CN106175691B - Flexible substrate MEMS device curved surface array photoacoustic imaging system - Google Patents
Flexible substrate MEMS device curved surface array photoacoustic imaging system Download PDFInfo
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Abstract
The invention discloses a curved surface array photoacoustic imaging system of a flexible substrate MEMS device, which is characterized in that a photoacoustic module arranged in the system is sequentially overlapped into an MEMS micro-mirror array, an optical fiber channel layer, a flexible printed circuit board interconnection layer, an MEMS acoustic transducer array layer and an acoustic impedance matching layer from bottom to top to form a flexible photoacoustic module which is flexible in main body and can be pasted on a curved surface; the photoacoustic module is composed of imaging unit arrays, each imaging unit constructs an independent small-area photoacoustic imaging system, two-dimensional scanning of laser in a small area corresponding to the imaging unit is realized, and three-dimensional imaging in the small area is completed; and obtaining a complete full-area image through image splicing. The invention is suitable for the rapid large-area high-performance imaging of the inner surface of the natural cavity of the human body and the surface of the external body of the human body.
Description
Technical Field
The invention relates to a photoacoustic imaging system, in particular to a curved array photoacoustic imaging system of a flexible substrate MEMS (micro-electromechanical system) device.
Background
In photoacoustic imaging technology for disease diagnosis, imaging coverage area, imaging speed, and spatial resolution are all very important. The large imaging coverage area is helpful for observing the whole imaging tissue, and the high spatial resolution can distinguish more detailed biological tissue and function change, thereby realizing early diagnosis of diseases. The high imaging speed allows photoacoustic imaging to reduce artifacts due to body motion, such as breathing, pulsation, and organ peristalsis, etc., reduce costs and duration of discomfort for the patient, enable pre-procedural high-throughput imaging, and also reduce the risks associated with invasive therapies, such as endoscopy. Currently, photoacoustic imaging systems are usually composed of a single light source or a single acoustic transducer or a simple array assembled by discrete devices, and such systems usually require a complex mechanical motion device to assist the scanning of the imaging probe, so as to realize large-area imaging. The photoacoustic imaging device is large and complex in structure, long in time consumption in the process of realizing large-area imaging, and not suitable for curved surface imaging.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a curved surface array photoacoustic imaging system of a flexible substrate MEMS device, which realizes large-area, high-resolution, high-contrast and quick imaging, avoids a complicated mechanical motion device in the traditional photoacoustic imaging, reduces the volume of a photoacoustic imaging head, is suitable for arranging a photoacoustic imaging array on a cylindrical surface, a spherical surface or a complicated curved surface and is suitable for quick large-area and high-performance imaging of the inner surface of a natural cavity of a human body and the outer surface of the human body.
The invention adopts the following technical scheme for solving the technical problems:
the structure of the curved surface array photoacoustic imaging system of the flexible substrate MEMS device is characterized in that: the system comprises a light source module, a photoacoustic module, a signal acquisition module, an image module and a control module;
the photoacoustic module is of a layer structure, and the layer structure is sequentially stacked from bottom to top into an MEMS micro-mirror array, an optical fiber channel layer, a flexible printed circuit board interconnection layer, an MEMS acoustic transducer array layer and an acoustic impedance matching layer; the MEMS acoustic transducer array layer is fixed on the upper surface welding feet of the flexible printed circuit board interconnection layer in a welding mode; the main bodies of the MEMS micro-mirror array and the optical fiber channel layer are flexible polymer structures, channels and grooves are manufactured on the flexible polymer structures, and the MEMS micro-mirror array and the optical fibers are embedded in the channels and the grooves of the flexible polymer structures; the MEMS micro-mirror array and the surface of the optical fiber channel layer, which is provided with the optical fiber and the MEMS micro-mirror array, are bonded with the lower surface of the flexible printed circuit board interconnection layer by adopting a bonding agent to form fixed connection; manufacturing a micropore array on the flexible printed circuit board interconnection layer, and irradiating imaged tissues through the micropore array on the flexible printed circuit board interconnection layer after laser in the optical fiber is reflected by the MEMS micro-mirror; the acoustic impedance matching layer is made of transparent and elastic polymers, is manufactured on the upper surface of the interconnection layer of the flexible printed circuit board and fully covers the MEMS acoustic transducer array layer to form a flexible photoacoustic module which is flexible in main body and can be attached to a cylindrical surface, a spherical surface or other curved surfaces;
the photoacoustic module is composed of imaging unit arrays, each imaging unit is provided with a laser input optical fiber and a two-degree-of-freedom MEMS (micro-electromechanical systems) micro-mirror, a plurality of MEMS acoustic transducers are uniformly distributed in the circumferential direction of the periphery of a laser emergent hole, and an independent small-area photoacoustic imaging system is constructed by the imaging units;
the MEMS micro-mirror can adjust the reflection angle of the laser in two degrees of freedom in the plane of the mirror surface, so that the laser can be scanned in two dimensions in a small area corresponding to the imaging unit, and three-dimensional imaging in the small area is completed;
the light source module comprises a laser source and a 1 xN optical switch; the input end of the 1 XN optical switch is connected with the laser source, and the output end is connected with the optical fiber;
the control module is used for controlling the 1 XN optical switch, so that the laser source sequentially scans and stays in the imaging unit array, the signal acquisition module acquires and obtains the output signal of the acoustic transducer corresponding to the imaging unit, the image module is used for obtaining the photoacoustic image of the imaging unit, and the photoacoustic images of all the imaging units are spliced to obtain a complete full-area image.
The structure of the curved surface array photoacoustic imaging system of the flexible substrate MEMS device is also characterized in that: the work mode of the photoacoustic module is as follows: the incident laser and the emergent laser are vertical, the incident laser is introduced into the imaging unit from the laser input optical fiber and is reflected by the MEMS micro-mirror, and the reflection angle of the MEMS micro-mirror can be adjusted on two horizontal rotating shafts, so that the emergent laser can be scanned in a two-dimensional manner in a small area on the surface of the biological tissue;
the working mode of the photoacoustic module is as follows: the incident laser and the emergent laser are parallel, the incident laser is introduced into the imaging unit from the laser input optical fiber, and after being reflected once by the fixed micro-mirror, the incident laser is reflected twice by the MEMS micro-mirror, and the reflection angle of the MEMS micro-mirror can be adjusted on two horizontal rotating shafts, so that the emergent laser can be scanned in two dimensions in a small area on the surface of the biological tissue.
The structure of the curved surface array photoacoustic imaging system of the flexible substrate MEMS device is also characterized in that: the signal acquisition module comprises a signal amplification and preprocessing circuit and a data acquisition device; the signal amplifying and preprocessing circuit amplifies the output signal of the acoustic transducer and the signal is converted into a digital signal by the data acquisition device.
The structure of the curved surface array photoacoustic imaging system of the MEMS device with the flexible substrate is also characterized in that: the control module comprises a central controller, a delay controller and a data acquisition channel switching circuit; the central controller controls the 1 XN optical switch to determine the output channel of the laser; when the laser is switched to the output channel, the data acquisition channel switching circuit switches the input end of the data acquisition device to the acoustic transducer of the imaging unit corresponding to the laser output channel through the delay of the delay controller, and the acoustic wave acquisition of the imaging unit is completed.
The structure of the curved surface array photoacoustic imaging system of the flexible substrate MEMS device is also characterized in that: the image module is composed of a data processing computer and image reconstruction and display; the data processing computer receives the digital signal output by the data acquisition device, and obtains a photoacoustic image of the imaging unit through the operation of an image reconstruction algorithm; and after the control module finishes the whole-area scanning of the imaging units, splicing the photoacoustic images of the imaging units to obtain the finished whole-area images, and displaying the images.
Compared with the prior art, the invention has the following beneficial effects:
the photoacoustic module is of a flexible structure, an imaging unit array is embedded in the flexible structure, an MEMS micro-mirror with a tiny size and a plurality of high-bandwidth and high-performance acoustic transducers are adopted in the imaging unit, laser scans the imaging unit one by one, the MEMS micro-mirror controls the laser to scan in a small area in the imaging unit in a two-dimensional manner, and a data acquisition device is controlled to synchronously acquire excited acoustic signals in a delayed manner, so that three-dimensional fine imaging in a large area is realized. The invention eliminates the mechanical mechanism scanning device in the traditional photoacoustic imaging system, simplifies the structure, accelerates the imaging speed, and greatly reduces the volume of the whole device by adopting a large number of MEMS devices. The flexible structure facilitates the photoacoustic module to be attached to the curved surface, and is extremely suitable for constructing a large-area and quick imaging device of the inner surface of a natural cavity or the curved surface of the body surface of a human body.
Drawings
FIG. 1 is a schematic block diagram of a system of the present invention;
FIG. 2 is a schematic view of a layered structure of a photoacoustic module in accordance with the present invention;
FIG. 3 is a schematic view of an imaging unit according to the present invention;
FIG. 4 is a schematic cross-sectional view of an imaging unit according to the present invention;
FIG. 5 is a schematic diagram of an imaging unit according to the present invention;
FIG. 6 is a schematic diagram of a second mode of the imaging unit according to the present invention;
FIG. 7 is a diagram of a cylinder array configuration in accordance with an embodiment of the present invention;
reference numbers in the figures: 1 acoustic impedance matching layer, 2 is MEMS acoustic transducer array layer; 3 flexible printed circuit board interconnection layer; 4 is MEMS micro-mirror array and optical fiber channel layer; 5 is MEMS acoustic transducer; 6 laser emergent hole; 7 an imaging unit; 8, incident laser; 9 laser input optical fiber; 10 is MEMS micro-mirror; 11, acoustic wave signals; 12 a biological tissue; 13 emitting laser; 14 fixing the micromirror; 15 a photoacoustic module carrier; 16 photoacoustic module.
Detailed Description
Referring to fig. 1, the curved-surface array photoacoustic imaging system of the flexible substrate MEMS device in this embodiment includes a light source module, a photoacoustic module, a signal acquisition module, an image module, and a control module.
As shown in fig. 2, 3, 4 and 7, the photoacoustic module 16 is a layered structure, and the layered structure is sequentially stacked from bottom to top into an MEMS micro-mirror array and fiber channel layer 4, a flexible printed circuit board interconnection layer 3, an MEMS acoustic transducer array layer 2 and an acoustic impedance matching layer 1; the MEMS acoustic transducer array layer 2 is fixed on the upper surface welding feet of the flexible printed circuit board interconnection layer 3 in a welding mode; the main body of the MEMS micro-mirror array and optical fiber channel layer 4 is a flexible polymer structure, a channel and a groove are manufactured on the flexible polymer structure, and the MEMS micro-mirror array and the optical fiber are embedded in the channel and the groove of the flexible polymer structure; the surface of the MEMS micro-mirror array and the optical fiber channel layer 4, which is provided with the optical fiber and the MEMS micro-mirror array, is bonded with the lower surface of the flexible printed circuit board interconnection layer 3 by adopting a bonding agent to form fixed connection; manufacturing a micropore array on the flexible printed circuit board interconnection layer 3, and irradiating the imaged tissue through the micropore array on the flexible printed circuit board interconnection layer 3 after laser in the optical fiber is reflected by the MEMS micro-mirror; the acoustic impedance matching layer 1 is made of transparent and elastic polymers, the acoustic impedance matching layer 1 is manufactured on the upper surface of the flexible printed circuit board interconnection layer 3, and the MEMS acoustic transducer array layer 2 is fully covered to form a flexible photoacoustic module which is flexible in main body and can be attached to a cylindrical surface, a spherical surface or other curved surfaces;
as shown in fig. 4 and 7, the photoacoustic module 16 is composed of an array of imaging units, each imaging unit 7 has a laser input fiber 9 and a two-degree-of-freedom MEMS micro-mirror 10, and a plurality of MEMS acoustic transducers 5 are uniformly distributed in the circumferential direction of the periphery of the laser exit hole 6, so as to construct an independent small-area photoacoustic imaging system with the imaging units; the MEMS micro-mirror 10 can adjust the reflection angle of the laser in two degrees of freedom in the mirror plane, thereby realizing two-dimensional scanning of the laser in a small area corresponding to the imaging unit and completing three-dimensional imaging in the small area.
The light source module comprises a laser source and a 1 XN light switch; the input end of the 1 XN optical switch is connected with the laser source, and the output end is connected with the optical fiber;
the control module is used for controlling the 1 XN optical switch, so that the laser source sequentially scans and stays in the imaging unit array, the signal acquisition module acquires and obtains the output signal of the acoustic transducer corresponding to the imaging unit, the image module is used for obtaining the photoacoustic image of the imaging unit, and the photoacoustic image of each imaging unit is spliced to obtain a complete full-area image.
As shown in fig. 1, in the present embodiment, the signal acquisition module includes a signal amplification and preprocessing circuit and a data acquisition device; the signal amplifying and preprocessing circuit amplifies the output signal of the acoustic transducer and converts the amplified output signal into a digital signal for a data acquisition device; the control module comprises a central controller, a delay controller and a data acquisition channel switching circuit; the central controller controls the 1 XN optical switch to determine the output channel of the laser; when the laser is switched to the output channel, the data acquisition channel switching circuit switches the input end of the data acquisition device to the acoustic transducer of the imaging unit corresponding to the laser output channel through the delay of the delay controller, and the acoustic wave acquisition of the imaging unit is completed; the image module consists of a data processing computer and an image reconstruction and display unit, the data processing computer receives the digital signal output by the data acquisition device, and the photoacoustic image of the imaging unit is obtained through the operation of an image reconstruction algorithm; and after the control module finishes the whole-area scanning of the imaging units, splicing the photoacoustic images of all the imaging units to obtain the finished whole-area images, and displaying the images.
As shown in fig. 4, 5 and 6, the MEMS device array photoacoustic imaging system of the present invention divides a large area imaging area into a plurality of imaging units, each of which is composed of one optical fiber, one MEMS micromirror and several acoustic transducers circumferentially distributed around the periphery centered on the light source. The 1 XN optical switch controls the laser of the laser source to scan and stop in the imaging unit array in sequence through the control module, and meanwhile, the controller also synchronously controls the data acquisition channel switching circuit, and after time delay, the input port of the data acquisition device is switched to the acoustic transducer output signal of the corresponding imaging unit. When laser enters the optical fiber of the imaging unit, the laser is reflected by the MEMS micro-mirror and then irradiates on the imaged biological tissue 12, the biological tissue 12 generates a photoacoustic effect to excite an acoustic wave signal 11, the generated acoustic wave signal 11 is converted into an electric signal through the MEMS acoustic transducer 5, and the electric signal is converted into a digital signal by a data acquisition device after being amplified and preprocessed and is provided for a data processing computer. And the data processing computer completes an image reconstruction algorithm to obtain the biological tissue photoacoustic image of the corresponding area of the imaging unit. And the data processing computer splices the photoacoustic images acquired by the imaging unit to obtain a biological tissue image of the full coverage area of the MEMS device array.
As shown in fig. 4, the incident laser 8 is introduced to the surface of the MEMS micro-mirror 10 from the laser input fiber 9, reflected by the MEMS micro-mirror 10, penetrates through the acoustic impedance matching layer 1 made of the light transparent material, and irradiates on the biological tissue 12, where the biological tissue generates the photoacoustic effect and emits the acoustic wave signal 11, and the acoustic wave signal 11 is collected by the acoustic transducer 5.
As shown in fig. 5, the first working mode of the photoacoustic module of the MEMS curved array photoacoustic imaging system is that the incident laser 8 and the emergent laser 13 are perpendicular to each other, the incident laser 8 is introduced into the imaging unit 7 from the laser input fiber 9 and reflected by the MEMS micromirror 10, and the reflection angle of the MEMS micromirror 10 can be adjusted on two horizontal rotation axes, so that the emergent laser 13 scans two-dimensionally in a small area of the surface of the biological tissue 12.
As shown in fig. 6, the photoacoustic module of the curved array photoacoustic imaging system of the MEMS device has a second operating mode in which the incident laser 8 and the emergent laser 13 are parallel, the incident laser 8 is introduced into the imaging unit 7 from the laser input fiber 9, reflected once by the fixed micromirror 14, and reflected twice by the MEMS micromirror 10, and the reflection angle of the MEMS micromirror 10 can be adjusted on two horizontal rotation axes, so that the emergent laser 13 scans two-dimensionally in a small area of the surface of the biological tissue 12.
As shown in fig. 7, one way of mounting the photoacoustic module 16 is to adhere it to the cylindrical surface of the cylindrical photoacoustic module carrier 15, which can be applied to photoacoustic imaging on the inner surface of the natural lumen of a human body.
Claims (4)
1. A curved surface array photoacoustic imaging system of a flexible substrate MEMS device is characterized by comprising a light source module, a photoacoustic module, a signal acquisition module, an image module and a control module;
the photoacoustic module (16) is of a layer structure, and the layer structure is sequentially overlapped into an MEMS micro-mirror array, an optical fiber channel layer (4), a flexible printed circuit board interconnection layer (3), an MEMS acoustic transducer array layer (2) and an acoustic impedance matching layer (1) from bottom to top; the MEMS acoustic transducer array layer (2) is fixed on the upper surface welding feet of the flexible printed circuit board interconnection layer (3) in a welding mode; the main body of the MEMS micro-mirror array and the optical fiber channel layer (4) is a flexible polymer structure, a channel and a groove are manufactured on the flexible polymer structure, and the MEMS micro-mirror array and the optical fiber are embedded in the channel and the groove of the flexible polymer structure; the surface of the MEMS micro-mirror array and the optical fiber channel layer (4) provided with the optical fiber and the MEMS micro-mirror array is bonded with the lower surface of the flexible printed circuit board interconnection layer (3) by adopting a bonding agent to form fixed connection; a micropore array is manufactured on the flexible printed circuit board interconnection layer (3), and laser in the optical fiber is reflected by the MEMS micro-mirror and irradiates an imaged tissue through the micropore array on the flexible printed circuit board interconnection layer (3); the acoustic impedance matching layer (1) is made of transparent and elastic polymers, the acoustic impedance matching layer (1) is manufactured on the upper surface of the flexible printed circuit board interconnection layer (3), and the MEMS acoustic transducer array layer (2) is fully covered to form a flexible photoacoustic module which is flexible in main body and can be attached to a cylindrical surface, a spherical surface or other curved surfaces;
the photoacoustic module (16) is composed of imaging unit arrays, each imaging unit is provided with a laser input optical fiber and a two-degree-of-freedom MEMS (micro-electromechanical system) micro-mirror (10), and a plurality of MEMS acoustic transducers (5) are uniformly distributed in the circumferential direction of the periphery of the laser emergent hole (6) so as to construct an independent small-area photoacoustic imaging system by the imaging units;
the MEMS micro-mirror (10) can adjust the reflection angle of the laser in two degrees of freedom in the plane of the mirror surface, so that the laser can be scanned in two dimensions in a small area corresponding to the imaging unit, and three-dimensional imaging in the small area is completed;
the light source module comprises a laser source and a 1 xN optical switch; the input end of the 1 XN optical switch is connected with the laser source, and the output end is connected with the optical fiber;
the control module is used for controlling the 1 xN optical switch to enable the laser source to scan and stay in the imaging unit array in sequence, the signal acquisition module acquires and obtains an output signal of the acoustic transducer corresponding to the imaging unit, the image module is used for obtaining a photoacoustic image of the imaging unit, and the photoacoustic images of the imaging units are spliced to obtain a complete full-area image;
the work mode of the photoacoustic module (16) is as follows: the incident laser (8) and the emergent laser (13) are vertical to each other, the incident laser (8) is introduced into the imaging unit (7) from the laser input optical fiber (9) and is reflected by the MEMS micro-mirror (10), and the reflection angle of the MEMS micro-mirror (10) can be adjusted on two horizontal rotation axes, so that the emergent laser (13) can be scanned in two dimensions in a small area of the surface of the biological tissue (12);
the working mode of the photoacoustic module (16) is either: the incident laser (8) and the emergent laser (13) are parallel, the incident laser (8) is introduced into the imaging unit (7) from the laser input fiber (9), and after being reflected once by the fixed micro-mirror (14), the incident laser is reflected twice by the MEMS micro-mirror (10), and the reflection angle of the MEMS micro-mirror (10) can be adjusted on two horizontal rotating shafts, so that the emergent laser (13) can scan in a small area of the surface of the biological tissue (12) in a two-dimensional mode.
2. The curved array photoacoustic imaging system of claim 1, wherein the signal acquisition module comprises a signal amplification and preprocessing circuit and a data acquisition device; the signal amplifying and preprocessing circuit amplifies the output signal of the acoustic transducer and converts the amplified output signal into a digital signal for a data acquisition device.
3. The photoacoustic imaging system of claim 1, wherein the control module comprises a central controller, a delay controller and a data acquisition channel switching circuit; the central controller controls the 1 XN optical switch to determine the output channel of the laser; when the laser is switched to the output channel, the data acquisition channel switching circuit switches the input end of the data acquisition device to the sound transducer of the imaging unit corresponding to the laser output channel through the delay of the delay controller, and the sound wave acquisition of the imaging unit is completed.
4. The curved array photoacoustic imaging system of claim 1, wherein the image module is used for image reconstruction and display by a data processing computer; the data processing computer receives the digital signal output by the data acquisition device, and obtains a photoacoustic image of the imaging unit through the operation of an image reconstruction algorithm; and after the control module finishes the whole-area scanning of the imaging units, splicing the photoacoustic images of the imaging units to obtain the finished whole-area images, and displaying the images.
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| CN106680214B (en) * | 2017-03-20 | 2019-08-27 | 华南师范大学 | Optoacoustic laparoscopic apparatus and its method a kind of while that detect elasticity and viscosity |
| CN109068484B (en) * | 2018-10-25 | 2019-08-27 | 中国船舶科学研究中心（中国船舶重工集团公司第七0二研究所） | A kind of sensor array of complicated interface pressure fluctuations beneath turbulent boundary lay test |
| CN110367942B (en) * | 2019-08-23 | 2021-03-09 | 中国科学技术大学 | Photoacoustic imaging system and method |
| CN110547788A (en) * | 2019-08-28 | 2019-12-10 | 李凯述 | Wearable animal photoacoustic combined electrocardiogram measuring system |
| CN111847377A (en) * | 2020-08-03 | 2020-10-30 | 中国计量大学 | Preparation method of silicon-based MEMS micro-hemispherical array |
| CN112604930A (en) * | 2020-11-24 | 2021-04-06 | 光奥科技（武汉）有限公司 | Piezoelectric flexible ultrasonic transducer based on MEMS technology and preparation method |
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