CN106153573B - A kind of high temperature and pressure optics cavity and its application method for absorption coefficient calibration - Google Patents

A kind of high temperature and pressure optics cavity and its application method for absorption coefficient calibration Download PDF

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Publication number
CN106153573B
CN106153573B CN201610443242.7A CN201610443242A CN106153573B CN 106153573 B CN106153573 B CN 106153573B CN 201610443242 A CN201610443242 A CN 201610443242A CN 106153573 B CN106153573 B CN 106153573B
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pressure
high temperature
gas
gas chamber
calibration
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CN106153573A (en
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李飞
曾徽
余西龙
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Institute of Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N2021/3536Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis using modulation of pressure or density

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  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention discloses a kind of high temperature and pressure optics cavity for absorption coefficient calibration, it solves the problems, such as that near infrared spectrum calibration cannot be considered in terms of high temperature and high pressure, and the sealing leakage problem of middle infrared calibration, overcome existing calibration system that can not carry out the limitation that demarcate from the wide scope of low pressure, low temperature to high pressure, high temperature to close, middle infrared spectrum, develops, establishes a kind of broadband high temperature, low pressure to high pressure calibration system.The high temperature and pressure optics cavity includes fixed gas chamber, sapphire optical column, thin-wall steel tube, mountable cooling flange, supported flange, clamp nut, heating tape, sealing ring, pressure gauge, pressure vacuum gauge, gas supply/exhaust module.Additionally provide the application method of this high temperature and pressure optics cavity for absorption coefficient calibration.

Description

A kind of high temperature and pressure optics cavity and its application method for absorption coefficient calibration
Technical field
The invention belongs to optical technical fields, more particularly to a kind of high temperature and pressure optics for absorption coefficient calibration Chamber and its application method.
Background technique
Laser absorption spectrum measuring technique is built upon on the basis of accurate spectrum parameter.Most common molecular spectrum Database HITRAN (high resolution transmission molecular absorption database) is base In the spectrum parameter that quantum calculation obtains, by development in more than 40 years, which covered H2O,CO,CO2Deng 47 kinds points Son.However, HITRAN database is there is also obvious deficiency, i.e. shortage high temperature spectrum parameter, L.S.Rothman et al. is organized thus HITEMP spectra database is developed, but its molecular spectrum parameter still lacks enough experimental verifications, the accuracy of spectrum parameter It is under suspicion, the complicated broadening mechanism especially under high temperature, high pressure influences, and actual measurement parameter has with HITRAN/HITEMP database Difference.Therefore demarcating to spectrum parameter is needed, at the same time, the gas analyzer based on laser absorption spectrum is also required to Measurement accuracy calibration under complex environment (high temperature and pressure).
According to wavelength band, the calibration of absorption spectrum can be divided near infrared absorption calibration and middle infrared absorption absorbs calibration, Calibration system is more mature using quartz ampoule as calibration pond by near infrared band most, and the work of relevant spectrum calibration has big The accumulation of amount.R.K.Hason group of Stanford University is to H2O carries out High temperature calibration in numerous spectral lines of near-infrared, including X.Liu et al. is using silica cuvette and high temperature Muffle furnace to H near 1.4 μm2The a plurality of spectral line of O is demarcated, and with 2004 database of HITRAN is compared;C.S.Goldenstein et al. is to H near 2.4 μm2O Absorption Line is demarcated. The greatest difficulty of these near-infrared calibration chambers based on quartz ampoule is can not to form hyperbaric environment, therefore be not used to high pressure absorption Calibration.
In terms of wavelength, quartz has good permeability near infrared band, but its long wave cut-off wavelength is about 2.5 μ M, it is impossible to be used in penetrate mid-infrared laser, therefore middle infrared calibration system needs to change optical window.In view of the good of sapphire glass Infrared breathability and excellent high temperature resistant, high pressure resistant property in good, middle infrared absorption experiment at present and calibration experiment are mostly selected Sapphire window is as translucent material.Foreign countries have precedent that can follow, J.Rice, S.Hahn in terms of middle infrared heat calibration experiment Et al. sapphire-copper of development seal calibration system, however there are high temperature leakage problems for the system.G.B.Rieker etc. is above-mentioned On the basis of, using new sealing means, i.e. sapphire both ends sealing (sealing of front end wedge shape copper backing, then hold copper backing sealing level with both hands) Mode, partially solve the problems, such as under high temperature (900K) demarcate chamber gas leakage, but and it is immature, it is difficult to the light of centering infrared-gas It composes constant and carries out accurate, prolonged rating test.
Summary of the invention
Technology of the invention solves the problems, such as: overcoming the deficiencies of the prior art and provide and a kind of demarcates for absorption coefficient High temperature and pressure optics cavity solves the problems, such as that near infrared spectrum calibration cannot be considered in terms of high temperature and high pressure and middle infrared calibration Leakage problem is sealed, overcomes existing calibration system that can not carry out to close, middle infrared spectrum from low pressure, low temperature to high pressure, high temperature The limitation of wide scope calibration develops, establishes a kind of broadband high temperature, low pressure to high pressure calibration system.
The technical solution of the invention is as follows: this high temperature and pressure optics cavity for absorption coefficient calibration, the high temperature are high Press optics cavity include fixed gas chamber, sapphire optical column, thin-wall steel tube, mountable cooling flange, supported flange, clamp nut, Heating tape, sealing ring, pressure gauge, pressure vacuum gauge, gas supply/exhaust module;
Fixed gas chamber includes inflating port and gas vent, is connect respectively with gas supply/exhaust module, is one section of circle in fixed gas chamber Post holes, both ends and thin-wall steel tube vacuum welding seal;
Thin-wall steel tube is internally embedded sapphire optical column, one end of thin-wall steel tube and fixed gas chamber welded seal, the other end It is welded with mountable cooling flange;
Sapphire optical column is fixed and sealed to mountable cooling flange;
Sealing ring includes big line footpath sealing ring and small line footpath sealing ring, and supported flange compresses big line footpath sealing ring, compresses spiral shell Mother compresses small line footpath sealing ring;
Heating tape surrounds fixed gas chamber setting;
Gas supply/exhaust module includes high pressure gas cylinder and several control valves, high pressure gas cylinder, pressure gauge, pressure vacuum gauge The inflating port of fixed gas chamber is connected to by control valve respectively, to be filled with the gas to be measured that concentration determines into fixed gas chamber Body, vacuum pump are connected to the gas vent of fixed gas chamber by valve.
Additionally provide the application method of this high temperature and pressure optics cavity for absorption coefficient calibration, comprising the following steps:
(1) air tightness test is carried out to high temperature and pressure optics cavity and gas supply/exhaust module, respectively to low pressure, hyperbaric environment Airtight test is carried out, guarantees that calibration system has good air-tightness;
(2) set temperature being heated to by heating tape, set temperature value carries out temperature control by relay and thermocouple, Stablize thermocouple temperature measurement in gas chamber in set temperature, keeps dozens of minutes;
(3) fixed gas chamber is vacuumized using vacuum pump, vacuum degree maintains to stablize close to 0.1Pa;
(4) by gas supply/exhaust module, the gas for being gradually put into certain pressure enters fixed gas chamber, the pressure of fixed gas chamber Power is obtained by pressure vacuum gauge;Make temperature, the pressure remained steady of gas chamber internal standard gas;
(5) spectral measurement is carried out using calibration system: by laser by gas chamber, after signal is received by a detector, by showing The acquisition of wave device, obtains the spectral signal under one group of pressure, stable condition;Later, change the air chamber pressure and temperature of setting, successively Carry out the spectral measurement under different pressures, different temperatures.
It includes inflating port and gas vent that the present invention, which passes through fixed gas chamber, is connect respectively with gas supply/exhaust module, fixed gas chamber It is inside one section of cylindrical hole, both ends and thin-wall steel tube vacuum welding seal;Thin-wall steel tube is internally embedded sapphire optical column, Steel Thin-Wall One end of pipe and fixed gas chamber welded seal, the other end and mountable cooling flange weld;Mountable cooling flange is fixed and close Seal sapphire optical column;Sealing ring includes big line footpath sealing ring and small line footpath sealing ring, and supported flange compresses big line footpath sealing ring, Clamp nut compresses small line footpath sealing ring;Heating tape surrounds fixed gas chamber setting;If gas supply/exhaust module include high pressure gas cylinder and Dry control valve, high pressure gas cylinder, pressure gauge, pressure vacuum gauge pass through the inflation that control valve is connected to fixed gas chamber respectively Mouthful, to be filled with the under test gas that concentration determines into fixed gas chamber, vacuum pump is connected to the deflation of fixed gas chamber by valve Mouthful;To solve the problems, such as that near infrared spectrum calibration cannot be considered in terms of the sealing gas leakage of high temperature and high pressure and middle infrared calibration Problem, overcome existing calibration system close, middle infrared spectrum can not be carried out from low pressure, low temperature to high pressure, high temperature wide scope mark Fixed limitation develops, establishes a kind of broadband high temperature, low pressure to high pressure calibration system.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the high temperature and pressure optics cavity according to the present invention for absorption coefficient calibration.
Fig. 2 is the partial structural diagram of the high temperature and pressure optics cavity according to the present invention for absorption coefficient calibration.
Fig. 3 is the inflation/deflation schematic diagram of the high temperature and pressure optics cavity according to the present invention for absorption coefficient calibration.
Fig. 4 is the absorption spectrum constant calibration mistake of the high temperature and pressure optics cavity according to the present invention for absorption coefficient calibration Journey schematic diagram.
Specific embodiment
As shown in Figure 1, 2, 3, this high temperature and pressure optics cavity for absorption coefficient calibration, the high temperature and pressure optics cavity packet Include fixed gas chamber, sapphire optical column, thin-wall steel tube, mountable cooling flange, supported flange, clamp nut, heating tape, sealing Circle, pressure gauge, pressure vacuum gauge, gas supply/exhaust module;
Fixed gas chamber includes inflating port and gas vent, is connect respectively with gas supply/exhaust module, is one section of circle in fixed gas chamber Post holes, both ends and thin-wall steel tube vacuum welding seal;
Thin-wall steel tube is internally embedded sapphire optical column (for the laser through visible, near-infrared and middle infrared band), One end of thin-wall steel tube and fixed gas chamber welded seal, the other end and mountable cooling flange weld;
Sapphire optical column is fixed and sealed to mountable cooling flange;In addition, the sealing ring due to use can be at high temperature To melt, it is necessary to the temperature of the cooling flange of water makes it less than 200 DEG C, while protecting sealing ring, guarantees minimum thermal deformation, Improve its sealing effect.
Supported flange: for compressing big line footpath (2.5mm) sealing ring, guarantee under low pressure, condition of high voltage, calibration system tool There is good leakproofness;
Clamp nut: the sealing ring of small line footpath is compressed, while improving sealability, sapphire is compressed into gas chamber Optical column resists the gas pressure under high pressure;
Sealing ring includes big line footpath sealing ring and small line footpath sealing ring, and supported flange compresses big line footpath sealing ring, compresses spiral shell Mother compresses small line footpath sealing ring;
Heating tape surrounds fixed gas chamber setting;
Gas supply/exhaust module includes high pressure gas cylinder and several control valves, high pressure gas cylinder, pressure gauge, pressure vacuum gauge (pressure measurement when for low pressure spectrum calibration) is connected to the inflating port of fixed gas chamber by control valve respectively, thus to solid Determine to be filled with the under test gas that concentration determines in gas chamber, vacuum pump (vacuumizing calibration chamber, minimum pressure is smaller than 1Pa) passes through valve Door is connected to the gas vent of fixed gas chamber.
In addition, the high temperature and pressure optics cavity is also connect with calibration system, the calibration system includes that signal generator (generates Sawtooth signal carries out wavelength and intensity modulated to laser controller), laser controller is (for controlling the work of laser Temperature and operating current carry out fast modulation to the output wavelength of laser according to the signal of signal generator in test), swash Light device (the middle infrared absorption spectrum of output laser, the characteristic absorpting spectrum of the wave-length coverage coverage goal component of laser, such as CO2 Near 4.3um, the middle infrared absorption of CO is composed near 4.6um, and the output power of laser is generally in several mW magnitudes), it is quasi- (laser (15) output laser has the biggish angle of divergence to straight lens mostly, needs to collimate it, remote to obtain preferable space Range transmission properties, the hot spot after collimation are typically about 1~2mm diameter), photodetector (receives across optical calibrating chamber Light intensity signal is converted to voltage signal by transmitted light), the oscillograph voltage signal of output (acquisition and recording detector (18));
Current-modulation is carried out to laser controller (14) using signal generator, modulated current signal drives laser (15), the laser in laser output particular range of wavelengths, collimated lens (17) collimation pass through high temperature and pressure optics cavity later Sapphire optical column (2) enter fixed gas chamber, after being absorbed by the under test gas that concentration, temperature, pressure determine, light intensity attenuation, Sapphire optical column (2) across right side is received by photodetector (18), is acquired and is obtained by oscillograph (19).
In addition, the laser (15) is equipped with cooling system (16).Laser internal element is cooled down, guarantees laser Device (15) is normal, steady operation.
In addition, the fixed gas chamber is stainless steel gas chamber.
In addition, the thin-wall steel tube is the stainless-steel pipe (304 steel pipe) that wall thickness is 0.5mm.
In addition, the heating tape is additionally provided with relay and thermocouple, to carry out temperature control and holding.
In addition, the big line footpath sealing ring and small line footpath sealing ring are perfluoroelastomer sealing ring, line footpath is respectively 2.5mm And 1.5mm.
In addition, the useful range of the pressure gauge: 0.1-2MPa, precision: ± 0.5%;The pressure vacuum gauge includes two Group vacuum meter, useful range are respectively as follows: 0.1-100Torr, 1-1000Torr.
In addition, gas is O in the high pressure gas cylinder2, CO, CO2, one of NO, and utilize N2Or Ar gas is carried as balance Gas.
As shown in figure 4, the application method of this high temperature and pressure optics cavity for absorption coefficient calibration is additionally provided, including Following steps:
(1) air tightness test is carried out to high temperature and pressure optics cavity and gas supply/exhaust module, respectively to low pressure, hyperbaric environment Airtight test is carried out, guarantees that calibration system has good air-tightness;
(2) set temperature being heated to by heating tape, set temperature value carries out temperature control by relay and thermocouple, Stablize thermocouple temperature measurement in gas chamber in set temperature, keeps dozens of minutes;
(3) fixed gas chamber is vacuumized using vacuum pump, vacuum degree maintains to stablize close to 0.1Pa;
(4) by gas supply/exhaust module, the gas for being gradually put into certain pressure enters fixed gas chamber, the pressure of fixed gas chamber Power is obtained by pressure vacuum gauge;Make temperature, the pressure remained steady of gas chamber internal standard gas;
(5) spectral measurement is carried out using calibration system: by laser by gas chamber, after signal is received by a detector, by showing The acquisition of wave device, obtains the spectral signal under one group of pressure, stable condition;Later, change the air chamber pressure and temperature of setting, successively Carry out the spectral measurement under different pressures, different temperatures.
It includes inflating port and gas vent that the present invention, which passes through fixed gas chamber, is connect respectively with gas supply/exhaust module, fixed gas chamber It is inside one section of cylindrical hole, both ends and thin-wall steel tube vacuum welding seal;Thin-wall steel tube is internally embedded sapphire optical column, Steel Thin-Wall One end of pipe and fixed gas chamber welded seal, the other end and mountable cooling flange weld;Mountable cooling flange is fixed and close Seal sapphire optical column;Sealing ring includes big line footpath sealing ring and small line footpath sealing ring, and supported flange compresses big line footpath sealing ring, Clamp nut compresses small line footpath sealing ring;Heating tape surrounds fixed gas chamber setting;If gas supply/exhaust module include high pressure gas cylinder and Dry control valve, high pressure gas cylinder, pressure gauge, pressure vacuum gauge pass through the inflation that control valve is connected to fixed gas chamber respectively Mouthful, to be filled with the under test gas that concentration determines into fixed gas chamber, vacuum pump is connected to the deflation of fixed gas chamber by valve Mouthful;To solve the problems, such as that near infrared spectrum calibration cannot be considered in terms of the sealing gas leakage of high temperature and high pressure and middle infrared calibration Problem, overcome existing calibration system close, middle infrared spectrum can not be carried out from low pressure, low temperature to high pressure, high temperature wide scope mark Fixed limitation develops, establishes a kind of broadband high temperature, low pressure to high pressure calibration system.In temperature range: room temperature- 1000K, pressure limit: under the conditions of 1Torr-1MPa, which has good sealing effect.It can be simultaneously suitable for low pressure Spectral line line style under spectrum parameter calibration and high pressure widens parameter calibration, can get accurate spectrum parameter, while can simulate A variety of high temperature, high-pressure combustion environment carry out spectral absorption simulation, the measurement accuracy for validated measurement systems
The above is only presently preferred embodiments of the present invention, is not intended to limit the present invention in any form, it is all according to According to technical spirit any simple modification, equivalent change and modification to the above embodiments of the invention, still belong to the present invention The protection scope of technical solution.

Claims (10)

1. a kind of high temperature and pressure optics cavity for absorption coefficient calibration, it is characterised in that: the high temperature and pressure optics cavity includes solid Determine gas chamber (1), sapphire optical column (2), thin-wall steel tube (3), mountable cooling flange (4), supported flange (5), clamp nut (6), heating tape (7), sealing ring (8), pressure gauge (9), pressure vacuum gauge (10), gas supply/exhaust module;
Fixed gas chamber includes inflating port and gas vent, is connect respectively with gas supply/exhaust module, is one section of cylinder in fixed gas chamber Hole, both ends and thin-wall steel tube vacuum welding seal;
Thin-wall steel tube is internally embedded sapphire optical column, one end of thin-wall steel tube and fixed gas chamber welded seal, the other end with can Cooling flange welding is installed;
Sapphire optical column is fixed and sealed to mountable cooling flange;
Sealing ring includes big line footpath sealing ring and small line footpath sealing ring, and supported flange compresses big line footpath sealing ring, for mountable Sapphire optical column is fixed and sealed to cooling flange, and clamp nut compresses small line footpath sealing ring, blue precious for compressing into gas chamber Stone optical column resists the gas pressure under high pressure;
Heating tape surrounds fixed gas chamber setting;
Gas supply/exhaust module includes high pressure gas cylinder (12) and several control valves, high pressure gas cylinder, pressure gauge, pressure vacuum gauge The inflating port of fixed gas chamber is connected to by control valve respectively, to be filled with the gas to be measured that concentration determines into fixed gas chamber Body, vacuum pump (11) are connected to the gas vent of fixed gas chamber by valve.
2. the high temperature and pressure optics cavity according to claim 1 for absorption coefficient calibration, it is characterised in that: the high temperature is high Pressure optics cavity is also connect with calibration system, and the calibration system includes signal generator (13), laser controller (14), laser (15), collimation lens (17), photodetector (18), oscillograph (19);
Current-modulation is carried out to laser controller (14) using signal generator (13), modulated current signal drives laser (15), the laser in laser output particular range of wavelengths, collimated lens (17) collimation pass through high temperature and pressure optics cavity later Sapphire optical column (2) enter fixed gas chamber, after being absorbed by the under test gas that concentration, temperature, pressure determine, light intensity attenuation, Sapphire optical column (2) across right side is received by photodetector (18), is acquired and is obtained by oscillograph (19).
3. the high temperature and pressure optics cavity according to claim 2 for absorption coefficient calibration, it is characterised in that: the laser Device (15) is equipped with cooling system (16).
4. the high temperature and pressure optics cavity according to claim 1 for absorption coefficient calibration, it is characterised in that: the fixation Gas chamber is stainless steel gas chamber.
5. the high temperature and pressure optics cavity according to claim 1 for absorption coefficient calibration, it is characterised in that: the thin-walled Steel pipe is the stainless-steel pipe that wall thickness is 0.5mm.
6. the high temperature and pressure optics cavity according to claim 1 for absorption coefficient calibration, it is characterised in that: the heating Band is additionally provided with relay and thermocouple, to carry out temperature control and holding.
7. the high temperature and pressure optics cavity according to claim 1 for absorption coefficient calibration, it is characterised in that: the big line Diameter sealing ring and small line footpath sealing ring are perfluoroelastomer sealing ring, and line footpath is respectively 2.5mm and 1.5mm.
8. the high temperature and pressure optics cavity according to claim 1 for absorption coefficient calibration, it is characterised in that: the pressure The useful range of table: 0.1-2MPa, precision: ± 0.5%;The pressure vacuum gauge includes two groups of vacuum meters, useful range point Not are as follows: 0.1-100Torr, 1-1000Torr.
9. the high temperature and pressure optics cavity according to claim 1 for absorption coefficient calibration, it is characterised in that: the high pressure Gas is O in gas cylinder2, CO, CO2, one of NO, and utilize N2Or Ar gas is as balance carrier gas.
10. a kind of application method of the high temperature and pressure optics cavity according to claim 2 for absorption coefficient calibration, special Sign is: the following steps are included:
(1) air tightness test is carried out to high temperature and pressure optics cavity and gas supply/exhaust module, low pressure, hyperbaric environment is carried out respectively Airtight test guarantees that calibration system has good air-tightness;
(2) set temperature is heated to by heating tape, set temperature value carries out temperature control by relay and thermocouple, makes gas Indoor Thermal galvanic couple thermometric is stablized in set temperature, and dozens of minutes is kept;
(3) fixed gas chamber is vacuumized using vacuum pump, vacuum degree maintains to stablize close to 0.1Pa;
(4) by gas supply/exhaust module, the gas for being gradually put into certain pressure enters fixed gas chamber, and the pressure of fixed gas chamber is logical Cross pressure vacuum gauge acquisition;Make temperature, the pressure remained steady of gas chamber internal standard gas;
(5) spectral measurement is carried out using calibration system: by laser by gas chamber, after signal is received by a detector, passing through oscillograph Acquisition obtains the spectral signal under one group of pressure, stable condition;Later, the air chamber pressure and temperature for changing setting, successively carry out Spectral measurement under different pressures, different temperatures.
CN201610443242.7A 2016-06-20 2016-06-20 A kind of high temperature and pressure optics cavity and its application method for absorption coefficient calibration Expired - Fee Related CN106153573B (en)

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