CN106195438A - A kind of micro-valve for controlling air pressure - Google Patents

A kind of micro-valve for controlling air pressure Download PDF

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Publication number
CN106195438A
CN106195438A CN201610585331.5A CN201610585331A CN106195438A CN 106195438 A CN106195438 A CN 106195438A CN 201610585331 A CN201610585331 A CN 201610585331A CN 106195438 A CN106195438 A CN 106195438A
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CN
China
Prior art keywords
valve
micro
spool
electromagnetic
air pressure
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Granted
Application number
CN201610585331.5A
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Chinese (zh)
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CN106195438B (en
Inventor
李松晶
刘旭玲
符海
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Harbin Gongda Haizhuo intelligent Forming Technology Co.,Ltd.
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Harbin Institute of Technology
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0003Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015Diaphragm or membrane valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00Subject matter not provided for in other groups of this subclass
    • F16K99/0001Microvalves
    • F16K99/0034Operating means specially adapted for microvalves
    • F16K99/0042Electric operating means therefor
    • F16K99/0046Electric operating means therefor using magnets

Abstract

A kind of micro-valve for controlling air pressure, the present invention relates to a kind of micro-valve, the present invention solves that the valve of existing conventional servo valve is bulky, structure is complicated, price is high, the problem of friction effects tiny flow quantity control characteristic, it includes micro-valve air inlet end runner, micro-valve outlet side runner, fluid channel and two electromagnetic valves, it is provided with fluid channel between two electromagnetic valves, and two electromagnetic valves seal connection by fluid channel, one of them electromagnetic valve is connected with external air source by micro-valve air inlet end runner, another electromagnetic valve is connected with external exhaust port by micro-valve outlet side runner, the invention belongs to micro-fluidic field.

Description

A kind of micro-valve for controlling air pressure
Technical field
The present invention relates to a kind of micro-valve, be specifically related to a kind of micro-valve for controlling air pressure, for micro-move device or pneumatic micro- The application scenarios such as fluidic chip control, belong to micro-fluidic field.
Background technology
At present, tiny flow quantity controls to have become the important development direction of fluid control technology, micro-move device, micro-injection with And micro-fluidic chip field becomes one of requisite technology, the most conventional pneumatic servovalve/proportioning valve physical dimension is relatively Greatly, due to the restriction of spool friction and valve port characteristic etc., it is impossible to realize the stability contorting of air pressure tiny flow quantity, limit The realization of tiny flow quantity control and application.
Summary of the invention
The valve that the present invention solves existing conventional servo valve is bulky, structure is complicated, price is high, friction effects is small The problem of metering characteristics, and then a kind of micro-valve for controlling air pressure is provided.
The present invention solves that the problems referred to above adopt the technical scheme that: it includes micro-valve air inlet end runner, micro-valve outlet side Runner, fluid channel and two electromagnetic valves, be provided with fluid channel between two electromagnetic valves, and two electromagnetic valves are sealed even by fluid channel Logical, one of them electromagnetic valve is connected with external air source by micro-valve air inlet end runner, and another electromagnetic valve passes through micro-valve outlet side Runner is connected with external exhaust port.
The invention has the beneficial effects as follows:
The present invention uses compact electromagnetic driver, and its volume is far smaller than the servo valve proportioning valve of stock size, structure letter Single;Be convenient for carrying, 2, valve body 3-2 material use current pneumatic micro-fluidic chip common used material PDMS, be different from current various often The hard material of scale cun servo valve/proportioning valve, it is easy to carry out over all Integration as a control module and microfluidic system;3、 PDMS material low price, technique are simple, can encapsulate in several hours under the conditions of common lab;4) air pressure controls Micro-valve body amasss little, simple in construction, is prone to encapsulation and is easy to carry.4, the present invention utilizes fluid channel 4-4 and two electromagnetic valve 4-1 Forming a threeway air pressure and control micro-valve, it is air valve that threeway air pressure controls micro-valve, is used for controlling gas on/off and regulation gas stream Amount, pneumatic microfluidic system carries out integrated, by it is carried out logic control, realizes pneumatic microfluidic system one pneumatic micro- The change of pressure in runner.5, the present invention proposes air pressure based on PDMS and controls micro-valve, it is to avoid conventional air pressure control valve valve The impact that tiny flow quantity is controlled by frictional force between core and valve body and valve port characteristic, it is possible to preferably meet tiny flow quantity control Need.6, the present invention is energized by electromagnetic driver 3-1 and produces the suction of opposite magnetic, and armature 1-5 and electricity with armature 1-5 The electromagnetic attraction that magnetic driven device 3-1 the produces counteracting force more than back-moving spring 1-6 makes spool 1-10 make micro-valve away from valve film 2-1 Open, when electromagnetic driver 3-1 power-off back-moving spring 1-6 make spool 1-10 near valve film 2-1 and pass through valve film 2-1 will be in valve Fluid channel 2-3 blocking relative for core 1-10, plays the effect that micro-valve cuts out.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention, and Fig. 2 is the overall structure schematic diagram of electromagnetic driver 3-1, electromagnetism in figure When driver 3-1 power-off iron core 1-4 is nonmagnetic, valve film 2-1 is pressed on substrate 2-2 micro-by spool 1-10 inverted Rotary-table tip In runner 2-3, making the schematic diagram that micro-valve cuts out, Fig. 3 is the overall structure schematic diagram of electromagnetic driver 3-1, Electromagnetic Drive in figure When device 3-1 is passed through 24V voltage, ferroelectric core 1-4 is magnetic, and attracts armature 1-5 to make spool 1-10 make micro-valve open away from valve film 2-1 The schematic diagram opened.
Detailed description of the invention
Detailed description of the invention one: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, it includes micro-valve air inlet end runner 4-2, micro-valve outlet side runner 4-3, fluid channel 4-4 and two electromagnetic valve 4-1, It is provided with fluid channel 4-4 between two electromagnetic valve 4-1, and two electromagnetic valve 4-1 seal connection by fluid channel 4-4, one of them Electromagnetic valve 4-1 is connected with external air source 4-5 by micro-valve air inlet end runner 4-2, and another electromagnetic valve 4-1 passes through micro-valve outlet side Runner 4-3 is connected with external exhaust port.
Detailed description of the invention two: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, electromagnetic valve 4-1 includes electromagnetic driver 3-1 and valve body 3-2, and electromagnetic driver 3-1 is arranged near valve body 3-2, its Its composition and annexation are identical with detailed description of the invention one.
Detailed description of the invention three: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, electromagnetic driver 3-1 includes plastic casing 1-1, iron magnetic shell 1-2, coil 1-3, iron core 1-4, armature 1-5, answers Position spring 1-6, fastening screw 1-7, valve seat 1-8, base 1-9 and spool 1-10, coil 1-3 are wrapped on iron core 1-4, reset bullet Spring 1-6 is set on armature 1-5, and the lower end of armature 1-5 is fixing with the top of spool 1-10 to be connected, and iron core 1-4 is fixedly mounted on On the inwall of iron magnetic shell 1-2, iron magnetic shell 1-2 is fixedly mounted on the inwall of plastic casing 1-1, processes in the middle part of valve seat 1-8 Having through hole, fastening screw 1-7 to be fixedly mounted on the sidewall of valve seat 1-8 through hole, armature 1-5 and spool 1-10 is arranged on valve seat 1- In the through hole of 8, the top of spool 1-10 is arranged on fastening screw 1-7, and plastic casing 1-1 is arranged on valve seat 1-8 upper surface, Base 1-9 is fixedly mounted on the lower surface of valve seat 1-8, and armature 1-5 and iron core 1-4 is oppositely arranged, and the one of back-moving spring 1-6 End is stuck on one end of iron magnetic shell 1-2, and the other end of back-moving spring 1-6 withstands on one end of spool 1-10.Other composition and Annexation is identical with detailed description of the invention one.
Detailed description of the invention four: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, the lower end of spool 1-10 is machined with inverted Rotary-table, and the tip diameter of inverted Rotary-table is 1mm, spool The distance of the tip of the inverted Rotary-table in 1-10 lower end to base 1-9 lower surface is 120 μm.Other composition and annexation and tool Body embodiment one, two or three are identical.
Detailed description of the invention five: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, valve body 3-2 includes that valve film 2-1 and substrate 2-2, substrate 2-2 upper surface are machined with fluid channel 2-3, and valve film 2-1 is arranged On the upper surface of substrate 2-2, the tip of the inverted Rotary-table in spool 1-10 lower end is arranged on the top of fluid channel 2-3, other Composition and annexation are identical with detailed description of the invention one.
Detailed description of the invention six: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, the spool that spool 1-10 is made up of polrvinyl chloride or polypropylene material.Spool 1-10 has that plasticity is good, toughness High, be not susceptible to brittle fracture, and be exposed to the function of flawless joint in air, other composition and annexation for a long time with concrete Embodiment one is identical.
Detailed description of the invention seven: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, the valve film that valve film 2-1 is made up of transparent PDMS material.Substrate 2-2 is made up of transparent PDMS material Substrate, the thickness of substrate 2-2 is 3mm~8mm, and it is good that substrate 2-2 has plasticity, prevents from deforming because of stress when using, material Expect transparent to be easy to naked eyes when electromagnetic driver 3-1 and valve body 3-2 encapsulates and align.Multiple miniature valves composition valve group of encapsulation can be made Being a module, it is simple to carry out over all Integration with pneumatic micro-fluidic chip or system, other composition and annexation are real with concrete Execute mode one identical.PDMS is the material of polydimethylsiloxane.
Detailed description of the invention eight: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, the thickness of valve film 2-1 is 100 μm~500 μm, and film 2-1 is smooth and soft for valve, and deformability is strong, not easy fracture, and And potentially act as the effect of spring washer, leak gas when preventing electromagnetic micro valve from closing;Other composition and annexation and detailed description of the invention One is identical.
Detailed description of the invention nine: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, electromagnetic driver 3-1 driving voltage is direct current 24V voltage.Other composition and annexation and detailed description of the invention One is identical.
Detailed description of the invention ten: combining Fig. 1-Fig. 3 and present embodiment is described, one described in present embodiment is used for controlling gas Micro-valve of pressure, when emergency power off occurs in pneumatic microfluidic system, channel-style normally closed type electromagnetic micro valve can cut off outside gas in time Source 4-5, protects pneumatic microfluidic system.Other composition and annexation are identical with detailed description of the invention one.

Claims (8)

1. the micro-valve being used for controlling air pressure, it is characterised in that: it includes micro-valve air inlet end runner (4-2), micro-valve outlet side Runner (4-3), fluid channel (4-4) and two electromagnetic valves (4-1), be provided with fluid channel (4-4) between two electromagnetic valves (4-1), and Two electromagnetic valves (4-1) seal connection by fluid channel (4-4), and one of them electromagnetic valve (4-1) passes through micro-valve air inlet end runner (4-2) being connected with external air source (4-5), another electromagnetic valve (4-1) passes through micro-valve outlet side runner (4-3) and external exhaust port Connect.
A kind of micro-valve for controlling air pressure, it is characterised in that: electromagnetic valve (4-1) includes electromagnetism Driver (3-1) and valve body (3-2), electromagnetic driver (3-1) is arranged near valve body (3-2).
A kind of micro-valve for controlling air pressure, it is characterised in that: electromagnetic driver (3-1) includes Plastic casing (1-1), iron magnetic shell (1-2), coil (1-3), iron core (1-4), armature (1-5), back-moving spring (1-6), location Latch (1-7), valve seat (1-8), base (1-9) and spool (1-10), coil (1-3) is wrapped on iron core (1-4), back-moving spring (1-6) being set on armature (1-5), the lower end of armature (1-5) is fixing with the top of spool (1-10) to be connected, and iron core (1-4) is solid Dingan County is contained on the inwall of iron magnetic shell (1-2), and iron magnetic shell (1-2) is fixedly mounted on the inwall of plastic casing (1-1), valve Seat (1-8) middle part is machined with through hole, and fastening screw (1-7) is fixedly mounted on the sidewall of valve seat (1-8) through hole, armature (1-5) Being arranged in the through hole of valve seat (1-8) with spool (1-10), the top of spool (1-10) is arranged on fastening screw (1-7), moulds Material housing (1-1) is arranged on valve seat (1-8) upper surface, and base (1-9) is fixedly mounted on the lower surface of valve seat (1-8), rank Ferrum (1-5) and iron core (1-4) are oppositely arranged, and one end of back-moving spring (1-6) is stuck on one end of iron magnetic shell (1-2), multiple The other end of position spring (1-6) withstands on one end of spool (1-10).
A kind of micro-valve for controlling air pressure, it is characterised in that: the lower end processing of spool (1-10) There is inverted Rotary-table, and the tip diameter of inverted Rotary-table is 1mm, the tip of the inverted Rotary-table in spool (1-10) lower end Distance to base (1-9) lower surface is 120 μm.
5. according to the micro-valve for controlling air pressure a kind of described in claim 1 or 4, it is characterised in that: valve body (3-2) includes valve film (2-1) with substrate (2-2), substrate (2-2) upper surface is machined with fluid channel (2-3), and valve film (2-1) is arranged on substrate (2-2) On upper surface, the tip of the inverted Rotary-table in spool (1-10) lower end is arranged on the top of fluid channel (2-3).
A kind of micro-valve for controlling air pressure, it is characterised in that: spool (1-10) is by polychlorostyrene second The spool that alkene or polypropylene material are made.
A kind of micro-valve for controlling air pressure, it is characterised in that: valve film (2-1) is by transparent The valve film that PDMS material is made.Material transparent is easy to naked eyes when electromagnetic driver (3-1) encapsulates with valve body (3-2) and is alignd.
A kind of micro-valve for controlling air pressure, it is characterised in that: the thickness of valve film (2-1) is 100 μm~500 μm.
CN201610585331.5A 2016-07-22 2016-07-22 A kind of micro-valve for control pressure Active CN106195438B (en)

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CN106195438B CN106195438B (en) 2018-09-07

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110410575A (en) * 2019-08-16 2019-11-05 郑州轻工业学院 A kind of mobile electromagnetical driving micro-valve towards micro-fluidic chip
CN111500406A (en) * 2020-04-20 2020-08-07 哈尔滨工业大学 Microfluidic PCR chip
CN113251207A (en) * 2021-05-13 2021-08-13 哈尔滨工业大学 Pneumatic shuttle valve based on PDMS material and control method

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US5660370A (en) * 1996-03-07 1997-08-26 Integrated Fludics, Inc. Valve with flexible sheet member and two port non-flexing backer member
CN101718795A (en) * 2008-09-22 2010-06-02 中国科学院大连化学物理研究所 Microfluidic chip liquid drop control method based on pneumatic micro valve
CN102679039A (en) * 2012-05-07 2012-09-19 博奥生物有限公司 Pneumatic micro-valve integrated in micro-flow control chip
CN103335154A (en) * 2013-07-15 2013-10-02 大连海事大学 Electromagnetic micro valve integrated on micro-fluidic chip
CN104565501A (en) * 2015-01-20 2015-04-29 重庆科技学院 Microfluidic three-way solenoid valve and application method thereof
CN105278587A (en) * 2015-10-26 2016-01-27 哈尔滨工业大学 Multi-channel microfluidic pressure source

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5660370A (en) * 1996-03-07 1997-08-26 Integrated Fludics, Inc. Valve with flexible sheet member and two port non-flexing backer member
CN101718795A (en) * 2008-09-22 2010-06-02 中国科学院大连化学物理研究所 Microfluidic chip liquid drop control method based on pneumatic micro valve
CN102679039A (en) * 2012-05-07 2012-09-19 博奥生物有限公司 Pneumatic micro-valve integrated in micro-flow control chip
CN103335154A (en) * 2013-07-15 2013-10-02 大连海事大学 Electromagnetic micro valve integrated on micro-fluidic chip
CN104565501A (en) * 2015-01-20 2015-04-29 重庆科技学院 Microfluidic three-way solenoid valve and application method thereof
CN105278587A (en) * 2015-10-26 2016-01-27 哈尔滨工业大学 Multi-channel microfluidic pressure source

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110410575A (en) * 2019-08-16 2019-11-05 郑州轻工业学院 A kind of mobile electromagnetical driving micro-valve towards micro-fluidic chip
CN111500406A (en) * 2020-04-20 2020-08-07 哈尔滨工业大学 Microfluidic PCR chip
CN113251207A (en) * 2021-05-13 2021-08-13 哈尔滨工业大学 Pneumatic shuttle valve based on PDMS material and control method
CN113251207B (en) * 2021-05-13 2022-09-23 哈尔滨工业大学 Pneumatic shuttle valve based on PDMS material and control method

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Effective date of registration: 20191231

Address after: 150000 No.20 Nanhai Road, Haiping road concentration area, economic development zone, Harbin City, Heilongjiang Province

Patentee after: Harbin Industrial University hi tech intelligent Forming Technology Co., Ltd.

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Patentee after: Harbin Gongda Haizhuo intelligent Forming Technology Co.,Ltd.

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Patentee before: HIT HYDRO INTELLIGENT FORMING TECHNOLOGY Co.,Ltd.