CN106180079A - 一种三氟化氮等离子清洗装置 - Google Patents
一种三氟化氮等离子清洗装置 Download PDFInfo
- Publication number
- CN106180079A CN106180079A CN201610529020.7A CN201610529020A CN106180079A CN 106180079 A CN106180079 A CN 106180079A CN 201610529020 A CN201610529020 A CN 201610529020A CN 106180079 A CN106180079 A CN 106180079A
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- CN
- China
- Prior art keywords
- storehouse
- power supply
- cleaning storehouse
- nitrogen trifluoride
- cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- Plasma Technology (AREA)
- Cleaning In General (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610529020.7A CN106180079B (zh) | 2016-07-07 | 2016-07-07 | 一种三氟化氮等离子清洗装置 |
Applications Claiming Priority (1)
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CN201610529020.7A CN106180079B (zh) | 2016-07-07 | 2016-07-07 | 一种三氟化氮等离子清洗装置 |
Publications (2)
Publication Number | Publication Date |
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CN106180079A true CN106180079A (zh) | 2016-12-07 |
CN106180079B CN106180079B (zh) | 2018-08-28 |
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CN201610529020.7A Active CN106180079B (zh) | 2016-07-07 | 2016-07-07 | 一种三氟化氮等离子清洗装置 |
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CN (1) | CN106180079B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106944419A (zh) * | 2017-05-12 | 2017-07-14 | 中国工程物理研究院核物理与化学研究所 | 一种去除表面氚污染的等离子体去污系统 |
CN107999469A (zh) * | 2017-11-20 | 2018-05-08 | 安徽晓星能源科技有限公司 | 一种中频交流辉光清洗电源 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1644251A (zh) * | 2004-01-20 | 2005-07-27 | 台湾积体电路制造股份有限公司 | 清洁反应室的方法 |
CN2889296Y (zh) * | 2006-04-12 | 2007-04-18 | 山东新华医疗器械股份有限公司 | 圆筒形低真空射频等离子体灭菌装置 |
CN201020055Y (zh) * | 2007-04-05 | 2008-02-13 | 北京白象新技术有限公司 | 并联式低温等离子体灭菌装置 |
US20080193330A1 (en) * | 2007-02-09 | 2008-08-14 | Tokyo Institute Of Technology | surface treatment apparatus |
CN102560439A (zh) * | 2012-03-29 | 2012-07-11 | 雅视光学有限公司 | 等离子体表面处理方法及装置 |
CN105088164A (zh) * | 2015-08-13 | 2015-11-25 | 黄山迈瑞机械设备科技有限公司 | 一种轴承外圈滚道强化处理装置及处理方法 |
-
2016
- 2016-07-07 CN CN201610529020.7A patent/CN106180079B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1644251A (zh) * | 2004-01-20 | 2005-07-27 | 台湾积体电路制造股份有限公司 | 清洁反应室的方法 |
CN2889296Y (zh) * | 2006-04-12 | 2007-04-18 | 山东新华医疗器械股份有限公司 | 圆筒形低真空射频等离子体灭菌装置 |
US20080193330A1 (en) * | 2007-02-09 | 2008-08-14 | Tokyo Institute Of Technology | surface treatment apparatus |
CN201020055Y (zh) * | 2007-04-05 | 2008-02-13 | 北京白象新技术有限公司 | 并联式低温等离子体灭菌装置 |
CN102560439A (zh) * | 2012-03-29 | 2012-07-11 | 雅视光学有限公司 | 等离子体表面处理方法及装置 |
CN105088164A (zh) * | 2015-08-13 | 2015-11-25 | 黄山迈瑞机械设备科技有限公司 | 一种轴承外圈滚道强化处理装置及处理方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106944419A (zh) * | 2017-05-12 | 2017-07-14 | 中国工程物理研究院核物理与化学研究所 | 一种去除表面氚污染的等离子体去污系统 |
CN107999469A (zh) * | 2017-11-20 | 2018-05-08 | 安徽晓星能源科技有限公司 | 一种中频交流辉光清洗电源 |
CN107999469B (zh) * | 2017-11-20 | 2021-04-27 | 安徽晓星能源科技有限公司 | 一种中频交流辉光清洗电源 |
Also Published As
Publication number | Publication date |
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CN106180079B (zh) | 2018-08-28 |
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Effective date of registration: 20180713 Address after: 210000 2, B unit 300, Zhihui Road, Kirin science and Technology Innovation Park, Jiangning District, Nanjing, Jiangsu. Applicant after: NANJING CHUQING ELECTRONIC TECHNOLOGY Co.,Ltd. Address before: 471000 5, 407, Yin Kun science and Technology Park, 6 Fenghua Road, hi tech Development Zone, Luoyang, Henan. Applicant before: LUOYANG GAOCHANG ELECTRICAL AND MECHANICAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20230720 Address after: Tuqiao Industrial Cluster, Chunhua Street, Jiangning District, Nanjing, Jiangsu Province, 210000 Patentee after: Jiangsu Yongcheng Micro Nano New Materials Co.,Ltd. Address before: 210000 2, B unit 300, Zhihui Road, Kirin science and Technology Innovation Park, Jiangning District, Nanjing, Jiangsu. Patentee before: NANJING CHUQING ELECTRONIC TECHNOLOGY Co.,Ltd. |
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