CN106191759A - Reduce the vacuum glow glow discharge nitriding technique of industrial robot precision gear deformation - Google Patents
Reduce the vacuum glow glow discharge nitriding technique of industrial robot precision gear deformation Download PDFInfo
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- CN106191759A CN106191759A CN201610711840.8A CN201610711840A CN106191759A CN 106191759 A CN106191759 A CN 106191759A CN 201610711840 A CN201610711840 A CN 201610711840A CN 106191759 A CN106191759 A CN 106191759A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/18—Hardening; Quenching with or without subsequent tempering
- C21D1/25—Hardening, combined with annealing between 300 degrees Celsius and 600 degrees Celsius, i.e. heat refining ("Vergüten")
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Abstract
The invention discloses a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear, belong to technical field of heat treatment.The step of the present invention is: 1) prepared by part: carry out quenched to gear part blank, makes hardness reach 31～32.5HRC；2) front cleaning: gear part is carried out；3) parts fixation: use frock clamping to become gear assemblies gear part；4) shove charge: above-mentioned gear assemblies is arranged on cathode disc in the circular of closing equably, and covers bonnet；5) nitriding: use ladder-elevating temperature heat preserving mode that gear part is warmed up to nitriding temperature, and control at 3.5～4 hours from the time of room temperature to nitriding temperature；6) furnace cooling: the blow-on when in-furnace temperature is less than or equal to 95 DEG C.The present invention effectively reduces the deformation after precision gear nitriding heat treatment, and meets this gear heat treatment technology requirement, and one time heat treatment qualification rate reaches 100%.
Description
Technical field
The present invention relates to a kind of nitridation process, reduce the deformation of industrial robot precision gear more particularly, it relates to a kind of
Vacuum glow glow discharge nitriding technique.
Background technology
Fig. 1 and Fig. 2 is a kind of gear part schematic diagram being applied in industrial robot waist decelerator, industrial robot
Waist decelerator is to connect pedestal and the part of health, has been mainly rotary motion effect.This gear part 1 is industrial robot
Vitals in waist decelerator, working condition is complicated, it is desirable to has excellent wearability, higher anti-contact fatigue and resists
Fatigue property.For this gear part 1, current common process is to use gas nitriding to process, and uses common process to deposit
Form of gear tooth deformation is big after treatment, infiltration layer is uneven, process the defects such as time length, yield rate only about 45% after heat treatment.
Glow ion nitriding technique has that nitriding speed is fast, it is easy to control to organize, deform the advantages such as little, has the most obtained rapidly
Development, has also been used to the Nitrizing Treatment of the parts such as gear.But, due to the heat treatment technics requirement of said gear part 1
Higher, existing glow discharge nitriding technique is difficult to meet the Nitrizing Treatment requirement of this type of part.Therefore, research and development one can effectively reduce
Industrial robot precision gear deforms, meets the nitridation process that its heat treatment technics requires simultaneously, becomes those skilled in the art
Technical barrier urgently to be resolved hurrily.
Summary of the invention
1. invention to solve the technical problem that
It is an object of the invention to overcome deficiencies of the prior art, it is provided that a kind of reduction industrial robot is accurate
The vacuum glow glow discharge nitriding technique of gear shifting quadrant texturing, uses technical scheme, effectively reduces precision gear nitriding heat
Deformation after process, and meet this precision gear heat treatment technics requirement, one time heat treatment qualification rate reaches 100%.
2. technical scheme
For reaching above-mentioned purpose, the technical scheme that the present invention provides is:
A kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, including following
Step:
(1) prepared by part: carry out quenched to 42CrMoH or 35CrMo blank, makes blank hardness reach 31～32.5HRC,
Then blank machine is processed as gear part；
(2) front cleaning: be carried out the gear part loaded in charging basket, removes the dirt of gear part remained on surface；
(3) parts fixation: use frock clamping to become gear assemblies the gear part of more than, make frock clamp
Two transverse planes of gear part；
(4) shove charge: the gear assemblies in step (3) is arranged on cathode disc in the circular of closing equably, and
Cover bonnet；
(5) vacuum glow glow discharge nitriding: use ladder-elevating temperature heat preserving mode gradually gear part to be warmed up to nitridation process
Temperature, and control at 3.5～4 hours to the time of nitridation process temperature from room temperature；
(6) furnace cooling: after nitriding terminates, gear part furnace cooling under vacuum conditions, and be less than at in-furnace temperature
Blow-on during equal to 95 DEG C.
Further, the chemical composition of the 42CrMoH blank described in step (1) is: C:0.38～0.45%；Mn:
0.50～0.80%；Si:0.17～0.37%；S :≤0.030%；P :≤0.030%；Cr:0.9～1.2%；Mo:0.15～
0.25%；Ni :≤0.03%；The chemical composition of described 35CrMo blank is: C:0.32～0.40%；Mn:0.40～
0.70%；Si:0.17～0.37%；S :≤0.035%；P :≤0.035%；Cr:0.80～1.10%；Mo:0.15～
0.25%；Ni :≤0.03%；Cu :≤0.30%.
Further, the charging basket described in step (2) is latticed charging basket, and gear part lies in charging basket one by one
In mesh sheet, the gap between part and part is 10～15mm, and many group charging baskets are stacked together, and upper strata charging basket and lower floor's charging basket
Between layer away from for 30～50mm；Cleaning described in step (2) is to use vacuum hydrocarbon solvent to be carried out gear part.
Further, the frock described in step (3) includes clamping plate and bolt, is used by the two of gear part transverse planes
Clamping plate clamp, and are clamped by bolt.
Further, 4 gear parts are clamped with clamping plate by step (3) successively, and is clamped by bolt into gear train
Component.
Further, in step (4), cathode disc is disposed with the above gear of two circles zero in the circular of closing
It is spaced apart 35～40mm between part, and gear part.
Further, the vacuum glow glow discharge nitriding technological parameter in step (5) is:
(5-1) 180 ± 15 DEG C of samming 20 ± 1min, electric current 10～15A, voltage 600～650V, furnace pressure 120Pa, ammonia flow
Amount 250～300ml/min, dutycycle 45%；
(5-2) 280 ± 15 DEG C of samming 20 ± 1min, electric current 11～14A, voltage 620～660V, furnace pressure 240Pa, ammonia flow
Amount 550～600ml/min, dutycycle 81%；
(5-3) 380 ± 15 DEG C of samming 20 ± 1min, electric current 18～23A, voltage 650～680V, furnace pressure 280Pa, ammonia flow
Amount 680～720ml/min, dutycycle 76%；
(5-4) 460 ± 15 DEG C of samming 20 ± 1min, electric current 19～25A, voltage 670～690V, furnace pressure 300Pa, ammonia flow
Amount 800～850ml/min, dutycycle 58%；
(5-5) 515 ± 5 DEG C of nitriding 480 ± 1min, electric current 13～16A, voltage 680～700V, furnace pressure 300Pa, ammonia flow
Amount 850～900ml/min, dutycycle 55%.
Further, after step (6) furnace cooling terminates, also include successively gear part being tested, casing
Step.
3. beneficial effect
Use the technical scheme that the present invention provides, compared with existing known technology, there is following remarkable result:
(1) a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, it is right
Gear part blank carries out quenched, makes blank hardness reach 31～32.5HRC, can effectively shorten follow-up nitriding time, improves
Heat treatment efficiency, it is thus achieved that good comprehensive mechanical performance；
(2) a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, is oozing
Before nitrogen processes, use frock clamping to become gear assemblies the gear part of more than, make frock clamp gear part
Two transverse planes, it is ensured that the parallelism tolerance requirement of gear part transverse plane, reduce Nitrizing Treatment deformation；
(3) a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, by tooth
Wheel molectron is arranged on cathode disc in the circular of closing equably, makes gear part homogeneous heating, prevents because of inequality of being heated
And cause part deformation；
(4) a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, it is adopted
Gradually gear part is warmed up to ladder-elevating temperature heat preserving mode nitridation process temperature, can not only ensure that gear part has excellent
Good wearability, higher anti-contact fatigue and flexural fatigue resistance energy, and be conducive to reducing the temperature at each position of gear part
Difference, eliminates the generation of machining stress, reduces the gear part deformation caused because heating is too fast；
(5) a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, it is certainly
Room temperature controls at 3.5～4 hours to the time of nitridation process temperature, in the situation ensureing effective nitrogen-hardening layer depth
Under, reduce arcing time, thus ensure that the surface roughness of the gear part flank of tooth, one time heat treatment i.e. can reach gear essence
Degree requirement；
(6) a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, it oozes
After nitrogen terminates, gear part furnace cooling under vacuum conditions, and the blow-on when in-furnace temperature is less than or equal to 95 DEG C, prevent gear
Part high-temperature oxydation；
(7) a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, it is adopted
With vacuum hydrocarbon solvent, gear part carried out front cleaning, remove surface of the work and tiny endoporus residual machining cutting oil and
Trickle iron filings, it is to avoid follow-up during vacuum glow glow discharge nitriding part beat arc and injuring part surface, make piece surface
Reaching certain cleanliness factor, after reaching nitriding, piece surface hardness is uniformly without the effect of soft spots.
Accompanying drawing explanation
Fig. 1 is a kind of gear part schematic diagram being applied in industrial robot waist decelerator in the present invention；
Fig. 2 is A-A direction sectional structure schematic diagram in Fig. 1；
Fig. 3 is the parts fixation structural representation in the present invention；
Fig. 4 is the shove charge schematic diagram in the present invention；
Fig. 5 is the stream of a kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention
Cheng Tu；
Fig. 6 is the nitridation process curve chart in the present invention.
Label declaration in schematic diagram:
1, gear part；2, clamping plate；3, bolt；4, gear assemblies；5, cathode disc.
Detailed description of the invention
For further appreciating that present disclosure, the present invention is described in detail in conjunction with the accompanying drawings and embodiments.
Embodiment
By certain modulus be 0.5, the number of teeth be 97 the Nitrizing Treatment technical process of industrial robot precision gear as a example by, heat at
Reason technology requires: case hardness >=700HV, effective case depth is 0.15～0.26mm (boundary value 400HV, PCD
(pitch circle diameter) position), accuracy of gear JIS1～3 grades (accuracy of gear before heat treatment is 1～1.5 grade),
Plane parallelism tolerance is ± 0.012mm (the plane parallelism tolerance before heat treatment is ± 0.007mm).For reaching at above-mentioned heat
Reason requirement, as it is shown in figure 5, a kind of vacuum glow glow discharge nitriding work reducing the deformation of industrial robot precision gear of the present embodiment
Skill, comprises the following steps:
(1) prepared by part: carry out quenched to gear blank, makes blank hardness reach 31～32.5HRC, through modifier treatment
After, it is possible to obtain good comprehensive mechanical performance, can effectively shorten follow-up nitriding time, improve heat treatment efficiency；Then will
Blank machine after quenched is processed as gear part；In the present embodiment, blank can be 42CrMoH or 35CrMo, 42CrMoH base
The chemical composition of material is: C:0.38～0.45%；Mn:0.50～0.80%；Si:0.17～0.37%；S :≤0.030%；P:
≤ 0.030%；Cr:0.9～1.2%；Mo:0.15～0.25%；Ni :≤0.03%；The chemical composition of 35CrMo blank is: C:
0.32～0.40%；Mn:0.40～0.70%；Si:0.17～0.37%；S :≤0.035%；P :≤0.035%；Cr:0.80
～1.10%；Mo:0.15～0.25%；Ni :≤0.03%；Cu :≤0.30%.
(2) front cleaning: be carried out the gear part loaded in charging basket, removes the dirt of gear part remained on surface；
Specifically, charging basket uses latticed charging basket, is lain in by gear part in 15 × 15mm mesh sheet of charging basket one by one, part and part
Between gap be 10～15mm, place 50 gear parts in each charging basket, many group charging baskets are stacked together, and upper strata charging basket
And the layer between lower floor's charging basket is away from for 30～50mm, fills 5 layers altogether；Above-mentioned cleaning is to use vacuum hydrocarbon solvent to gear part
It is carried out, the Sino-Japan vacuum hydrocarbon solvent cleaning machine produced jointly specifically can be used to carry out front cleaning, mainly remove workpiece
Oily and trickle iron filings are cut in the machining of surface and tiny endoporus residual, it is simple to follow-up during vacuum glow glow discharge nitriding
Avoiding part to beat arc, injuring part surface, make piece surface reach certain cleanliness factor, after reaching nitriding, piece surface hardness is equal
The even effect without soft spots, clear appearance after laundering is brilliant white, and, use vacuum hydrocarbon solvent to clean, cleanliness without any pollution.
(3) parts fixation: use frock clamping to become gear assemblies the gear part of more than, make frock clamp
Two transverse planes of gear part, in this manner it is ensured that the parallelism tolerance requirement of gear part transverse plane, reduce Nitrizing Treatment
Deformation；The most in the present embodiment, as it is shown on figure 3, frock includes clamping plate 2 and bolt 3, by two transverse planes of gear part 1
Clamp with clamping plate 2, and clamp with bolt 3, simple in construction, convenient mounting and clamping；4 gear parts 1 are used clamping plate 2 by the present embodiment successively
Clamping, and it is clamped by bolt into gear assemblies 4, single treatment amount is many.
(4) shove charge: as shown in Figure 4, is arranged in the circular of closing equably by the gear assemblies 4 in step (3)
On cathode disc 5, and cover bonnet；Specifically, cathode disc 5 is disposed with, in the circular of closing, the gear part that two circles are above,
And it is spaced apart 35～40mm between gear part, must replace by like parts if any vacant locations, as such, it is possible to make gear
Part 1 homogeneous heating, prevents from causing part deformation because being heated inequality.
(5) vacuum glow glow discharge nitriding: owing to part is in heating process, not only thermal stress can produce distortion, releases simultaneously
Put internal stress and also can produce distortion, and firing rate is to affect the key factor that gear part stress produces, each portion of gear
The biggest then stress of the temperature difference of position is the biggest, therefore uses ladder-elevating temperature heat preserving mode that gear part is gradually warmed up to nitriding work
Skill temperature, and control at 3.5～4 hours to the time of nitridation process temperature from room temperature, the time of will heat up control 3.5～
4 hours, in the case of ensureing effective nitrogen-hardening layer depth, reduce arcing time, thus ensure that the gear part flank of tooth
Surface roughness, one time heat treatment i.e. can reach accuracy of gear requirement；In the present embodiment use LDMC-75FS vacuum glow from
Sub-nitriding furnace, as shown in Figure 6, vacuum glow glow discharge nitriding technological parameter is:
(5-1) 180 ± 15 DEG C of samming 20 ± 1min, electric current 10～15A, voltage 600～650V, furnace pressure 120Pa, ammonia flow
Amount 250～300ml/min, dutycycle 45%；
(5-2) 280 ± 15 DEG C of samming 20 ± 1min, electric current 11～14A, voltage 620～660V, furnace pressure 240Pa, ammonia flow
Amount 550～600ml/min, dutycycle 81%；
(5-3) 380 ± 15 DEG C of samming 20 ± 1min, electric current 18～23A, voltage 650～680V, furnace pressure 280Pa, ammonia flow
Amount 680～720ml/min, dutycycle 76%；
(5-4) 460 ± 15 DEG C of samming 20 ± 1min, electric current 19～25A, voltage 670～690V, furnace pressure 300Pa, ammonia flow
Amount 800～850ml/min, dutycycle 58%；
(5-5) 515 ± 5 DEG C of nitriding 480 ± 1min, electric current 13～16A, voltage 680～700V, furnace pressure 300Pa, ammonia flow
Amount 850～900ml/min, dutycycle 55%.
Specific operation process is as follows:
One, install part, put into test block, bonnet on cover, connect cooling water pipe and liquefied ammonia trachea；
Two, start power supply, click on and log in, input password " XXXXXX ", subsequently into key frame, then enter back into switching value
Control；
Three, be passed through cooling water, start vacuum pump 1 and vacuum pump 2, and slowly open vacuum butterfly valve (should before starting vacuum pump
First check whether place enters closed mode to butterfly valve) start evacuation in stove；
Four, force value is set to 20Pa；
Five, when force value is shown as about 60Pa, start high pressure, restart resistance 1 and (should examine before starting high pressure, resistance 1
Look into voltage, whether dutycycle setting knob is in zero-bit)；
Six, adjust " voltage gives " and voltage is adjusted to about 650V；
Seven, " dutycycle gives " is adjusted, until starting in stove to beat arc；
Eight, after build-up of luminance in stove, shut the butterfly valve of vacuum pump 2, stop vacuum pump 2；
Nine, big space rate is slowly added after arc weakens when beating in stove, until about 70%；
Ten, when beating arc in stove and again weakening, dutycycle is adjusted to 20%, opens ammonia total valve, ammonia is set to
200, pressure is set to 30, proceeds by aerating and beats arc；
11, along with beating again weakening of arc, slowly intensified pressure, ammonia amount, dutycycle, reach required the wanting that heat up
Ask；
12, terminate when beating arc in stove, after aura is stable, dutycycle is set to zero, stop resistance 1, start resistance 2, so
After the most slowly add big space rate, continue to heat up；When workpiece to 180 ± 15 DEG C, according to the form below execution concrete technology:
13, automatic blowing out, part furnace cooling under vacuum conditions after technique is finished.
(6) furnace cooling: after nitriding terminates, gear part furnace cooling under vacuum conditions, and be less than at in-furnace temperature
Blow-on during equal to 95 DEG C, prevents gear part high-temperature oxydation.
(7) inspection: randomly select one group of gear assemblies after above-mentioned Nitrizing Treatment PROCESS FOR TREATMENT and test, inspection
Test result such as following table:
(8) vanning: be disassembled into single-piece by examining qualified gear assemblies electric tool, case after leaching antirust oil.
A kind of vacuum glow glow discharge nitriding technique reducing the deformation of industrial robot precision gear of the present invention, by using
Before vacuum hydrocarbon solvent clean, frock reasonable in design and charging mode, nitriding heating ladder-elevating temperature, control from room temperature to
The time of nitridation process temperature, gear heat treatment distortion has obtained effective control, and gear part uses the nitridation process heat optimized
After process, first-time qualification rate is 100%.
Below being schematically described the present invention and embodiment thereof, this description does not has restricted, institute in accompanying drawing
Show is also one of embodiments of the present invention, and actual structure is not limited thereto.So, if the common skill of this area
Art personnel enlightened by it, in the case of without departing from the invention objective, without creatively designing and this technical scheme
Similar frame mode and embodiment, all should belong to protection scope of the present invention.
Claims (8)
1. one kind reduce industrial robot precision gear deformation vacuum glow glow discharge nitriding technique, it is characterised in that include with
Lower step:
(1) prepared by part: carry out quenched to 42CrMoH or 35CrMo blank, makes blank hardness reach 31～32.5HRC, then
Blank machine is processed as gear part；
(2) front cleaning: be carried out the gear part loaded in charging basket, removes the dirt of gear part remained on surface；
(3) parts fixation: use frock clamping to become gear assemblies the gear part of more than, make frock clamp gear
Two transverse planes of part；
(4) shove charge: the gear assemblies in step (3) is arranged on cathode disc in the circular of closing equably, and covers
Bonnet；
(5) vacuum glow glow discharge nitriding: use ladder-elevating temperature heat preserving mode that gear part is gradually warmed up to nitridation process temperature,
And control at 3.5～4 hours to the time of nitridation process temperature from room temperature；
(6) furnace cooling: after nitriding terminates, gear part furnace cooling under vacuum conditions, and be less than or equal at in-furnace temperature
Blow-on when 95 DEG C.
The vacuum glow glow discharge nitriding technique of reduction industrial robot precision gear the most according to claim 1 deformation, its
It is characterised by: the chemical composition of the 42CrMoH blank described in step (1) is: C:0.38～0.45%；Mn:0.50～
0.80%；Si:0.17～0.37%；S :≤0.030%；P :≤0.030%；Cr:0.9～1.2%；Mo:0.15～0.25%；
Ni :≤0.03%；The chemical composition of described 35CrMo blank is: C:0.32～0.40%；Mn:0.40～0.70%；Si:
0.17～0.37%；S :≤0.035%；P :≤0.035%；Cr:0.80～1.10%；Mo:0.15～0.25%；Ni :≤
0.03%；Cu :≤0.30%.
The vacuum glow glow discharge nitriding technique of reduction industrial robot precision gear the most according to claim 1 deformation, its
It is characterised by: the charging basket described in step (2) is latticed charging basket, gear part is lain in one by one in the mesh sheet of charging basket, zero
Gap between part and part is 10～15mm, and many group charging baskets are stacked together, and the layer between upper strata charging basket and lower floor's charging basket
Away from for 30～50mm；Cleaning described in step (2) is to use vacuum hydrocarbon solvent to be carried out gear part.
The vacuum glow glow discharge nitriding technique of reduction industrial robot precision gear the most according to claim 1 deformation, its
It is characterised by: the frock described in step (3) includes clamping plate and bolt, the two of gear part transverse planes clamping plate is clamped,
And be clamped by bolt.
The vacuum glow glow discharge nitriding technique of reduction industrial robot precision gear the most according to claim 4 deformation, its
It is characterised by: 4 gear parts are clamped with clamping plate by step (3) successively, and is clamped by bolt into gear assemblies.
The vacuum glow glow discharge nitriding technique of reduction industrial robot precision gear the most according to claim 1 deformation, its
It is characterised by: in step (4), cathode disc is disposed with the gear part that two circles are above, and gear zero in the circular of closing
It is spaced apart 35～40mm between part.
The vacuum glow glow discharge nitriding technique of reduction industrial robot precision gear the most according to claim 1 deformation, its
It is characterised by: the vacuum glow glow discharge nitriding technological parameter in step (5) is:
(5-1) 180 ± 15 DEG C of samming 20 ± 1min, electric current 10～15A, voltage 600～650V, furnace pressure 120Pa, ammonia flow
250～300ml/min, dutycycle 45%；
(5-2) 280 ± 15 DEG C of samming 20 ± 1min, electric current 11～14A, voltage 620～660V, furnace pressure 240Pa, ammonia flow
550～600ml/min, dutycycle 81%；
(5-3) 380 ± 15 DEG C of samming 20 ± 1min, electric current 18～23A, voltage 650～680V, furnace pressure 280Pa, ammonia flow
680～720ml/min, dutycycle 76%；
(5-4) 460 ± 15 DEG C of samming 20 ± 1min, electric current 19～25A, voltage 670～690V, furnace pressure 300Pa, ammonia flow
800～850ml/min, dutycycle 58%；
(5-5) 515 ± 5 DEG C of nitriding 480 ± 1min, electric current 13～16A, voltage 680～700V, furnace pressure 300Pa, ammonia flow
850～900ml/min, dutycycle 55%.
The vacuum glow glow discharge nitriding technique of reduction industrial robot precision gear the most according to claim 1 deformation, its
It is characterised by: after step (6) furnace cooling terminates, also includes the step successively gear part tested, case.
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| CN106514165A (en) * | 2016-12-15 | 2017-03-22 | 贵州群建精密机械有限公司 | Glow-ion nitriding treatment method for gear made of 05Cr17Ni4Cu4Nb material |
| CN106756769A (en) * | 2016-12-09 | 2017-05-31 | 贵州群建精密机械有限公司 | A kind of antifatigue nitriding method of engine of heavy-duty car timing gears |
| CN111636046A (en) * | 2020-05-09 | 2020-09-08 | 北京卫星制造厂有限公司 | Local ion nitriding method for deep cavity threads of titanium alloy part |
| CN113930716A (en) * | 2021-08-31 | 2022-01-14 | 北京卫星制造厂有限公司 | Ion nitriding method for ultrahigh-strength stainless steel gear |
| CN113930715A (en) * | 2021-08-31 | 2022-01-14 | 北京卫星制造厂有限公司 | Ion nitriding method for small-module gear |
| CN115323309A (en) * | 2022-06-27 | 2022-11-11 | 西安泵阀总厂有限公司 | Surface hardening treatment method for zirconium and zirconium alloy pump orifice ring parts |
| CN117488046A (en) * | 2023-10-26 | 2024-02-02 | 烟台大学 | Heat treatment device and method for realizing high-hardness wear-resistant 60NiTi alloy |
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| CN106756769A (en) * | 2016-12-09 | 2017-05-31 | 贵州群建精密机械有限公司 | A kind of antifatigue nitriding method of engine of heavy-duty car timing gears |
| CN106514165A (en) * | 2016-12-15 | 2017-03-22 | 贵州群建精密机械有限公司 | Glow-ion nitriding treatment method for gear made of 05Cr17Ni4Cu4Nb material |
| CN111636046A (en) * | 2020-05-09 | 2020-09-08 | 北京卫星制造厂有限公司 | Local ion nitriding method for deep cavity threads of titanium alloy part |
| CN111636046B (en) * | 2020-05-09 | 2023-03-31 | 北京卫星制造厂有限公司 | Local ion nitriding method for deep cavity threads of titanium alloy part |
| CN113930716A (en) * | 2021-08-31 | 2022-01-14 | 北京卫星制造厂有限公司 | Ion nitriding method for ultrahigh-strength stainless steel gear |
| CN113930715A (en) * | 2021-08-31 | 2022-01-14 | 北京卫星制造厂有限公司 | Ion nitriding method for small-module gear |
| CN115323309A (en) * | 2022-06-27 | 2022-11-11 | 西安泵阀总厂有限公司 | Surface hardening treatment method for zirconium and zirconium alloy pump orifice ring parts |
| CN117488046A (en) * | 2023-10-26 | 2024-02-02 | 烟台大学 | Heat treatment device and method for realizing high-hardness wear-resistant 60NiTi alloy |
| CN117488046B (en) * | 2023-10-26 | 2024-05-14 | 烟台大学 | Heat treatment device and method for realizing high-hardness wear-resistant 60NiTi alloy |
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