |
| CN106198387B (en) | 2019-09-20 |
| TWI623738B (en) | 2018-05-11 |
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