CN210487587U - Calibration device for gas laser absorption spectrum measurement - Google Patents

Calibration device for gas laser absorption spectrum measurement Download PDF

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Publication number
CN210487587U
CN210487587U CN201921491811.0U CN201921491811U CN210487587U CN 210487587 U CN210487587 U CN 210487587U CN 201921491811 U CN201921491811 U CN 201921491811U CN 210487587 U CN210487587 U CN 210487587U
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absorption
optical
absorption cell
optical fiber
gas
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陈卫
部绍清
伍越
王磊
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Ultra High Speed Aerodynamics Institute China Aerodynamics Research and Development Center
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Ultra High Speed Aerodynamics Institute China Aerodynamics Research and Development Center
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Abstract

The utility model discloses a gaseous laser absorption spectral measurement's calibration device, include: the temperature control box is provided with optical windows I for observation at two sides; the absorption pool is arranged in the temperature control box through the base; two paths of vacuum hoses are connected to the absorption tank; two groups of optical windows II which are arranged in parallel inside two ends of the absorption cell; two groups of optical fiber collimators which are arranged outside the two ends of the absorption cell in parallel; the nitrogen purging joint is arranged outside the two ends of the absorption cell and is close to the two groups of optical fiber collimators; a thermal resistance type temperature sensor arranged inside the absorption cell; the thermal resistance type temperature sensor is connected with a thermometer display positioned outside the temperature control box. The utility model discloses a calibration device can carry out independent control to the pressure and the temperature of the gas that awaits measuring, and the temperature control scope is at-80 deg.C ~ 100 deg.C, and the pressure range is more than or equal to 1kPa to the air supply is removable, thereby can satisfy the needs that multiple gas laser absorption spectral measurement under different temperature and the pressure environment was markd.

Description

Calibration device for gas laser absorption spectrum measurement
Technical Field
The utility model relates to a gaseous detection technology field, concretely relates to gaseous laser absorption spectroscopy's calibration device.
Background
Gas laser absorption spectroscopy (TDLAS) techniques, as represented by the Tunable Diode Laser Absorption Spectroscopy (TDLAS), are increasingly used in industrial fields and laboratories, such as environmental monitoring, toxic gas leakage, combustion diagnosis, flow field diagnosis, and trace gas detection, due to their advantages of non-contact measurement, rapidness, accuracy, etc. However, in some measurement environments, such as combustion wind tunnels, the gas components in the flow field cannot be known in advance, sampling analysis is not convenient, the true value of the gas component concentration in the environment is not known, and a second independent measurement means is also lacked for comparing the laser absorption spectrum measurement results. In order to check the accuracy of the laser absorption spectroscopy measurement system for gas component measurement, the measurement accuracy of the measurement system itself can only be verified or error corrected by a necessary calibration system.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages which will be described later.
To achieve these objects and other advantages in accordance with the purpose of the invention, a calibration device for gas laser absorption spectroscopy measurement is provided, including:
the temperature control box is provided with optical windows I for observation at two sides;
the absorption pool is arranged in the temperature control box through a base; the absorption tank is connected with two paths of vacuum hoses, wherein one path of vacuum hose is an air extraction pipeline and is connected with a vacuum pump; the other path of vacuum hose is an air inlet pipeline and is connected with an air source of the gas to be detected;
two groups of optical windows II which are arranged in parallel inside two ends of the absorption cell; each group of optical windows II in the two groups of optical windows II comprises an optical window III positioned in the front end of the absorption cell and an optical window IV positioned in the rear end of the absorption cell;
two groups of optical fiber collimators which are arranged outside the two ends of the absorption cell in parallel; each of the two groups of optical fiber collimators comprises an optical fiber collimator I positioned outside the front end of the absorption cell and an optical fiber collimator II positioned outside the rear end of the absorption cell; gaps are arranged between the optical window III and the optical fiber collimator I and between the optical window IV and the optical fiber collimator II;
the nitrogen purging joint is arranged outside the two ends of the absorption cell and is close to the two groups of optical fiber collimators; the nitrogen purging connector is communicated with a gap between the optical window III and the optical fiber collimator I and a gap between the optical window IV and the optical fiber collimator II;
a thermal resistance type temperature sensor arranged inside the absorption cell; the thermal resistance type temperature sensor is connected with a thermometer display positioned outside the temperature control box.
Preferably, a pipeline through hole is formed in the side face of the box body of the temperature control box.
Preferably, the absorption cell is of a cylindrical tubular structure.
Preferably, a sealing ring I is arranged at the joint of the two paths of vacuum hoses and the absorption tank; the two groups of optical windows II are hermetically connected with the interiors of the two ends of the absorption cell through sealing rings II; the two groups of optical fiber collimators are hermetically connected with the outer parts of the two ends of the absorption cell through sealing rings III; and the nitrogen purging joint is hermetically connected with the outer parts of the two ends of the absorption tank through a sealing ring IV.
Preferably, the air exhaust pipeline is connected with a vacuum gauge, a vacuum pump valve and a gas sampling valve; and the vacuum pump, the vacuum gauge, the vacuum pump valve and the gas sampling valve are all positioned outside the temperature control box.
Preferably, the air source is isolated from the air inlet pipeline through an air inlet valve; and the air source and the air inlet valve are both positioned outside the temperature control box.
Preferably, the gas source comprises O2、N2、Ar、H2O、CO2And NO2One or more air sources.
Preferably, the temperature control box has the functions of refrigeration and heating, and can adjust the temperature of the absorption tank within the range of-80-100 ℃.
Preferably, the two sets of optical windows ii are quartz glass or sapphire glass optical windows.
Preferably, the optical window iii in the front end of the absorption cell and the optical window iv in the rear end are inclined at an angle to each other.
The utility model discloses at least, include following beneficial effect: the utility model discloses a calibration device can carry out independent control to the pressure and the temperature of the gas that awaits measuring, and the temperature control scope is at-80 deg.C ~ 100 deg.C, and the pressure range is more than or equal to 1kPa to the air supply is removable, thereby can satisfy the needs that multiple gas laser absorption spectral measurement under different temperature and the pressure environment was markd.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Description of the drawings:
fig. 1 is a schematic view of the overall structure of the calibration device for gas laser absorption spectrum measurement according to the present invention;
FIG. 2 is a schematic side view of the temperature control box of the present invention;
FIG. 3 is a schematic structural view of the absorption tank and its accessories according to the present invention;
fig. 4 is a schematic view of the internal end face structure of the absorption tank of the present invention.
The specific implementation mode is as follows:
the present invention is further described in detail below with reference to the drawings so that those skilled in the art can implement the invention with reference to the description.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
Fig. 1 ~ 4 show the utility model discloses a calibration device for gas laser absorption spectrum measurement, include:
the temperature control box 100 is provided with optical windows I101 for observation on two sides;
an absorption tank 200 disposed in the temperature control cabinet 100 through a base 300; the absorption tank 200 is connected with two paths of vacuum hoses, wherein one path of vacuum hose is an air exhaust pipeline 6 and is connected with a vacuum pump 13, air in the absorption tank is exhausted before use, and the air pressure in the absorption tank is controlled to be below 1 kPa; the other path of vacuum hose is an air inlet pipeline 16 and is connected with an air source of the gas to be detected; the cavity of the absorption tank is generally made of stainless steel materials;
two groups of optical windows II which are arranged in parallel inside two ends of the absorption cell 200; each group of optical windows II in the two groups of optical windows II comprises an optical window III 3 positioned in the front end of the absorption cell and an optical window IV 30 positioned in the rear end of the absorption cell;
two groups of optical fiber collimators which are arranged outside the two ends of the absorption cell 200 in parallel; each of the two groups of optical fiber collimators comprises an optical fiber collimator I1 positioned outside the front end of the absorption cell and an optical fiber collimator II 111 positioned outside the rear end of the absorption cell; gaps are arranged between the optical window III 3 and the optical fiber collimator I1 and between the optical window IV 30 and the optical fiber collimator II 111; each group of optical fiber collimators in the two groups of optical fiber collimators is coaxially arranged with each group of optical windows II in the two groups of optical windows II respectively;
the nitrogen purging connector 2 is arranged outside two ends of the absorption cell 200 and close to the two groups of optical fiber collimators; the nitrogen purging connector 2 is communicated with a gap between the optical window III 3 and the optical fiber collimator I1 and a gap between the optical window IV 30 and the optical fiber collimator II 11;
a thermal resistance type temperature sensor 5 provided inside the absorption cell 200; the thermal resistance type temperature sensor 5 is connected with a thermometer display 7 positioned outside the temperature control box 100; the thermal resistance type temperature sensor is used for actually measuring the temperature of the internal gas; the temperature value is displayed by a thermometer display arranged outside the temperature control box;
in the technical scheme, the absorption cell is used for controlling the gas pressure and the component distribution ratio,the temperature control box is used for controlling the gas temperature, and the whole absorption pool is arranged in the temperature control box when in use. The absorption cell is of a cylindrical tubular structure, and adopts a double-light-path design (two groups of optical windows II and two groups of optical fiber collimators), namely two optical windows are respectively processed and arranged on two end faces and are used for transmitting laser beams; the laser beam transmitting and receiving device adopts a double-optical-path design, an optical fiber collimator is connected with an optical fiber laser or an optical fiber photoelectric detector of a laser absorption spectrum measuring system to realize the transmitting and receiving of laser beams, and the optical fiber collimators at the two ends are completely the same and can transmit or receive each other. The double-light-path structural design can meet the measurement requirement of a double-spectral-line ratio method in the laser absorption spectrum technology. And the outer sides of the end faces of the absorption cells corresponding to the optical window positions are provided with optical fiber collimators, so that the optical fiber output light of the optical fiber laser is converted into space parallel light, and the light beam is absorbed by gas in the absorption cell, received by the optical fiber collimator on the other side and coupled to enter a photoelectric detector for data acquisition and result calculation. A certain gap is reserved between the optical fiber collimator and the optical window for installing a nitrogen purging connector, the nitrogen is continuously used for purging the optical window of the absorption cell in a low-temperature environment, and fog or frost is avoided from appearing on the optical window. Two paths of vacuum hoses are connected to the pipe body of the absorption tank, one path of vacuum hose is connected with a vacuum pump, air in the absorption tank is pumped out before the absorption tank is used, and the air pressure in the absorption tank is controlled to be below 1 kPa; the other vacuum hose is connected with a gas source and is used for filling gas to be measured, such as O, after the valve of the vacuum pump is closed2、N2、Ar、H2O、CO2、NO2And the like. A temperature sensor is arranged in the absorption cell for measuring the real temperature of the gas. The content of the gas to be measured is obtained by converting the measured pressure and temperature values and is compared with the measured value of the laser absorption spectrum method so as to check the measurement accuracy of the measurement system or carry out error correction on the measurement result.
In the above technical solution, a pipeline through hole 102 is formed on a side surface of the box body of the temperature control box, and is used for connecting a vacuum hose, an optical fiber, an electric wire and the like connected to the absorption cell with instruments and equipment such as an external vacuum pump, a vacuum gauge, a thermometer display, a laser measurement system (an optical fiber laser or an optical fiber photoelectric detector) and the like.
In the above technical solution, the absorption cell is a cylindrical tubular structure.
In the technical scheme, a sealing ring I14 is arranged at the joint of the two paths of vacuum hoses and the absorption tank 200; the two groups of optical windows II are hermetically connected with the interiors of the two ends of the absorption cell 200 through sealing rings II 15; the two groups of optical fiber collimators are hermetically connected with the outer parts of the two ends of the absorption cell 200 through sealing rings III 17; and the nitrogen purging joint is hermetically connected with the outer parts of the two ends of the absorption tank through a sealing ring IV 18.
In the technical scheme, the air exhaust pipeline is connected with a vacuum gauge 8, a vacuum pump valve 9 and a gas sampling valve 10; and the vacuum pump, the vacuum gauge, the vacuum pump valve and the gas sampling valve are all positioned outside the temperature control box. The vacuum gauge is used for measuring the real pressure of the gas in the absorption cell; gas sampling valves are used for other gas measurement methods.
In the above technical solution, the air source is isolated from the air inlet pipe 16 by the air inlet valves 11 and 12; and the air source and the air inlet valve are both positioned outside the temperature control box.
In the above technical solution, the gas source comprises O2、N2、Ar、H2O、CO2And NO2One or more air sources.
In the technical scheme, the temperature control box has the functions of refrigeration and heating, and can adjust the temperature of the absorption tank within the range of minus 80-100 ℃.
In the above technical scheme, the two groups of optical windows ii are quartz glass or sapphire glass optical windows.
In the technical scheme, in order to avoid the laser beams from reflecting and interfering back and forth between the optical windows at the left end and the right end of the absorption cell and influence the accuracy of the optical path length and the signal-to-noise ratio of the laser signals, the optical window III positioned in the front end of the absorption cell and the optical window IV positioned in the rear end of the absorption cell are inclined at a certain angle, so that the reflected light beams deviate from the original optical path.
Example 1:
in the present embodiment, intake airThe pipeline 16 is connected with two gas sources, O respectively2And N2. The gas source is isolated from the absorption cell by gas inlet valves 11 and 12. After the vacuum pump pumps the air in the absorption tank, the vacuum pump valve 9 is closed, the air inlet valve 11 is opened, and a certain amount of O is filled2Then closed again, at this time O2The content of (A) can be calculated by the temperature and pressure values of 7 and 8, and the content is used for checking the measurement accuracy of the laser absorption spectrum measurement system or carrying out error correction on the measurement result. In order to calibrate the different pressure pairs O2Influence of the content measurement, the intake valve 12 can be opened, by charging to O2Measuring non-interfering inert gas N2The pressure of the absorption cell is regulated. A gas sampling valve 10 is also installed on the suction pipeline of the absorption cell for the requirements of other gas measurement methods.
While the embodiments of the invention have been described above, it is not intended to be limited to the details shown, or described, but rather to cover all modifications, which would come within the scope of the appended claims, and all changes which come within the meaning and range of equivalency of the art are therefore intended to be embraced therein.

Claims (10)

1. A calibration device for gas laser absorption spectrum measurement is characterized by comprising:
the temperature control box is provided with optical windows I for observation at two sides;
the absorption pool is arranged in the temperature control box through a base; the absorption tank is connected with two paths of vacuum hoses, wherein one path of vacuum hose is an air extraction pipeline and is connected with a vacuum pump; the other path of vacuum hose is an air inlet pipeline and is connected with an air source of the gas to be detected;
two groups of optical windows II which are arranged in parallel inside two ends of the absorption cell; each group of optical windows II in the two groups of optical windows II comprises an optical window III positioned in the front end of the absorption cell and an optical window IV positioned in the rear end of the absorption cell;
two groups of optical fiber collimators which are arranged outside the two ends of the absorption cell in parallel; each of the two groups of optical fiber collimators comprises an optical fiber collimator I positioned outside the front end of the absorption cell and an optical fiber collimator II positioned outside the rear end of the absorption cell; gaps are arranged between the optical window III and the optical fiber collimator I and between the optical window IV and the optical fiber collimator II;
the nitrogen purging joint is arranged outside the two ends of the absorption cell and is close to the two groups of optical fiber collimators; the nitrogen purging connector is communicated with a gap between the optical window III and the optical fiber collimator I and a gap between the optical window IV and the optical fiber collimator II;
a thermal resistance type temperature sensor arranged inside the absorption cell; the thermal resistance type temperature sensor is connected with a thermometer display positioned outside the temperature control box.
2. The calibration device for gas laser absorption spectrum measurement as claimed in claim 1, wherein a pipeline through hole is formed on a side surface of the case body of the temperature control case.
3. The calibration apparatus for gas laser absorption spectroscopy measurement according to claim 1, wherein the absorption cell is a cylindrical tubular structure.
4. The calibration device for gas laser absorption spectrum measurement according to claim 1, wherein a sealing ring i is arranged at the joint of the two vacuum hoses and the absorption cell; the two groups of optical windows II are hermetically connected with the interiors of the two ends of the absorption cell through sealing rings II; the two groups of optical fiber collimators are hermetically connected with the outer parts of the two ends of the absorption cell through sealing rings III; and the nitrogen purging joint is hermetically connected with the outer parts of the two ends of the absorption tank through a sealing ring IV.
5. The calibration device for gas laser absorption spectrum measurement according to claim 1, wherein a vacuum gauge, a vacuum pump valve and a gas sampling valve are connected to the pumping pipeline; and the vacuum pump, the vacuum gauge, the vacuum pump valve and the gas sampling valve are all positioned outside the temperature control box.
6. The calibration device for gas laser absorption spectrum measurement as claimed in claim 1, wherein the gas source is isolated from the gas inlet pipeline by a gas inlet valve; and the air source and the air inlet valve are both positioned outside the temperature control box.
7. Calibration arrangement for gas laser absorption spectroscopy measurement according to claim 1, wherein the gas source comprises O2、N2、Ar、H2O、CO2And NO2One or more air sources.
8. The calibration device for gas laser absorption spectrum measurement as claimed in claim 1, wherein the temperature control box has refrigeration and heating functions, and can adjust the temperature of the absorption cell within the range of-80 ℃ to 100 ℃.
9. The calibration device for gas laser absorption spectrum measurement according to claim 1, wherein the two sets of optical windows II are quartz glass or sapphire glass optical windows.
10. The calibration apparatus for gas laser absorption spectrum measurement according to claim 1, wherein the optical window iii in the front end and the optical window iv in the rear end of the absorption cell are inclined at a certain angle to each other.
CN201921491811.0U 2019-09-09 2019-09-09 Calibration device for gas laser absorption spectrum measurement Active CN210487587U (en)

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CN201921491811.0U CN210487587U (en) 2019-09-09 2019-09-09 Calibration device for gas laser absorption spectrum measurement

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Application Number Priority Date Filing Date Title
CN201921491811.0U CN210487587U (en) 2019-09-09 2019-09-09 Calibration device for gas laser absorption spectrum measurement

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114755202A (en) * 2022-06-15 2022-07-15 中国空气动力研究与发展中心设备设计与测试技术研究所 Polyimide optical fiber distributed humidity sensor and positioning detection method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114755202A (en) * 2022-06-15 2022-07-15 中国空气动力研究与发展中心设备设计与测试技术研究所 Polyimide optical fiber distributed humidity sensor and positioning detection method
CN114755202B (en) * 2022-06-15 2022-09-02 中国空气动力研究与发展中心设备设计与测试技术研究所 Optical fiber distributed humidity sensor based on polyimide and positioning detection method

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