A kind of flexible touch screen and preparation method thereof
Technical field
The present invention relates to electronic technology field, be specifically related to a kind of condenser type flexibility touch screen and system thereof
Preparation Method.
Background technology
Touch screen (English full name is Touch Panel), also known as touch screen, contact panel, is a kind of
It is formed on image display device display surface, utilizes the conductor such as human body or capacitance pen to carry out instruction input
Device, the external input device such as mouse, keyboard and the mechanical type input input such as button can be replaced
Equipment, can effectively simplify the electronic product structure such as computer, mobile phone, before having boundless application
Scape.
Touch screen is divided into resistance-type to cover (resistive overlay) touch screen, photosensitive type touch screen, electricity
Appearance formula touch screen etc..Wherein, capacitance type touch control screen (English full name is Capacity Touch Panel,
Referred to as CTP) it is that screen is controlled, according to detecting touching by the electric current sensing utilizing human body
The capacitance variations in region, and then calculate touch position, there is realization highly sensitive, easy and tap more
The advantages such as control technology, are increasingly becoming in the electronic product such as smart mobile phone, panel computer the main flow of application
Touch screen.
Chinese patent literature CN102163095A discloses a kind of capacitance type touch control screen and preparation side thereof
Method, including the first sensing patterns formed on a transparent substrate and the second sensing patterns.First sensing
Pattern connects setting in the first direction each other by the first connecting pattern, and the second sensing patterns is led to each other
Cross the second connecting pattern and connect setting in a second direction, the row and that the first sensing patterns is formed by connecting
The row that two sensing patterns are formed by connecting forms insulation and structure intersected with each other.
In order to prevent the first connecting pattern and the short circuit of the second connecting pattern, the first connecting pattern and second
Needing between sensing patterns to form insulating barrier, preparation method is: sequentially form conduction on a transparent substrate
Layer and insulating barrier;Form photoresist oxidant layer on the insulating layer and pattern formation mask;By covering
Conductive layer and insulating barrier are patterned by film respectively, form the first sensing patterns, the second sensing figure
Case and the first connecting pattern of series connection the first sensing patterns, remove mask after patterning;In substrate
Upper formation covers the second sensing patterns and the conductive layer of insulating barrier, and patterns formation series connection the second sense
Second connecting pattern of mapping case.
Above-mentioned technique needs formed the first sensing patterns, the second sensing patterns, the first connecting pattern,
The forming process of the second connecting pattern and the Patternized technique of insulating barrier need to perform four tunics altogether
Layer, twice mask and three road etching technics, manufacturing process is complicated, thus reduces the life of touch screen
Produce efficiency and yields, improve production cost.
Summary of the invention
It is the problem of touch screen complicated process of preparation in prior art to this end, to be solved by this invention,
Simply flexible touch screen of a kind of preparation technology and preparation method thereof is provided.
For solving above-mentioned technical problem, the technical solution used in the present invention is as follows:
A kind of flexible touch screen, described flexible substrate, in being folded with, is formed and is provided with some independence
The first flexible substrate of the first sensing patterns and be provided with the of some the second independent sensing patterns
Two flexible substrate;
The first described sensing patterns realizes being connected in series by the first connecting pattern, forms first and leads
Electric unit;The second described sensing patterns realizes being connected in series by the second connecting pattern, forms the
Two conductive units;It is provided with insulating barrier between described first conductive unit and the second conductive unit;Institute
State the first sensing patterns and the second sensing patterns forms Inductance and Capacitance structure.
Described first sensing patterns and the second sensing patterns lay respectively at described flexible substrate centrage
Both sides, described flexible substrate along after its centrage doubling, described first sensing patterns and the second sensing
Pattern forms Inductance and Capacitance structure.
Described first sensing patterns is identical with described second sensing patterns shape.
Described insulating barrier is by the one in silicon nitride, silicon oxide or silicon oxynitride or a combination thereof thing system
For forming.
The preparation method of a kind of flexible touch screen, comprises the steps:
S1, flexible substrate is fitted in rigidity additional substrate;
S2, on flexible substrates away from described rigidity additional substrate side formed conductive layer;
S3, use etching technics that described conductive layer is patterned, form some independent first
Sensing patterns and the second sensing patterns, and the first connection between described first sensing patterns
Pattern (51), the second connecting pattern between the second sensing patterns;
Described first sensing patterns realizes being connected in series by the first connecting pattern, forms the first conduction
Unit;The second described sensing patterns realizes being connected in series by the second connecting pattern, forms second
Conductive unit;
S4, evaporation form the insulating barrier covering described first conductive unit;
S5, described flexible substrate is removed fold after described additional substrate, described first sensing patterns
Form Inductance and Capacitance structure with the second sensing patterns, encapsulate and get final product.
Alternatively, described step S2 and step S3 are:
S2, on flexible substrates side away from described additional substrate form insulated from each other first and lead
Electric layer and the second conductive layer;
Described first conductive layer is patterned by S3, employing etching technics, is formed some independent
First sensing patterns and the first connecting pattern between described first sensing patterns;Use etching
Described second conductive layer is patterned by technique, forms some the second independent sensing patterns and position
The second connecting pattern between described second sensing patterns;
Described first sensing patterns realizes being connected in series by the first connecting pattern, forms the first conduction
Unit;The second described sensing patterns realizes being connected in series by the second connecting pattern, forms second
Conductive unit.
Preferably, the rigidity additional substrate in described step S1 is rigid plane or cylinder surface.
Described step S4 is: evaporation forms covering described evaporation formation and covers described second conductive unit
Insulating barrier.
Described step S4 is: evaporation forms covering described evaporation formation and covers described first conductive unit
Insulating barrier with the second conductive unit.
Described step S5 is by described flexible substrate along its centrage doubling.
The technique scheme of the present invention has the advantage that compared to existing technology
Flexible touch screen of the present invention is to be provided with some the first independent sensings in flexible substrate
After pattern and some the second independent sensing patterns, the of correspondence position after flexible substrate bending, will be made
One sensing patterns and the second sensing patterns form Inductance and Capacitance structure.The flexible touch screen of this kind of structure
Simple in construction, preparation process only needs to be formed conductive layer on substrate, is deposited with one after over etching again
After layer insulating, it is thus only necessary to form two membranes layer, etching once can realize.Letter significantly
Change preparation technology, improve yield rate.
Accompanying drawing explanation
In order to make present disclosure be more likely to be clearly understood, concrete below according to the present invention
Embodiment also combines accompanying drawing, and the present invention is further detailed explanation, wherein
Fig. 1-Fig. 5 is flexibility touch screen preparation process structural representation of the present invention;
Fig. 6 is flexible touch screen top view shown in Fig. 4;
Fig. 7 is flexible touch screen top view shown in Fig. 5 of the present invention.
In figure, reference is expressed as: 1-flexible substrate, 2-additional substrate, 31-the first sensing patterns,
32-the second sensing patterns, 4-insulating barrier, 51-the first connecting pattern, 52-the second connecting pattern, 61-
First electrical pickoff, 62-the second electrical pickoff.
Detailed description of the invention
In order to make the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing
Embodiments of the present invention are described in further detail.
The present invention can be embodied in many different forms, and should not be construed as limited to explain at this
The embodiment stated.On the contrary, it is provided that these embodiments so that the disclosure will be thorough and complete,
And the design of the present invention will be fully conveyed to those skilled in the art, the present invention will be only by right
Require to limit.In the accompanying drawings, for clarity, can exaggerate layer with the size in region with relative
Size.It should be appreciated that when element such as layer, region or substrate be referred to as " being formed at " or
" be arranged on " another element " on " time, this element can be arranged directly on another element described,
Or intermediary element can also be there is.On the contrary, it is referred to as " being formed directly into " or " straight when element
Connect and be arranged on " on another element time, there is not intermediary element;When element is referred to as " transparent or half
Transparent ", represent that this element has high optical transmittance.
As shown in figure 5 and figure 7, a kind of flexible touch screen of the present invention, including flexible substrate 1, institute
State flexible substrate 1 in being folded with, formed and be provided with the of some the first independent sensing patterns 31
One flexible substrate and the second flexible substrate being provided with some the second independent sensing patterns 32;
As shown in Figure 6, the first described sensing patterns 31 realizes string by the first connecting pattern 51
Connection connects, and forms the first conductive unit, and the first sensing patterns 31 is rhombus, adjacent two rhombuses
Contact point is the first connecting pattern 51, and as other embodiments, the first connecting pattern 51 also may be used
Think the square or pattern of other any shapes connecting adjacent first sensing patterns 31, as long as can
Make the first sensing patterns 31 be connected in series and can realize goal of the invention.The second described sensing patterns 32
Realize being connected in series by the second connecting pattern 52, form the second conductive unit;Described first conduction
Insulate between unit and described second conductive unit, as other embodiments, the second connecting pattern
52 can also be for connecting the square or pattern of other any shapes of adjacent second sensing patterns 32, only
Want to make the second sensing patterns 32 be connected in series and can realize goal of the invention.
Described first sensing patterns 31 and the second sensing patterns 32 lay respectively at described flexible substrate 1
Centrage both sides, described flexible substrate 1 along after its centrage doubling, described first sensing patterns 31
Inductance and Capacitance structure is formed with the second sensing patterns 32.
As it is shown in figure 5, be provided with insulating barrier 4 between described first conductive unit and the second conductive unit;
Described first sensing patterns 31 and the second sensing patterns 32 form Inductance and Capacitance structure.Flexible substrate 1
Preferably along its centrage doubling.
Described first sensing patterns 31 is identical with described second sensing patterns 32 shape.
Described insulating barrier 4 is by the one in silicon nitride, silicon oxide or silicon oxynitride or a combination thereof thing
It is prepared from.
As shown in figures 1 to 6, the preparation method of above-mentioned flexible touch screen comprises the steps:
S1 is as it is shown in figure 1, be fitted in flexible substrate 1 in additional substrate 2, and described auxiliary serves as a contrast
The end 2, has rigid plane;As other embodiments, additional substrate 2 can also be cylinder table
Face;
S2, in flexible substrate 1, side away from described additional substrate 2 is formed by sputtering technology
Conductive layer;Conductive layer described in the present embodiment is preferably indium tin oxide (ITO) layer, as this
Other bright embodiments, described conductive layer is selected from, but not limited to, molybdenum (Mo), silver (Ag), titanium (Ti), copper
(Cu), the low-resistance material such as aluminum (Al) or molybdenum/aluminum/molybdenum (Mo/Al/Mo), concrete preparation method is according to material
Material selects, and all can realize the purpose of the present invention, belong to protection scope of the present invention.
Described conductive layer is patterned by S3, employing wet-etching technology, is formed as shown in Figure 2
The first some independent sensing patterns 31 and the second sensing patterns 32, and as shown in Figure 6, position
The first connecting pattern 51 between described first sensing patterns 31, is positioned at described second sensing patterns
The second connecting pattern 52 between 32;
Described first sensing patterns 31 realizes being connected in series by the first connecting pattern 51, forms the
One conductive unit;The second described sensing patterns 32 realizes series connection even by the second connecting pattern 52
Connect, form the second conductive unit;
The first electrical pickoff 61 and the second electrical pickoff as shown in Figure 6 is concurrently formed by etching
62, described first electrical pickoff 61 electrically connects with described first conductive unit, described second electrical contact
Point 62 electrically connects with described second conductive unit.
Etching agent employed in described wet-etching technology is selected from, but not limited to, the acidity comprising oxalic acid
Etching agent, the preferred oxalic acid of the present embodiment.In the present embodiment, preferably to described first connecting pattern 52
Over etching so that the side of described first connecting pattern 52 than described mask corresponding region side more
Inner, obtain described first connecting pattern 52 and be projected in described mask in described flexible substrate 1
In the drop shadow spread in described flexible substrate 1 of the corresponding region.
S4, evaporation form the insulating barrier 4 covering described first conductive unit as shown in Figure 3;
S5, described flexible substrate 1 is removed fold after described additional substrate 2, described first sensing
Pattern 31 and the second sensing patterns 32 form Inductance and Capacitance structure, encapsulate and get final product.
Preferably, described flexible substrate 1 removes described its centrage doubling of additional substrate 2 tailing edge.
The first described sensing patterns 31 and described second sensing patterns 32 can also use identical or
Different materials is prepared from.When it uses different materials to prepare, described step S2 and step
S3 is:
S2, in flexible substrate 1, side away from described additional substrate 2 forms insulated from each other
One conductive layer and the second conductive layer;
Described first conductive layer is patterned by S3, employing etching technics, is formed some independent
First sensing patterns 31 and the first connecting pattern 51 between described first sensing patterns 31;
Use etching technics that described second conductive layer is patterned, form some the second independent sensings
Pattern 32 and the second connecting pattern 52 between described second sensing patterns 32;
Described first sensing patterns 31 realizes being connected in series by the first connecting pattern 51, forms the
One conductive unit;The second described sensing patterns 32 realizes series connection even by the second connecting pattern 52
Connect, form the second conductive unit.
As other embodiments, described step S4 is: evaporation is formed and covers described second conduction
The insulating barrier 4 of unit;As another embodiment, described step S4 is: evaporation formation is covered
Cover the insulating barrier 4 of described first conductive unit and the second conductive unit.That is, described insulating barrier 4 also may be used
To be positioned only at above described first conductive unit or above the second conductive unit, it is possible in flexibility
Make insulation between the first conductive unit and the second conductive unit can realize the mesh of the present invention after substrate 1
's.
As shown in Figure 6, the flexible substrate 1 of the present invention is respectively equipped with the first electrical pickoff 61 and
Two electrical pickofves 62, after described flexible base substrate folds, the first electrical pickoff 61 and the second electrical contact
The circular pattern of point 62 is stacked realizes electric connection, as other embodiments, and the first electrical pickoff 61
Can also be the square or pattern of other any shapes with the second electrical pickoff 62, as long as therebetween
Can make that pattern is stacked to be realized electric connection and can realize goal of the invention.
Flexible touch screen of the present invention only needs to be formed conductive layer on substrate for process, passes through
After being deposited with a layer insulating again after etching, it is thus only necessary to form two membranes layer, etching is once
Can realize.Enormously simplify preparation technology, improve yield rate.
Obviously, above-described embodiment is only for clearly demonstrating example, and not to enforcement
The restriction of mode.For those of ordinary skill in the field, on the basis of the above description
Can also make other changes in different forms.Here without also cannot be to all of enforcement
Mode gives exhaustive.And the obvious change thus extended out or variation are still in the present invention
Protection domain among.