CN106168483B - Upper-ring-shaped and lower-discrete double-electrode distributed micro gyroscope and preparation method thereof - Google Patents
Upper-ring-shaped and lower-discrete double-electrode distributed micro gyroscope and preparation method thereof Download PDFInfo
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- CN106168483B CN106168483B CN201610635008.4A CN201610635008A CN106168483B CN 106168483 B CN106168483 B CN 106168483B CN 201610635008 A CN201610635008 A CN 201610635008A CN 106168483 B CN106168483 B CN 106168483B
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
Abstract
The invention provides an upper annular lower discrete double-electrode distributed micro gyroscope and a preparation method thereof, wherein the preparation method comprises the following steps: the device comprises a monocrystalline silicon substrate, a center fixing support column, a miniature harmonic oscillator, an upper electrode, a lower electrode and a glass substrate. The invention combines MEMS bulk silicon processing technology and surface silicon processing technology to manufacture; the invention can provide different driving and detecting modes and different working modes, and can work in a system needing complex control; the invention can respectively drive and detect by utilizing the lower electrode and the upper electrode, thereby reducing the parasitic capacitance between the drive electrode and the detection electrode and improving the detection precision.
Description
Technical Field
The invention relates to a micro gyroscope in the technical field of micro electro mechanical systems, in particular to an upper annular lower discrete dual-electrode distributed micro gyroscope and a preparation method thereof.
Background
The gyroscope is an inertial device capable of detecting the angle or angular velocity of a carrier, and plays a very important role in the fields of attitude control, navigation positioning and the like. With the development of national defense science and technology and the aviation and aerospace industries, the requirements of the inertial navigation system on the gyroscope are also developed in the direction of low cost, small volume, high precision, multi-axis detection, high reliability and adaptability to various severe environments. Thus, the importance of MEMS micro-gyroscopes is self evident. In particular, a micro disc resonator gyroscope has become a research hotspot in the field as an important research direction of the MEMS micro gyroscope.
For the micro gyroscope, a full-angle control technology is adopted, the micro gyroscope has the superior characteristics of high stability, strong shock resistance, high precision, small error and the like, and has wide application prospects in the fields of aerospace, inertial navigation, civil consumer electronics and the like. The number of electrodes of the currently designed gyroscope is small, so that the application of the gyroscope in a complex control system is limited; in addition, a general gyroscope only has one set of electrodes on one surface, and certain parasitic capacitance and signal interference exist among the driving electrodes, the detecting electrodes and the control electrodes, so that the detection precision is limited.
Based on this, it is urgently needed to provide a new gyroscope structure, so as to avoid or reduce the above-mentioned influencing factors, and simultaneously expand the application range thereof.
Through retrieval, the invention provides an internal and external double-electrode type miniature hemispherical resonator gyroscope and a preparation method thereof, and the preparation method comprises the following steps: the device comprises a monocrystalline silicon substrate, a central fixed supporting column, a miniature hemispherical harmonic oscillator, an outer electrode metal welding plate, a glass substrate, a metal lead, a circular welding wire coil, an outer electrode metal connecting column inner electrode and a seed layer. The invention can respectively drive and detect by utilizing the inner electrode and the outer electrode, thereby reducing the parasitic capacitance between the driving electrode and the detection electrode and improving the detection precision; and a metal lead and a circular welding wire disc are provided for the inner electrode and the outer electrode, so that signal application and signal extraction are facilitated.
However, the above patent only provides a structural scheme of a micro hemispherical gyroscope with an internal discrete electrode and an external discrete electrode, and cannot provide different electrode distribution schemes for various micro gyroscopes.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an upper annular lower discrete dual-electrode distributed micro gyroscope and a preparation method thereof, wherein the micro gyroscope is manufactured by combining an MEMS bulk silicon processing technology and a surface silicon processing technology and is a novel processing technology; different driving and detecting modes and different working modes can be provided, and the system can work in a system requiring complex control.
According to an aspect of the present invention, there is provided an upper ring lower discrete dual-electrode distributed micro-gyroscope, comprising: the device comprises a monocrystalline silicon substrate, a center fixing support column, a miniature harmonic oscillator, an upper electrode, a lower electrode and a glass substrate; wherein:
the lower electrodes are uniformly distributed on the lower side of the miniature harmonic oscillator to form a uniformly distributed lower electrode; meanwhile, the lower electrode is arranged on the surface of the monocrystalline silicon substrate or the surface of the glass substrate;
the upper electrode is distributed on the upper side of the miniature harmonic oscillator and is in an annular integrated shape to form an annular integrated upper electrode; meanwhile, the upper electrode is arranged on the surface of the monocrystalline silicon substrate or the surface of the glass substrate;
one end of the central fixed supporting column is connected with the monocrystalline silicon substrate, and the other end of the central fixed supporting column is connected with the miniature harmonic oscillator;
the miniature harmonic oscillator is a vibrating body of the micro gyroscope, and the upper electrode and the lower electrode are used for driving, detecting and controlling the micro gyroscope.
When the micro gyroscope works in an angular rate mode, an alternating current driving signal is applied, a direct current bias signal is applied to the miniature harmonic oscillator, the annular integrated upper electrode enables the miniature harmonic oscillator to work in a required driving mode through electrostatic force, and the vibration amplitude and frequency of the driving mode are kept unchanged; when an external angular velocity exists in the direction vertical to the monocrystalline silicon substrate, the vibration amplitude of the detection mode changes, the vibration amplitude is in direct proportion to the external angular velocity, and meanwhile, the capacitance between the annular integrated upper electrode and the miniature harmonic oscillator changes; and calculating the magnitude of the modal vibration amplitude by acquiring the signal change on the annular integrated upper electrode, and further calculating the magnitude of the external angular velocity.
Furthermore, the micro gyroscope collects the signal change on the uniformly distributed lower electrode to calculate the magnitude of the vibration amplitude of the detection mode, and further calculates the magnitude of the external angular velocity, so that the parasitic capacitance between the annular integrated upper electrodes is reduced, and the detection precision is improved.
Furthermore, the micro gyroscope applies an alternating current driving signal to the uniformly distributed lower electrode, and acquires a detection signal on the annular integrated upper electrode or the uniformly distributed lower electrode, so that different driving, detecting and controlling modes are provided.
Furthermore, the working state of the micro-gyroscope is judged through the signal change on the uniformly distributed lower electrodes, and in the abnormal working state, the control signal is applied to part of the uniformly distributed lower electrodes through a control algorithm, so that the working state of the micro-gyroscope can be adjusted, and the micro-gyroscope can work normally.
Furthermore, the micro gyroscope can work in a force balance mode and an all-angle mode, wherein the force balance mode directly detects the magnitude of the applied angular velocity, and the all-angle mode directly detects the magnitude of the applied rotation angle.
Preferably, the upper electrode and the lower electrode are made of boron ion or phosphorus ion doped silicon or metallic nickel; when the upper electrode or the lower electrode is positioned on the monocrystalline silicon substrate, the material is boron ion or phosphorus ion doped silicon; when the upper electrode or the lower electrode is positioned on the glass substrate, the material is metallic nickel.
Preferably, the micro gyroscope is a ring resonator gyroscope, a disc resonator gyroscope, a multi-ring resonator gyroscope or a cup resonator gyroscope.
Preferably, the material of the miniature harmonic oscillator is doped diamond or doped polysilicon.
Preferably, the single crystal silicon substrate and the glass substrate are made of high-resistance materials of high-resistance silicon and silicon dioxide, and the high-resistance materials are used for reducing signal interference between the upper electrode and the lower electrode.
Preferably, the material of the central fixed supporting column is silicon dioxide or high-resistance silicon.
In the invention, the upper electrode and the lower electrode are distributed and can be used in a complex control system to realize full-angle control.
The invention can be a plurality of micro gyroscope structures of uniformly distributed lower electrodes and annular integrated upper electrodes, can be suitable for special circuit driving and detecting schemes (such as the embodiment), and the micro harmonic oscillator is not limited to a micro hemispherical resonator gyroscope and can also provide different electrode distribution schemes for a plurality of micro gyroscopes.
The upper annular lower discrete double-electrode distribution is structurally characterized in that the electrodes are distributed up and down instead of being distributed adjacently or internally and externally, and the upper electrode is annular and integrated, so that the process is simpler compared with the upper and lower double discrete electrodes.
According to another aspect of the present invention, there is provided a method for manufacturing an upper-ring lower-discrete two-electrode distributed micro-gyroscope, including the following steps:
firstly, cleaning a monocrystalline silicon substrate and a glass substrate, coating glue, photoetching, developing, injecting boron ions, sputtering and removing the glue, and obtaining an upper electrode or a lower electrode of a boron ion or phosphorus ion doped silicon material on the monocrystalline silicon substrate;
secondly, gluing, photoetching, developing, silicon isotropic etching and photoresist removing are carried out on the monocrystalline silicon substrate to obtain a groove corresponding to the shape of the miniature harmonic oscillator on the monocrystalline silicon substrate;
thirdly, depositing silicon dioxide on the monocrystalline silicon substrate to provide a sacrificial layer for manufacturing the miniature harmonic oscillator and the gap between the upper electrode and the lower electrode;
fourthly, depositing doped diamond or doped polycrystalline silicon on the monocrystalline silicon substrate, and carrying out chemical mechanical polishing to manufacture the miniature harmonic oscillator;
fifthly, etching the silicon dioxide sacrificial layer by using BOE solution on the basis of the fourth step and controlling the etching time to release the miniature harmonic oscillator, and fixing the supporting column by taking the residual part as the center;
sixthly, gluing, photoetching, developing, nickel electroplating and photoresist removing are carried out on the glass substrate to manufacture an upper electrode or a lower electrode made of a metal nickel material;
and seventhly, inverting the glass substrate, and bonding the glass substrate and the single crystal silicon substrate to align the center of the glass substrate with the center of a center fixing support column of the single crystal silicon substrate, so that the two substrates are fixed, and the upper annular lower discrete dual-electrode distributed micro gyroscope is obtained.
Compared with the prior art, the invention has the following beneficial effects:
(1) the micro gyroscope is manufactured by combining an MEMS bulk silicon processing technology and a surface silicon processing technology, and is a novel processing technology;
(2) the micro gyroscope can provide different driving and detecting modes and different working modes, the number of electrodes is increased under the condition of not reducing the area of the electrodes, and the micro gyroscope can work in a system needing complex control;
(3) the micro gyroscope can utilize the lower electrode and the upper electrode to respectively drive and detect, so that the parasitic capacitance between the driving electrode and the detecting electrode is reduced, and the detection precision is improved; the method can be used in a complex control system to realize full-angle control.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIGS. 1(a) -1 (c) are schematic structural diagrams of an upper ring-shaped and lower discrete dual-electrode distributed micro disk resonator gyroscope according to the present invention;
2(a) -2 (c) are schematic structural diagrams of an upper-ring-shaped and lower-discrete dual-electrode distributed micro-ring resonator gyroscope according to the present invention;
3(a) -3 (c) are schematic structural diagrams of an upper ring-shaped lower discrete dual-electrode distributed micro multi-ring resonator gyroscope according to the present invention;
FIGS. 4(a) -4 (c) are schematic structural diagrams of an upper ring-shaped and lower discrete dual-electrode distributed miniature cup resonator gyroscope according to the present invention;
FIGS. 5(a) -5 (g) are flow charts of a method for fabricating an upper ring-shaped and lower discrete dual-electrode distributed micro disk resonator gyroscope according to an embodiment of the present invention;
in the figure: the resonator comprises a miniature harmonic oscillator 1, an annular integrated upper electrode 2, a uniformly distributed lower electrode 3, a monocrystalline silicon substrate 4, a glass substrate 5 and a central fixing support column 6.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
Example 1
As shown in fig. 1(a) -1 (c), the present embodiment provides an upper ring-shaped lower discrete dual-electrode distributed micro disc resonator gyroscope structure, including:
a disc-shaped miniature harmonic oscillator 1;
an annular integrated upper electrode 2;
sixteen uniformly distributed lower electrodes 3;
a single crystal silicon substrate 4;
a glass substrate 5;
a central fixed support post 6; wherein:
one end of the central fixed supporting column 6 is connected with the monocrystalline silicon substrate 4, and the other end of the central fixed supporting column 6 is connected with the miniature harmonic oscillator 1 (as shown in fig. 1 (a));
one annular integrated upper electrode 2 is arranged on the upper surface of the glass substrate 5 (as shown in fig. 1 (b)) and distributed on the upper side of the miniature harmonic oscillator 1 (as shown in fig. 1 (c)); sixteen uniformly distributed lower electrodes 3 are disposed on the surface of the monocrystalline silicon substrate 4 and uniformly distributed on the lower side of the miniature harmonic oscillator 1 (as shown in fig. 1(a) and 1 (c)); the single crystal silicon substrate 4 is bonded to a glass substrate 5.
In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, and is a main vibration body of the micro disc resonator gyroscope.
In this embodiment, the annular integrated upper electrode 2 is made of boron ion doped silicon, or phosphorus ion doped silicon, and is used for driving, detecting, and controlling the micro disc resonator gyroscope.
In this embodiment, the material of the uniformly distributed lower electrode 3 is boron ion doped silicon or phosphorus ion doped silicon, and is used for driving, detecting and controlling the micro disc resonator gyroscope.
In this embodiment, the single crystal silicon substrate 4 and the glass substrate 5 are made of high-resistance materials such as high-resistance silicon and silicon dioxide, and the high-resistance materials can reduce signal interference between the annular integrated upper electrode 2 and the sixteen uniformly distributed lower electrodes 3.
In this embodiment, the material of the central fixing support column 6 is silicon dioxide, and may also be high-resistance silicon.
In this embodiment, the micro disc resonator gyroscope may work in an angular rate mode, apply an ac driving signal, apply a dc bias signal to the micro resonator 1, and make the micro resonator 1 work in a desired driving mode by the annular integrated upper electrode 2 through electrostatic force, where the vibration amplitude and frequency of the driving mode remain unchanged; when an external angular velocity exists in the direction vertical to the monocrystalline silicon substrate 4, the vibration amplitude of the detection mode changes, the vibration amplitude is in direct proportion to the external angular velocity, and meanwhile, the capacitance between the annular integrated upper electrode 2 and the miniature harmonic oscillator 1 changes; the magnitude of the modal vibration amplitude can be calculated by collecting the signal change on the annular integrated upper electrode 2, and then the magnitude of the external angular velocity is calculated.
In this embodiment, the micro disc resonator gyroscope may also collect signal changes on the uniformly distributed lower electrode 3 to calculate the magnitude of the modal vibration amplitude, and further calculate the magnitude of the applied angular velocity, thereby reducing the parasitic capacitance between the annular integrated upper electrodes 2 and improving the detection accuracy.
In this embodiment, the micro disc resonator gyroscope may apply an ac driving signal to the uniformly distributed lower electrode 3, collect a detection signal from the annular integrated upper electrode 2 or the uniformly distributed lower electrode 3, and provide different driving, detecting, and controlling modes.
In this embodiment, the micro disc resonator gyroscope may determine the operating state of the micro disc resonator gyroscope through a change in the signal on the evenly-distributed lower electrode 3, and in an abnormal operating state, the operating state of the micro disc resonator gyroscope may be adjusted by applying a control signal to a part of the evenly-distributed lower electrode 3 through a control algorithm, so that the micro disc resonator gyroscope operates normally.
In this embodiment, the micro disc resonator gyroscope may also operate in a force balance mode and an all-angle mode, where the force balance mode may directly detect the magnitude of the applied angular velocity and the all-angle mode may directly detect the magnitude of the applied rotation angle.
Example 2
As shown in fig. 2(a) -2 (c), the present embodiment provides an upper-ring lower-discrete two-electrode distributed micro-ring resonator gyroscope structure, including:
a ring-shaped miniature harmonic oscillator 1;
an annular integrated upper electrode 2;
sixteen uniformly distributed lower electrodes 3;
a single crystal silicon substrate 4;
a glass substrate 5;
a central fixed support post 6; wherein:
one end of the central fixed supporting column 6 is connected with the monocrystalline silicon substrate 4, and the other end of the central fixed supporting column 6 is connected with the miniature harmonic oscillator 1 (as shown in fig. 2 (a)); one annular integrated upper electrode 2 is arranged on the surface of the glass substrate 5 (as shown in fig. 2 (b)) and distributed on the upper side of the miniature harmonic oscillator 1 (as shown in fig. 2 (c)); sixteen uniformly distributed lower electrodes 3 are disposed on the surface of the monocrystalline silicon substrate 4 and uniformly distributed on the lower side of the miniature harmonic oscillator 1 (as shown in fig. 2(a) and 2 (c)); the single crystal silicon substrate 4 is bonded to a glass substrate 5.
In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, and is a main vibration body of the micro ring resonator gyroscope.
In this embodiment, the annular integrated upper electrode 2 is made of boron ion doped silicon or phosphorus ion doped silicon, and is used for driving, detecting, and controlling the micro annular resonator gyroscope.
In this embodiment, the material of the uniformly distributed lower electrode 3 is nickel, and is used for driving, detecting, and controlling the micro ring resonator gyroscope.
In this embodiment, the single crystal silicon substrate 4 and the glass substrate 5 are made of high-resistance materials such as high-resistance silicon and silicon dioxide, and the high-resistance materials can reduce signal interference between one annular integrated upper electrode 2 and sixteen uniformly distributed lower electrodes 3.
In this embodiment, the material of the central fixing support column 6 is silicon dioxide, and may also be high-resistance silicon.
In this embodiment, the micro ring resonator gyroscope may also operate in a force balance mode and an all-angle mode, where the force balance mode may directly detect the magnitude of the applied angular velocity and the all-angle mode may directly detect the magnitude of the applied rotation angle.
Example 3
As shown in fig. 3(a) -3 (c), the present embodiment provides an upper ring-shaped lower discrete dual-electrode distributed micro multi-ring resonator gyroscope structure, including:
a multi-ring-shaped miniature harmonic oscillator 1;
an annular integrated upper electrode 2;
sixteen uniformly distributed lower electrodes 3;
a single crystal silicon substrate 4;
a glass substrate 5;
a central fixed support post 6; wherein:
one end of the central fixed supporting column 6 is connected with the monocrystalline silicon substrate 4, and the other end of the central fixed supporting column 6 is connected with the miniature harmonic oscillator 1 (as shown in fig. 3 (a)); one annular integrated upper electrode 2 is arranged on the surface of the glass substrate 5 (as shown in fig. 3 (b)) and distributed on the upper side of the miniature harmonic oscillator 1 (as shown in fig. 3 (c)); sixteen uniformly distributed lower electrodes 3 are disposed on the surface of the monocrystalline silicon substrate 4 and uniformly distributed on the lower side of the miniature harmonic oscillator 1 (as shown in fig. 3(a) and 3 (c)); the single crystal silicon substrate 4 is bonded to a glass substrate 5.
In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, and is a main vibration body of the micro multi-ring resonator gyroscope.
In this embodiment, the annular integrated upper electrode 2 is made of boron ion doped silicon, or phosphorus ion doped silicon, and is used for driving, detecting, and controlling the micro multi-ring resonator gyroscope.
In this embodiment, the material of the uniformly distributed lower electrode 3 is boron ion doped silicon or phosphorus ion doped silicon, and is used for driving, detecting and controlling the micro multi-ring resonator gyroscope.
In this embodiment, the single crystal silicon substrate 4 and the glass substrate 5 are made of high-resistance materials such as high-resistance silicon and silicon dioxide, and the high-resistance materials can reduce signal interference between the annular integrated upper electrode 2 and the uniformly distributed lower electrode 3.
In this embodiment, the material of the central fixing support column 6 is silicon dioxide, and may also be high-resistance silicon.
In this embodiment, the micro multi-ring resonator gyroscope can also work in a force balance mode and an all-angle mode, the force balance mode can directly detect the magnitude of the applied angular velocity, and the all-angle mode can directly detect the magnitude of the applied rotation angle.
Example 4
As shown in fig. 4(a) -4 (c), the present embodiment provides an upper ring-shaped lower discrete two-electrode distributed micro cup resonator gyroscope structure, comprising:
a cup-shaped miniature harmonic oscillator 1;
an annular integrated upper electrode 2;
sixteen uniformly distributed lower electrodes 3;
a single crystal silicon substrate 4;
a glass substrate 5;
a central fixed support post 6; wherein:
one end of the central fixed supporting column 6 is connected with the monocrystalline silicon substrate 4, and the other end of the central fixed supporting column 6 is connected with the miniature harmonic oscillator 1 (as shown in fig. 4 (a)); one annular integrated upper electrode 2 is arranged on the surface of the glass substrate 5 (as shown in fig. 4 (b)) and distributed on the upper side of the miniature harmonic oscillator 1 (as shown in fig. 4 (c)); sixteen uniformly distributed lower electrodes 3 are disposed on the surface of the monocrystalline silicon substrate 4 and uniformly distributed on the lower side of the miniature harmonic oscillator 1 (as shown in fig. 4(a) and 4 (c)); the single crystal silicon substrate 4 is bonded to a glass substrate 5.
In this embodiment, the material of the miniature resonator 1 is doped diamond or doped polysilicon, and is the main vibrating body of the miniature cup-shaped resonant gyroscope.
In this embodiment, the annular integrated upper electrode 2 is made of boron ion doped silicon, or phosphorus ion doped silicon, and is used for driving, detecting, and controlling the micro cup resonator gyroscope.
In this embodiment, the material of the uniformly distributed lower electrode 3 is boron ion doped silicon or phosphorus ion doped silicon, and is used for driving, detecting and controlling the micro cup-shaped resonant gyroscope.
Furthermore, the micro gyroscope may be provided with a metal lead, one end of the metal lead is connected to the upper electrode and the lower electrode, the other end of the metal lead is used as an external interface, and the metal lead is used for signal application and signal extraction.
In this embodiment, the single crystal silicon substrate 4 and the glass substrate 5 are made of high-resistance materials such as high-resistance silicon and silicon dioxide, and the high-resistance materials can reduce signal interference between the annular integrated upper electrode 2 and the uniformly distributed lower electrode 3.
In this embodiment, the material of the central fixing support column 6 is silicon dioxide, and may also be high-resistance silicon.
In this embodiment, the miniature cup-shaped resonator gyroscope can also work in a force balance mode and an all-angle mode, the force balance mode can directly detect the magnitude of the applied angular velocity, and the all-angle mode can directly detect the magnitude of the applied rotation angle.
The invention combines the MEMS bulk silicon processing technology and the surface silicon processing technology for manufacturing, and is a novel processing technology; the micro gyroscope can provide different driving and detecting modes and different working modes, and can work in a system needing complex control; the micro gyroscope can respectively drive and detect by utilizing the lower electrode and the upper electrode, so that the parasitic capacitance between the driving electrode and the detecting electrode is reduced, and the detection precision is improved; the lower electrode and the upper electrode of the micro gyroscope in the invention provide metal leads, which are convenient for signal application and signal extraction.
Example 5
As shown in fig. 5(a) -5 (g), this embodiment provides a method for manufacturing an upper ring-shaped and lower discrete dual-electrode distributed micro disk resonator gyroscope, which includes the following steps:
the first step, as shown in fig. 5(a), glue coating, photoetching, developing, silicon isotropic etching and photoresist removing are carried out on a monocrystalline silicon substrate to obtain a cylindrical groove with the radius of 300-700 μm on the monocrystalline silicon substrate 4;
secondly, as shown in fig. 5(b), the monocrystalline silicon substrate 4 is cleaned, coated with glue, photoetched, developed, injected with boron ions, sputtered and stripped to obtain the lower electrode 3 of boron ion doped silicon material with the thickness of 10-50 μm on the monocrystalline silicon substrate 4;
step three, as shown in fig. 5(c), silicon dioxide with the thickness of 1-6 μm is deposited on the monocrystalline silicon substrate, and a sacrificial layer is provided for manufacturing the miniature disc harmonic oscillator 1 and the electrode gap;
fourthly, as shown in fig. 5(d), depositing doped diamond or doped polysilicon on the basis of the third step, and performing chemical mechanical polishing to manufacture a micro disc resonator 1 with the thickness of 10-30 μm;
fifthly, as shown in fig. 5(e), etching the silicon dioxide sacrificial layer by using a BOE solution on the basis of the fourth step and controlling the etching time to release the micro disc harmonic oscillator 1, and using the residual part as a central fixed supporting column 6 with the radius of 15-35 μm;
sixthly, as shown in fig. 5(f), gluing, photoetching, developing, electroplating nickel and removing glue on the glass substrate 5 to manufacture the upper electrode 2 made of the metal nickel material with the height of 20-70 μm;
and seventhly, as shown in fig. 5(g), inverting the glass substrate 5, and bonding the glass substrate and the monocrystalline silicon substrate 4 to align the center part of the glass substrate 5 with the center of the central fixing support column of the monocrystalline silicon substrate 4, so as to realize the fixing of the two substrates, thereby obtaining the upper annular lower discrete dual-electrode distributed micro gyroscope.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention.
Claims (9)
1. An upper annular lower discrete dual-electrode distributed micro-gyroscope, comprising: the device comprises a monocrystalline silicon substrate, a center fixing support column, a miniature harmonic oscillator, an upper electrode, a lower electrode and a glass substrate; wherein:
the lower electrodes are uniformly distributed on the lower side of the miniature harmonic oscillator to form a uniformly distributed lower electrode; meanwhile, the lower electrode is arranged on the surface of the monocrystalline silicon substrate or the surface of the glass substrate;
the upper electrode is distributed on the upper side of the miniature harmonic oscillator and is in an annular integrated shape to form an annular integrated upper electrode; meanwhile, the upper electrode is arranged on the surface of the monocrystalline silicon substrate or the surface of the glass substrate;
one end of the central fixed supporting column is connected with the monocrystalline silicon substrate, and the other end of the central fixed supporting column is connected with the miniature harmonic oscillator;
the miniature harmonic oscillator is a vibrating body of the micro-gyroscope, and the upper electrode and the lower electrode are used for driving, detecting and controlling various micro-gyroscope structures;
when the micro gyroscope works in an angular rate mode, an alternating current driving signal is applied, a direct current bias signal is applied to the micro harmonic oscillator, the annular integrated upper electrode enables the micro harmonic oscillator to work in a required driving mode through electrostatic force, and the vibration amplitude and the frequency of the driving mode are kept unchanged; when an external angular velocity exists in the direction vertical to the monocrystalline silicon substrate, the vibration amplitude of the detection mode changes, the vibration amplitude is in direct proportion to the external angular velocity, and meanwhile, the capacitance between the annular integrated upper electrode and the miniature harmonic oscillator changes; and calculating the magnitude of the modal vibration amplitude by acquiring the signal change on the annular integrated upper electrode, and further calculating the magnitude of the external angular velocity.
2. The distributed micro-gyroscope with upper and lower annular electrodes as claimed in claim 1, wherein the micro-gyroscope collects signal changes on the uniformly distributed lower electrode to calculate the magnitude of the modal vibration amplitude, and further calculates the magnitude of the applied angular velocity, so as to reduce the parasitic capacitance between the upper and lower annular integrated electrodes and improve the detection precision.
3. The upper annular lower discrete dual-electrode distributed micro-gyroscope of claim 1, wherein the micro-gyroscope applies an ac driving signal to the evenly distributed lower electrodes and collects a detection signal from the annular integral upper electrode or the evenly distributed lower electrodes to provide different driving, detecting and controlling modes.
4. The upper annular lower discrete dual-electrode distributed micro-gyroscope of claim 1, wherein the working state of the micro-gyroscope is determined by the signal variation on the uniformly distributed lower electrodes, and in the abnormal working state, the working state of the micro-gyroscope can be adjusted by applying a control signal to a part of the uniformly distributed lower electrodes through a control algorithm, so that the micro-gyroscope works normally.
5. The upper annular lower discrete two-electrode distributed micro-gyroscope of claim 1, wherein the micro-gyroscope is capable of operating in a force balance mode and a full angle mode, the force balance mode directly detecting the magnitude of the applied angular velocity, and the full angle mode directly detecting the magnitude of the applied rotation angle.
6. The upper ring-shaped lower discrete dual-electrode distributed micro-gyroscope according to any of claims 1-5, characterized in that the material of the upper electrode and the lower electrode is boron ion or phosphorus ion doped silicon or metallic nickel; when the upper electrode or the lower electrode is positioned on the monocrystalline silicon substrate, the material is boron ion or phosphorus ion doped silicon; when the upper electrode or the lower electrode is positioned on the glass substrate, the material is metallic nickel.
7. An upper ring-shaped lower discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, wherein the materials of the single-crystal silicon substrate and the glass substrate are high-resistance materials of high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials are used for reducing signal interference between the upper electrode and the lower electrode.
8. The upper ring-shaped lower discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, wherein the material of the central fixed supporting column is high-resistivity silicon or silicon dioxide;
the material of the miniature harmonic oscillator is doped diamond or doped polycrystalline silicon.
9. Method for the production of an upper annular lower discrete two-electrode distributed micro-gyroscope according to any one of claims 1 to 8, characterized in that it comprises the following steps:
firstly, cleaning a monocrystalline silicon substrate and a glass substrate, coating glue, photoetching, developing, injecting boron ions, sputtering and removing the glue, and obtaining an upper electrode or a lower electrode of a boron ion or phosphorus ion doped silicon material on the monocrystalline silicon substrate;
secondly, gluing, photoetching, developing, silicon isotropic etching and photoresist removing are carried out on the monocrystalline silicon substrate to obtain a groove corresponding to the shape of the miniature harmonic oscillator on the monocrystalline silicon substrate;
thirdly, depositing silicon dioxide on the monocrystalline silicon substrate to provide a sacrificial layer for manufacturing the miniature harmonic oscillator and the gap between the upper electrode and the lower electrode;
fourthly, depositing doped diamond or doped polycrystalline silicon on the monocrystalline silicon substrate, and carrying out chemical mechanical polishing to manufacture the miniature harmonic oscillator;
fifthly, etching the silicon dioxide sacrificial layer by using BOE solution on the basis of the fourth step and controlling the etching time to release the miniature harmonic oscillator, and fixing the supporting column by taking the residual part as the center;
sixthly, gluing, photoetching, developing, nickel electroplating and photoresist removing are carried out on the glass substrate to manufacture an upper electrode or a lower electrode made of a metal nickel material;
and seventhly, inverting the glass substrate, and bonding the glass substrate and the single crystal silicon substrate to align the center of the glass substrate with the center of a center fixing support column of the single crystal silicon substrate, so that the two substrates are fixed, and the upper annular lower discrete dual-electrode distributed micro gyroscope is obtained.
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