CN106154412A - Bonder and the chip of light waveguide of this bonder of application - Google Patents
Bonder and the chip of light waveguide of this bonder of application Download PDFInfo
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Abstract
Embodiments of the invention disclose a kind of bonder and apply the chip of light waveguide of this bonder, relate to fiber optic communication field, it is possible to reduce the insertion loss during fiber waveguide signal coupling of bonder both sides.Bonder described in this bonder is used for the first fiber waveguide and the connection of the second fiber waveguide, including entity area and first wave guide grating；First end of described entity area and first optical waveguide coupled；Second end of described entity area couples with the second end of described first wave guide grating；First end of described first wave guide grating and second optical waveguide coupled；Wherein, the size of the first end of described entity area is mated with the face size of described first fiber waveguide, second end of described entity area mates with the face size of the second end of described first wave guide grating, and the size of the first end of described first wave guide grating is mated with the face size of the second fiber waveguide；The width linearity gradual change of described entity area.Embodiments of the invention are applied to fiber optic communication.
Description
Technical field
The present invention relates to fiber optic communication field, particularly relate to bonder and apply the light of this bonder
Waveguide chip.
Background technology
In recent years, developing rapidly, in communication network along with various the Internets and multimedia application
Flow just increase rapidly.Either access network, Metropolitan Area Network (MAN) or backbone transport networks, to setting
The demand of standby upgrading is increasingly stronger, to meet ever-increasing network traffic demand.Light transmitting-receiving mould
Block is the core cell in optical-fiber network.Miniaturization, low energy consumption, multichannel, the light of low cost are received
Send out module and will become development trend.As the core devices of optical transceiver module, light emission component and
Light-receiving assembly also must develop to miniaturization and multichannel feature.Integrated form encapsulation technology can
To realize the miniaturization of multichannel light assembly, i.e. multiple path laser chip or detector chip are sealed
It is contained in same shell.Inside optical assembly, in addition to chip of laser and detector chip,
Also need to some passive devices to realize the passive process function of optical signal, such as luminous power is divided
Become multiple signals, wavelength-division multiplex/demultiplexing, polarization state to merge and separate, so could structure
Become complete light emission component or light-receiving assembly function.Passive device can be divided into two classes, a class
Be based on Free Space Optics, i.e. light beam is propagated in air or other uniform dielectrics；Another kind of
Be based on Wave Guiding Optics, i.e. light beam is propagated in fiber waveguide.This two classes passive device is respectively arranged with excellent lacking
Point, for miniaturization optical assemblies more than 4 passages, nothing based on planar optical waveguide chip
Source device is advantageously.
For light emission component and the light-receiving assembly of tail fiber type, single-mode fiber and passive device
Coupling is one of key technology.If passive device uses planar optical waveguide chip, how to reduce
Insertion loss between single-mode fiber and input/output fiber waveguide is the difficulty that numerous developer faces
Point.Because, a diameter of 9 microns of the core district of single-mode fiber, and the sandwich layer size of monomode optical waveguide
Much smaller, such as 4 microns × 4 microns.The two difference on mode spot-size can cause inserting
Enter loss very big, such as reach 2dB.Such insertion loss is either to light emission component
Or light-receiving assembly is all unacceptable.
For the insertion loss of reduction optical fiber to waveguide, prior art provides a kind of scheme: use line
Property become narrow gradually the physical couplings device of (or wide) to reduce optical fiber to the insertion loss of waveguide.By
Processing technology in this bonder is all planarization, it is therefore advantageous that design is simple, lacks
Point is transversely (horizontal direction) can only to adjust spot size, it is impossible to vertically adjust light
Spot size.So, also cannot make the spot size light close to single-mode fiber of monomode optical waveguide
Spot size.This bonder still has a certain effect for the fiber waveguide of low-refraction difference, but for
The fiber waveguide effect of high index-contrast is the most inconspicuous.Therefore bonder both sides can not effectively be reduced
The insertion loss during coupling of fiber waveguide signal.
Summary of the invention
Embodiments of the invention provide a kind of bonder and apply the chip of light waveguide of this bonder,
Can effectively reduce the insertion loss during fiber waveguide signal coupling of bonder both sides.
On the one hand, it is provided that a kind of bonder, described bonder is used for the first fiber waveguide and the second light
The connection of waveguide, including entity area and first wave guide grating；
First end of described entity area and first optical waveguide coupled；
Second end of described entity area couples with the second end of described first wave guide grating；
First end of described first wave guide grating and second optical waveguide coupled；
Wherein, the size of the first end of described entity area and the end face chi of described first fiber waveguide
The end face of the second end of very little coupling, the second end of described entity area and described first wave guide grating
Size is mated, the size of the first end of described first wave guide grating and the end face chi of the second fiber waveguide
Very little coupling；
The width of described entity area from the first end of described entity area to described entity area
The second linear gradual change.
On the other hand, it is provided that a kind of chip of light waveguide, including bonder and with described bonder
First fiber waveguide of coupling, described bonder is above-mentioned bonder.
The bonder that embodiments of the invention provide, wherein bonder is by the first fiber waveguide and second
Fiber waveguide links together, and the end of the size of the first end of entity area and the first fiber waveguide
Face size coupling, the second end of entity area and the face size of the second end of first wave guide grating
Coupling, the size of the first end of first wave guide grating is mated with the face size of the second fiber waveguide；
Owing to the width of entity area is linear to the second of entity area from the first end of entity area
Gradual change；Therefore, the entity area of bonder can adjust the spot size of the first fiber waveguide output
Spot size to the second fiber waveguide is close in the horizontal direction, first wave guide grating have sandwich layer district
Sandwich layer and the refractivity of covering the transmission of light can be produced constraint, but first wave guide grating
Interstitial area is owing to being that uniform dielectric light can be propagated in the trend that dissipates, i.e. in horizontal and vertical
Both direction adjusts the spot size of the first fiber waveguide output to the spot size of the second fiber waveguide
Close, insertion when therefore can effectively reduce the fiber waveguide signal coupling of bonder both sides is damaged
Consumption.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below by right
In embodiment or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that,
Accompanying drawing in describing below is only some embodiments of the present invention, for those of ordinary skill in the art
From the point of view of, on the premise of not paying creative work, it is also possible to obtain the attached of other according to these accompanying drawings
Figure.
The structural representation of a kind of chip of light waveguide that Fig. 1 provides for embodiments of the invention；
The structural representation of a kind of bonder that Fig. 2 provides for embodiments of the invention；
The first wave of the bonder a kind of as depicted that Fig. 3 provides for embodiments of the invention
The structural representation of guide grating；
The optical field distribution analogous diagram that Fig. 4 a-g provides for embodiments of the invention；
Light propagation signal in a kind of bonder that Fig. 5 provides for embodiments of the invention is imitative
True figure；
The structural representation of a kind of bonder that Fig. 6 provides for another embodiment of the present invention；
The structural representation of a kind of bonder that Fig. 7 provides for another embodiment of the present invention.
Reference:
Bonder-1；
Fiber waveguide-2；
Optical fiber-3；
Entity area-11；
First end-111 of entity area；
Second end-112 of entity area；
First wave guide grating-12；
First end-121 of first wave guide grating；
Second end-122 of first wave guide grating；
Second waveguide grating 13.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is entered
Row clearly and completely describes, it is clear that described embodiment is only a part of embodiment of the present invention,
Rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not having
Have and make the every other embodiment obtained under creative work premise, broadly fall into present invention protection
Scope.
In describing the invention, it is to be understood that term " " center ", " left ",
The orientation of the instruction such as " right ", " vertically ", " level " or position relationship are for based on accompanying drawing institute
The orientation shown or position relationship, be for only for ease of description the present invention and simplify describe rather than
Instruction or the device of hint indication or element must have specific orientation, with specific orientation structure
Make and operate, additionally, input and outfan are all to exist according to signal in embodiments of the invention
Direction be defined, i.e. according to sense, definition signal input one end be input,
One end of definition signal output is outfan, naturally it is also possible to define other titles on principle,
Therefore it is not considered as limiting the invention.
Embodiments of the invention provide a kind of chip of light waveguide, including bonder 1 and and bonder
First fiber waveguide 2 of 1 coupling, shown in reference Fig. 1, one end of bonder 1 and waveguide core
The first fiber waveguide 2 on sheet couples, and the other end and second fiber waveguide 3 of bonder 1 couple.
Wherein, chip of light waveguide is usually the signal processing unit of network end-point, is mainly used in first
The optical signal that fiber waveguide 2 receives decodes further, opto-electronic conversion etc. processes, or will
The signal of telecommunication is to be sent by the first fiber waveguide 2 after optical signal by coding, electro-optic conversion, and light
Signal is based primarily upon pattern when light Propagation and makes a distinction, due at optical-fiber network end
Baseband signal processing unit, is mainly based upon single-mode optics signal and processes, therefore, and this programme
It is mainly used in chip of light waveguide by monomode optical waveguide, single-mode optics signal to be transmitted, at this
The generally planar chip of light waveguide of chip of light waveguide in application, for the first light wave of signal transmission
Lead 2 and second fiber waveguide 3 be monomode optical waveguide, wherein, bonder 1 and the first fiber waveguide 2
Generally can be situated between having certain thickness same plane fiber waveguide when being positioned on chip of light waveguide
Making molding in matter, the most as illustrated in fig. 1 and 2, the top view cross section of the first fiber waveguide 2 is usual
For having the strip of one fixed width, the top view cross section of bonder 1 is the most trapezoidal；Second light
Waveguide 3 is for the light letter outwards exported to bonder 1 input optical signal or reception bonder 1
Number, therefore the second fiber waveguide 3 usually optical fiber, following example are based on this and illustrate.
With reference to shown in Fig. 2, embodiments of the invention provide a kind of bonder 1, are applied to above-mentioned
Chip of light waveguide, bonder 1 is for the first fiber waveguide 2 and connection bag of the second fiber waveguide 3
Include entity area 11 and first wave guide grating 12；
First end 111 of entity area 11 couples with the first fiber waveguide 2；
Second end of entity area 11 and the second end 122 of 112 first wave guide gratings 12 couple；
First end 121 of first wave guide grating 12 couples with the second fiber waveguide 3；
Wherein, the size of the first end 111 of entity area 11 and the face size of fiber waveguide 2
Coupling, the second end 112 of entity area 11 and the second end 122 of first wave guide grating 12
Face size mates, and the width of the first end 121 of first wave guide grating 12 is straight with optical fiber 3
Footpath is mated；
The width of entity area 11 from the first end 111 of entity area 11 to entity area 11
The second end 112 linear gradient.
The size of the first end 111 of entity area 11 and the first fiber waveguide 2 in above-described embodiment
Face size coupling refer to: the size of the first end 111 of entity area 11 and the first light wave
Lead 2 face size identical so that the first end 111 and the first light wave of entity area 11
Lead the end face of 2 can couple completely, or the size of the first end 111 of entity area 11 with
The error of the face size of the first fiber waveguide 2 in preset range to reduce entity district as far as possible
The insertion loss brought during the end coupling of first end 111 in territory 11 and the first fiber waveguide 2；
Second end 112 of similar entity area 11 and the second end 122 of first wave guide grating 12
Face size mates, and refers to: the second end 112 of entity area 11 and first wave guide grating 12
The face size of the second end 122 identical in case the second end 112 of entity area 11 with
The end face of the second end 122 of first wave guide grating 12 can couple completely, or entity area
Second end 112 of 11 and the error of the face size of the second end 122 of first wave guide grating 12
So that the second end 112 reducing entity area 11 is guide-lighting with first wave as far as possible in preset range
The insertion loss brought during the end coupling of the second end 122 of grid 12；First wave guide grating 12
The size of the first end 121 mate with the face size of the second fiber waveguide 3 and refer to: first wave guide
The size of the first end 121 of grating 12 is identical with the face size of the second fiber waveguide 3,
Certainly, when the second fiber waveguide 3 is round fiber, the first end 121 of first wave guide grating 12
Width and the diameter of the second fiber waveguide 3 identical, or error in preset range so that fall as far as possible
The insertion that first end 121 of low first wave guide grating 12 brings when coupling with the second fiber waveguide 3
Loss.
Wherein, first wave guide grating 12 is including at least a screen periods, the most each grating
Cycle is made up of a Ge Youxin district and an interstitial area, as it is shown on figure 3, screen periods T includes
Region A and B, region A are You Xin district, and region B is interstitial area, wherein region A and light
The length of grid cycle T is than the dutycycle for screen periods T；Wherein, the structure of region A with
Entity area 11 is similar to, including the covering outside sandwich layer and sandwich layer, between its center core layer and covering
The light field of the refractivity constraint A conduction formed, region B is that uniform light medium is to light
Field is without constraint, and light field is isotropic critical dimensions at region B.
The bonder that embodiments of the invention provide, wherein bonder is by the first fiber waveguide and second
Fiber waveguide links together, and the end of the size of the first end of entity area and the first fiber waveguide
Face size coupling, the second end of entity area and the face size of the second end of first wave guide grating
Coupling, the size of the first end of first wave guide grating is mated with the face size of the second fiber waveguide；
Owing to the width of entity area is linear to the second of entity area from the first end of entity area
Gradual change；Therefore, the entity area of bonder can adjust the spot size of the first fiber waveguide output
Spot size to the second fiber waveguide is close in the horizontal direction, first wave guide grating have sandwich layer district
Sandwich layer and the refractivity of covering the transmission of light can be produced constraint, but first wave guide grating
Interstitial area is owing to being that uniform dielectric light can be propagated in the trend that dissipates, i.e. in horizontal and vertical
Both direction adjusts the spot size of the first fiber waveguide output to the spot size of the second fiber waveguide
Close, insertion when therefore can effectively reduce the fiber waveguide signal coupling of bonder both sides is damaged
Consumption.
Simultaneously as the width of entity area 11 from the first end 111 of entity area 11 to reality
Second end 112 linear gradient of body region 11；As in figure 2 it is shown, with the first fiber waveguide 2 be
Monomode optical waveguide, the second fiber waveguide is that optical fiber illustrates, the rightest due to entity area 11
End is connected with monomode optical waveguide, when light field is after monomode optical waveguide enters this entity area 11,
Owing to the width of entity area 11 becomes larger, light field constraint in the horizontal direction can be by
Gradual change is weak, and the size of hot spot the most also becomes larger, and entity area 11 and first
The thickness of fiber waveguide 2 is identical, and the size of hot spot does not changes.Therefore, real
The effect of body region 11 is that the hot spot of monomode optical waveguide is extended, in the horizontal direction to optical fiber
Spot size is close, as in figure 2 it is shown, due under normal circumstances, the single mode in chip of light waveguide
Fiber waveguide sectional dimension is typically smaller than the sectional dimension of optical fiber, can not be understood merely as single mode here
Fiber waveguide area of section is less than the area of section of optical fiber, it is also possible to be interpreted as monomode optical waveguide cross section
Shape size is positioned at the circular section shape of optical fiber, therefore provides a kind of example physical region
The width of 11 from the first end 111 of entity area 11 to the second end 112 of entity area 111
Dimension linear reduces, it is illustrated that middle SW ＜ NW.
Furthermore, it is to be appreciated that first wave guide grating at least includes a screen periods, but
Owing to a screen periods is limited to the adjustment capability of spot size, therefore provide a kind of preferably side
Formula is: first wave guide grating 12 includes the screen periods of predetermined number, each screen periods
There are sandwich layer and interstitial area arranged in parallel, as in figure 2 it is shown, each light on first wave guide grating 12
The length in grid cycle Zhong Youxin district and length ratio (the i.e. duty of first wave guide grating of interstitial area
Than) from the first end 121 of first wave guide grating 12 to the second end of first wave guide grating 12
122 linear gradients, wherein the dutycycle of screen periods refers to there is sandwich layer in a screen periods
The ratio that length occupies in the screen periods of place.Each in first wave guide grating 12 above
The length of individual screen periods does not limits, but owing to making grating typically by photoengraving work
Skill makes, and needs to design different cycles owing to making the grating of different cycles in exposure technology
Mask plate, therefore can increase design complexities, in order to reduce design complexities, a kind of preferred
Scheme is: on first wave guide grating 12, the length of each screen periods is equal.
Thering is provided a kind of example, high order end and second fiber waveguide 3 of first wave guide grating 12 are connected,
The low order end of first wave guide grating 12 is connected with the entity area 11 of bonder.First wave is guide-lighting
Grid 12 are made up of several screen periods, and first wave guide grating 12 has in each screen periods
The length in core district and the length ratio of interstitial area from the first end of first wave guide grating to first wave
Second linear increase of guide grating, such as, has 15 screen periods in figure 3.Whole
In individual first wave guide grating 12, the width of each screen periods is consistent, and width is SW.
The length of each screen periods is also consistent, and Cycle Length is T.The duty of each screen periods
More inconsistent than being, i.e. the value of A/T is inconsistent.A kind of example of offer is: first wave guide
Its largest duty cycle of that cycle of the low order end of grating 12, first wave guide grating 12 the most left
That cycle of end, its dutycycle was minimum.The dutycycle in each cycle linearly gradually becomes from right to left
Little.At the first wave guide grating 12 of bonder, light field is having the propagation zone of sandwich layer (i.e. such as Fig. 3
Shown in, the A district in each cycle) propagate time, owing to waveguide has the existence of sandwich layer, light field
The constraint of existing horizontal direction, also has the constraint of vertical direction.In the propagation zone without sandwich layer (i.e.
The interstitial area in each cycle) when propagating, light field is not actually having uniform Jie of any constraint
Propagating in matter, in the propagation zone having sandwich layer, its optical field distribution can be approximated to be Gauss distribution, and
When Gauss distribution field is propagated in uniform dielectric, gradually dissipate, say, that light field
Hot spot the most all becomes larger.In design optimization, by control
Make the change of each screen periods dutycycle to control hot spot extension in vertical direction and receipts
Contracting.At the whole first wave guide grating 12 of bonder, the propagation of light field experienced by periodically
Constrained region and without constraint.Intermittent nothing constraint makes hot spot in vertical direction and level
All extended on direction.A kind of example is: each screen periods on first wave guide grating 12
Dutycycle from the first end 121 of first wave guide grating 12 to the second of first wave guide grating 12
Linear 122 increase, and wherein on first wave guide grating 12, the length of each screen periods is equal,
Owing to dutycycle is change from big to small, hot spot extended amplitude in vertical direction is from little
To big change, the closer to the second fiber waveguide 3, extended amplitude is the biggest.And at whole bonder
In middle horizontal direction, the extended amplitude to spot size includes that spot size is existed by entity area 11
Extended amplitude in horizontal direction and whole first wave guide grating 12 without constraint to hot spot
Size extended amplitude in the horizontal direction.
The optical field distribution analogous diagram that Fig. 4 a-g provides for embodiments of the invention.Wherein, Fig. 4 a
Showing the optical field distribution figure of monomode optical waveguide, Fig. 4 g shows and couples through optical fiber to waveguide
At the optical field distribution figure of optical fiber after device.Fig. 4 b, 4c show bonder internal entity region 11
In optical field distribution figure at two sampling propagation distances, relative to Fig. 4 a substantially by entity district
Behind territory 11, spot size is extended in the horizontal direction.Fig. 4 d, 4e and 4f show
Optical field distribution figure at three sampling propagation distances in the internal first wave guide grating 12 of bonder,
After substantially passing through first wave guide grating 12 relative to Fig. 4 a, 4b and 4c, spot size is vertically
Extended amplitude on direction is change from small to large, and spot size the most also has in addition
Slightly extension.In addition combine Fig. 4 a-g, due to entity area 11 only to spot size along level
Direction is extended, and therefore the light beam of monomode optical waveguide output is after by entity area 11,
Hot spot is that class is oval, and spot diameter is straight less than hot spot in the horizontal direction in vertical direction
Footpath, therefore the light beam angle of divergence in vertical direction is more than the angle of divergence in the horizontal direction, institute
With light beam after entering first wave guide grating 12, hot spot divergence speed in vertical direction is wanted
More than divergence speed in the horizontal direction, therefore light beam is after by first wave guide grating 12,
Hot spot will be gradually changed into similar round by class ellipse, certainly pass through first wave guide due to light beam
During grating 12, the spot diameter of vertical direction becomes larger, light beam in vertical direction send out
Scattered angle tapers into, and therefore light beam divergence speed in vertical direction is the most slack-off, light beam
The angle of divergence and divergence speed in the vertical direction and the horizontal direction tend to identical, spot size by
Gradually close to the spot size of optical fiber mode fields.And after by first wave guide grating 12, if light
The spot size of bundle is closer to the spot size of optical fiber mode fields, then when fiber waveguide couples with optical fiber
Insertion loss is the lowest.
Fig. 5 shows the light propagation analogous diagram in the bonder of whole optical fiber to fiber waveguide.
The picture rightmost side is for connecting monomode optical waveguide, and the picture leftmost side is for connecting optical fiber.By light propagation
Fig. 5 is it can be seen that propagate with single mode form in entity area 11 light field, at first wave always
Guide grating 12, due to the existence of interstitial area, light field presents periodic Constrained and without constraint
Form is propagated.
Concrete, the insertion loss between optical fiber and monomode optical waveguide is main in the above-described embodiments
Being that the difference of the refractivity of the sandwich layer by the two and covering is caused, light is situated between in fiber waveguide
When propagating in matter, the refractivity reduction of sandwich layer and covering can make the spot size of optical mode field increase
Greatly.And the refractivity of monomode optical waveguide is much larger than the refractivity of optical fiber, as long as therefore can subtract
The two difference little, just can reduce insertion loss therebetween.The first wave of bonder is guide-lighting
Grid 12 serve this effect just.Specifically, in each of first wave guide grating 12
In screen periods, the effective refractive index in sandwich layer district is had to be equal to effective refraction of entity area 11
Rate, and the effective refractive index of interstitial area is exactly the refractive index of monomode optical waveguide covering, a grating
The effective refractive index in cycle is the weighted mean of the two, and its result is between entity area 11
Effective refractive index and the effective refractive index of optical fiber between.The dutycycle of screen periods is the least,
The effective refractive index of this screen periods is just closer to the effective refractive index of optical fiber.The present invention is just
Change descending for the dutycycle of screen periods each in grating region, make whole bonder
The effective refractive index of one waveguide optical grating 12 is close to the effective refractive index of optical fiber, and then reduces
Insertion loss.Be embodied in spot size, light grating when having sandwich layer district to propagate due to sandwich layer
With the existence of clad refractive rate variance, luminous energy is preferably constrained on core district and propagates；And light is in gap
When district propagates, owing to being to propagate in uniform dielectric district, light beam will be propagated in the trend dissipated.?
In one cycle of grating region, the dutycycle in cycle is the least, and the constraint that light is propagated by this cycle is made
With the least, so, hot spot more tends to divergence expression propagation, i.e. the size of hot spot is more
Spot size close to optical fiber eigen mode.By optimizing the grating of first wave guide grating 12
Number of cycles, Cycle Length, the initial and stop value of dutycycle, can make whole optical fiber to ripple
The insertion loss leading bonder is greatly reduced.In the design of the present invention, bonder uses plane work
Skill, does not propose new requirement to the processing technology of planar optical waveguide, therefore, has more practicality
It is worth.
Further, with reference to shown in Fig. 6, the bonder of the present invention also includes: second waveguide light
Grid 13, second waveguide grating 13 is arranged at first wave guide grating 12 first end 121 and second
Between fiber waveguide 3；
Wherein, on second waveguide grating 13, the length of each screen periods is equal and dutycycle phase
Deng.Optionally, the length of second waveguide grating 13 is more than or equal to grating grinding technics precision
Maximum error scope.
Planar optical waveguide chip is passed through to cut and grind this two procedures to obtain from wafer.
Order is first to cut to grind afterwards.After grinding, it is met the planar optical waveguide of design size
And the bonder coupled with planar optical waveguide.In practical operation, precision is had to limit owing to grinding,
Planar optical waveguide chip duplicate with design size can not be obtained.Optical fiber and bonder
Connecting the input and output port being located exactly at planar optical waveguide chip, the error of grinding can affect
Optical fiber is to the performance of bonder.Such as, if overgrinding, the first wave guide grating of bonder
Several periodic optical gratings in district 12 will be milled away, and this insertion that will affect bonder is damaged
Consumption；If grinding not in place, cannot be direct by the first wave guide grating region 12 causing bonder
Being connected with optical fiber, this will have a strong impact on the optical fiber coupling efficiency to bonder.
For solving the problems referred to above, with reference to shown in Fig. 6, it is provided that a kind of insensitive to grinding precision
Coupler design structural representation.Bonder also includes being arranged at first wave guide grating 12 first
Second waveguide grating 13 between end 121 and optical fiber 3.Second waveguide grating 13 is by several
Screen periods forms, and the length of each screen periods is consistent, dutycycle consistent, duct width
Unanimously.The total length of second waveguide grating 13 is determined by grinding error.At design plane light wave
When leading chip, the left margin (left margin as depicted) of whole chip is placed in second waveguide
The middle position of grating 13.Based on such design concept, the overall length of second waveguide grating 13
Degree is equal to the scope absolute value grinding error.Such as, grinding error is +/-100 microns, then,
The total length in uniform light grid region is 200 microns.Should ensure that second waveguide grating 13 in design
Length more than or equal to the maximum error scope of grating grinding technics precision.
The width of the duct width first wave guide grating 12 of second waveguide grating 13 is consistent, i.e.
SW.The screen periods of second waveguide grating 13 and dutycycle, can make grinding error to optical fiber
The impact brought to bonder insertion loss is down to minimum.Most preferably setting of second waveguide grating 13
Meter is, after grinding, no matter remaining uniform grating number of cycles is many or few, passes through
After remaining uniform grating number of cycles, optical fiber should be basically unchanged to the insertion loss of bonder.Tool
Body includes following three kinds of situations, 1) it is ground to zero error, and i.e. after grinding, plane light wave
The left margin leading chip is exactly design load, and now second waveguide grating 13 has the length of half
It is milled away；2) overgrinding reach the maximum of grinding precision, i.e. after grinding,
The left margin of planar optical waveguide chip is located exactly at second waveguide grating 13 and first wave guide grating
First end 121 of 12, now second waveguide grating 13 is all milled away；3) grind less than
Position also reaches the maximum of grinding precision, i.e. after grinding, and the left side of planar optical waveguide chip
The high order end of boundary's uniform second waveguide grating 13 just, now second waveguide grating 13 is by all
Retain.Three cases above either which kind of, the insertion loss of whole optical fiber to waveguide coupler
Change the most little.In addition optional, as it is shown in fig. 7, bonder thickness h everywhere and light wave
The thickness H led is equal.It is limited to the processing technology of chip of light waveguide, the making of bonder and light
Waveguide uses planar technology to be formed on same wafer, and the thickness of bonder mates with fiber waveguide i.e.
Can, owing to the thickness of bonder all can introduce new insertion loss from fiber waveguide, therefore time different
Without making special handling.
The above, the only detailed description of the invention of the present invention, but protection scope of the present invention is also
Being not limited to this, any those familiar with the art is at the technology model that the invention discloses
In enclosing, change can be readily occurred in or replace, all should contain within protection scope of the present invention.
Therefore, protection scope of the present invention should be as the criterion with described scope of the claims.
Claims (11)
1. a bonder, described bonder is used for the first fiber waveguide and the connection of the second fiber waveguide,
It is characterized in that, including entity area and first wave guide grating；
First end of described entity area and first optical waveguide coupled；
Second end of described entity area couples with the second end of described first wave guide grating；
First end of described first wave guide grating and second optical waveguide coupled；
Wherein, the size of the first end of described entity area and the end face chi of described first fiber waveguide
The end face of the second end of very little coupling, the second end of described entity area and described first wave guide grating
Size is mated, the size of the first end of described first wave guide grating and the end face chi of the second fiber waveguide
Very little coupling；
The width of described entity area from the first end of described entity area to described entity area
Second linear gradual change.
Bonder the most according to claim 1, it is characterised in that described first wave is guide-lighting
Grid include the screen periods of predetermined number, each screen periods include an interstitial area and one have
Core district, the length in each screen periods Zhong Youxin district and interstitial area on described first wave guide grating
Length ratio from the first end of described first wave guide grating to the second end of described first wave guide grating
Linear gradient.
Bonder the most according to claim 2, it is characterised in that described interstitial area is equal
Even smooth medium, described You Xin district includes sandwich layer and is enclosed in the covering that described sandwich layer is peripheral.
Bonder the most according to claim 2, it is characterised in that described first wave is guide-lighting
On grid, the length in each screen periods Zhong Youxin district and the length ratio of interstitial area are from described first wave
First end of guide grating is to the second linear increase of described first wave guide grating.
Bonder the most according to claim 2, it is characterised in that described first wave is guide-lighting
On grid, the length of each screen periods is equal.
Bonder the most according to claim 1, it is characterised in that described bonder also wraps
Including: second waveguide grating, described second waveguide grating is arranged at the of described first wave guide grating
Between one end and the second fiber waveguide；
Wherein, on described second waveguide grating, the length of each screen periods is equal and each grating
The cycle Zhong Youxin length in district is equal with the length ratio of interstitial area.
Bonder the most according to claim 6, it is characterised in that described second waveguide light
The length of grid is more than or equal to the maximum error scope of grating grinding technics precision.
8. according to the bonder described in any one of claim 1～7, it is characterised in that described reality
The width of body region from the first end of described entity area to the second extreme direction of described entity area
Linear reduction.
9. according to the bonder described in any one of claim 1～7, it is characterised in that described coupling
Clutch thickness everywhere is equal with the thickness of described fiber waveguide.
Bonder the most according to claim 1, it is characterised in that described first wave guide
Grating is Bragg grating.
11. 1 kinds of chip of light waveguide, it is characterised in that include bonder and couple with described
First fiber waveguide of device coupling, described bonder is the coupling described in any one of claim 1-10
Device.
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| CN201510145773.3A CN106154412B (en) | 2015-03-30 | 2015-03-30 | The chip of light waveguide of coupler and the application coupler |
| US14/981,420 US9645320B2 (en) | 2015-03-30 | 2015-12-28 | Coupler and optical waveguide chip applying the coupler |
| US15/467,044 US9971098B2 (en) | 2015-03-30 | 2017-03-23 | Coupler and optical waveguide chip applying the coupler |
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| CN201510145773.3A CN106154412B (en) | 2015-03-30 | 2015-03-30 | The chip of light waveguide of coupler and the application coupler |
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| CN106154412B CN106154412B (en) | 2019-08-13 |
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