A kind of micro-valve for controlling air pressure
Technical field
The present invention relates to a kind of micro-valve, be specifically related to a kind of micro-valve for controlling air pressure, for micro-move device or pneumatic micro-
The application scenarios such as fluidic chip control, belong to micro-fluidic field.
Background technology
At present, tiny flow quantity controls to have become the important development direction of fluid control technology, micro-move device, micro-injection with
And micro-fluidic chip field becomes one of requisite technology, the most conventional pneumatic servovalve/proportioning valve physical dimension is relatively
Greatly, due to the restriction of spool friction and valve port characteristic etc., it is impossible to realize the stability contorting of air pressure tiny flow quantity, limit
The realization of tiny flow quantity control and application.
Summary of the invention
The valve that the present invention solves existing conventional servo valve is bulky, structure is complicated, price is high, friction effects is small
The problem of metering characteristics, and then a kind of micro-valve for controlling air pressure is provided.
The present invention solves that the problems referred to above adopt the technical scheme that: it includes micro-valve air inlet end runner, micro-valve outlet side
Runner, fluid channel and two electromagnetic valves, be provided with fluid channel between two electromagnetic valves, and two electromagnetic valves are sealed even by fluid channel
Logical, one of them electromagnetic valve is connected with external air source by micro-valve air inlet end runner, and another electromagnetic valve passes through micro-valve outlet side
Runner is connected with external exhaust port.
The invention has the beneficial effects as follows:
The present invention uses compact electromagnetic driver, and its volume is far smaller than the servo valve proportioning valve of stock size, structure letter
Single;Be convenient for carrying, 2, valve body 3-2 material use current pneumatic micro-fluidic chip common used material PDMS, be different from current various often
The hard material of scale cun servo valve/proportioning valve, it is easy to carry out over all Integration as a control module and microfluidic system;3、
PDMS material low price, technique are simple, can encapsulate in several hours under the conditions of common lab;4) air pressure controls
Micro-valve body amasss little, simple in construction, is prone to encapsulation and is easy to carry.4, the present invention utilizes fluid channel 4-4 and two electromagnetic valve 4-1
Forming a threeway air pressure and control micro-valve, it is air valve that threeway air pressure controls micro-valve, is used for controlling gas on/off and regulation gas stream
Amount, pneumatic microfluidic system carries out integrated, by it is carried out logic control, realizes pneumatic microfluidic system one pneumatic micro-
The change of pressure in runner.5, the present invention proposes air pressure based on PDMS and controls micro-valve, it is to avoid conventional air pressure control valve valve
The impact that tiny flow quantity is controlled by frictional force between core and valve body and valve port characteristic, it is possible to preferably meet tiny flow quantity control
Need.6, the present invention is energized by electromagnetic driver 3-1 and produces the suction of opposite magnetic, and armature 1-5 and electricity with armature 1-5
The electromagnetic attraction that magnetic driven device 3-1 the produces counteracting force more than back-moving spring 1-6 makes spool 1-10 make micro-valve away from valve film 2-1
Open, when electromagnetic driver 3-1 power-off back-moving spring 1-6 make spool 1-10 near valve film 2-1 and pass through valve film 2-1 will be in valve
Fluid channel 2-3 blocking relative for core 1-10, plays the effect that micro-valve cuts out.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention, and Fig. 2 is the overall structure schematic diagram of electromagnetic driver 3-1, electromagnetism in figure
When driver 3-1 power-off iron core 1-4 is nonmagnetic, valve film 2-1 is pressed on substrate 2-2 micro-by spool 1-10 inverted Rotary-table tip
In runner 2-3, making the schematic diagram that micro-valve cuts out, Fig. 3 is the overall structure schematic diagram of electromagnetic driver 3-1, Electromagnetic Drive in figure
When device 3-1 is passed through 24V voltage, ferroelectric core 1-4 is magnetic, and attracts armature 1-5 to make spool 1-10 make micro-valve open away from valve film 2-1
The schematic diagram opened.
Detailed description of the invention
Detailed description of the invention one: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, it includes micro-valve air inlet end runner 4-2, micro-valve outlet side runner 4-3, fluid channel 4-4 and two electromagnetic valve 4-1,
It is provided with fluid channel 4-4 between two electromagnetic valve 4-1, and two electromagnetic valve 4-1 seal connection by fluid channel 4-4, one of them
Electromagnetic valve 4-1 is connected with external air source 4-5 by micro-valve air inlet end runner 4-2, and another electromagnetic valve 4-1 passes through micro-valve outlet side
Runner 4-3 is connected with external exhaust port.
Detailed description of the invention two: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, electromagnetic valve 4-1 includes electromagnetic driver 3-1 and valve body 3-2, and electromagnetic driver 3-1 is arranged near valve body 3-2, its
Its composition and annexation are identical with detailed description of the invention one.
Detailed description of the invention three: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, electromagnetic driver 3-1 includes plastic casing 1-1, iron magnetic shell 1-2, coil 1-3, iron core 1-4, armature 1-5, answers
Position spring 1-6, fastening screw 1-7, valve seat 1-8, base 1-9 and spool 1-10, coil 1-3 are wrapped on iron core 1-4, reset bullet
Spring 1-6 is set on armature 1-5, and the lower end of armature 1-5 is fixing with the top of spool 1-10 to be connected, and iron core 1-4 is fixedly mounted on
On the inwall of iron magnetic shell 1-2, iron magnetic shell 1-2 is fixedly mounted on the inwall of plastic casing 1-1, processes in the middle part of valve seat 1-8
Having through hole, fastening screw 1-7 to be fixedly mounted on the sidewall of valve seat 1-8 through hole, armature 1-5 and spool 1-10 is arranged on valve seat 1-
In the through hole of 8, the top of spool 1-10 is arranged on fastening screw 1-7, and plastic casing 1-1 is arranged on valve seat 1-8 upper surface,
Base 1-9 is fixedly mounted on the lower surface of valve seat 1-8, and armature 1-5 and iron core 1-4 is oppositely arranged, and the one of back-moving spring 1-6
End is stuck on one end of iron magnetic shell 1-2, and the other end of back-moving spring 1-6 withstands on one end of spool 1-10.Other composition and
Annexation is identical with detailed description of the invention one.
Detailed description of the invention four: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, the lower end of spool 1-10 is machined with inverted Rotary-table, and the tip diameter of inverted Rotary-table is 1mm, spool
The distance of the tip of the inverted Rotary-table in 1-10 lower end to base 1-9 lower surface is 120 μm.Other composition and annexation and tool
Body embodiment one, two or three are identical.
Detailed description of the invention five: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, valve body 3-2 includes that valve film 2-1 and substrate 2-2, substrate 2-2 upper surface are machined with fluid channel 2-3, and valve film 2-1 is arranged
On the upper surface of substrate 2-2, the tip of the inverted Rotary-table in spool 1-10 lower end is arranged on the top of fluid channel 2-3, other
Composition and annexation are identical with detailed description of the invention one.
Detailed description of the invention six: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, the spool that spool 1-10 is made up of polrvinyl chloride or polypropylene material.Spool 1-10 has that plasticity is good, toughness
High, be not susceptible to brittle fracture, and be exposed to the function of flawless joint in air, other composition and annexation for a long time with concrete
Embodiment one is identical.
Detailed description of the invention seven: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, the valve film that valve film 2-1 is made up of transparent PDMS material.Substrate 2-2 is made up of transparent PDMS material
Substrate, the thickness of substrate 2-2 is 3mm~8mm, and it is good that substrate 2-2 has plasticity, prevents from deforming because of stress when using, material
Expect transparent to be easy to naked eyes when electromagnetic driver 3-1 and valve body 3-2 encapsulates and align.Multiple miniature valves composition valve group of encapsulation can be made
Being a module, it is simple to carry out over all Integration with pneumatic micro-fluidic chip or system, other composition and annexation are real with concrete
Execute mode one identical.PDMS is the material of polydimethylsiloxane.
Detailed description of the invention eight: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, the thickness of valve film 2-1 is 100 μm~500 μm, and film 2-1 is smooth and soft for valve, and deformability is strong, not easy fracture, and
And potentially act as the effect of spring washer, leak gas when preventing electromagnetic micro valve from closing;Other composition and annexation and detailed description of the invention
One is identical.
Detailed description of the invention nine: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, electromagnetic driver 3-1 driving voltage is direct current 24V voltage.Other composition and annexation and detailed description of the invention
One is identical.
Detailed description of the invention ten: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas
Micro-valve of pressure, when emergency power off occurs in pneumatic microfluidic system, channel-style normally closed type electromagnetic micro valve can cut off outside gas in time
Source 4-5, protects pneumatic microfluidic system.Other composition and annexation are identical with detailed description of the invention one.