CN106194736A - Oil rotary vacuum pump - Google Patents

Oil rotary vacuum pump Download PDF

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Publication number
CN106194736A
CN106194736A CN201510324129.2A CN201510324129A CN106194736A CN 106194736 A CN106194736 A CN 106194736A CN 201510324129 A CN201510324129 A CN 201510324129A CN 106194736 A CN106194736 A CN 106194736A
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CN
China
Prior art keywords
oil
cylinder
pump
cooling
grade
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Granted
Application number
CN201510324129.2A
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Chinese (zh)
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CN106194736B (en
Inventor
大卫·金
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WOOSONG VACUUM CO Ltd
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WOOSONG VACUUM CO Ltd
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Publication of CN106194736A publication Critical patent/CN106194736A/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • F04C29/042Heating; Cooling; Heat insulation by injecting a fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • F04C29/025Lubrication; Lubricant separation using a lubricant pump
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • F04C29/028Means for improving or restricting lubricant flow
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00Fluid
    • F04C2210/22Fluid gaseous, i.e. compressible
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/40Electric motor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00Rotary kinetic fluid motors or pumps
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00Pumps

Abstract

Disclose a kind of rotary type vacuum pump installation, it is characterized in that, stable pump environment is can ensure that based on three-member type oil cooling structure, at each pump module parts, wherein form cooling jacket, and pass through cooling jacket by cooling water circulation, and the heat of generation can directly be cooled at pump module, therefore the temperature preventing pump module raises, and simultaneously because oil can be cooled at the contact surface that vacuum oil contacts with the cooling jacket of pump module, and the directed oily channel flow being exposed to cooling jacket with edge of oil simultaneously transmitted by oil pump, thus to use the cooling water of cooling jacket by oil cooling, thereby, the temperature that can prevent pump module raises.Additionally, the pump housing and first order cylinder are integrated into the form of single parts, so the quantity of each parts can reduce saves manufacturing cost simultaneously.

Description

Oil rotary vacuum pump
Technical field
The present invention relates to a kind of vacuum pump, and be specifically related to use vacuum oil to guarantee the rotation of the vacuum of pump installation Rotatable vacuum pump.
Background technology
In general, vacuum equipment is that it is configured to low except the device of gas molecule at sealing container internal diabetes Low pressure in atmospheric pressure is aspirated and compresses, and compressed gas is discharged in air, thus improves container Interior vacuum.This vacuum pump can be divided into oil-sealed rotary pump and diffusion pump, and they are respectively designed to do Formula and wet type.Diffusion pump is wet type, and it uses oil to guarantee high vacuum, and oil-sealed rotary pump is dry Formula, it does not use oil, and is able to ensure that at a fairly low vacuum, but oil-sealed rotary pump has simple structure With high ruggedness, and having stable vacuum, then, oil-sealed rotary pump is widely used to various work Industry field, and have an advantage in that, user can easily operate and maintenance cost is relatively low.
In this, vacuum technique makes rapid progress, and its scope of application extends to semiconductor deposition, electronics Industry, metal field, chemical field, medical science and medicine supply, atomic energy industry etc..
Additionally, the kind of vacuum pump forming vacuum have close water type, rotary-type, Roots type based on oil, Oil diffused, physical absorption, chemical absorbing type etc., and vacuum pump usually can be categorized as wet type and dry type. But, water seal closed form or the rotary-type wet type (water or oil are input in vacuum pump) of oil base, the most partly leading Do not employ in the industrial circle of body, food, chemistry, medical science and medicine supply etc..Therefore, Dry vacuum pump (water or oil are not input in vacuum pump) has been used widely.Use vacuum Oil guarantees that the vacuum pump of the lubrication operation of vacuum pump apparatus, seal operation and cooling down operation makes the most in a large number With.
Can use vacuum oil and not have any physically or chemically to become in the rotary vacuum pump using vacuum oil The condition changed is very important in terms of the maintenance of pump operation.Use the spy of the rotary vacuum pump of this oil Levying and be, when the pump is operated, and rotor eccentric inside cylinder body rotates, and keep in the blade groove of rotor Blade to pusher, and is rotated the intimate surface contact with cylinder body by centrifugal force, and work process gas passes through cylinder body Suction ports be sucked, and the gas being stuck between two blades is compressed and turns along the direction of exhaust port Move, and notable gas compressed is discharged to the outside by steam vent when the exhaust valve is opened.
When process gas is aspirated by pump module and compresses, during gas compression, produce compression heat, and pressure Contracting heat increase in order to lubricate with seal operation and be fed to the temperature of the vacuum oil of cylinder body, the most also increase pump The temperature of module.Along with above-mentioned work technique continues, oil temperature gradually rises, and the oil that temperature raises is in order to moisten Sliding and seal operation and supply to pump module, and the oil therefore supplied is during suction and compression process The temperature of process gas is increased more, so oil temperature may raise rapidly, and the temperature of simultaneously pump module May raise rapidly, the temperature for this pump surface may increase to more than the use temperature of pump (40~60 DEG C) Scope.
At the rotary vacuum pump that use oil, there is Quick air-discharge speed (more than 2,000 liters/min) In the case of, high-temperature vacuum oil is the most crucial in terms of pump performance.If blade is deposited on the rotor of rotation Blade groove in, high temperature oil is fed into the blade moved in blade groove internal linear by means of centrifugal force, and by Overheated in the blade groove of the rotor having built up in temperature, oil is likely to become solid, and may be coated in leaf In the running surface of film trap, for this, lubrication becomes grain, consequently, it is possible to damaged blade, this may cause blocking of pump. Additionally, overheated oil may solidify in a part for bearing, this bearing supported shaft when the rotor is turning, this The lubrication of bad luck may be caused, consequently, it is possible to damage bearing.Additionally, be supplied to the sealing of the axle of sealing The overheated oil of part is likely to result in any deformation of the hermetic unit of axle, and this is likely to result in the leakage of oil.By Raising in the temperature crossing thermal vacuum, the evaporating pressure of oil also raises, so the vacuum of pump and exhaust velocity can Can reduce.
In order to solve oil temperature raise the problems referred to above, manufacture and use can cooling vacuum oil pump.The most Typical method through using is as follows.
1. use the oil cooling method of cooling coil
Fig. 1 is the view illustrating vacuum oil cooling structure, and this structure uses Conventional rotary vacuum pump apparatus Cooling coil, wherein oil storage housing 100 is made up and is assembled into the assembling parts of cooling coil 110 of copper pipe. While cooling current supercooling coil pipe 110, the temperature of cooling oil 120.The method has a problem in that to be worked as When manufacturing the assembling parts of cooling coil 110, it is necessary to have separately component costs, and have assembling and disassemble these The complicated process of parts.Oil may be revealed from the assembled part of housing 100.Company due to cooling coil 110 Connecing part may be impaired, and copper pipe material may maybe may crack in corrosion, so cooling water may be leaked to oil In.Additionally, compared with the cost of installation and maintenance increased, said method does not provide how many effects (can be pre- Phase 15~a small amount of cooling effect of 20 DEG C).
2. the method forming coolant jacket on the outer wall of oil storage housing
Fig. 2 is the view describing a kind of method, and wherein cooling jacket 130 is formed at Conventional rotary vacuum pump Cooling water 140 on the outer wall of the oily storage housing 100 of device and cold is fed at this, thus cools down The temperature of vacuum oil 120 on the border surface 150 contacted with vacuum oil 120.The method has a problem in that cold The most overheated vacuum oil 120 inefficiency, because the cooling water 140 of cooling jacket 130 contacts with each other with oil The contact area of border surface 150 less.The space of cooling jacket 130 only it is completely filled at cooling water Time interior, cooling effect can become more efficient.But, it is formed at cold owing to having the air cavities 160 of air But, at water jacket 130, oil cooling is not likely to be efficient.Use the said method of cooling jacket 130 at its oil Cooling effect aspect may be good unlike the method using cooling coil 110.
3. for the method being installed separately vacuum oil cooling system
For describing the view of a kind of method during Fig. 3, wherein oil cooling system 170 is separately mounted to routine The oily storage housing 100 of rotary type vacuum pump installation is outside, and the vacuum oil 120 of oil storage housing 100 is even It is connected on oil to be recycled in the structure of oil cooling system 170 by passage 180, so oil storage housing 100 Vacuum oil can be cooled while oil cooling system 170 at vacuum oil.Therefore, by using above-mentioned knot Structure makes oil circulate continuously can be by oil cooling.
But, when manufacturing oil cooling system, said method needs oil circulating pump, oil cooler, oil to filter Device, pipeline etc., need high cost for this, and these parts are arranged on outside pump, so pump installing space increases Greatly.
When attempting the temperature being carried out cooling pump by cooling vacuum oil, above-mentioned three kinds of methods all can not drop effectively The temperature of low pump module, so there being the problem keeping pumping fluid to use condition under best condition.
The problem of the vacuum pump apparatus caused due to overheated oil temperature may be summarized as follows.
-due to the oil viscosity reduced, sealing property may be substantially reduced.
-increase owing to the abrasion of each parts of greasy property of oil reduction is possible, and contacting with each other and carrying out phase To motion each parts between it may happen that block problem.
During the intake-gas compression of-cylinder body, owing to the gas of 200 DEG C of high temperature above/high pressure is it may happen that corruption Erosion problem.
-change according to oil temperature such as the steam pressure of fruit oil and change, then when oil temperature raises, the vacuum of pump can Can reduce owing to steam pressure raises.
In the case of-steam in high temp/high pressure state intake-gas is transformed into liquid, water is likely to be due to phase Become in the oil being gathered in vacuum pump.
The steam pressure of-oil raises the highest, and oil temperature raises the highest, and vacuum oil is converted into the amount of gas Can raise.In the case of the oil of liquid is converted into gas and may flow back to vacuum equipment, work may be polluted Product in technique.
-when oily overheated time, the size of each parts of pump module can become due to thermal expansion based on variations in temperature Greatly, and there is predetermined the interference at the gap location of each operation part, to this end, pump and may stop suddenly, therefore Damage motor.In order to solve the problems referred to above, if the gap of each operation part is made relatively big, sealing property Possible deviation at these parts, and the vacuum of pump and exhaust velocity reduce, and the working time increases, and It is difficult to meet required vacuum.
Summary of the invention
Therefore, the proposition of the present invention is intended to solve the problems referred to above of typical dry vacuum pump.
It is an object of the invention to provide a kind of rotary type vacuum pump installation, it is characterised in that based on three-member type oil Cooling structure can ensure that stable pump environment, wherein forms cooling jacket at each pump module parts, and By cooling water circulation by cooling jacket, and the heat produced at pump module can directly be cooled, therefore The temperature preventing pump module raises, and oil can be connecing that the cooling jacket with pump module of vacuum oil contacts simultaneously Touch surface to be cooled, and while flow through the oily passage being exposed to cooling jacket at the oil supplied by oil pump, Oil can be cooled, and the oil of cooling is available for being given to pump module and raises with the temperature being therefore prevented from pump module.
It is a further object of the present invention to provide the rotary type vacuum pump installation using vacuum oil, it is characterised in that The pump housing that past is formed by two parts and 1 grade of (first) cylinder form the form of single parts, with thus Reducing the quantity of each parts, this causes the manufacturing cost reduced.
To achieve these goals, it is provided that a kind of rotary vacuum pump using vacuum oil, including: pump housing cylinder, It is configured with 1 grade of (first) cylinder body in monomeric form;Oilcan body, it is fixed to the one of pump housing cylinder Side;Intermediate plate, it is fixed to the side of 1 grade of (first) cylinder body in oilcan body;2 grades of (second) cylinder bodies, It is fixed to the side of intermediate plate;Bonnet, its fixing side covering 2 grades of (second) cylinder bodies;Protecgulum, It is fixed to the outside of pump housing cylinder;Oil pump case, it is fixed to the side of protecgulum;Oil seal lid, it is fixed Side to oil pump case;Motor field frame, its be fixed to pump housing cylinder simultaneously around and wrap up oil pump case and Oil seal lid;The first rotor, it is through oil pump case, oil seal lid and 1 grade of (first) cylinder body and uses Oil pump case is rotatably supported under the auxiliary of bearing;Motor, its be fixed at motor field frame from And drive the first rotor;Second rotor, it is integrally formed with the first rotor and rotatable under the auxiliary of bearing Be bearing at intermediate plate and extend towards 2 grades of (second) cylinder bodies;First blade, it is by 1 grade (the One) rotation of the first rotor in cylinder body the inwall with 1 grade of (first) cylinder body are in close contact, and aspirate, Compression and discharge gas;Suction port, it is arranged at pump housing cylinder thus the gas that will aspirate from vacuum equipment It is fed to 1 grade of (first) cylinder body;Second blade, its by second rotor rotate and with 2 grades (second) The inwall of cylinder body is in close contact and aspirates, compresses and discharge the gas transmitted from 1 grade of (first) cylinder body;Row Gas port, it is formed at oilcan body thus will be discharged to the outside from 2 grades of (second) cylinder body expellant gas; 1 grade of (first) cylinder cooling jacket, it is formed at 1 grade of (first) cylinder;Intermediate plate cooling jacket, At its plate formed between;1 grade of (first) cylinder cooling jacket, it is formed at 2 grades of (second) cylinder bodies Place;Bonnet cooling jacket, it is formed at bonnet;And multiple cooling-water duct 8, it is configured to guide Cooling water circulation by cooling jacket, wherein oilcan body and pump housing cylinder respectively include oil memory space, thus are used for Make first and 2 grades of (second) cylinders, intermediate plate and bonnet be immersed in below vacuum oil.
Shaft coupling is used to connect according to the present invention, the axle of motor and the first rotor.
Additionally, according to the present invention, oil pump is arranged in oil pump case.
According to the present invention, cooling water inlet port is formed at 1 grade of (first) cylinder cooling jacket, and cold But water outlet end interruption-forming is at bonnet.
Therefore, also providing for first row air valve, this first row air valve is configured to the of 1 grade of (first) cylinder One exhaust passage is to outside opening;And second row air valve, this second row air valve is configured to 2 grades (second) The second exhaust passage of cylinder is to outside opening.
Additionally, according to the present invention, at least one projecting rib is from 1 grade of (first) cylinder, intermediate plate and 2 Any one in level (second) cylinder highlights along the direction of each cooling jacket, and is provided with oil circulation logical Cross the oily passage of each projecting rib.
Beneficial effect
Benefit of the invention is that over the pump housing formed by two parts and 1 grade of (first) cylinder support one The form of individual single component, thus to reduce the quantity of parts, this causes the manufacturing cost of reduction.Additionally, Can ensure that stable pump environment based on three-member type oil cooling structure, wherein formed cold at each pump module parts But water jacket, and by cooling water circulation by cooling jacket, and the heat produced at pump module can be direct Cooled, therefore prevent the temperature of pump module from raising, and oil can be at the cooling water of vacuum oil Yu pump module simultaneously At the contact surface of set contact cooled, and flow through at the oil supplied by oil pump and be exposed to the oil of cooling jacket and lead to While road, oil can be cooled, and the oil of cooling can be fed into pump module, to be therefore prevented from pump module Temperature raises.
Specifically, projecting rib may be formed in cooling jacket, and oil passage can be formed with the projecting rib of auxiliary Or thus allow oil circulation.Cooled and follow at pump module owing to being positioned at cooling water and the oil that flows together Ring is also supplied to, so being very well protected from the overheated of pump installation.
Accompanying drawing explanation
The present invention be will become better understood with reference to the accompanying drawings, and accompanying drawing is only by mean of illustrating and is given, therefore, The present invention is not limited, in accompanying drawing:
Fig. 1 to 3 is each view illustrating conventional configurations.
Fig. 4 is the positive view of the rotary vacuum pump using vacuum oil according to the present invention;
Fig. 5 is the plane of the line A-A intercepting along the rotary vacuum pump using vacuum oil according to the present invention Sectional view;
Fig. 6 is the sectional view that the line B-B along Fig. 4 intercepts;
Fig. 7 is the sectional view that the line C-C along Fig. 4 intercepts;
Fig. 8 is the sectional view that the line D-D along Fig. 4 intercepts;And
Fig. 9 is the sectional view that the line E-E along Fig. 4 intercepts.
Detailed description of the invention
The present invention can be more specifically implemented together with the embodiment of following demonstration.The embodiment of following demonstration is provided For illustrative purposes only, it is not intended to limit the scope of the present invention as claimed in claim.Therefore, It will be apparent that the present invention is not limited by disclosed example embodiment, it should annotation is for including retouching according to following State obtainable part and all of amendment.
With reference to the accompanying drawings the rotary vacuum pump using vacuum oil according to an exemplary embodiment of the present is carried out Explanation.
As shown in Figure 4, the rotary vacuum pump of vacuum oil used according to the invention includes: pump housing cylinder 1, its It is configured with 1 grade of (first) cylinder body " A " in monomeric form;Oilcan body 2, it is fixed to pump housing cylinder 1 Side;Intermediate plate 7, it is fixed to the side of interior 1 grade of (first) the cylinder body 1A of oilcan body 2;2 grades (the Two) cylinder body 8, it is fixed to the side of intermediate plate 7;Bonnet 9, its 2 grades of (second) cylinders of fixing covering The side of body 8;Protecgulum 5, it is fixed to the outside of pump housing cylinder 1;Oil pump case 14, it is fixed to protecgulum The side of 5;Oil seal lid 15, it is fixed to the side of oil pump case 14;Motor field frame 4, it is fixed To pump housing cylinder 1 simultaneously around and wrap up oil pump case 14 and oil seal lid 15;The first rotor 6, it passes Oil pump case 14, oil seal lid 15 and 1 grade of (first) cylinder body 1A also use oil pump case 14 at bearing It is rotatably supported under the auxiliary of 33;Motor 50, it is fixed at motor field frame 4 thus drives The first rotor 6;Second rotor 11, it is integrally formed with the first rotor 6 and can under the auxiliary of bearing 34 It is rotatably supported at intermediate plate 7 and extends towards 2 grades of (second) cylinder bodies 8;First blade 10, it leads to Cross the first rotor 6 in 1 grade of (first) cylinder body 1A to rotate and interior with 1 grade of (first) cylinder body 1A Wall is in close contact, and aspirates, compress and discharge gas;Suction port 35, its be arranged at pump housing cylinder 1 from And the gas aspirated from vacuum equipment is fed to 1 grade of (first) cylinder body 1A;Second blade 12, it leads to Cross the second rotor 11 rotate and be in close contact and aspirate with the inwall of 2 grades of (second) cylinder bodies 8, compress and Discharge the gas transmitted from 1 grade of (first) cylinder body 1A;Exhaust port 44, it is formed at oilcan body 2 Thus will be discharged to the outside from 2 grades of (second) cylinder body 8 expellant gas;1 grade of (first) cylinder cooling Water jacket 18, it is formed at 1 grade of (first) cylinder 1A;Intermediate plate cooling jacket 19, during it is formed at Between at plate 7;2 grades of (second) cylinder cooling jackets 20, it is formed at 2 grades of (second) cylinder bodies 8; Bonnet cooling jacket 12, it is formed at bonnet 9;And multiple cooling-water duct 23,24,25,26, 27 and 28, it is configured to guide cooling water and cycles through cooling jacket 18,19,20 and 21.Oilcan body 2 With pump housing cylinder 1 respectively include oil memory space 51 for making first and 2 grades of (second) cylinder 1A and 8, Intermediate plate 7 and bonnet 9 are immersed in vacuum oil 17 times.
As it is shown in figure 5, in cooling-water duct, 1 grade of (first) cylinder cooling water passage (going out) 23 With intermediate plate cooling-water duct (entering) 24,1 grade of (first) cylinder cooling jacket 18 is cooled down with intermediate plate Set 19 connection, and intermediate plate cooling jacket 19 and 2 grades of (second) cylinder block cooling waters overlap between 20 each Part is by 25 and 2 grades of (second) cylinder block cooling water passages (entering) 26 of intermediate plate cooling-water duct (going out) Connection.Additionally, each several part between 2 grades of (second) cylinder block cooling water sets 20 and bonnet cooling jacket 21 Connected with bonnet cooling-water duct (entering) 28 by 2 grades of (second) cylinder body passages (going out) 27.Bonnet Cooling jacket 21 is configured to the cooling water circulation coolant outlet port flange by being fixed to oilcan body 2 The coolant outlet port 29 of 30.If Fig. 5 is to shown in 9, the input of each cooling water and output channel shape Becoming at the two ends of each cooling jacket 18,19,20 and 21, cooling jacket 18,19,20 and 21 respectively has There are fan (hand fan) shape space, i.e. formation facing with each other on the passage of farthest cooling-water duct.
Additionally, the axle of motor 50 and the first rotor 6 are by by pump side shaft coupling 48 and motor side shaft coupling A pair shaft coupling 48 and 49 that device 49 is formed connects, and oil pump 13 is arranged in housing 14, and cooling The Initial Entry port of water is formed at 1 grade of (first) cylinder cooling jacket 18, and cools down the last of water Outlet port 29 is formed at the cooling jacket 21 of bonnet 9.As seen in figs. 6 and 8, it is provided with for by 1 The first row air valve 39 that the first exhaust passage 38 of level (first) cylinder 1A outwardly opens, and be used for The second row air valve 43 that the second exhaust passage 42 of 2 grades of (second) cylinders 8 is outwardly opened.1 grade (the One) residual gas after it is discharged by first row air valve 39 of cylinder 1A is by 2 in Fig. 8 Level (second) cylinder-suction port 41 is input to 2 grades of (second) cylinders from 1 grade of (first) cylinder 1A 8, and compressed by the rotation of the second rotor 11, and when second row air valve 43 is opened by contrary The second exhaust passage 42 of side and exhaust port are discharged to the outside.
If Fig. 6 is to shown in 9, produce the first and 2 of heat of high temperature around due to gas suction and compression Level (second) cylinder 1A and 8, the outside of intermediate plate 7 and bonnet 9 form oil memory space 51, and very Empty oil 17 is stored in oil memory space 51.It is provided with and contacts and from each with cooling jacket 18,19 and 20 Component 1A, 7 or 8 be projected into each cooling jacket one or more projecting ribs 31A, 32A and 32A, and oil circulation by projecting rib 31A, 32A and 32A, so the cold of vacuum oil 17 can be greatly promoted But.
Meanwhile, as shown in figs. 4 and 6, the opening 52 of 1 grade of (first) cylinder cooling jacket 18 is by cooling down Water cover 16 covers, and formation cooling water drainage goes out port 45 at cooling water cover 16.
Reference 47 expression is used for fixing vacuum-packed lip seal.
The present invention relates to solve in conventional pumps due to the most thermally-induced problem, more based on three-member type oil cooling structure Specifically making to provide stable pump environment, being wherein modified to by vacuum pump structure can each at pump module Form cooling jacket at compartment and circulate cool water through the structure of cooling jacket, so can be by will be at pump The heat produced at module directly cools down and prevents the temperature of pump module from raising, and oil can be further the most swollen Cooling down further at the contact surface of the vacuum oil of swollen structure, this contact surface connects with the cooling jacket of pump module Touch, and when the oil 17 transmitted by oil pump is input to pump module, pass the same of oil passage 31 and 32 at oil Time, oil can pass through cooling water cooling each in cooling jacket 18,19 and 20, and the oil of cooling is again Front pump module, thus the temperature being therefore prevented from pump module raises.
The present invention expects provides following operating effect, so industrial applicability is good.
The quantity of-each parts can reduce so that is configured to the pump housing and first (the leading) of two parts form in the past The form of cylinder configuration integrated pump cylinder, thus include material cost, processing cost, assembly cost and Maintenance cost can be greatly saved in interior manufacturing cost.The present invention be modified into be prevented from oil temperature raise thus Absorb first (leading) by forming cooling jacket at the outer wall of the 1 of pump housing cylinder grade of (first) cylinder The heat produced at cylinder, and directly pass through cooling jacket by cooling water circulation.
-the present invention is modified into such structure, and the cooling water of the cooling jacket wherein flowing through pump module can be by The oil temperature of pump is maintained at less than 60 DEG C, thus to solve the most thermally-induced problem due to pump.
-in the improvement pump of the present invention, such as each master of cylinder, rotor, blade, bearing, air bleeding valve etc. Want parts to operate under stable oil temperature environment, therefore improve due to thermal expansion, seal, friction etc. causes asks Topic, so vacuum and the exhaust velocity of pump can be improved, and because the ruggedness of each parts and oil-filled butylbenzene rubber The replacement cycle of glue, it is possible to save the cost that environmental pollution is relevant, when changing each parts with use detergent The cost relevant with the waste oil disposal meeting initial ring environment pollution produced when changing contaminated oil.
-in the improved structure of the present invention, by intermediate plate, the second (secondary) cylinder and bonnet Forming cooling jacket, cooling water can absorb the heat produced at each parts of pump module, to be therefore prevented from pump mould The temperature of block raises and is to cool down oil cooling at the oily contact surface of water contact.Specifically, follow at oil Ring by cooling water cooling, and can cool down oil input by oil while oily passage prominent in cooling jacket Thus to improve due to the overheated problem caused of oil in pump.
-oil temperature raises the highest, and the steam pressure increase of oil is the highest, it means that can not obtain wherein vacuum The vacuum of pump is less than the pressure of the steam pressure of oil.Given oil temperature raises the highest, and the vacuum of pump becomes therewith Ratio reduces the lowest problem, can prevent oil temperature liter under the auxiliary relative to the direct cooling means of pump module Height, thereby, it is ensured that stable oil temperature environment, so the necessary vacuum of pump can stably be obtained.
-as overheated in fruit oil, then there is chemical reaction.If by deep fat front pump module and be used for lubrication and Seal operation, then in the gap of each operation part that oil is input to each parts and possibility is hardening and may be coated in On each parts, stopping for this lubrication operation, and each modular unit can have the problem of blocking, this causes the prominent of pump So stop, but the present invention can provide stable oil temperature environment, thus to extend the service life of pump simultaneously at pump The cost of such as component costs, maintenance cost etc. is saved during maintenance.
Each example embodiment of the present invention having been described above so far, they are that those of ordinary skill in the art is real Execute known optimal mode during the present invention.Owing to the present invention can implement with the most several forms, without departing from this The spirit or essential attributes of invention, so, it should also be understood that examples detailed above is not by described above any Details limits, unless otherwise prescribed, but on the contrary, it should think that being incorporated in claims such as widely limits Spirit and scope of the invention within, therefore, fall into all changes within the requirement of claims and boundary Change and amendment, or so require and the equivalent of boundary, therefore will be by included by appended claims.
[reference]
1: pump housing cylinder
2: oilcan body
3: top cover
4: motor field frame
5: protecgulum
6: the first rotor
7: intermediate plate
8:2 level (second) cylinder
9: bonnet
10: the first blades
11: the second rotors
12: the second blades
13: oil pump
14: oil pump case
15: oil seal lid
16: cooling water cover
17: vacuum oil
18:1 level (first) cylinder cooling jacket
19: intermediate plate cooling jacket
20:2 level (second) cylinder cooling jacket
21: bonnet cooling jacket
22: cooling water inlet port
23:1 level (first) cylinder cooling jacket (going out)
24: intermediate plate cooling-water duct (enters)
25: intermediate plate cooling-water duct (goes out)
26. 2 grades of (second) cylinder cooling jackets (entering)
27:2 level (second) cylinder channel (going out)
28: bonnet cooling-water duct (enters)
29: coolant outlet port
30: coolant outlet port flange
31: oil passage
32: oil passage
31A: projecting rib
32A: projecting rib
33: bearing
34: bearing
35: suction ports
36: suction channel
37: oily anti-flow prevention valve
38: first exhaust passage
39: first row air valve
40: intermediate plate air intake passage
41:2 level (second) cylinder-suction port
42: second exhaust passage
43: second row air valve
44: exhaust port
45: cooling water drainage goes out port
46: cooling water drainage goes out passage
47: lip seal
48: pump side shaft coupling
49: motor side shaft coupling
50: motor
51: oil memory space
52: opening

Claims (6)

1. use a rotary vacuum pump for vacuum oil, including:
Pump housing cylinder, described pump housing cylinder is configured with 1 grade of (first) cylinder body of monomeric form;
Oilcan body, described oilcan body is fixed to the side of described pump housing cylinder;
Intermediate plate, described intermediate plate is the side of described 1 grade of (first) cylinder in being fixed to described oilcan body;
2 grades of (second) cylinders, described 2 grades of (second) cylinders are fixed to the side of described intermediate plate;
Fixing bonnet, described fixing bonnet covers the side of described 2 grades of (second) cylinders;
Protecgulum, described protecgulum is fixed to the outside of described pump housing cylinder;
Oil pump case, described oil pump case is fixed to the side of described protecgulum;
Oil seal lid, described oil seal lid is fixed to the side of described oil pump case;
Motor field frame, described motor field frame is fixed to described pump housing cylinder, simultaneously around and fenced described Oil pump case and described oil seal lid;
The first rotor, described the first rotor passes described oil pump case, described oil seal lid and described 1 Level (first) cylinder also uses described oil pump case to be mounted pivotably under the auxiliary of bearing;
Motor, described motor is fixed on described motor field frame (4) place thus drives described first Rotor;
Second rotor, described second rotor and described the first rotor are integrally formed and borrow at described intermediate plate Help bearing be mounted pivotably and extend towards described 2 grades of (second) cylinders;
First blade, described first blade is turned by the described the first rotor in described 1 grade of (first) cylinder Dynamic and with described 1 grade of (first) cylinder inwall is in close contact, and aspirates, compress and discharge gas;
Suction port, described suction port is arranged at described pump housing cylinder, thus for will be from described vacuum The gas of equipment suction is supplied to described 1 grade of (first) cylinder;
Second blade, described second blade by described second rotor rotate and with described 2 grades of (second) gas The described inwall of cylinder is in close contact, and aspirates, compresses and discharge from described 1 grade of (first) cylinder transmission Gas;
Discharge port, described discharge port is formed at described oilcan body, thus will be from described 2 grades ( Two) cylinder expellant gas is discharged to the outside;
1 grade of (first) cylinder cooling jacket, described 1 grade of (first) cylinder cooling jacket is formed at institute State at 1 grade of (first) cylinder;
Intermediate plate cooling jacket, described intermediate plate cooling jacket is formed at described intermediate plate;
2 grades of (second) cylinder cooling jackets, described 2 grades of (second) cylinder cooling jackets are formed at institute State at 2 grades of (second) cylinders;
Bonnet cooling jacket, described bonnet cooling jacket is formed at described bonnet;And
Multiple cooling-water ducts, the plurality of cooling-water duct is configured to guide described cooling water circulation pass through Each described cooling jacket;
Wherein said oilcan body and described pump housing cylinder respectively include oil memory space, for described first and 2 Level (second) cylinder, described intermediate plate and described bonnet are to be immersed under described vacuum oil.
2. pump as claimed in claim 1, it is characterised in that the axle of described motor and described the first rotor Use shaft coupling connects.
3. pump as claimed in claim 1, it is characterised in that oil pump is arranged on inside described oil pump case.
4. pump as claimed in claim 1, it is characterised in that cooling water inlet port is formed at described 1 At level (first) cylinder cooling jacket, and coolant outlet port is formed at described bonnet.
5. pump as claimed in claim 1, it is characterised in that also include:
First row air valve, described first row air valve is configured to described the of described 1 grade of (first) cylinder One exhaust passage is to outside opening;And second row air valve, described second row air valve is configured to described 2 grades (the second) the described second exhaust passage of cylinder is to outside opening.
6. the pump as according to any one of claim 1 to 5, it is characterised in that at least one projecting rib from Any one in described 1 grade of (first) cylinder, described intermediate plate and described 2 grades of (second) cylinders is along every The direction of individual cooling jacket highlights, and is provided with the oil circulation oily passage by each described projecting rib.
CN201510324129.2A 2014-09-05 2015-06-12 Oily rotary vacuum pump Active CN106194736B (en)

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KR10-2014-119010 2014-09-05
KR1020140119010A KR101593928B1 (en) 2014-09-05 2014-09-05 Oil rotary vacuum pupm

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CN106194736B CN106194736B (en) 2018-09-25

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GB2603897B (en) * 2021-02-12 2023-08-16 Edwards Ltd Vacuum pump exhaust system
CN114909290B (en) * 2022-04-18 2023-09-08 金华市威科工贸有限公司 Vacuum pump with adjustable oil inlet quantity

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GB747874A (en) * 1954-01-27 1956-04-18 Thomas Winter Nichols Improvements in rotary compressors, pumps and the like
US4283167A (en) * 1979-04-26 1981-08-11 Varian Associates, Inc. Cooling structure for an oil sealed rotary vacuum pump
DE3335188A1 (en) * 1983-09-28 1985-04-04 Dr. Ing. K. Busch GmbH, 7867 Maulburg Sliding-vane rotary vacuum pump
JPH07324693A (en) * 1994-05-30 1995-12-12 Ulvac Japan Ltd Cooling device for oil rotary vacuum pump
CN2837559Y (en) * 2005-06-10 2006-11-15 朱永清 Single-stage rotary vane type vacuum pump
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CN106194736B (en) 2018-09-25
KR101593928B1 (en) 2016-02-15

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